JPH0528501Y2 - - Google Patents

Info

Publication number
JPH0528501Y2
JPH0528501Y2 JP4861492U JP4861492U JPH0528501Y2 JP H0528501 Y2 JPH0528501 Y2 JP H0528501Y2 JP 4861492 U JP4861492 U JP 4861492U JP 4861492 U JP4861492 U JP 4861492U JP H0528501 Y2 JPH0528501 Y2 JP H0528501Y2
Authority
JP
Japan
Prior art keywords
pressure
receiving diaphragm
diaphragm
pressure receiving
introduction part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4861492U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052041U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4861492U priority Critical patent/JPH052041U/ja
Publication of JPH052041U publication Critical patent/JPH052041U/ja
Application granted granted Critical
Publication of JPH0528501Y2 publication Critical patent/JPH0528501Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP4861492U 1992-05-21 1992-05-21 圧力変換器 Granted JPH052041U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4861492U JPH052041U (ja) 1992-05-21 1992-05-21 圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4861492U JPH052041U (ja) 1992-05-21 1992-05-21 圧力変換器

Publications (2)

Publication Number Publication Date
JPH052041U JPH052041U (ja) 1993-01-14
JPH0528501Y2 true JPH0528501Y2 (ko) 1993-07-22

Family

ID=12808295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4861492U Granted JPH052041U (ja) 1992-05-21 1992-05-21 圧力変換器

Country Status (1)

Country Link
JP (1) JPH052041U (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3598181B2 (ja) * 1996-09-13 2004-12-08 長野計器株式会社 ダイアフラムおよび圧力センサ
JP6797649B2 (ja) * 2016-11-29 2020-12-09 セイコーインスツル株式会社 ダイヤフラムの製造方法

Also Published As

Publication number Publication date
JPH052041U (ja) 1993-01-14

Similar Documents

Publication Publication Date Title
US6837112B2 (en) Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
EP0741906B1 (en) Low cost, center-mounted capacitive pressure sensor
US6014800A (en) Method of making a pressure transducer having a tensioned diaphragm
US4046010A (en) Pressure transducer with welded tantalum diaphragm
KR101496774B1 (ko) 다이어프램 스트레스를 경감하기 위한 홈을 구비하는 정전 용량 압력 센서
US4061035A (en) Diaphragm arrangement for pressure transducers
EP0759547A1 (de) Drucksensor
US20110290031A1 (en) Capacitance type pressure sensor
US10101232B2 (en) Pressure difference sensor with protection against static overloads
US4056009A (en) Diaphragm arrangement for pressure transducers
JP2006521553A5 (ko)
US20130305834A1 (en) Device for converting a force or a pressure into an electrical signal and method for producing such a device
US5025667A (en) Hermetic pressure sensor
US11927498B2 (en) Adiabatic reducing pressure transducer, system and method
US4306460A (en) Differential pressure transducer
US4034610A (en) Differential pressure measuring device
JP4933838B2 (ja) センタホール型荷重変換器
JPH0528501Y2 (ko)
CA1148379A (en) Fluid pressure transmitting diaphragm assembly and method of manufacture
JPS60186726A (ja) 圧力変換器
US3901082A (en) Fluid pressure sensing system and differential pressure unit therefor
US5060520A (en) Hermetic pressure sensor
US6209397B1 (en) Pressure sensor membrane having stepped annular peripheral surfaces and pressure sensor employing same
JPH10300607A (ja) 圧力センサ
US4011650A (en) Cold working process