JPH05283543A - Laser stamp device - Google Patents

Abstract

PURPOSE:To provide a laser stamp device which can stamp information such as parts number, etc., on both front and rear surfaces of a work such as a TAB lead type semiconductor device, etc., and has a simple structure. CONSTITUTION:First and second stationary reflecting mirrors 11, 12 are oppositely disposed in shape above a conveying passage 6, and third and fourth stationary reflecting mirrors 14, 13 are oppositely disposed in a V shape under the passage 6. A movable reflecting mirror 15A and a light source 7 are arranged at the side of the passage 6 as laser light beam entry means to the mirrors.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking device, and more particularly, to a device for laser marking a product number, a standard, a lot number, etc. on the front and back surfaces of a work such as a TAB lead type semiconductor device by an in-line method. To do.

[0002]

2. Description of the Related Art For example, when manufacturing a TAB lead type semiconductor device (1), the tip of an inner lead (4) provided on an insulating film (5) is bumped onto a semiconductor pellet (2) as shown in FIG. An intermediate structure is produced by thermocompression bonding to the electrode (3). Then, a resin (8) covering the tip portion of the inner lead (4) and the bump electrode (3) on the surface of the semiconductor pellet (2) positioned and fixed in the window portion (5A) of the insulating film (5). The TAB lead-type semiconductor device (1) is completed by coating and solidifying and forming a resin film or an Au plating film (8A) on the back surface of the semiconductor pellet (2).

By the way, on the surface of the resin (8) on the front surface side of the TAB lead type semiconductor device (1) and on the surface of the resin film or Au plating film (8A) on the rear surface side thereof, the TAB lead on the user side is provided. The product name, standard, manufacturing lot number, etc. are stamped for the purpose of facilitating identification when mounting the semiconductor device (1).

As a conventional marking device, a laser marking device shown in FIG. 3 is used.

In the conventional laser marking device, as shown in FIG. 3A, first, a first light source (7A) is placed from above a TAB lead type semiconductor device (1) which is positioned and fixed on a guide rail (6). After projecting a laser beam from the resin (8) and marking the product name, standard, etc. on the surface of the resin (8), at the same position or at another position, as shown in FIG. A laser beam is projected from the second light source (7B) to imprint remaining necessary items such as lot numbers on the surface of the resin film or Au plating film (8A).

[0006]

When the conventional device shown in FIG. 3 is used, in the in-line system, two light sources (7A) (7A) (7A) (7A)
It is necessary to install B), and the equipment cost rises as the number of light sources increases. On the other hand, when laser marking is performed on both front and back surfaces of the TAB lead-type semiconductor device (1) with only one light source, a mechanism for vertically turning up the TAB lead-type semiconductor device (1) is provided. After the marking on the front side of 1) is completed, T
Since the AB lead type semiconductor device (1) is turned upside down and the back side is imprinted, installation of the reversing mechanism complicates the equipment.

[0007]

Means for Solving the Problems As a means for solving the above problems, the present invention is a method for imprinting predetermined information by irradiating a laser beam on both front and back surfaces of a work positioned on a transport path, wherein the work surface of the transport path is Side, a pair of fixed reflecting mirrors are arranged opposite to each other in the shape of a figure, and a pair of fixed reflecting mirrors are arranged opposite to each other in the shape of a reverse figure in the back side of the work in the conveying path. It is characterized in that a movable reflecting mirror that selectively makes light incident on is disposed on the side of the transport path.

The movable reflecting mirror has a single reflecting surface that rotates with respect to the projection path of the laser beam from the light source, or in the direction orthogonal to the projection path of the laser beam from the light source. It is desirable to have a pair of reflecting surfaces that move linearly.

[0009]

The laser beam from the light source is guided to one of the fixed reflecting mirrors via the movable reflecting mirror, and the laser beam projected from the fixed reflecting mirror is used to mark information on one of the front and back surfaces of the work. After that, the projecting path of the laser beam is switched by operating the movable reflecting mirror, the laser beam is guided to the other fixed reflecting mirror through the movable reflecting mirror, and the laser beam projected from the fixed reflecting mirror is used. The information is stamped on the other side of the front and back of the work.

[0010]

EXAMPLE An example of the present invention for imprinting the front and back surfaces of a TAB lead type semiconductor device (1) will be described with reference to FIG. In the following description, the same components as those in FIG. 3 for explaining the conventional technique are denoted by the same reference numerals, and the description of the overlapping matters will be omitted.

The laser marking device (10) is provided with a first fixed reflecting mirror (11) and a second fixed reflecting mirror (12) in a figure-eight shape above a conveying path formed by a guide rail (6). And a third fixed reflecting mirror (14) and a fourth fixed reflecting mirror (13) are arranged below the work transfer path so as to face each other in an inverted eight shape. As means for injecting the laser beam to 11) to (14), on the side of the transport path,
A movable reflecting mirror (15A) and a light source (7) are arranged.

The movable reflecting mirror (15A) in this embodiment
Is composed of a rotary reflecting mirror that horizontally rotates on a light projection path from the light source (7) around a pivot (16) attached to its side end.

As indicated by the solid line in FIG. 1, the movable reflecting mirror (15A) is horizontally rotated with the pivot (16) as the center of rotation, and its reflecting surface is directed obliquely upward. In this state, a laser beam is projected from the light source (7). The projected laser beam passes through a movable reflecting mirror (15A), a first fixed reflecting mirror (11) and a second fixed reflecting mirror (12) as shown by a solid line, and a work, for example, a TAB lead type semiconductor device (1). ), And stamps predetermined information indicating the product name, standard, etc.

Thereafter, the movable reflecting mirror (15A) is horizontally rotated with the pivot (16) as the center of rotation, as indicated by the chain double-dashed line in FIG. 1, and its reflecting surface is directed obliquely downward. In this state, a laser beam is projected from the light source (7). The projected laser beam is moved by the movable reflecting mirror (15
A), the third fixed reflecting mirror (14) and the fourth fixed reflecting mirror (1
It is guided to the lower surface of the TAB lead type semiconductor device (1) via 3), and predetermined information indicating the lot number and the like is imprinted there.

In this embodiment, the pivot (16) of the movable reflecting mirror (15A) is arranged orthogonal to the incident light from the laser light source (7) to rotate the movable reflecting mirror (15A). The movable reflecting mirror may be rotated by keeping the mirror surface of the mirror in the state shown in FIG. 1 and concentrically arranging the incident optical axis and the pivot.

Next, another embodiment is shown in FIG. The movable reflecting mirror (15B) in this embodiment is supported by a guide member (not shown) on the light projecting path from the light source (7) as indicated by the solid line and the chain double-dashed line in FIG. ) Is composed of a triangular reflecting mirror that linearly slides along the thickness direction. The procedure for switching the TAB lead type semiconductor device (1) and the projection path of the laser beam to the upper surface side and the lower surface side is the same as that in the first embodiment, and the description thereof will be omitted.

[0017]

According to the present invention, a work, for example, TAB, is used.
It becomes possible to imprint predetermined information on both front and back surfaces of the lead-type semiconductor device with a simple light source using a simple light source without inverting the TAB lead-type semiconductor device.
It is possible to reduce the capital investment and realize the product cost reduction, and its practical value is great.

[Brief description of drawings]

FIG. 1 is a schematic front view showing a first embodiment of the present invention.

FIG. 2 is a schematic front view showing a second embodiment of the present invention.

FIG. 3 is a schematic front view showing a conventional example of a laser marking device.

[Explanation of symbols]

 1 Work [TAB lead type semiconductor device] 6 Transport path [Guide rail] 7 Light source 10 Laser marking device 11, 12, 13, 14 First fixed reflecting mirror 15A, 15B Movable reflecting mirror

Claims (3)

[Claims] 1. A method of imprinting predetermined information by irradiating a laser beam on both front and back surfaces of a work positioned on a transport path, wherein a pair of fixed reflecting mirrors face each other in a figure eight shape on the work surface side of the transport path. A pair of fixed reflecting mirrors are arranged opposite to each other in the shape of an inverted figure on the back side of the work in the conveying path, and a movable reflecting mirror that selectively makes a laser beam from a light source incident on the fixed reflecting mirror is located on the conveying path side. A laser marking device, characterized in that it is arranged on one side. 2. The laser marking device according to claim 1, wherein the movable reflecting mirror has a single reflecting surface that rotates with respect to a projection path of a laser beam from the light source. 3. The laser marking device according to claim 1, wherein the movable reflecting mirror has a pair of reflecting surfaces that linearly moves in a direction orthogonal to a projection path of a laser beam from the light source.