JPH05259322A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH05259322A
JPH05259322A JP4051185A JP5118592A JPH05259322A JP H05259322 A JPH05259322 A JP H05259322A JP 4051185 A JP4051185 A JP 4051185A JP 5118592 A JP5118592 A JP 5118592A JP H05259322 A JPH05259322 A JP H05259322A
Authority
JP
Japan
Prior art keywords
semiconductor device
metal plate
temperature
package
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4051185A
Other languages
Japanese (ja)
Inventor
進 ▲高▼橋
Susumu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamagata Ltd
Original Assignee
NEC Yamagata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamagata Ltd filed Critical NEC Yamagata Ltd
Priority to JP4051185A priority Critical patent/JPH05259322A/en
Publication of JPH05259322A publication Critical patent/JPH05259322A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To increase the degree of freedom of a design based on temperature characteristics while eliminating the need for a thermostatic chamber even when the range of a working temperature is limited. CONSTITUTION:A first metal plate 2 and a second metal plate 3 joined so as to have a Peltier effect are fixed onto a package 1 with terminals 8A-8F, and a semiconductor chip 4 is loaded onto the second metal plate 3. Currents are made to flow through a metal joining section 9 by using electrodes 6, 7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半導体装置に関し、特に
温度制御を必要とする半導体装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to a semiconductor device requiring temperature control.

【0002】[0002]

【従来の技術】従来の半導体装置は、抵抗の温度特性
(数100ppm〜数1000ppm)やトランジスタ
のVBFの温度特性(2mV/℃)あるいは増幅率hFE
温度特性などの条件を考慮して設計されている。また、
半導体装置の使用温度範囲が狭い範囲に制限されている
場合は、恒温槽に半導体装置を入れて温度コントロール
している。
2. Description of the Related Art In a conventional semiconductor device, a temperature characteristic of resistance (several hundred ppm to several thousand ppm), a temperature characteristic of V BF of a transistor (2 mV / ° C.), a temperature characteristic of an amplification factor h FE , etc. are considered. Is designed. Also,
When the operating temperature range of the semiconductor device is limited to a narrow range, the temperature is controlled by putting the semiconductor device in a constant temperature bath.

【0003】図2はかかる従来の一例を示す恒温槽を用
いた半導体装置の斜視図である。図2に示すように、従
来の半導体装置12は使用温度範囲を狭く指定されてい
るとき、恒温槽10に入れて使用する。この半導体装置
12はコンデンサ13や抵抗14と共に基板11上に搭
載され、恒温槽10内で温度コントロールされる。
FIG. 2 is a perspective view of a semiconductor device using a constant temperature oven showing such a conventional example. As shown in FIG. 2, the conventional semiconductor device 12 is used by being put in the constant temperature bath 10 when the operating temperature range is specified to be narrow. The semiconductor device 12 is mounted on the substrate 11 together with the capacitor 13 and the resistor 14, and the temperature is controlled in the constant temperature bath 10.

【0004】[0004]

【発明が解決しようとする課題】上述した従来の半導体
装置は、各種の温度特性を考慮した設計をしなければな
らないので、設計の自由度が制限されるという欠点があ
る。
The conventional semiconductor device described above has a drawback that the degree of freedom in design is limited because it must be designed in consideration of various temperature characteristics.

【0005】また、従来の半導体装置はその使用温度範
囲を狭い範囲に制限されているとき、恒温槽に入れて温
度コントロールをしなければならない。そのため、実装
上の形状が大きくなるという欠点がある。
Further, when the temperature range of the conventional semiconductor device is limited to a narrow range, the semiconductor device must be placed in a constant temperature bath for temperature control. Therefore, there is a drawback that the mounting shape becomes large.

【0006】本発明の目的は、かかる設計の自由度を増
すとともに、使用温度範囲が制限されたときにも恒温槽
を不要にする半導体装置を提供することにある。
An object of the present invention is to provide a semiconductor device that increases the degree of freedom in design and eliminates the need for a constant temperature bath even when the operating temperature range is limited.

【0007】[0007]

【課題を解決するための手段】本発明の半導体装置は、
複数の端子を備えたパッケージと、前記パッケージ内に
搭載し且つペルチェ効果を持つように接合した第1およ
び第2の金属板と、前記第2の金属板上に搭載する温度
センサ内蔵の半導体チップとを有して構成される。
The semiconductor device of the present invention comprises:
A package having a plurality of terminals, first and second metal plates mounted in the package and joined so as to have a Peltier effect, and a semiconductor chip containing a temperature sensor mounted on the second metal plate. And is configured.

【0008】[0008]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。図1(a),(b)はそれぞれ本発明の一
実施例を示す半導体装置の平面図およびその断面図であ
る。図1(a),(b)に示すように、本実施例は箱形
のパッケージ1に第1の金属板2と第2の金属板3とを
固定し、その第2の金属板3の上に半導体チップ4を搭
載する。この半導体チップ4は温度センサを内蔵してい
る。しかも、半導体チップ4はボンディングワイヤ5に
より、パッケージ1の端子8A〜8Fに結合された電極
6,7と接続される。かかる半導体装置において、半導
体チップ4に内蔵した温度センサにより、電極6と電極
7を用い金属接合部9に電流を流すと、ペルチェ効果を
利用した温度コントロールを実現できる。従って、半導
体装置の動作温度を可変に出来、更にある一定温度の設
定制御が可能になる。
Embodiments of the present invention will now be described with reference to the drawings. 1A and 1B are a plan view and a sectional view of a semiconductor device showing an embodiment of the present invention, respectively. As shown in FIGS. 1A and 1B, in this embodiment, the first metal plate 2 and the second metal plate 3 are fixed to the box-shaped package 1, and the second metal plate 3 is fixed. The semiconductor chip 4 is mounted on top. The semiconductor chip 4 has a built-in temperature sensor. Moreover, the semiconductor chip 4 is connected by the bonding wires 5 to the electrodes 6 and 7 coupled to the terminals 8A to 8F of the package 1. In such a semiconductor device, when a temperature sensor built in the semiconductor chip 4 causes a current to flow through the metal bonding portion 9 using the electrodes 6 and 7, temperature control using the Peltier effect can be realized. Therefore, the operating temperature of the semiconductor device can be made variable, and the setting control of a certain constant temperature becomes possible.

【0009】[0009]

【発明の効果】以上説明したように、本発明の半導体装
置は、ペルチェ効果を持つように二種類の金属板を接合
し、その接合した金属板上に温度センサ内蔵の半導体チ
ップを設置して温度コントロールをするので、設計の自
由度を増すとともに、恒温槽を不要にできるという効果
がある。
As described above, in the semiconductor device of the present invention, two kinds of metal plates are joined so as to have a Peltier effect, and a semiconductor chip with a built-in temperature sensor is installed on the joined metal plates. Since the temperature is controlled, the degree of freedom in design is increased and the constant temperature bath can be eliminated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す半導体装置の平面およ
び断面を表わす図である。
FIG. 1 is a diagram showing a plane and a cross section of a semiconductor device according to an embodiment of the present invention.

【図2】従来の一例を示す恒温槽を用いた半導体装置の
斜視図である。
FIG. 2 is a perspective view of a semiconductor device using a constant temperature bath showing a conventional example.

【符号の説明】[Explanation of symbols]

1 パッケージ 2 第1の金属板 3 第2の金属板 4 半導体チップ 5 ボンディングワイヤ 6,7 電極 8,8A〜8F 端子 9 金属接合部 1 Package 2 1st metal plate 3 2nd metal plate 4 Semiconductor chip 5 Bonding wire 6,7 Electrode 8,8A-8F terminal 9 Metal junction part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 複数の端子を備えたパッケージと、前記
パッケージ内に搭載し且つペルチェ効果を持つように接
合した第1および第2の金属板と、前記第2の金属板上
に搭載する温度センサ内蔵の半導体チップとを有するこ
とを特徴とする半導体装置。
1. A package provided with a plurality of terminals, first and second metal plates mounted in the package and joined so as to have a Peltier effect, and a temperature for mounting on the second metal plate. A semiconductor device having a semiconductor chip with a built-in sensor.
JP4051185A 1992-03-10 1992-03-10 Semiconductor device Withdrawn JPH05259322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4051185A JPH05259322A (en) 1992-03-10 1992-03-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051185A JPH05259322A (en) 1992-03-10 1992-03-10 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH05259322A true JPH05259322A (en) 1993-10-08

Family

ID=12879803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051185A Withdrawn JPH05259322A (en) 1992-03-10 1992-03-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH05259322A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002270A (en) * 1998-06-18 2000-01-15 김영환 Temperature controller using peltier effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002270A (en) * 1998-06-18 2000-01-15 김영환 Temperature controller using peltier effect

Similar Documents

Publication Publication Date Title
US4819042A (en) Isolated package for multiple semiconductor power components
JP2697700B2 (en) Temperature control type semiconductor laser device and temperature control method therefor
US4314270A (en) Hybrid thick film integrated circuit heat dissipating and grounding assembly
JP3344552B2 (en) Pressure welding type semiconductor device
JPS62161600U (en)
US4032964A (en) Multiple hybrid semiconductor structure
JPH05259322A (en) Semiconductor device
JPH0687505B2 (en) Field effect transistor for high power
GB1175122A (en) Improvements in and relating to Semiconductor Devices
JP3203377B2 (en) Hybrid integrated circuit device
JP2693688B2 (en) Multi-input / low-loss voltage regulator
JPS6022821B2 (en) semiconductor equipment
JPH01216608A (en) Package for semiconductor device
JPH05326832A (en) Dc voltage stabilizing element
JPH05283582A (en) Positive and negative stabilized power supply
JPH06338734A (en) Power transistor temperature protective circuit device
JPH06291251A (en) Power semiconductor module
JPS61172376A (en) Semiconductor device
JPH04137739A (en) Hybrid integrated circuit
JPH05136162A (en) High output power semiconductor device
JP2819742B2 (en) Hybrid integrated circuit device
JPS5837551U (en) ceramic gas sensor
JP2002280482A (en) Semiconductor device for microwave
JPS63111659A (en) Semiconductor device
JPH02112242A (en) Semiconductor device

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990518