JPH05290689A - Manufacture of vacuum equipment - Google Patents

Abstract

PURPOSE:To provide a method for manufacturing a vacuum equipment in which exhaust can be rapidly performed in vacuum, and vacuum sealing by airtight brazing is ensured. CONSTITUTION:In a vacuum equipment which is exhausted in vacuum, a recessed part 11 is provided on the outer surface of a metallic member 4 having an exhaust hole 10 in such a manner as to surround the opening part of the exhaust hole. One end of a metallic spring 14 is engagingly locked in the recessed part 11, and a metal cap 12 is supported by the other end of the metallic spring 14. Thus, manufacturing efficiency and reliability can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a sealed vacuum device such as a vacuum valve.

[0002]

2. Description of the Related Art FIGS. 5 and 6 are vertical sectional views showing the whole of a conventional vacuum valve disclosed in, for example, Japanese Patent Publication No. 51-46912 and the details of its essential parts. In the figure, 1 is an insulating container, 2 is an end plate fixed to the upper end of the insulating container 1, 3 is an end plate fixed to the lower end of the insulating container 1, and 4 and 5 penetrate the end plates 2 and 3 to face each other. The arranged conducting rods, 6, 7 are electrodes fixed to the inner ends of the conducting rods 4, 5 respectively, 8 is a bellows whose one end is fixed to the end plate 3 and the other end is fixed to the conducting rod 5, and 9 is an insulating container. An arc shield fixed to 1, 10 is an exhaust hole communicating from the upper side of the outer surface of the current-carrying rod 4 into the vacuum vessel, 11 is a recess provided on the upper surface of the current-carrying rod 4 so as to surround the opening of the exhaust hole 10, and 12 is a recess. Recess 11
A metal lid 13 placed inside is a brazing material inserted between the current-carrying rod 4 and the metal lid 12.

The conventional vacuum valve is constructed as described above, and the respective parts are joined by brazing or welding. For example, the end plate 2 and the current-carrying rod 4 of the electrode 6, and the end plate 3 and the current-carrying rod 5 of the electrode 7 through the bellows 8 are hermetically brazed together, and then attached to the upper and lower ends of the insulating container 1 with the shield 9 attached. A vacuum container is formed by joining the end plates 2 and 3 by airtight brazing. This vacuum container has an exhaust hole in a high vacuum.
After being vacuum evacuated through 10, when the brazing filler metal 13 melts at high temperature, the metal lid 12 descends by its own weight and closes the exhaust hole 10,
It is vacuum-sealed by airtight brazing.

[0004]

In the conventional method for manufacturing a vacuum device as described above, since the metal lid 12 is placed on the exhaust hole 10 through the brazing material 13 before the vacuum exhaust, the current carrying rod is The gap between 4 and the brazing material 13 and the metal lid 12 becomes small,
There has been a problem that it takes a long time to evacuate through this gap. When the gap between the current-carrying rod 4 and the metal lid 12 is increased due to the thickness and shape of the brazing filler metal 13, the metal lid 12 does not completely descend due to the high viscosity of the brazing filler metal 13 when melting, There is a problem that vacuum leakage is likely to occur due to poor airtight brazing.

The present invention has been made to solve the above problems, and an object thereof is to provide a method for manufacturing a vacuum device in which vacuum evacuation can be performed quickly in a vacuum and vacuum sealing by airtight brazing is surely performed. It is a thing.

[0006]

In a vacuum device according to the present invention, a recess is provided on an outer surface of a metal member having an exhaust hole so as to surround an opening of the exhaust hole, and one end of a metal spring is locked in the recess. The other end of this metal spring supports a metal lid.

[0007]

In the vacuum equipment constructed as described above, the metal spring supports the metal lid to form a sufficiently large exhaust port between the opening of the exhaust hole and the metal lid, and brazing. In this case, due to the property that the elasticity decreases as the temperature rises, the weight of the metal lid or jig is used for compression and the exhaust hole is closed.

[0008]

【Example】

Example 1. FIG. 1 is a longitudinal sectional view of an essential part of a vacuum valve showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of an essential part for explaining the operation of this embodiment. 1 to 11 (partly not shown) are exactly the same as the conventional vacuum valves described above. 12 is a metal lid having a diameter larger than that of the concave portion, which is arranged above the concave portion 11 to face it, 13 is a flat brazing material placed at a position facing the metal lid 12 on the outer surface of the conducting rod 4, and 14 is a lower end. Is a metal spring that is fitted in the recess 11 and supports the metal lid 12 at the upper end. In this embodiment, a coil spring is used. The material and shape of the coil spring 14 are such that the height of the spring is larger than the depth of the recess 11 when the vacuum is exhausted, and the elasticity is lowered at a temperature higher than the melting point of the brazing material 13 so that the metal lid or jig (not shown).
Is selected to be smaller than the depth of the recess 11 by being compressed by the weight of.

In the vacuum valve constructed as described above, since the coil spring 14 supports the metal lid 12 and forms an exhaust port between the opening of the exhaust hole 10 and the metal lid 12, the exhaust hole 10
Therefore, a sufficiently large exhaust path is secured through this exhaust port, and rapid vacuum exhaust in vacuum is possible. After that, as the temperature rises to the brazing temperature, the coil spring
Since the elasticity of 14 causes the metal lid 12 or the weight of the jig to compress due to the elasticity lowering, and the metal lid 12 and the brazing material 13 are brought into contact with each other as shown in FIG. 2, the exhaust hole 10 is closed by the metal lid 11, and the vacuum container is It is surely vacuum sealed with airtight brazing.

Embodiment 2. In Example 2 shown in FIG. 3, a metal lid is used.
12 is a cup shape having an inverted concave section, and the upper end of the coil spring 14 is fitted into the concave portion of the metal lid 12, and the material of the coil spring 14 is
The shape is such that the spring height is larger than the combined length of the depth of the recess 11 and the depth of the recess of the metal lid 12 when evacuating, and the brazing material
If the temperature is higher than the melting point of 13 and the elasticity of the metal lid or the jig (not shown) causes the elasticity to decrease, it becomes smaller when compressed by the weight of the metal lid or jig (not shown).

Embodiment 3. By configuring the metal spring of the first embodiment, for example, the coil spring 14 with the same material as the brazing material 13, the same operation as that of the first embodiment can be expected, and the coil spring 14 melts at the brazing temperature and is vacuum-sealed. After metal lid
12 Prevent the reaction force of the spring from working.

Embodiment 4. In Example 4 shown in FIG.
The lower end is fitted into the recess 11 at 13 and the upper end constitutes a disc spring which supports the metal lid 12, and the shape of this disc spring is larger than the depth of the recess 11 when the vacuum is exhausted. The metal spring shown in FIG. 1, for example, the coil spring becomes unnecessary by selecting so as to be small when compressed by the weight of a metal lid or a jig (not shown) due to elasticity decrease at a temperature higher than the melting point of ..

Embodiment 5. In the above-described first to fourth embodiments, the exhaust hole 10 is provided in the current-carrying rod 4, but the same operation can be expected by forming the end plate 2 from metal and providing the exhaust hole with the same structure as the above-described embodiment.

[0014]

As described above, according to the present invention, by disposing the metal spring so as to support the metal lid at the opening of the exhaust hole, the vacuum exhaust can be performed quickly in vacuum and the vacuum sealing by the airtight brazing can be performed. Can be reliably stopped, and manufacturing efficiency and reliability can be improved.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of an essential part showing a first embodiment of the present invention.

FIG. 2 is a longitudinal sectional view of an essential part for explaining the operation of the first embodiment.

FIG. 3 is a longitudinal sectional view of an essential part showing a second embodiment of the present invention.

FIG. 4 is a longitudinal sectional view of a main part showing a fourth embodiment of the present invention.

FIG. 5 is a vertical sectional view showing a conventional vacuum valve.

FIG. 6 is a vertical cross-sectional view showing a main part of a conventional vacuum valve.

[Explanation of symbols]

 1 Insulation container 2 End plate 4 Current bar 10 Exhaust hole 11 Recess 12 Metal lid 13 Brazing material 14 Metal spring

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] June 19, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction content]

In the vacuum valve constructed as described above, the coil spring 14 supports the metal lid 12 and supports the exhaust hole 10.
Since an exhaust port is formed between the opening of the and the metal lid 12,
A sufficiently large exhaust path is secured from the exhaust hole 10 through this exhaust port, and rapid vacuum exhaust in vacuum is possible. Further, as the temperature rises up to the brazing temperature thereafter, the elasticity of the coil spring 14 decreases and the coil spring 14 is compressed by the thickness of the metal lid 12 or the jig to bring the metal lid 12 and the brazing material 13 into contact with each other as shown in FIG. The hole 10 is closed with a metal lid 12, and the vacuum container is securely vacuum-sealed by airtight brazing.

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

Claims (2)

[Claims] 1. A vacuum device that is evacuated in a vacuum,
A recess is provided on the outer surface of the metal member having the exhaust hole so as to surround the opening of the exhaust hole, one end of the metal spring is locked in the recess, and the metal lid is supported by the other end of the metal spring. A manufacturing method characterized in that the exhaust hole is closed with the metal lid in a vacuum due to a decrease in elasticity of the metal spring, and vacuum sealing is performed by airtight brazing. 2. The vacuum device according to claim 1, wherein the metal spring is made of a brazing material.