JPH05267132A - Figure segmenting device for charged-particle plotter - Google Patents
Figure segmenting device for charged-particle plotterInfo
- Publication number
- JPH05267132A JPH05267132A JP4065512A JP6551292A JPH05267132A JP H05267132 A JPH05267132 A JP H05267132A JP 4065512 A JP4065512 A JP 4065512A JP 6551292 A JP6551292 A JP 6551292A JP H05267132 A JPH05267132 A JP H05267132A
- Authority
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- Japan
- Prior art keywords
- data
- trapezoidal
- decomposing
- basic
- graphic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子線描画装置等の荷
電粒子描画装置に関わり、とくにその描画図形発生装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle drawing apparatus such as an electron beam drawing apparatus, and more particularly to a drawing figure generating apparatus therefor.
【０００１】[0001]
【従来の技術】従来から電子線描画装置により描画する
ＬＳＩ等の図形パターンは一般的にＣＡＤ装置を使用し
て作成されている。このＣＡＤ装置が出力する図形パタ
ーンデータは専用のソフトウエアにより大型計算機、ミ
ニコンピュータ、ワークステーション等のうえで描画装
置に入力可能な専用フォマットに変換され、通信媒体を
介して描画装置に入力され描画されていた。2. Description of the Related Art Conventionally, a graphic pattern of an LSI or the like drawn by an electron beam drawing apparatus is generally created by using a CAD apparatus. The graphic pattern data output by this CAD device is converted by a dedicated software into a dedicated format that can be input to the drawing device on a large-scale computer, a minicomputer, a workstation, etc., and is input to the drawing device via a communication medium for drawing. It had been.
【０００２】上記電子線描画装置における描画単位は、
一般的に矩形、スポット等に成形した電子ビームの形状
である。すなわち、図形パターンを上記矩形、あるいは
スポットの集合として表現して試料を順次露光してい
る。The drawing unit in the above electron beam drawing apparatus is
Generally, it is a shape of an electron beam shaped into a rectangle, a spot, or the like. That is, the sample is sequentially exposed by expressing the graphic pattern as the above rectangle or a set of spots.
【０００３】しかし、図形パターンを直接的に矩形、ま
たはスポットの集合に分解すると、 （１）図形の分解／フォマット変換処理に多大の時間を
要する （２）図形データ数が増大し、その転送時間が長くなる 等の問題点が発生するので、ＣＡＤ装置の専用ソフトウ
エアにより原図形を例えば４５度の倍数で表現される底
角を持つ台形の基本図形の集合に分解し、各基本図形を
描画装置により矩形、またはスポットに分解して高速に
描画するようにしている。なお、上記台形の基本図形は
ＬＳＩの斜め配線パターンが４５度に制限されている場
合が多いに関連している。However, if the figure pattern is directly decomposed into a rectangle or a set of spots, (1) it takes a lot of time for the figure decomposition / format conversion process. (2) The number of figure data increases and the transfer time thereof However, there is a problem that the original figure is decomposed into a set of trapezoidal basic figures with a base angle expressed by a multiple of 45 degrees, and each basic figure is drawn. The device decomposes it into rectangles or spots for high-speed drawing. The trapezoidal basic figure is related to the fact that the diagonal wiring pattern of the LSI is often limited to 45 degrees.
【０００４】しかし最近では、ＬＳＩが複雑化して４５
度以外の角度の斜め配線パターンが増え、さらに、電子
線描画装置により円／楕円を始めとする複雑な曲線を使
用するフレネルレンズや量子デバイスのパターンを描画
する場合も増えており、この様な図形を上記基本図形の
集合で表現すると基本図形数が極端に増加して上記
（１）、（２）の問題が再びクロ−ズアップされつつあ
る。このため例えば実験的には、上記フレネルレンズや
量子デバイスの描画において、ＣＡＤによる図形データ
作成、専用ソフトウエアによるデータ変換等を省略し、
円等の図形パラメータのみを描画装置へ入力して簡便に
描画するようにすることが見直されている。However, in recent years, LSIs have become complicated, and 45
Increasing number of diagonal wiring patterns at angles other than degrees, and also increasing the number of cases of drawing Fresnel lens and quantum device patterns that use complicated curves such as circles / ovals by electron beam drawing devices. When a figure is expressed by a set of the above-mentioned basic figures, the number of basic figures is extremely increased, and the problems (1) and (2) are being closed up again. Therefore, for example, experimentally, in the drawing of the Fresnel lens and the quantum device, the figure data creation by CAD, the data conversion by dedicated software, etc. are omitted,
It has been reconsidered that only graphic parameters such as circles are input to a drawing device so that drawing can be performed easily.
【０００５】なお、特開昭５５−９４３３号公報には、
上記原図形を基本図形の集合に分解し、各基本図形をド
ットデ−タに分解して描画することが開示されている。
また、特開昭６３−３２９２０号公報には、四辺形図形
をＸ軸、あるいはＹ軸に並行になるように座標変換した
のち描画することが開示されている。Incidentally, Japanese Patent Application Laid-Open No. 55-9433 discloses that
It is disclosed that the original figure is decomposed into a set of basic figures, and each basic figure is decomposed into dot data for drawing.
Further, Japanese Patent Application Laid-Open No. 63-32920 discloses that a quadrilateral figure is coordinate-transformed so as to be parallel to the X axis or the Y axis and then drawn.
【０００６】また特開平１−１７５７３７号公報には、
描画パタ−ンを矩形と台形の基本図形に分割し、Ｘ軸、
あるいはＹ軸と傾斜する部分を有する基本図形に対して
はこれをＸ軸、あるいはＹ軸に並行な線分により矩形と
直角三角形の集合に分割し、２等辺でない直角三角形は
さらに長辺に並行な線分により台形図形の集合に分割
し、さらに上記各台形図形を矩形と直角三角形の集合に
分割して、上記矩形と直角三角形のすべてを矩形と直角
三角形に成形した電子ビ−ムにより描画することが開示
されている。Further, in Japanese Patent Laid-Open No. 1-175737,
Divide the drawing pattern into rectangular and trapezoidal basic figures,
Alternatively, for a basic figure having a portion inclined to the Y axis, this is divided into a set of rectangles and right triangles by a line segment parallel to the X axis or the Y axis, and a right triangle that is not isosceles is further parallel to the long side. The above trapezoidal figures are divided into a set of rectangles and right-angled triangles, and all of the above-mentioned rectangles and right-angled triangles are drawn in the form of rectangles and right-angled triangles. It is disclosed to do.
【０００７】[0007]
【発明が解決しようとする課題】上述のように、従来技
術において電子線描画装置の外部装置であるＣＡＤ装置
が行なう円／楕円等の曲線図形、任意角を持つ斜め配線
パターン等の図形分解／フォマット変換の処理時間が長
くなり、また、上記分解図形データを電子線描画装置に
転送する時間が長くなるという問題があった。本発明の
目的は、上記ＣＡＤ装置が処理するデータ量を減少して
そのデータ変換時間とデータの転送時間等を短縮し、さ
らに、簡単なパラメータ入力により円図形データ等を発
生して描画することのできる荷電粒子描画装置の図形分
解装置を提供することにある。As described above, in the prior art, a CAD device, which is an external device of an electron beam drawing device, performs a curved / circular figure such as a circle / ellipse or a figure decomposition of an oblique wiring pattern having an arbitrary angle / There is a problem that the processing time of the format conversion becomes long and the time for transferring the above-mentioned decomposed figure data to the electron beam drawing apparatus becomes long. An object of the present invention is to reduce the amount of data processed by the CAD device to shorten the data conversion time and the data transfer time, and to generate and draw circular graphic data etc. by simple parameter input. It is an object of the present invention to provide a graphic decomposing device for a charged particle drawing device.
【０００８】[0008]
【課題を解決するための手段】上記課題を解決するため
に、入力図形データを底角が４５°の整数倍の基本台形
図形に分解する従来のデータ変換装置の他に、入力図形
データを底角が任意角の台形図形に分解するデータ変換
手段を設け、さらに、上記底角が任意角の台形図形を上
記底角が４５°の整数倍の基本台形図形に分解する任意
角処理プロセッサを設けるようにする。In order to solve the above-mentioned problems, in addition to the conventional data conversion apparatus for decomposing input figure data into basic trapezoidal figures whose base angle is an integral multiple of 45 °, input figure data Data conversion means for decomposing into a trapezoidal figure having an arbitrary angle is provided, and further, an arbitrary angle processing processor for decomposing the trapezoidal figure with an arbitrary bottom angle into a basic trapezoidal figure having an integer multiple of 45 °. To do so.
【０００９】さらに、上記データ変換手段は上記入力図
形データを底角が任意角の台形図形デ−タに分解する手
段と上記底角の値をパラメ−タとして出力するように
し、上記任意角処理プロセッサは上記パラメ−タにより
上記底角が任意角の台形図形を上記底角が４５°の整数
倍の基本台形図形に分解するようにする。また、上記任
意角処理プロセッサを高速のＲＩＳＣ型プロセッサ、デ
ジタルシグナルプロセッサ等により構成するようにす
る。Further, the data conversion means is adapted to decompose the input graphic data into trapezoidal graphic data having a base angle of an arbitrary angle, and output the base angle value as a parameter to perform the arbitrary angle processing. The processor causes the parameter to decompose the trapezoidal figure having an arbitrary base angle into a basic trapezoidal figure having a base angle of an integral multiple of 45 °. Further, the arbitrary angle processing processor is composed of a high-speed RISC type processor, a digital signal processor or the like.
【００１０】さらに、上記図形分解回路の前段に上記デ
ータ変換装置が出力する底角が４５°の整数倍の基本台
形図形デ−タと上記任意角処理プロセッサが出力する４
５°の整数倍の基本台形図形デ−タとを切り替える手段
を備えるようにする。Further, the basic trapezoidal graphic data whose base angle is an integral multiple of 45 ° output from the data converter and the output from the arbitrary angle processing processor 4 are output in front of the graphic decomposition circuit.
A means for switching between basic trapezoidal figure data of an integral multiple of 5 ° is provided.
【００１１】[0011]
【作用】上記データ変換手段は従来のデータ変換装置が
底角が４５°の整数倍の基本台形図形に分解できない複
雑な入力図形を底角が任意角の台形図形に分解し、上記
任意角処理プロセッサは上記底角が任意角の台形図形を
底角が４５°の整数倍の基本台形図形に分解する。ま
た、上記データ変換手段は上記入力図形データを底角が
任意角の台形図形デ−タに分解すると同時に上記底角の
値をパラメ−タとして出力し、上記任意角処理プロセッ
サは上記パラメ−タにより上記底角が任意角の台形図形
を上記底角が４５°の整数倍の基本台形図形に分解す
る。The data converting means decomposes a complicated input figure which cannot be decomposed into a basic trapezoidal figure whose base angle is an integral multiple of 45 ° by the conventional data converting apparatus into a trapezoidal figure whose base angle is an arbitrary angle and performs the arbitrary angle processing. The processor decomposes the trapezoidal figure whose base angle is an arbitrary angle into basic trapezoidal figures whose base angle is an integral multiple of 45 °. Further, the data converting means decomposes the input graphic data into trapezoidal graphic data having a base angle of an arbitrary angle, and at the same time outputs the value of the base angle as a parameter, and the arbitrary angle processing processor outputs the parameter. Is used to decompose the trapezoidal figure having an arbitrary base angle into a basic trapezoidal figure whose base angle is an integral multiple of 45 °.
【００１２】また、上記高速のＲＩＳＣ型プロセッサ、
デジタルシグナルプロセッサ等により構成された任意角
処理プロセッサは上記底角が任意角の台形図形を上記底
角が４５°の整数倍の基本台形図形に高速に分解する。
また、上記データ変換手段を一体構成したデータ変換装
置は入力図形が底角が４５°の整数倍の基本台形ではな
い場合に上記底角の値をパラメ−タにして出力する。ま
た、上記切替え手段は上記データ変換装置が出力する底
角が４５°の整数倍の基本台形図形デ−タと上記任意角
処理プロセッサが出力する４５°の整数倍の基本台形図
形デ−タとを切り替えて図形分解回路に送付する。The high-speed RISC processor,
An arbitrary-angle processing processor configured by a digital signal processor or the like quickly decomposes the trapezoidal figure whose base angle is an arbitrary angle into a basic trapezoidal figure whose base angle is an integral multiple of 45 °.
Further, the data conversion device integrally configured with the data conversion means outputs the value of the base angle as a parameter when the input figure is not a basic trapezoid whose base angle is an integral multiple of 45 °. The switching means includes basic trapezoidal graphic data whose base angle is an integral multiple of 45 ° and basic trapezoidal graphic data of an integral multiple of 45 ° output by the arbitrary angle processor. And send it to the figure decomposition circuit.
【００１３】[0013]
【実施例】図１は本発明による電子線描画装置実施例の
ブロック図であり、点線で囲まれた部分が本発明により
追加された部分、それ以外は従来部分である。まず、上
記従来部分によりるＣＡＤフォマットのＬＳＩパターン
データを矩形データに変換して描画する方法につき説明
する。ＣＡＤ装置１は描画すべきＬＳＩパターンをＣＡ
Ｄフォマット化し、得られたＣＡＤ図形データ２を出力
する。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram of an embodiment of an electron beam drawing apparatus according to the present invention. A portion surrounded by a dotted line is a portion added by the present invention, and other portions are conventional portions. First, a method of converting the LSI pattern data of the CAD format according to the above conventional part into rectangular data and drawing the data will be described. The CAD device 1 uses the CA for the LSI pattern to be drawn.
The D-formatted data is obtained, and the obtained CAD figure data 2 is output.
【００１４】このＣＡＤ図形データ２は大型計算機、ミ
ニコンピュータ、ワークステーション等の専用のソフト
ウエアを使用するデータ変換装置３により底角が４５度
の倍数の基本台形図形の集合に分解され、さらに描画装
置に入力可能な専用フォマットに変換され、通信路、磁
気テープ等の媒体４を介して電子線描画装置５へ転送さ
れる。The CAD figure data 2 is decomposed into a set of basic trapezoidal figures having a base angle of a multiple of 45 degrees by a data conversion device 3 using dedicated software such as a large-scale computer, a mini computer, a workstation, and the like, and further drawn. It is converted into a dedicated format that can be input to the apparatus, and transferred to the electron beam drawing apparatus 5 via the medium 4 such as a communication path and a magnetic tape.
【００１５】電子線描画装置５は、上記転送された図形
データをバッファメモリ６に一時保管し、図形読出し回
路７はバッファメモリ６より図形データを読みだして復
元し、ファストインファストアウト形メモリ（ＦＩＦ
Ｏ）８に設定する。なお、上記図形デ−タには繰り返し
データ等に対する圧縮処理が施されている。The electron beam drawing apparatus 5 temporarily stores the transferred graphic data in the buffer memory 6, and the graphic reading circuit 7 reads the graphic data from the buffer memory 6 and restores the data, and a fast-in-fast-out type memory ( FIF
O) Set to 8. The graphic data is subjected to compression processing for repeated data and the like.
【００１６】図形分解回路９は上記ＦＩＦＯ８に設定さ
れたデ−タから底角が４５度の倍数の基本台形図形を順
次読出して矩形図形１０に分解し偏向制御部１１へ転送
する。なお、この矩形図形１０のデータは図形原点
（ｘ，ｙ）と高さＨ、幅Ｗで構成される。偏向制御部１
１は矩形図形１０のデータをアナログ信号１２に変換し
て偏向器１３に送り、矩形の電子ビーム１４を偏向して
試料（ウエハ）１５上に電子ビーム露光を行なう。The figure decomposition circuit 9 sequentially reads basic trapezoidal figures having a base angle of a multiple of 45 degrees from the data set in the FIFO 8, decomposes them into rectangular figures 10, and transfers them to the deflection control section 11. The data of the rectangular graphic 10 is composed of a graphic origin (x, y), a height H, and a width W. Deflection control unit 1
Reference numeral 1 converts the data of the rectangular figure 10 into an analog signal 12 and sends it to the deflector 13 to deflect the rectangular electron beam 14 to expose the sample (wafer) 15 with the electron beam.
【００１７】本発明では上記従来型の電子線描画装置に
図１の点線で囲んだ部分を追加し、底角が任意角の台形
図形を底角が４５度の倍数の基本台形図形に変換できる
ようにする。この場合、データ変換装置３は任意角を含
む台形図形をそのまま出力でき、また円等の曲線図形を
任意角台形図形の集合に近似して出力できるので、媒体
４に転送するデータ量を減少することができる。In the present invention, a portion surrounded by a dotted line in FIG. 1 is added to the above conventional electron beam drawing apparatus to convert a trapezoidal figure with an arbitrary base angle into a basic trapezoidal figure with a base angle of a multiple of 45 degrees. To do so. In this case, the data conversion device 3 can output a trapezoidal figure including an arbitrary angle as it is, and can also output a curved figure such as a circle by approximating it to a set of arbitrary-angled trapezoidal figures, so that the amount of data transferred to the medium 4 is reduced. be able to.
【００１８】図２は上記任意角台形図形を４５度の倍数
の基本台形図形に変換する方法の説明図である。図２
（ａ）は任意角台形図形１８であり、これを例えば同図
（ｂ）に示すように矩形１８１、１８２と二つの直角三
角形１８３、１８４に分解し、さらに直角三角形のそれ
ぞれを微小な矩形１８５の集合に分解する。この微小な
矩形１８５が上記底角が４５度の倍数の基本台形図形に
該当する。もちろん、上記矩形１８５を底角が４５度の
台形図形にすることもできる。FIG. 2 is an explanatory diagram of a method of converting the above-mentioned arbitrary-angle trapezoidal figure into a basic trapezoidal figure of a multiple of 45 degrees. Figure 2
(A) is an arbitrary trapezoidal figure 18, which is decomposed into rectangles 181 and 182 and two right triangles 183 and 184 as shown in (b) of the figure, and each of the right triangles is a minute rectangle 185. Decompose into a set of. This minute rectangle 185 corresponds to the basic trapezoidal figure whose base angle is a multiple of 45 degrees. Of course, the rectangle 185 may be a trapezoidal figure having a base angle of 45 degrees.
【００１９】フレネルレンズや量子デバイスのパターン
のように円、楕円、あるいは複雑な曲線を含む図形は上
記任意角台形図形１８の集合に分解できるので、同様に
同図（ｂ）のように分解することができる。上記微小な
矩形１８５のそれぞれの横方向の長さは底角の大きさに
応じて変化する。したがってＣＡＤ装置１あるいはデ−
タ変換装置３は、上記底角より算出した微小な矩形１８
５の長さの低減率をパラメ−タとして出力すれば、媒体
４を介して電子線描画装置５が受け取るデータ量を著し
く低減することができる。また、上記図２の（ａ）から
同図（ｂ）への変換処理は任意角処理プロセッサ１６が
行なう。Since a figure including a circle, an ellipse, or a complicated curve such as a Fresnel lens or quantum device pattern can be decomposed into a set of the above-mentioned arbitrary trapezoidal figures 18, it is similarly decomposed as shown in FIG. be able to. The lateral length of each of the minute rectangles 185 changes according to the size of the base angle. Therefore, the CAD device 1 or the data
The data conversion device 3 uses a small rectangle 18 calculated from the base angle.
If the reduction rate of the length 5 is output as a parameter, the amount of data received by the electron beam drawing apparatus 5 via the medium 4 can be significantly reduced. The conversion processing from FIG. 2A to FIG. 2B is performed by the arbitrary angle processor 16.
【００２０】この変換処理では比較的単純な処理を高速
に繰り返すことが要求されるので、任意角処理プロセッ
サ１６には高速のＲＩＳＣ形プロセッサ、デジタルシグ
ナルプロセッサ（ＤＳＰ）等が好適である。また、ＲＩ
ＳＣ形プロセッサ、ＤＳＰ等のマイクロプログラム変更
により、極座標パラメータにより指定される円、その他
の特殊図形を電子線描画装置５に入力でき、同様に出転
送時間、デ−タ変換装置３のデ−タ変換時間等を減少す
ることができる。Since a relatively simple process is required to be repeated at high speed in this conversion process, a high-speed RISC processor, digital signal processor (DSP) or the like is suitable for the arbitrary angle processor 16. Also, RI
By changing the microprogram of the SC processor, DSP, etc., the circle specified by the polar coordinate parameters and other special figures can be input to the electron beam drawing apparatus 5, and similarly, the output transfer time and the data of the data converting apparatus 3 can be input. The conversion time etc. can be reduced.
【００２１】また、これらのマイクロプログラムを電子
線描画装置全体を制御する制御計算機２３に保存して任
意角処理プロセッサ１６にダウンロ−ドすることによ
り、特殊図形を同様に処理して高速描画することができ
る。図形読出し回路７は、読みだしデータが任意角台形
図形の場合には、これをＦＩＦＯ１７に設定し、任意角
処理プロセッサ１６はＦＩＦＯ１７のデータを順次読み
出して基本図形データに分解しＦＩＦＯ２０に順次設定
する。Further, by storing these microprograms in the control computer 23 for controlling the entire electron beam drawing apparatus and downloading them to the processor 16 for processing an arbitrary angle, special graphics are processed similarly and high speed drawing is performed. You can When the read-out data is an arbitrary square trapezoidal figure, the figure reading circuit 7 sets this in the FIFO 17, and the arbitrary angle processor 16 sequentially reads the data of the FIFO 17 and decomposes it into basic figure data and sets it in the FIFO 20 sequentially. ..
【００２２】図３は本発明による円弧図形の発生例であ
る。制御用計算機２３はプロセッサ１６へ円弧処理用の
プログラムをダウンロ−ドし、プロセッサ１６を円弧処
理用の専用プロセッサとする。プロセッサ１６は制御用
計算機２３の起動命令によりＦＩＦＯ１７よりデ−タを
読みだし、円弧図形を４５度の倍数を底角にもつ基本台
形図形の集合として出力する。このとき、ＦＩＦＯ１７
が読み出すデ−タは円弧の中心位置（ｘ，ｙ）と円弧の
半径ｒと円弧の幅ｈのみである。FIG. 3 shows an example of generation of a circular arc figure according to the present invention. The control computer 23 downloads a program for arc processing to the processor 16 and makes the processor 16 a dedicated processor for arc processing. The processor 16 reads the data from the FIFO 17 in response to the activation command of the control computer 23, and outputs the arc figure as a set of basic trapezoid figures having a base angle of a multiple of 45 degrees. At this time, FIFO17
The data that is read out is only the center position (x, y) of the arc, the radius r of the arc and the width h of the arc.
【００２３】プロセッサ１６は制御用計算機２３がパラ
メ−タとして予め指定した値ｄと図示のｄ１が等しくな
るように図形幅Ｗを計算し、その図形の原点（ｘ，ｙ＋
ｒ）と図形幅Ｗと図形高さｈの基本図形２４をＦＩＦＯ
２０に出力する。同様にしてプロセッサ１６は図形が原
点（ｘ＋ｗ，ｙ＋ｒ−ｄ１）の基本図形２５を発生し、
以下順次次の基本図形２６、２７等を発生して円弧図形
を生成する。さらに、制御用計算機２３はプロセッサ１
６に対してｗの上限、加減をパラメ−タとして設定し、
上記ｄ＝ｄ１の処理より上記ｗの上下限判定を優先させ
れば、どのような図形でも上記基本図形に分解すること
ができる。The processor 16 calculates the figure width W so that the value d1 designated in advance by the control computer 23 as a parameter becomes equal to d1 shown in the figure, and the origin (x, y +) of the figure is calculated.
r), the figure width W and the figure height h of the basic figure 24 in the FIFO
Output to 20. Similarly, the processor 16 generates a basic graphic 25 whose origin is (x + w, y + r-d1),
Thereafter, the next basic figures 26, 27, etc. are sequentially generated to generate an arcuate figure. Further, the control computer 23 is the processor 1
The upper limit of w and the amount of w are set as parameters for 6,
By giving priority to the upper and lower limit judgment of w over the processing of d = d1, any figure can be decomposed into the above basic figure.
【００２４】又、任意角処理プロセッサ１６は、描画の
進行状況、ＦＩＦＯ８、ＦＩＦＯ１７、ＦＩＦＯ２０の
空／フル状況等を監視し、デコーダ２１を介してマルチ
プレクサ２２を切り換え、図形分解回路９にＦＩＦＯ８
またはＦＩＦＯ２０のデータを効率良く転送する。The arbitrary angle processor 16 also monitors the drawing progress status, the empty / full status of the FIFO8, FIFO17, and FIFO20, switches the multiplexer 22 through the decoder 21, and causes the figure decomposition circuit 9 to receive the FIFO8.
Alternatively, the data in the FIFO 20 is efficiently transferred.
【００２５】[0025]
【発明の効果】本発明により、底角が任意角の台形図形
や極座標パラメータにより指定される円等の曲線図形等
を比較的少ないデ−タ量で電子線描画装置に入力できる
ので、電子線描画装置へのデータ転送時間を短縮し、同
時に従来は困難であった上記複雑な曲線図形を描画する
ことができる。According to the present invention, a trapezoidal figure having an arbitrary base angle and a curved figure such as a circle designated by polar coordinate parameters can be input to the electron beam drawing apparatus with a relatively small amount of data. It is possible to shorten the data transfer time to the drawing device and, at the same time, draw the complicated curved figure which has been difficult in the past.
【００２４】また、電子線描画装置内に設けたＲＩＳＣ
形プロセッサ、ＤＳＰ等により上記各入力データを底角
が４５度の倍数の台形図形の集合に高速変換するので、
描画時間を短縮することができる。また、上記底角が４
５度の倍数の台形図形入力デ−タと、上記ＲＩＳＣ形プ
ロセッサ、ＤＳＰ等により底角が任意角の台形から底角
が４５度の倍数の台形に変換された図形デ−タを、それ
ぞれのＦＩＦＯのデ−タ蓄積量に応じて選択するので描
画手順を効果化することができる。The RISC provided in the electron beam drawing apparatus
Since the above-mentioned input data are converted at high speed into a set of trapezoidal figures whose base angle is a multiple of 45 degrees by a shape processor, DSP, etc.,
The drawing time can be shortened. Also, the base angle is 4
The trapezoidal figure input data in multiples of 5 degrees and the figure data converted from trapezoids with arbitrary base angles into trapezoids in multiples of 45 degrees by the RISC processor, DSP, etc. Since the selection is made according to the amount of data accumulated in the FIFO, the drawing procedure can be made effective.
【図１】本発明による荷電粒子描画装置の図形分解装置
実施例のブロック図である。FIG. 1 is a block diagram of an embodiment of a figure decomposition apparatus of a charged particle drawing apparatus according to the present invention.
【図２】本発明における底角が任意角の台形図形を底角
が４５度の倍数の台形図形の集合に分解する概念の一例
を示す図形図である。FIG. 2 is a diagram showing an example of a concept of decomposing a trapezoidal figure having an arbitrary base angle into a set of trapezoidal figures having a multiple of 45 degrees.
１…ＣＡＤ装置、３…デ−タ変換装置、４…媒体、５…
電子線描画装置、６……バッファメモリ、７…図形読出
し回路、８、１７、２０…ファーストインファーストア
ウト形メモリ（ＦＩＦＯ）、９…図形分解回路、１１…
偏向制御部、１３…偏向器、１５…試料、１６…任意角
処理プロセッサ、１８…任意角台形図形、２２…マルチ
プレクサ、２３…制御計算機、１８１、１８２…矩形、
１８３、１８４…直角三角形、１８５…底角が４５度の
倍数の台形図形。1 ... CAD device, 3 ... Data conversion device, 4 ... Medium, 5 ...
Electron beam drawing apparatus, 6 ... Buffer memory, 7 ... Graphic reading circuit, 8, 17, 20 ... First-in first-out type memory (FIFO), 9 ... Graphic decomposition circuit, 11 ...
Deflection control unit, 13 ... Deflector, 15 ... Sample, 16 ... Arbitrary angle processing processor, 18 ... Arbitrary angle trapezoidal figure, 22 ... Multiplexer, 23 ... Control computer, 181, 182 ... Rectangle,
183, 184 ... right triangle, 185 ... trapezoidal figure with a base angle of multiples of 45 degrees.
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成４年１２月１０日[Submission date] December 10, 1992
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明による荷電粒子描画装置の図形分解装置
実施例のブロック図である。FIG. 1 is a block diagram of an embodiment of a figure decomposition apparatus of a charged particle drawing apparatus according to the present invention.
【図２】本発明における底角が任意角の台形図形を底角
が４５度の倍数の台形図形の集合に分解する概念の一例
を示す図形図である。FIG. 2 is a diagram showing an example of a concept of decomposing a trapezoidal figure having an arbitrary base angle into a set of trapezoidal figures having a multiple of 45 degrees.
【図３】本発明における本発明により発生する円弧図形
例である。FIG. 3 is an example of an arc figure generated by the present invention in the present invention.
【符号の説明】 １…ＣＡＤ装置、３…デ−タ変換装置、４…媒体、５…
電子線描画装置、６……バッファメモリ、７…図形読出
し回路、８、１７、２０…ファーストインファーストア
ウト形メモリ（ＦＩＦＯ）、９…図形分解回路、１１…
偏向制御部、１３…偏向器、１５…試料、１６…任意角
処理プロセッサ、１８…任意角台形図形、２２…マルチ
プレクサ、２３…制御計算機、１８１、１８２…矩形、
１８３、１８４…直角三角形、１８５…底角が４５度の
倍数の台形図形。[Explanation of Codes] 1 ... CAD device, 3 ... Data conversion device, 4 ... Medium, 5 ...
Electron beam drawing apparatus, 6 ... Buffer memory, 7 ... Graphic reading circuit, 8, 17, 20 ... First-in first-out type memory (FIFO), 9 ... Graphic decomposition circuit, 11 ...
Deflection control unit, 13 ... Deflector, 15 ... Sample, 16 ... Arbitrary angle processing processor, 18 ... Arbitrary angle trapezoidal figure, 22 ... Multiplexer, 23 ... Control computer, 181, 182 ... Rectangle,
183, 184 ... right triangle, 185 ... trapezoidal figure with a base angle of multiples of 45 degrees.
Claims (6)
−マットの図形デ−タを予め決められたフォ−マットに
したがって基本図形デ−タに変換してＬＳＩ描画装置に
入力するデ−タ変換装置と、上記基本図形デ−タを図形
分解回路によりドットまたは矩形の集合に分解して荷電
ビ−ムにより試料上に露光する荷電粒子描画装置の図形
分解装置において、上記基本図形（円、楕円、多角形
等）以外の上記図形分解回路では分解できない図形デ−
タを基本図形に分解する高速変換回路と、上記高速変換
回路の出力を選択する切り替え手段とを備えたことを特
徴とする荷電粒子描画装置の図形分解装置。1. Data for converting graphic data of a CAD format forming an LSI pattern or the like into basic graphic data according to a predetermined format and inputting the basic graphic data to an LSI drawing apparatus. A converter and a figure decomposing apparatus of a charged particle drawing apparatus for decomposing the basic figure data into a set of dots or rectangles by a figure decomposing circuit and exposing the sample with a charged beam. Other than oval, polygon, etc.)
A graphic decomposing device for a charged particle drawing apparatus, comprising: a high-speed conversion circuit for decomposing a pattern into basic figures, and switching means for selecting an output of the high-speed conversion circuit.
の基本台形図形に分解するデータ変換装置と、上記基本
台形図形を矩形またはドットに分解する図形分解回路を
備えた荷電粒子描画装置の図形分解装置において、上記
入力図形データを底角が任意角の台形図形に分解するデ
ータ変換手段と、上記底角が任意角の台形図形を上記底
角が４５°の整数倍の基本台形図形に分解する任意角処
理プロセッサとを備えたことを特徴とする荷電粒子描画
装置の図形分解装置。2. A charged particle drawing device comprising a data conversion device for decomposing input graphic data into a basic trapezoidal graphic having a base angle of an integer multiple of 45 °, and a graphic decomposition circuit for decomposing the basic trapezoidal graphic into rectangles or dots. In the figure decomposing device, data conversion means for decomposing the input figure data into a trapezoidal figure having a base angle of an arbitrary angle, and a trapezoidal figure having a base angle of an arbitrary angle, and a basic trapezoidal figure having a base angle of an integral multiple of 45 °. A figure decomposition apparatus for a charged particle drawing apparatus, comprising:
は上記入力図形データを底角が任意角の台形図形デ−タ
に分解する手段と上記底角の値をパラメ−タとして出力
する手段とを備え、上記任意角処理プロセッサは上記パ
ラメ−タにより上記底角が任意角の台形図形を上記底角
が４５°の整数倍の基本台形図形に分解する手段を備え
たことを特徴とする荷電粒子描画装置の図形分解装置。3. The data conversion means according to claim 2, wherein said input graphic data is decomposed into trapezoidal graphic data having a base angle of an arbitrary angle, and said base angle value is output as a parameter. The arbitrary-angle processor includes means for decomposing the trapezoidal figure having an arbitrary base angle into the basic trapezoidal figure having an integer multiple of 45 ° by the parameters. Figure decomposing device for particle drawing device.
処理プロセッサを高速のＲＩＳＣ型プロセッサ、デジタ
ルシグナルプロセッサ等により構成するようにしたこと
を特徴とする荷電粒子描画装置の図形分解装置。4. The graphic decomposing device for a charged particle drawing apparatus according to claim 2, wherein the arbitrary angle processing processor is constituted by a high-speed RISC type processor, a digital signal processor or the like.
上記データ変換手段を上記図形分解回路側に一体に構成
するようにしたことを特徴とする荷電粒子描画装置の図
形分解装置。5. The method according to any one of claims 1 to 4,
A figure decomposing device for a charged particle drawing apparatus, wherein the data converting means is integrally formed on the figure decomposing circuit side.
上記図形分解回路の前段に上記データ変換装置が出力す
る底角が４５°の整数倍の基本台形図形デ−タと上記任
意角処理プロセッサが出力する４５°の整数倍の基本台
形図形デ−タとを切り替える手段を備えたことを特徴と
する荷電粒子描画装置の図形分解装置。6. The method according to any one of claims 2 to 4,
Basic trapezoidal graphic data whose base angle is an integral multiple of 45 ° and basic trapezoidal graphic data of an integral multiple of 45 ° output from the data converter and an arbitrary multiple of 45 ° are output in front of the graphic decomposition circuit. A figure decomposing apparatus for a charged particle drawing apparatus, characterized by comprising means for switching between and.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4065512A JP2823418B2 (en) | 1992-03-24 | 1992-03-24 | Figure decomposition equipment for charged particle drawing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4065512A JP2823418B2 (en) | 1992-03-24 | 1992-03-24 | Figure decomposition equipment for charged particle drawing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05267132A true JPH05267132A (en) | 1993-10-15 |
| JP2823418B2 JP2823418B2 (en) | 1998-11-11 |
Family
ID=13289179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4065512A Expired - Fee Related JP2823418B2 (en) | 1992-03-24 | 1992-03-24 | Figure decomposition equipment for charged particle drawing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2823418B2 (en) |
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