JPH0526827A - Analyzing device using spectrum measurement - Google Patents

Abstract

PURPOSE:To prevent interference between peaks of different elements so as to make data analysis easier at the time of making analysis by using various kinds of spectrum measurements. CONSTITUTION:A data base 7 about the intensity and position of the spectrum peak of each element and displaying means 8 which displays the spectrum image of one element from the data base when the element is designated are provided. In addition, a means which designates an energy range to be measured and controller 4 which makes spectrum measurement to be made in the designated energy range are also provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention facilitates data analysis and eliminates misjudgment in setting analysis conditions in an energy spectroscopic analyzer such as an X-ray photoelectron analyzer or various other spectroscopic analyzers. Regarding the device.

[0002]

2. Description of the Related Art In the energy spectrum of Auger electrons emitted from a sample excited by being irradiated with an electron beam or the like, X-ray photoelectrons emitted from a sample excited by X-rays, etc.
Since a plurality of peaks having different energies are detected from one element, the spectrum data obtained by measurement of an arbitrary sample has more detection peaks than the number of constituent elements. Conventionally, when analyzing spectral data, the peak of the maximum intensity is specified for each element in the sample, and the analysis is performed by analyzing the peak intensity, but the spectral peaks of other elements contained in the sample are If it exists near the spectral peak of the specified measurement element, interference will occur between the peaks, and quantitative analysis will be difficult as it is.For the spectral data obtained by the measurement, perform a complicated analysis considering the interference, or It was necessary to perform measurement within the range where interference did not occur.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to avoid peak interference between different elements and facilitate data analysis in analysis by various spectrum measurements.

[0004]

[Means for Solving the Problems] In an analyzer by spectrum measurement, a database of intensity and position of spectral peak of each element, and display means for displaying a spectrum image of the element designated from the database when the element is designated. , Means for specifying the measured energy range,
A control device for performing spectrum measurement in a designated energy range was provided.

[0005]

[Function] There are a plurality of energy spectrum peaks of the secondary radiation emitted from the elements excited by X-rays or electron beams, etc.
Analysis is possible. The present invention is intended to use a spectral peak without interference of the peaks of other elements in the analysis of the element, and the position of the spectral peak of each element is known in advance, so the position of the peak of each element is stored in the database When you specify the elements contained in the sample,
When the spectral images of all the designated elements are displayed side by side on the display means at the same time, the operator can easily find the peaks of the designated element without interference from the displayed spectral images. Therefore, by allowing the operator to specify the spectrum range that includes the peak, it is possible to obtain a spectral peak that does not interfere with the peaks of other elements by measurement, and it is possible to obtain high accuracy without the need for troublesome analysis of interference of other elements. Various analysis results can be obtained.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the configuration of an apparatus according to an embodiment of the present invention.
This example is an X-ray photoelectron spectroscopy analyzer. Reference numeral 1 is an X-ray gun, 2 is a sample, and 3 is an energy analyzer, which performs energy analysis of X-ray photoelectrons emitted from the sample. A controller 4 controls the applied voltage of the energy analyzer 3 so that X-ray photoelectrons in the energy range set by the operator are detected via the keyboard 5. 6 is an electronic detector, the output of which is stored in the memory 9. 7 is X of each element
A database of line photoelectron energy spectra,
When the operator specifies an element with the keyboard 5,
A spectrum image as shown in FIG. 3 is displayed on the CRT 8.
FIG. 2 shows a flowchart of the operation of one embodiment of the present invention. Assuming that the elements constituting the sample are known in advance, first, all component elements are designated (# 1). Initialize the measurement conditions such as the measurement range of each element. (# 2). From the spectrum data stored in the database, the spectral peaks of all the designated component elements are extracted, and the extracted spectral peaks are displayed for each component element as shown in FIG. 3 (# 3). On the displayed spectrum peak screen, the operator finds, for each component element, the strongest energy peak among the spectrum peaks that do not interfere, and sets it as the measurement range of each component element (# 4). Measurement is performed within the set measurement range (# 5).

[0007]

According to the present invention, interference of energy peaks due to other elements is eliminated in energy peaks used for elemental analysis, and sample analysis can be performed without performing complicated calculations in peak analysis. By doing so, the analysis process has become significantly easier.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is a flowchart of an embodiment of the present invention.

[Figure 3] Energy peak display example of each element

[Explanation of symbols]

 1 X-ray gun 2 sample 3 energy analyzer 4 controller 5 keyboard 6 detector 7 database 8 CRT 9 memory

Claims (1)

Claims: 1. A database of the intensity and position of spectral peaks of each element, display means for displaying the spectrum image of the specified element from the database when the element is specified, and the measured energy range. An analyzer for spectrum measurement, comprising: a means for designating and a controller for performing spectrum measurement in a designated energy range.