JPH05256785A - Observing apparatus of ic using microminiature proximity imaging device - Google Patents

Observing apparatus of ic using microminiature proximity imaging device

Info

Publication number
JPH05256785A
JPH05256785A JP4055446A JP5544692A JPH05256785A JP H05256785 A JPH05256785 A JP H05256785A JP 4055446 A JP4055446 A JP 4055446A JP 5544692 A JP5544692 A JP 5544692A JP H05256785 A JPH05256785 A JP H05256785A
Authority
JP
Japan
Prior art keywords
reflecting mirror
ring
imaging device
optical path
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4055446A
Other languages
Japanese (ja)
Other versions
JP3113375B2 (en
Inventor
Michio Jodai
道夫 上代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HAIROTSUKUSU KK
Original Assignee
HAIROTSUKUSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HAIROTSUKUSU KK filed Critical HAIROTSUKUSU KK
Priority to JP04055446A priority Critical patent/JP3113375B2/en
Publication of JPH05256785A publication Critical patent/JPH05256785A/en
Application granted granted Critical
Publication of JP3113375B2 publication Critical patent/JP3113375B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To execute inspection of soldering of IC efficiently by monitoring a soldered part of the IC by rotating an opticalaxis reflecting mirror, a periphery reflecting mirror and a ring lens for correction of an illuminating optical path by a rotary ring. CONSTITUTION:A ring lens 8 for correction of an illuminating optical path which corresponds to a ring lens for illumination on the imaging device 1 side and a periphery reflecting mirror 9 which reflects a soldered part of IC obliquely from above and projects an image thereof onto an optical-axis reflecting mirror 7 are fixed around the optical-axis reflecting mirror 7. The imaging device 1 to which an observing device is fitted is disposed immediately above the IC 10 and a rotary ring 4 is rotated by finger tips in the direction of an arrow (a), for instance. Then the periphery reflecting mirror 9 and the optical-axis reflecting mirror 7 rotate around the IC 10, the soldered part 11 is illuminated by an illuminating light corrected by the ring mirror 8 for correction of the illuminating optical path and a reflected image thereof is formed in the imaging device 1. By observing this formed image by a monitor, an observer inspects the quality of soldering.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、IC(集積回路)にお
ける端子のはんだ付け状態を観察(検査)するための装
置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for observing (inspecting) the soldering state of terminals in an IC (integrated circuit).

【0002】[0002]

【従来の技術】ICの場合、基板の周囲には回路接続用
の端子がはんだ付けにより多数取り付けられている。従
来、このはんだ付けは超小型近接撮影装置を用いてはん
だ付け部分を拡大し、この拡大した像をモニター上に写
し出して観察している。
2. Description of the Related Art In the case of an IC, a large number of terminals for circuit connection are attached around the substrate by soldering. Conventionally, this soldering is performed by enlarging the soldering portion using an ultra-small close-up imaging device and displaying the enlarged image on a monitor for observation.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記超小型近
接撮影装置を用いて観察する場合、はんだ付け部分はI
Cの周囲に存在することから、超小型近接撮影装置を片
手に持ち、もう一方の手でICを摘んでこれを回転させ
ないとIC全体のはんだ付け部分を観察できないという
不便がある。このため、チップ1ケの観察に多くの時間
が必要である。
However, when observing with the above-mentioned ultra-small close-up photography device, the soldered portion is I
Since it exists around C, it is inconvenient that the soldering portion of the entire IC cannot be observed unless the user holds the microminiature close-up imaging device in one hand, picks the IC with the other hand, and rotates the IC. Therefore, it takes a lot of time to observe one chip.

【0004】本発明の目的は、超小型近接撮影装置を用
いて能率的にICはんだ付け部分の観察を行うことが出
来るようにすることである。
An object of the present invention is to make it possible to efficiently observe an IC soldered portion using a microminiature close-up photographing device.

【0005】[0005]

【課題を解決するための手段】本発明に係るICはんだ
付け部分の観察装置は次のとおりである。
The apparatus for observing an IC soldered portion according to the present invention is as follows.

【0006】超小型近接撮影装置に対して回転自在に取
り付けられた回転リングと、この回転リングと一緒に回
転し、且つ光軸に置かれた光軸反射ミラーと、この光軸
反射ミラーに対してICを斜め上方から反射して、この
反射像を前記光軸反射ミラーに向けて投写することがで
き、前記回転リングにより光軸反射ミラーと一緒にIC
の周囲を回転する周回反射ミラーと、超小型近接撮影装
置側の照明用リングレンズの前面に位置し、照明用光路
を補正する照明光路補正用リングレンズと、から成る超
小型近接撮影装置におけるIC観察装置。
A rotating ring rotatably attached to the microminiature close-up photographing device, an optical axis reflecting mirror which is rotated together with the rotating ring and is placed on the optical axis, and the optical axis reflecting mirror. The IC can be reflected obliquely from above, and the reflected image can be projected toward the optical axis reflecting mirror. The rotating ring allows the IC to be projected together with the optical axis reflecting mirror.
An IC for a microminiature close-up image pickup device, which includes an orbiting reflection mirror that rotates around the Observation device.

【0007】[0007]

【作用】ICを水平に置き、この上部中央に超小型近接
撮影装置を配置すると、ICの周囲のはんだ付け部分に
光源から光ファイバーを経由して送られてきた照明光は
リングレンズから照明光路補正用リングレンズを介して
はんだ付け部分に照射される。この照明によって明るく
なったはんだ付け部分の像は周回反射ミラーから光軸反
射ミラーを経由して超小型近接撮影装置内に入り、拡大
されてCCDに結像し、この像がテレビカメラを介して
モニターに写し出される。観察者は、このモニターによ
りはんだ付けの状態を観察する。そして、回転リングを
回転させると、一緒に周回反射ミラー及び中心ミラー及
び照明光路補正用リングミラーが回転し、ICを一周す
る間に順次はんだ付け部分をモニターに写し出す。この
結果、ICはそのまま固定し、回転リングを指先で1回
転させるだけで、IC全体のはんだ付け部分を迅速に観
察することができる。
When the IC is placed horizontally and the microminiature close-up device is placed in the center of the upper part of the IC, the illumination light sent from the light source to the soldering portion around the IC via the optical fiber is corrected from the ring lens. The soldered part is irradiated through the ring lens for use. The image of the soldered part brightened by this illumination enters the microminiature close-up imaging device from the orbiting reflection mirror via the optical axis reflection mirror, is enlarged and forms an image on the CCD, and this image is transmitted via the TV camera. It is displayed on the monitor. The observer observes the state of soldering on this monitor. Then, when the rotating ring is rotated, the orbiting reflection mirror, the center mirror, and the illumination optical path correcting ring mirror are rotated together, and the soldered portion is sequentially displayed on the monitor while the IC makes one round. As a result, it is possible to quickly observe the soldered portion of the entire IC simply by fixing the IC as it is and rotating the rotating ring once with a fingertip.

【0008】[0008]

【実施例】図1に本発明の実施例を示す。1は超小型近
接撮影装置(以下「撮影装置」という)、2は撮影装置
1に対する固定リングにして、ビス3により固定されて
いる。4は固定リング2の外側において、この固定リン
グ2に対して回転自在に取り付けられた回転リング、5
は回転ハンドリング、6は回転リング4と一緒に回転す
る反射ミラー保持リングにして、この保持リング6の中
心には光軸上に位置するように光軸反射ミラー7が取り
付けられていると共にこの光軸反射ミラー7の周囲には
撮影装置1側の照明用リングレンズ(図示せず)に対応
する照明光路補正用リングレンズ8及びICのはんだ付
け部分を斜め上方から写し出し、この像を光軸反射ミラ
ー7に投写する周回反射ミラー9が固定されている。な
お、照明光路補正用リングレンズ8は回転させなくても
よい。
EXAMPLE FIG. 1 shows an example of the present invention. Reference numeral 1 denotes an ultra-small close-up imaging device (hereinafter referred to as “imaging device”), and 2 denotes a fixing ring for the imaging device 1, which is fixed by a screw 3. Reference numeral 4 denotes a rotary ring which is rotatably attached to the fixed ring 2 on the outer side of the fixed ring 2.
Is a rotating handling, 6 is a reflecting mirror holding ring which rotates together with the rotating ring 4, and an optical axis reflecting mirror 7 is attached to the center of the holding ring 6 so as to be located on the optical axis and Around the axis reflection mirror 7, the illumination optical path correction ring lens 8 corresponding to the illumination ring lens (not shown) on the photographing device 1 side and the soldered portion of the IC are projected obliquely from above, and this image is reflected by the optical axis. The orbiting reflection mirror 9 for projecting on the mirror 7 is fixed. The illumination optical path correcting ring lens 8 may not be rotated.

【0009】図2は上記観察装置を用いて行う観察例の
説明図にして、10はIC、11ははんだ付け部分にし
て、本発明観察装置を取り付けた撮影装置1をIC10
の直上に配置し、指先で回転リング4を例えば矢印a方
向に回転すると、周回反射ミラー9及び光軸反射ミラー
7がIC10の周りを回転し、照明光路補正用リングミ
ラー8で補正された照明光によりはんだ付け部分11を
反射してこの反射像を撮影装置1内に結像させる。観察
者は、この結像をモニターで観察することにより、はん
だ付けの良及び不良を検査する。
FIG. 2 is an explanatory view of an observation example performed by using the above-described observation apparatus, 10 is an IC, 11 is a soldering portion, and the photographing apparatus 1 to which the observation apparatus of the present invention is attached is IC10.
When the rotary ring 4 is arranged immediately above the optical disk, and the rotary ring 4 is rotated with the fingertip in the direction of arrow a, the orbiting reflection mirror 9 and the optical axis reflection mirror 7 rotate around the IC 10, and the illumination corrected by the illumination optical path correction ring mirror 8 The soldered portion 11 is reflected by the light, and this reflected image is formed in the photographing device 1. The observer inspects this image formation on the monitor to inspect whether the soldering is good or bad.

【0010】[0010]

【発明の効果】本発明は以上のように、ICを水平に置
き、この上で回転リングにより反射ミラーを回転させる
だけでIC全体のはんだ付け状態を観察することができ
るので、はんだ付けの検査作業を能率的に行うことがで
きる。
As described above, according to the present invention, the soldering state of the entire IC can be observed only by placing the IC horizontally and rotating the reflection mirror on the IC by the rotating ring. Work can be done efficiently.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る観察装置の断面図。FIG. 1 is a sectional view of an observation device according to the present invention.

【図2】IC観察作業の説明図。FIG. 2 is an explanatory view of IC observation work.

【符号の説明】[Explanation of symbols]

1 超小型近接撮影装置 2 固定リング 3 ビス 4 回転リング 5 回転ハンドリング 6 反射ミラー保持リング 7 光軸反射ミラー 8 照明光路補正用リングレンズ 9 周回反射ミラー 10 IC 11 はんだ付け部分 1 Ultra-compact close-up imaging device 2 Fixed ring 3 Screw 4 Rotation ring 5 Rotation handling 6 Reflection mirror holding ring 7 Optical axis reflection mirror 8 Illumination optical path correction ring lens 9 Circular reflection mirror 10 IC 11 Soldering part

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 // H01L 23/50 N 9272−4M ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location // H01L 23/50 N 9272-4M

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 超小型近接撮影装置に対して回転自在に
取り付けられた回転リングと、この回転リングと一緒に
回転し、且つ光軸に置かれた光軸反射ミラーと、この光
軸反射ミラーに対してICを斜め上方から反射して、こ
の反射像を前記光軸反射ミラーに向けて投写することが
でき、前記回転リングにより光軸反射ミラーと一緒にI
Cの周囲を回転する周回反射ミラーと、超小型近接撮影
装置側の照明用リングレンズの前面に位置し、照明用光
路を補正する照明光路補正用リングレンズと、から成る
超小型近接撮影装置におけるIC観察装置。
1. A rotating ring rotatably attached to an ultra-small close-up image pickup device, an optical axis reflecting mirror that rotates together with the rotating ring and is placed on an optical axis, and the optical axis reflecting mirror. With respect to the IC, the IC can be reflected obliquely from above and the reflected image can be projected toward the optical axis reflecting mirror.
In a microminiature close-up photography device, which comprises an orbiting reflection mirror that rotates around C and an illumination optical path correction ring lens that is located in front of the illumination ring lens on the side of the microminiature close-up photography device and corrects the illumination optical path. IC observation device.
JP04055446A 1992-03-13 1992-03-13 IC observation device using ultra-small close-up imaging device Expired - Lifetime JP3113375B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04055446A JP3113375B2 (en) 1992-03-13 1992-03-13 IC observation device using ultra-small close-up imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04055446A JP3113375B2 (en) 1992-03-13 1992-03-13 IC observation device using ultra-small close-up imaging device

Publications (2)

Publication Number Publication Date
JPH05256785A true JPH05256785A (en) 1993-10-05
JP3113375B2 JP3113375B2 (en) 2000-11-27

Family

ID=12998828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04055446A Expired - Lifetime JP3113375B2 (en) 1992-03-13 1992-03-13 IC observation device using ultra-small close-up imaging device

Country Status (1)

Country Link
JP (1) JP3113375B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009109276A (en) * 2007-10-29 2009-05-21 Canon Machinery Inc Inspection apparatus and inspection method
JP2011017977A (en) * 2009-07-10 2011-01-27 Hairokkusu:Kk Adapter for micro proximity photographic device
WO2013162079A1 (en) * 2012-04-27 2013-10-31 株式会社ハイロックス Device for three-dimensional observation of circumferential surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009109276A (en) * 2007-10-29 2009-05-21 Canon Machinery Inc Inspection apparatus and inspection method
JP2011017977A (en) * 2009-07-10 2011-01-27 Hairokkusu:Kk Adapter for micro proximity photographic device
WO2013162079A1 (en) * 2012-04-27 2013-10-31 株式会社ハイロックス Device for three-dimensional observation of circumferential surface

Also Published As

Publication number Publication date
JP3113375B2 (en) 2000-11-27

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