JPH0527178A - Microscope observation device - Google Patents

Abstract

PURPOSE:To offer the microscope observation device capable of forming a two-dimensional image, which has high resolution in optical two dimensions and also has high size reproducibility, in real time. CONSTITUTION:The laser beam from a laser light source 1 after being deflected at a fast speed in a main scanning direction by an optoacoustic deflecting element 3 is deflected at a slow speed in a subscanning direction by a 1st vibration mirror 8 to radiate a sample 13 and the reflected light from the sample 13 after radiating the 1st vibration mirror 8 again to cancel the deflection in the subscanning direction radiates a slit 19 extending in the main scanning direction; and the light transmitted through this slit 19 radiates a 2nd vibration mirror 22 and is deflected again in the subscanning direction and made incident on a CCD two-dimensional image pickup element 24. The laser light source 1, an observation point on the sample 13, the slit 19, and the CCD two-dimensional image pickup element 24 are so arranged as to constitute a confocal optical system in conjugate image formation relation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope observing apparatus, and in particular, a light emitted from a light source is two-dimensionally scanned to illuminate a sample surface, and reflected light, transmitted light or fluorescence from the sample is converted by a photoelectric conversion element. The present invention relates to a microscope observation device suitable for being configured as a microscope imaging device that receives light and obtains an image signal.

[0002]

2. Description of the Related Art Such a microscope image pickup device is an IC, LS
It is used for product inspection and process control of semiconductors such as I, various materials and magnetic tapes. A laser scanning microscope imaging device using a laser as a light source is known,
Conventionally, various types have been proposed. For example, 19
In SCANNING Vol.7, pp88-96, published in 1985, V. Wilke titled "Optical Scanning Microscope", the laser light emitted from the laser light source was scanned by the first and second vibrating mirrors in the main scanning direction. And a laser scanning microscope image pickup device in which the light is sequentially deflected in the sub-scanning direction and projected onto a sample, and reflected light from the sample is received by a photomultiplier.

In addition, Transactions of the 1990 issued
In ROYAL MICROSCOPICAL SOCIETY Vol.1, pp242-250, J. Brakengoff and K. Visscher scan the light passing through the slit with a vibrating mirror in the sub scanning direction instead of scanning the laser light from the laser light source at high speed. 2 on the sample
Dimensionally scanned, and the reflected light or fluorescence from the sample is deflected by a vibrating mirror so as to cancel the deflection in the sub-scanning direction to form a one-dimensional image. There is disclosed a microscope image pickup device which secures a focus property, deflects the light transmitted through the slit again by a vibrating mirror to form a two-dimensional image, and receives the two-dimensional image by a two-dimensional CCD.

Further, Japanese Patent Application Laid-Open No. 61-
In Japanese Patent No. 80215 and U.S. Pat. No. 4,736,110, a laser is used as a light source, laser light emitted from the light source is deflected in the main scanning direction by an acousto-optic device, and then orthogonal to the main scanning direction by a vibrating mirror. It is deflected in the sub-scanning direction to irradiate the observation point of the sample, and the reflected light, transmitted light or fluorescence from the sample is deflected in the sub-scanning direction to cancel the deflection of the incident light to the sample in the sub-scanning direction and the CCD line. Microscope imaging in which a linear image sensor such as a sensor is used to receive light, and the laser light source, the observation point on the sample, and the linear image sensor are all arranged to form a confocal optical system in a conjugated imaging relationship. A device is disclosed.

[0005]

In the first conventional example described above, since the vibrating mirror is used for high-speed main scanning, there is a limit to high-speed scanning due to the inertial weight of the mirror and the responsiveness of the driving unit. The detection speed of a two-dimensional image is as slow as about 0.5 to 2 screens / second, and detection in real time is impossible. Further, since the reproducibility of the dimension of the sample based on the detected image depends on the reproducibility of the scanning of the vibrating mirror, there is a drawback that a highly accurate and complicated signal processing circuit is required to drive the vibrating mirror.

In the second conventional example, 2 having a spatial resolution is used.
Since the imaging is performed by the three-dimensional CCD, the observation points on the sample and the pixels on the CCD correspond to each other 1: 1. Therefore, the dimensional reproducibility of the sample is the same as the above-described first dimensional reproducibility when converted into an electric signal. It is superior to the conventional example. However, since slit illumination is used in the main scanning direction instead of high-speed scanning, there are the following problems. First, since the numerical aperture (NA) in the main scanning direction is low, the focal plane selectivity in the main scanning direction is poor. Secondly, since the spatial coherency in the main scanning direction is high, speckle stripes are generated, and there is a drawback that the detected image appears as shading unevenness. Third
In addition, since only the in-plane resolution of the CCD is used in the main scanning direction, the confocal property is low, and the resolution is the same as that of a conventional microscope that does not use confocal.

In the third conventional example, an acousto-optic deflecting element is used for main scanning, and a vibrating mirror is used for sub-scanning so that reflected light, transmitted light, and fluorescence from the sample are canceled out by deflection in the sub-scanning direction. After that, the light is made incident on the CCD line sensor, and the point light source, the observation point on the sample, and the CCD
Since the line sensors are arranged so as to form a confocal optical system that has a conjugate image formation relationship, high-speed scanning is possible, real-time image detection can be performed, and main scanning direction is possible. Also, high resolution can be obtained in the sub-scanning direction. Further, the dimensional reproducibility of the detected image in the sub-scanning direction is very high. However, the light from the sample is deflected so as to cancel the scanning in the sub-scanning direction, and then the CCD
Since the light is incident on the line sensor, there is a drawback that the dimensional reproducibility in the sub-scanning direction is low. Further, in this conventional example, since a linear image is projected on the CCD line sensor, it is not possible to photograph using a photographic film in place of the CCD line sensor or observe with the naked eye.

The object of the present invention is to solve the above-mentioned various drawbacks of the prior art, to obtain a two-dimensional image of a sample in real time, to have high resolution in both the main scanning direction and the sub-scanning direction, and to perform shading. It is possible to obtain a high-quality image with no unevenness, and to obtain an image with high dimensional reproducibility in any direction, not only in the main scanning direction and the sub-scanning direction, but also for shooting with photographic film and visual observation. An object of the present invention is to provide a microscope observation device that can be used.

[0009]

A microscope observing device of the present invention is a high-speed apparatus having a point light source for generating scanning light and an acousto-optical deflecting element for deflecting light emitted from the point light source in the main scanning direction at high speed. Deflection means, first low-speed deflection means for deflecting the light emitted from the high-speed deflection means at a low speed in the sub-scanning direction orthogonal to the main scanning direction, and light emitted from the first low-speed deflection means. An objective lens system for irradiating the observation point of the sample with the second low-speed deflecting means for deflecting the reflected light, transmitted light, or fluorescence from the sample in the sub-scanning direction so as to cancel the deflection in the sub-scanning direction. An observation on the point light source and the sample, comprising a spatial filter for receiving the light emitted from the second low-speed deflecting means and a third low-speed deflecting means for deflecting the light transmitted through the spatial filter in the sub-scanning direction. Point and spatial filters, It is characterized in that it has arranged to constitute a confocal optical system which these are all conjugate imaging relationship.

[0010]

In the microscope observing apparatus according to the present invention, the reflected light, the transmitted light and the fluorescence from the sample are deflected by the second low speed deflecting means so as to cancel the deflection by the first low speed deflecting means, and then the main scanning is performed. Since it is passed through a spatial filter such as a slit extending in the direction, confocality can be secured and resolution can be improved. Furthermore, since a point light source is used as the light source and the image of this point light source is used for high-speed scanning as it is, speckle fringes do not occur and the light spot is scanned on the sample, so the NA in the main scanning direction is also secured. it can. Further, since the light passing through the spatial filter is deflected again in the sub-scanning direction by the third low-speed deflecting means to obtain a two-dimensional image, the dimensional reproducibility of the two-dimensional image in an arbitrary direction is extremely high. Will be things. In addition, this two-dimensional image is a two-dimensional CCD
When the light is received by the image pickup device, the observation point of the sample and the pixels on the two-dimensional CCD image pickup device correspond to each other in a ratio of 1: 1 or 1: 2. By processing, excellent dimensional reproducibility can be obtained in arbitrary two-dimensional directions.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing the construction of an embodiment of a microscope observing apparatus according to the present invention. A laser light source 1 that continuously oscillates linearly polarized light is arranged as a point light source. This laser light source 1
A polarization ratio of 100: 1 or more is required, and it is easier to obtain a lens or the like by using a visible light laser such as a He-Ne or Ar gas laser. Therefore, the He-Ne gas laser is used in this example. As the polarization direction of the linearly polarized light emitted from the laser light source 1, S-polarized light (E vector horizontal) is used, the reason for which will be described later. The laser light emitted from the laser light source 1 is passed through the beam expander 2 and its diameter is expanded to the entrance pupil diameter of the acousto-optic deflecting element 3 which constitutes the high-speed deflecting means for deflecting in the main scanning direction. For example, when an optical deflector EFL-D250-8 manufactured by Matsushita Electronics Co., Ltd. is used, since it has an entrance pupil of 8 × 5 mm, the beam expander 2 expands the laser beam diameter to 5 mm.

The laser beam expanded by the beam expander 2 is made incident on the acousto-optic deflecting element 3, and a predetermined main scanning frequency is set in the main scanning direction, that is, the direction perpendicular to the plane of FIG. To adopt 15.7
Deflection at a horizontal scanning frequency of 5 KHz. Due to the characteristics of the acousto-optic deflecting element 3, the incident light needs to be S-polarized, and the beam emitted at this time is P-polarized. When the acousto-optic deflecting element 3 is driven at a high frequency of 40 to 120 MHz, a deflection angle of 2.6 degrees is obtained, and this high frequency is modulated at 15.75 KHz described above. As will be described later, the acousto-optic deflection element 3
Is supplied with a signal synchronized with the horizontal drive signal HD.

The laser beam emitted from the acousto-optic deflecting element 3 is made incident on the vibrating mirror 8 of the galvanometer scanner 7 constituting the first low-speed deflecting means through the lenses 4 and 5 and the polarization beam splitter 6, and at this time, the lens. 4 and 5 act to form an image of the entrance pupil of the acousto-optic deflector on the vibrating mirror 8. The galvanometer scanner 7 deflects the laser beam in the sub-scanning direction at a low speed. To ensure the scanning accuracy, a galvanometer scanner 7 with a built-in position sensor is used, and the vibration angle can be servo-controlled. General Sc
Anning's G series is suitable. Further, in order to minimize the moment of inertia of the vibrating mirror 8, a reflecting surface is thinned to the extent that it is not distorted by one wavelength or more. Further, a signal synchronized with the vertical drive signal VD is supplied to the galvanometer scanner 7 in order to vibrate the vibrating mirror 8 at a frequency of 60 Hz which is equal to the vertical scanning frequency of a normal television rate.

As described above, since the laser beam emitted from the acousto-optic deflector 3 is P-polarized, it passes through the polarization beam splitter 6, but at this time it is extinguished in order to prevent the loss of light quantity at the polarization beam splitter. Ratio is 100: 1
It is necessary to be above. The laser beam deflected in the plane of FIG. 1 by the vibrating mirror 8 of the galvanometer scanner 7 forms a two-dimensional scanning area by the laser beam on the first image plane 10 via the lens 9. This two-dimensional scanning area is reduced and projected onto the sample 13 by the objective lens 12.

The reflected light from the sample 13 is condensed by the objective lens 12 and is magnified and imaged on the first image forming surface 10. The galvanometer scanner 7 also acts as a second low-speed deflecting means for this reflected light. Incident on the vibrating mirror 8. The vibrating mirror 8 cancels the deflection in the sub-scanning direction, and then enters the polarization beam splitter 6. Lens 9 and objective lens
Since the 1/4 wave plate 11 is placed between 12 and 12, the laser beam will pass through this 1/4 wave plate twice, and its polarization plane is rotated 90 degrees, so the polarization beam splitter The laser beam incident on is S-polarized. Therefore, this S-polarized light is reflected by the polarization beam splitter 6,
It is imaged as a one-dimensional image on the slit 19 which constitutes a spatial filter via the lens 17 and the reflection mirror 18. The slit 19 has a function of removing unnecessary scattered light generated in the peripheral portion of the light reflected by the polarization beam splitter 6.

The laser beam transmitted through the slit 19 is incident on the two-dimensional CCD image pickup device 24 via the lens 20, the vibrating mirror 22 and the lens 23 of the second galvanometer mirror scanner 21 which constitutes the third low-speed deflecting means. A signal synchronized with the vertical drive signal VD is also supplied to the second galvanometer mirror scanner 21, the vibrating mirror 22 thereof is vibrated in synchronization with the vibrating mirror 8 of the first galvanometer mirror scanner 7, and again in the sub scanning direction. Since the light is deflected, a two-dimensional magnified image of the sample 13 is formed on the sensor surface of the two-dimensional CCD image pickup device 24. The two-dimensional CCD image pickup device 24 is preferably configured by a CCD image pickup device for a black and white TV camera. In this example, a monochrome CCD image pickup device ICX022B manufactured by Sony Corporation is used.
L-3 (Number of pixels 768H x 493V, Pixel pitch 11.0μm x 13.0
μm) is used.

In the present invention, the observation point of the sample 13, the first
The image plane 10, the slit 19 and the sensor surface of the two-dimensional CCD image pickup device 24 are all arranged so as to have a conjugate image formation relationship, and a confocal optical system is constructed also in the sub-scanning direction. In order to make this effect effective, the dimensions of the slit 19 must be set as follows. Now lenses 20 and 23
Supposing that the magnification is M ₁ , the dimension in the longitudinal direction of the slit, that is, the dimension in the main scanning direction must be M ₁ × 8.8 mm, and the dimension in the width direction, that is, the dimension in the sub-scanning direction must be M ₁ × 13.0 μm or less.
However, it should be noted that if the size in the sub-scanning direction is made too small, the S / N of the image signal will decrease.

Next, the processing system of the image signal obtained from the two-dimensional image pickup device 42 will be described. The image signal from the two-dimensional image pickup device 24 is first amplified by the preamplifier 26. As shown in FIG. 2, the preamplifier 26 comprises an amplifier 34, a bandpass filter 35 and an amplifier 36. Amplifier 34
Then, impedance conversion and voltage amplification of the image signal output from the two-dimensional image sensor 24 are performed, and the bandpass filter 35
Then, the high frequency component of 8MHz or more, which is unnecessary for the video signal, is attenuated. Further, the amplifier 36 performs current amplification and impedance conversion for driving the signal line. An emitter follower with one transistor is used for this impedance conversion, and an operational amplifier or a hybrid differential amplifier is used for voltage amplification. However, the performance of this amplifier requires a slew rate of 200 V / μs and a GBW product of 50 MHz or more. An LCπ type filter is used as the bandpass filter 35. The image signal amplified by such a preamplifier 26 is then supplied to the video signal amplifier 27.

The structure of the video signal amplifier 27 is shown in FIG. The video signal amplifier 27 adds a signal for display on a normal television monitor to the image signal amplified by the preamplifier 26. That is, the image signal is amplified by the amplifier 37. At this time, the amplifier 37 and the amplifier 36 of the preamplifier 26 are AC-coupled via the capacitor C in order to remove the influence of the offset voltage of the amplifier and the input current. The clamp circuit 38 reproduces the DC component. After that, the shading is corrected by passing through the shading correction circuit 39. As the correction waveform, inclination, parabolic, sin, and sin ² are used.

After the shading correction, the amplifier 41 again performs voltage amplification through the gain adjusting circuit 40, and the pedestal adding circuit 42 adds a blanking signal and a DC reference signal (black level) necessary for the video signal. Further, the amplifier 43 performs impedance conversion and current amplification necessary for driving the low impedance line, and the display 28 displays a magnified image of the sample 13. A monitor with a horizontal scanning frequency of 15.75 KHz and a vertical scanning frequency of 60 Hz is used for this display 28, as in the case of displaying a normal video signal.

In the present example, further, as shown in FIG. 1, a clock generator 31 and a scan driver 25.
To provide. The clock generator 31 includes a scanning signal necessary for deflecting the above-described light beam, a two-dimensional image pickup device 24
The clock signal for scanning, the CPU clock, and the synchronizing signal for the video signal are generated, and the timing of these signals is shown in FIG. FIG. 4A shows the clock of the two-dimensional image pickup device 24. When the above-mentioned Sony ICX22BL-3 is used, the clock frequency is 14.3 MHz and the duty ratio is approximately 2: 1. 4B and 4C show horizontal drive signals HD and VD, respectively, whose frequencies are 15.75 KHz and 60 Hz, both of which are negative logic. FIG. 4D shows a high frequency modulation signal for driving the acousto-optic deflecting element 3, which is generated by integrating the inversion signal of the horizontal drive signal HD in the scan driver 26. In this acousto-optic deflection element, the relationship between the high frequency modulation signal and the deflection angle is non-linear, so the modulation signal is mixed with the inclination, offset, parabolic, and sin waveforms as correction signals to maintain the linearity of the scanning position. I have to. FIG. 4E shows drive signals for the first and second galvanometer scanners 7 and 21, which are generated by integrating an inverted signal of the vertical drive signal VD. Since the deflection by these galvanometer scanners is slow, closed servo control can be performed, so that correction of the drive signal is not necessary.

Next, the A / D converter 29, the signal processing device 32, the buffer memory 30 and the focus controller 33 will be described. These circuits perform quantization, storage, analogization and quantized data processing of image signals. It is something to do. First, the image signal is quantized by the A / D converter 29. This A / D converter converts an analog image signal with a data rate of 14 MHz into a digital signal with a resolution of 8 bits. A parallel flash converter with a conversion rate of at least 1 megasample / second). If necessary, a sample hold circuit can be inserted before the A / D converter 29.

The digital value converted by the A / D converter 29 is stored in the image memory 49 via the buffer memory 30. The buffer memory 30 requires a capacity of 1000 × 8 bits, and the image memory 49 requires a capacity of 1M × 512 × 8 bits. When displaying the image data stored in the image memory 49, the D / A converter 50 converts the read data into an analog signal, the amplifier 51 performs impedance conversion and current amplification, and then the video amplifier 27 Just supply it. This is sufficient for displaying one frame, but in this example, the focus is scanned while changing the distance between the objective lens 12 and the sample 13 in addition to the image of one frame, and the image signal obtained at that time is displayed. It has a function of extracting the maximum value of each image and displaying it as an image.

As shown in FIG. 6, the confocal optical system employed in the microscope observation apparatus of the present invention is characterized in that the maximum values of the resolution curve 59 and the brightness curve 60 coincide with each other with respect to the focus position in the optical axis direction. Therefore, the fact that the surface shape of the sample can be measured by taking the envelope of the maximum brightness position while scanning the focus is used. Therefore, the microscope observation apparatus of the present invention has a theoretically infinite depth of focus.

The latch circuit 52, the comparator 53 and the selector 54 shown in FIG. 5 are for performing such a surface shape measuring function. The luminance data of a certain two-dimensional address is latched by the latch circuit 52, compared with the data in the image memory 49 at this address by the comparator 53, and the larger data is selected by the selector 54 to be stored in the image memory. Rewrite to the address location. By performing this for all pixels while performing focus scanning, only the image signal of the focused image is stored in the image memory 49. To quantitatively measure the surface shape in this way, C
A motor 15 that drives the sample table 14 on which the sample 13 is placed by the PU 55 via the motor controller 58 in the optical axis direction.
The number of movement pulses (that is, movement amount) output from the encoder 16 connected to this motor 15 when controlling
Is counted by the up / down counter 57, and the count number of the above-mentioned maximum luminance position is stored so as to correspond to each address position in the image memory 49.

Here, the execution program of the CPU 55 is a memory
Store in 56. For example, set the resolution of encoder 16 to 0.
If it is set to 01 μm / pulse, the dimensional reproducibility of 3σ = 0.1 μm can be obtained even if a commercially available microscope stage such as OPTIPHOTO × 6 manufactured by Nikon Corporation is used.

Regarding the dimension of the sample 13 in the two-dimensional direction, assuming that the total magnification of the optical system is M ₂ and the pixel size of the two-dimensional image pickup device 24 is a μm × b μm, each pixel of the two-dimensional CCD is Since it is a / M ₂ μm × b / M ₂ μm on the sample, based on these values and the brightness data stored in the image memory 49, the CPU 55 is used to determine an arbitrary two-dimensional direction on the sample. Can be measured with extremely high reproducibility. Actually, when the magnification of the optical system is 200 times and the size of one pixel on the sample is 0.05 μm, the dimensional reproducibility is 3σ = 0.03 μ.
will reach m. Further, when it is desired to obtain a value smaller than the pixel size on the sample, the dimensions may be calculated by interpolating the luminance data between pixels with a straight line or a quadratic curve.

In the present invention, the two-dimensional image of the sample can be displayed not only on the display 28 but also recorded on a photographic film or visually observed. That is, as shown in FIG. 1, a rotary mirror 61 is provided between the lens 23 and the two-dimensional CCD 24, and when the rotary mirror is rotated and inserted into the optical path, the sample 2 is moved through the eyepiece lens 62. It is possible to observe the three-dimensional image with the naked eye. A two-dimensional image of the sample can be recorded on the photographic film by mounting a camera instead of the eyepiece lens 62.

FIG. 7 shows the configuration of another embodiment of the microscope observing apparatus according to the present invention. The same elements as the elements shown in the previous example are designated by the same reference numerals, and detailed description thereof will be omitted. In this example, the oscillating mirror that constitutes the third low-speed deflecting means is shared with the oscillating mirror that constitutes the first and second low-speed deflecting means. That is, not only the front surface 8a but also the rear surface 8b of the galvanometer scanner 7 is formed as a mirror surface, and the incident light to the sample 13 is deflected in the sub-scanning direction by the front surface 8a and the reflected light from the sample is sub-scanning direction. To offset the deflection in the sub-scanning direction,
Further, the deflection in the sub-scanning direction is offset and removed in this way, and the light beam reflected by the polarization beam splitter 6 is reflected by the reflection mirror 18a and made incident on the slit 19, and the light beam transmitted through this slit is further reflected by the reflection mirror 18b. Then, the light is reflected on the back surface 8b of the vibrating mirror 8 through the lens 20 and is deflected again in the sub-scanning direction at a low speed. Since the front and back surfaces of the vibrating mirror 8 are used in this manner, the first, second and third low speed deflecting means can be configured by one vibrating mirror, and the structure is simplified.

The present invention is not limited to the above-described embodiments, but various changes and modifications can be added. For example, in the above-described embodiment, the sample image is displayed or observed by receiving the reflected light from the sample, but the sample image can be obtained by receiving the light transmitted through the sample. Furthermore, the sample image can be observed by receiving the fluorescence emitted from the sample when the sample is irradiated with light. Further, in the above-described embodiment, the first and second low speed deflecting means are constituted by the common vibrating mirror, but they may be constituted by different vibrating mirrors.

[0031]

As described above, according to the microscope observing apparatus of the present invention, it is possible to obtain a high-resolution image having high dimensional reproducibility in an arbitrary two-dimensional direction on a sample. Image detection and dimension measurement of fine patterns and fine structures can be performed in real time and in the atmosphere, and a single screen can be obtained in a short time, so even a moving sample can be observed and recorded in real time. Is possible.

[Brief description of drawings]

FIG. 1 is a diagram showing the configuration of an embodiment of a microscope observation apparatus according to the present invention.

FIG. 2 is a block diagram showing the configuration of the same preamplifier.

FIG. 3 is a block diagram showing a configuration of a video signal amplifier of the same.

4A to 4E are signal waveform diagrams showing timings of various signals.

FIG. 5 is a block diagram showing a configuration of the signal processing apparatus of the same.

FIG. 6 is a graph showing a luminance curve and a resolution curve.

FIG. 7 is a diagram showing the configuration of another embodiment of the microscope observation device according to the present invention.

[Explanation of symbols]

1 Laser Light Source (Point Light Source) 2 Beam Expander 3 Acousto-Optical Deflection Element (High Speed Deflection Means) 6 Polarization Beam Splitter 7 First Galvanometer Scanner (First and Second Low Speed Deflection Means) 11 1/4 Wave Plate 12 Objective Lens 13 sample 19 slit (spatial filter) 21 second galvanometer scanner (third low-speed deflection means) 24 two-dimensional imaging device 25 scan driver 26 preamplifier 27 video signal amplifier 28 display 29 A / D converter 30 buffer memory 31 clock Generator 32 Signal processor 33 Focus controller

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Daikichi Awamura             4-10-4 Tsunashima East, Kohoku Ward, Yokohama City, Kanagawa Prefecture             Laser Tech Co., Ltd.

Claims (7)

[Claims] 1. A high-speed deflecting means having a point light source for generating scanning light, an acousto-optical deflecting element for deflecting light emitted from the point light source in the main scanning direction at high speed, and a high-speed deflecting means for emitting the light. A first low-speed deflecting means for deflecting light at a low speed in a sub-scanning direction orthogonal to the main scanning direction;
The objective lens system for irradiating the observation point of the sample with the light emitted from the low-speed deflecting means, and deflects the reflected light, the transmitted light, or the fluorescence from the sample in the sub-scanning direction so as to cancel the deflection in the sub-scanning direction. The second low-speed deflecting means, the spatial filter for receiving the light emitted from the second low-speed deflecting means, and the third low-speed deflecting means for deflecting the light transmitted through the spatial filter in the sub-scanning direction. A microscope observation apparatus characterized in that the point light source, the observation point on the sample, and the spatial filter are arranged so as to constitute a confocal optical system in which these all have a conjugate imaging relationship. 2. An image forming lens system for forming an image of light emitted from the third low-speed deflecting means, and a two-dimensional image of a sample formed by the image forming lens system is received and converted into an image signal. The microscope observation apparatus according to claim 1, further comprising: 3. The microscope observing apparatus according to claim 2, further comprising image display means for displaying an image signal output from the two-dimensional light detecting means. 4. A means for processing an image signal output from the two-dimensional light detecting means to measure a dimension of a sample image in a two-dimensional plane in an arbitrary direction is provided. Or the microscope observing device according to 3. 5. The surface of the sample by processing means for scanning the sample in the optical axis direction, a signal representing the scanning amount output from the scanning means, and an image signal output from the two-dimensional photodetecting means. 5. The microscope observing device according to claim 2, further comprising a unit for measuring a state. 6. The microscope observing apparatus according to claim 1, wherein the first low-speed deflecting means and the second low-speed deflecting means have the same oscillating mirror. 7. The microscope observing apparatus according to claim 6, wherein the third low-speed deflecting means uses the back surfaces of the same vibrating mirrors of the first and second low-speed deflecting means.