JPH05265196A - Flexible mask - Google Patents

Abstract

PURPOSE:To lessen the metal fatigue of metallic patterns and the peeling from a film even if the flexible mask is repetitively used. CONSTITUTION:A protective film 13 consisting of a transparent or translucent high-polymer resin is provided on the transparent film 11 constituted by forming the metallic patterns 12 consisting of desired metallic films on the transparent film 11 having flexibility. The metallic patterns are by the protective film 13 against the metal fatigue and peeling by the vigorous bending with a substrate and further, the breakdown of the metallic patterns is prevented and a long life is obtd. even if the flexible mask 10 is repetitively used.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexible mask used when photolithographically etching an element having a curved surface such as a thermal head for thermal recording.

[0002]

2. Description of the Related Art Conventionally, a flexible mask is used as an exposure mask when forming a conductor pattern or the like on a curved insulating substrate by a photolithographic etching technique. FIG. 3 shows a conventional flexible mask in which a desired metal pattern 2 made of a metal film is formed on a flexible transparent film 1 made of, for example, polyethylene terephthalate (PET). In order to form a conductor pattern such as an electric wiring pattern using such a conventional flexible mask, first, a metal layer such as an electrode is vapor-deposited or sputtered on at least two surfaces of an insulating substrate (not shown), or the thickness is increased. After forming by the film forming method, a resist is applied on the metal layer. Then, the flexible mask on which a predetermined metal pattern 2 composed of a dark portion and a transparent portion is formed is brought into close contact with the resist film on the insulating substrate and exposed through the mask. At this time, attach the flexible mask to at least two of the insulating substrates.
The corners of the insulating substrate are bent and brought into close contact with each other in order to bring them into close contact with each other. After that, a predetermined conductor pattern is formed on the insulating substrate by performing a developing process, an etching process, and a resist stripping process.

[0003]

When the flexible mask is brought into close contact with the resist film on the insulating substrate and exposed, when the radius of curvature of the corner of the insulating substrate is 5 mm or less, the flexible mask is bent sharply. , In contact with the resist film in a bent state. As a result, metal fatigue of the metal pattern 2 formed on the flexible mask may occur, or peeling may occur from the transparent film 1. further,
If it is used several times in this state, there is a problem that the metal pattern 2 is destroyed and the function as a mask is lost.

The present invention has been made in order to solve such a problem, and provides a flexible mask which can reduce metal fatigue of a metal pattern and peeling from a film even if the flexible mask is repeatedly used. The purpose is to provide.

[0005]

The present invention provides a flexible mask in which a metal pattern made of a desired metal film is formed on a transparent film having flexibility, and the transparent film on which the metal pattern is formed. It is characterized in that a protective film made of a transparent or semi-transparent polymer resin is provided.

[0006]

When a protective film made of a transparent polymer resin is provided on the transparent film on which the metal pattern is formed, this protective film protects the metal pattern from metal fatigue and peeling due to severe bending with the insulating substrate. Therefore, even if the flexible mask is repeatedly used several times, the metal pattern is prevented from being broken and the life is greatly improved.

[0007]

Embodiments of the flexible mask according to the present invention will be described below with reference to the drawings. In FIG. 1, a flexible transparent film 11 made of polyethylene terephthalate (PET) is used as an example of the flexible mask 10, and a desired metal pattern 12 made of a metal film such as chromium is formed on the film 11.
Are formed. Further, on the transparent film 11 on which the metal pattern 12 is formed, a protective film 13 made of a transparent or semitransparent polymer resin having flexibility such as styrene and chlorinated polystyrene is provided.

A flexible mask 1 having such a structure
0 is manufactured as follows. First, a metal film is formed by depositing chromium (Cr) on the transparent transparent film 11 made of polyethylene terephthalate (PET) to have a thickness of, for example, 1500 angstrom using a vapor deposition or sputtering device. Next, a resist film is applied on the metal film, and a mask such as a glass photomask serving as an original plate is aligned and closely attached to the resist film surface for exposure, and further development is performed. As a result, the same resist pattern as the original plate is formed on the metal film. After that, the metal film having the resist pattern formed thereon is subjected to an etching treatment, and the resist film is peeled off to form the metal film pattern 1 on the transparent film 11.
2 is formed. Thereafter, as shown in FIG. 1, a protective film 13 made of a transparent polymer resin thicker than the metal film pattern 12 so as to completely cover the metal film pattern 12.
The flexible mask 10 is completed by providing.

Examples of the transparent film 11 having flexibility include polyethylene terephthalate (PET),
Polyethylene naphthalate (PEN), polycarbonate (PC), polyether ketone (PEK), polyether ether ketone (PEEK), polyphenylene oxide (PPO), etc. can be used. Further, as the metal film, in addition to chromium (Cr), a metal such as a chromium alloy, gold (Au), copper (Cu), aluminum (Al) titanium (Ti), molybdenum (Mo) tungsten (W), etc. Material is available. Further, as the protective film 13, polyethylene, polyester-based resin, polyacetal, polyarylate, cyclized isoprene rubber-based photosensitive resin, and polymer resin such as phenol resin can be used in addition to the above.

By using the flexible mask 10 constructed as described above, it is possible to form a conductor pattern such as an electric wiring pattern on the two surfaces of the plate-like substrate 21 of an element such as the thermal head 20. The plate-like substrate 21 is made of, for example, alumina ceramic, and the glass glaze layer 2 is formed on at least two surfaces of the plate-like substrate 21.
Two are provided. A metal film 23 of gold (Au) or the like is formed on the glaze layer 22 by vapor deposition or sputtering, or by printing and firing a thick film paste. Further, a resist film 24 is formed on the metal film 23 by coating, and then the above-mentioned flexible mask 10 on which the metal pattern 12 composed of a dark portion and a transparent portion is formed is brought into close contact with the resist film 24, and the mask is interposed. To expose.

At this time, the metal pattern 12 side of the flexible mask 10 is brought into close contact with at least two surfaces of the plate-like substrate 21, and is bent so as to be along the corners of the plate-like substrate 21 and brought into close contact therewith. As described above, when the two surfaces and the corners of the plate-shaped substrate 21 are aligned, the protective film 13 on the metal pattern 12 is adhered to the resist film 24, and the metal pattern 12 is formed.
Are protected by the protective film 13. Even if the radius of curvature R of the corner portion provided with the resist film 24 is about 5 mm or less, the flexible mask 10 is bent and adheres so as to fit the corner portion. Then, a predetermined conductor pattern is formed on the plate-shaped substrate by performing an etching process and a resist stripping process after the exposure process.

The present invention is not limited to the above-mentioned embodiments, and the protective film may be any transparent or semi-transparent polymer resin, and can be appropriately selected from general-purpose resins. Further, the transparent film and the metal film can be variously modified without departing from the scope of the present invention.

[0013]

As is apparent from the above description, according to the flexible mask of the present invention, since the protective film made of the transparent polymer resin is provided on the transparent film on which the metal pattern is formed, The protective film can protect the metal pattern from metal fatigue and peeling due to severe bending with the substrate. Therefore, even if the flexible mask is repeatedly used several times, it is possible to prevent the metal pattern from being broken, and there is an advantage that the life can be extended.

[0014]

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing an embodiment of a flexible mask according to the present invention.

FIG. 2 is a sectional view of an essential part showing a usage state of the above flexible mask.

FIG. 3 is a cross-sectional view showing a conventional flexible mask.

[Explanation of symbols]

 10 flexible mask 11 transparent film 12 metal pattern 13 protective film

Claims (1)

[Claims] 1. A flexible mask in which a metal pattern made of a desired metal film is formed on a flexible transparent film, and a transparent or semitransparent polymer resin is formed on the transparent film on which the metal pattern is formed. A flexible mask having a protective film made of.