JPH05251533A - Ic handler - Google Patents

Abstract

PURPOSE:To conduct the IC checkout continuously, to make a long time unmanned operation available, and to increase the efficiency of the IC checkout. CONSTITUTION:In an IC handier which has the main body 11 on which an untested product tray section 1, a loader robbot 2 for untested IC's, a test socket section 3, a carry-in device 4 for untested IC's, a carry-out device 5 for tested IC's, an unloader robbot 6 for tested IC's, a good-product storing tray section 7 and a defective-product storing tray section 8 are located, at least an auto loader 12 is provided which supplies a tray for untested products 15 which stores untested ICs to the untested product tray section 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC handler,
In particular, the present invention relates to an IC handler suitable for continuously performing IC inspection and performing unmanned operation for a long time.

[0002]

2. Description of the Related Art As a conventional technique of this type of IC handler, there is a technique shown in FIG.

In the prior art shown in FIG. 12, the untested tray unit 1 and the loader robot 2 are provided on the handler body 11.
And a test socket unit 3 and an uninspected IC carry-in device 4
And a unloading robot 5 for the inspection completion IC, an unloader robot 6, a good product storage tray unit 7, and a defective product storage tray unit 8.
The tray transport device 9 and the empty tray buffer section 10 are arranged.

An operator supplies an untested product tray 15 containing an untested product IC to the untested product tray unit 1 and sets it. The loader robot 2 has an uninspected product tray unit 1
The tray 15 for uninspected products set in
Pick-up C and loading device 4 for test socket 3
And return to the initial position. The carry-in device 4 sets an untested IC in a socket (not shown) of the test socket unit 3 and returns to the initial position. In the test socket unit 3, an untested IC set in the socket is inspected by an IC tester to determine a good product and a defective product. The carry-out device 5 approaches the test socket unit 3 and I
C, that is, the inspection completion IC is received from the socket and returns to the initial position. The unloader 6 receives the inspection completion IC from the unloading device 5, stores the good products in the good product tray 16 set in the good product storage tray unit 7, and stores the defective products in the defective product storage tray unit 8. Non-defective tray 1
After storing in 7, the product is classified into good products and defective products, and then returned to the initial position. When the non-defective product tray 16 and the defective product tray 17 are filled with the inspection completion IC, the operator takes them out from the non-defective product storage tray unit 7 and the defective product storage tray unit 8,
For example, it is transferred to a transport vehicle, collected, and transported to the next processing step. The tray transport device 9 receives the tray that has been emptied in the untested tray unit 1 and temporarily stores it in the empty tray buffer unit 10.

Further, when the trays set in the non-defective product storage tray section 7 and the defective product storage tray section 8 of the tray transporting device 9 are full, the non-defective product storage tray section 7 and the defective product storage tray section 8 are set. To supply an empty tray.

In this conventional technique, the above-described operation is repeated, and untested ICs are sequentially inspected to classify them into good products and defective products.

[0007]

By the way, in the above-mentioned conventional technique, all the inspection / selection operations of the uninspected ICs in the uninspected product tray 15 set in the uninspected product tray unit 1 are completed, and After the non-defective product and the defective product are collected, the next untested product tray 15 containing the untested IC is set and the inspection is restarted.

Therefore, the operator takes out the non-defective item tray 16 and the defective item tray 17 of the inspection IC at the end of the inspection / sorting operation of the uninspected item IC in the set non-inspected item tray 15 and inserts the uninspected item IC. It is necessary to set the next tray 15 for uninspected products. Therefore, if the operator is not near at the end of the inspection / sorting operation,
There was a problem that the IC inspection was in a dormant state until the operator arrived, and the efficiency did not increase.

An object of the present invention is to provide an IC handler capable of continuously performing IC inspection, allowing unmanned operation for a long time, and improving the efficiency of IC inspection.

[0010]

The above-mentioned object can be achieved by equipping an uninspected product tray portion arranged on a handler body with an autoloader for supplying an uninspected product tray containing an uninspected product IC.

The above-mentioned object is to equip an untested product tray section arranged on the handler body with an autoloader for supplying a tray for an untested product containing an untested product IC, and to provide a good product storage tray unit and a defective product storage tray unit. Is more satisfactorily achieved by being equipped with an automatic unloader that collects the tray for non-defective products and the tray for non-defective products in which the inspection completion ICs are stored.

Further, the above-mentioned purpose is that the set of the untested product tray unit, the non-defective product storage tray unit, and the defective product tray unit and the set of the autoloader and the automatic unloader mutually interact with each other in accordance with a tray transfer command from the control device only when the tray is transferred. It is possible to supply the untested product tray to the autoloader by external setup and to collect the non-defective product tray and the defective product tray from the auto unloader by external setup. This is achieved by the configuration described above.

Further, the above-mentioned object is to store a plurality of untested ICs, and after all the untested ICs in the untested product tray supplied to the untested product tray are inspected, follow a tray transfer command from the control device. This is achieved by the configuration in which a new untested product tray storing untested product ICs is supplied from the autoloader to the untested product tray unit.

The above-mentioned purpose is to store a plurality of untested ICs, and after all the untested ICs in the untested product tray supplied to the untested product tray have been inspected, follow a tray transfer command from the controller. The automatic loader is configured to supply a new tray for non-inspected products containing uninspected ICs to the non-inspected product tray portion, and the non-defective product tray and the non-defective product tray are connected to the auto unloader from the non-defective product trays. By configuring the trays for non-defective products to be sorted, transferred, and collected, it can be achieved more accurately.

[0015]

In the present invention, an autoloader is provided at a position corresponding to the untested product tray section, and the untested product tray containing the untested product IC is automatically supplied to the untested product tray section by this autoloader. Therefore, the IC inspection can be continuously performed, unmanned operation can be performed for a long time, and the efficiency can be improved.

Further, according to the present invention, an autoloader is provided at a position corresponding to the untested product tray part, and an auto unloader is provided for the good product storage tray part and the defective product storage tray part. An untested product tray containing an untested product IC is automatically supplied to the tray part, and the good product tray and the defective product tray filled from the good product storage tray part and the defective product storage tray part by the auto unloader are automatically supplied. Since they are collected, unmanned operation can be performed more accurately for a long time, and the efficiency of IC inspection can be improved.

Further, in the present invention, the set of the untested product tray part, the good product storage tray part, and the defective product tray part and the set of the auto loader and the auto unloader are related to each other only when the trays are transferred in accordance with the tray transfer command from the control device. It works, otherwise it works independently of each other. Then, the non-tested product tray is supplied to the autoloader by external setup, and the non-defective product tray and the defective product tray are collected from the auto unloader.
In this way, the autoloader and the auto unloader are operated in relation to each other by the external setup, so the setup time can be shortened.

Further, according to the present invention, after the inspection of all the uninspected ICs in the uninspected tray supplied to the uninspected tray section is completed, a new tray is newly added from the autoloader to the uninspected tray section in accordance with the tray transfer command from the controller. I am trying to supply an untested tray. As a result, the supply of the untested product tray from the autoloader to the untested product tray unit can be performed automatically and more reliably.

Further, according to the present invention, after the inspection of all the uninspected ICs in the uninspected product tray supplied to the uninspected product tray unit, after the completion of the inspection, a new transfer to the uninspected product tray unit from the autoloader is made in accordance with the tray transfer command from the controller. An inspection tray is supplied, and a good product tray and a defective product tray are sorted and transferred from the non-defective product storage tray unit and the defective product storage tray unit to the auto unloader and collected. Therefore, the supply of the untested product tray from the autoloader to the untested product tray unit and the collection of the good product tray and the defective product tray from the good product storage tray unit and the defective product storage tray unit to the auto unloader are automatically performed. It can be performed more reliably.

[0020]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 9 show an embodiment of the present invention. FIG. 1 is a plan view showing an outline of the whole, FIG. 2 to FIG. 4 are side views showing the structure and operation of an autoloader, and FIG. FIG. 7 is a side view showing the configuration and operation of the automatic unloader, and FIG.
Is an explanatory diagram showing an outline of the control software, and FIG. 9 is an explanatory diagram showing an internal logic of the control software.

In the embodiment shown in these figures, as shown in FIG.
A loader robot 2, a test socket unit 3, a loading device 4 for loading an untested IC into the test socket unit 3,
A carry-out device 5 for carrying out the inspection completed IC from the test socket part 3, an unloader robot 6, a non-defective product storage tray part 7, a defective product storage tray part 8, and a tray transfer device 9.
An empty tray buffer section 10 is arranged. Each of these parts, each robot, and each device is configured in the same manner as in the prior art shown in FIG.

Further, as shown in FIGS. 1 to 4, an autoloader 12 is installed at a position corresponding to the untested product tray section 1. Further, as shown in FIG. 1, an automatic unloader 13 is installed at a position corresponding to the good product storage tray section 7, and an automatic unloader 14 is installed at a position corresponding to the good product storage tray section 8. Then, the auto loader 12 and the auto unloader 1
The automatic guided vehicle 18 is arranged to travel to the positions corresponding to the rows 3 and 14. Further, a control device (not shown) for controlling the respective units, the robots, the devices, the auto loader 12 and the auto unloaders 13 and 14 is provided.

As shown in FIGS. 2, 3 and 4, the autoloader 12 has a fluid pressure cylinder 20 as a drive source.
And a piston rod 21 fitted therein, a tray pushing plate 22 attached to the piston rod 21,
It is provided with a tray pedestal 23 for the untested tray 15. The auto loader 12 has a tray cradle 23.
When the untested trays 15 are stacked on top of each other, the fluid pressure cylinder 20 is controlled to the approach side according to a command from the control device, and the piston rod 21 and the tray pushing plate 2
2 is operated to advance, and the untested product trays 15 stacked on the tray pedestal 23 are collectively pushed out to the untested product tray unit 1.

As shown in FIGS. 5, 6 and 7, the automatic unloaders 13 and 14 include a fluid pressure cylinder 24 as a drive source and a piston rod 25 fitted therein.
And a tray push plate 26 attached to the piston rod 25, and tray trays 27 for non-defective and defective trays 16 and 17. Thus, the tray 16 for non-defective products
When the non-defective product trays 16 are stacked in the non-defective product storage tray section 8, the automatic unloader 13 controls the fluid pressure cylinder 24 toward the approach side according to a command from the control device, and the piston rod 25 and the tray pushing plate 26 advance. The non-defective product trays 16 which are operated and stacked in the non-defective product storage tray section 8 are collectively pushed out onto the tray receiving base 27 and handed over. When the defective product trays 17 are stacked in the defective product storage tray section 9, the automatic unloader 14 for the defective product tray 17 controls the fluid pressure cylinder 24 to the approach side according to a command from the control device. Thus, the piston rod 25 and the tray pushing plate 26 are operated to advance, and the defective product trays 17 stacked in the defective product storage tray portion 9 are collectively pushed onto the tray receiving base 27 and delivered.

As shown in FIG. 1, the automatic carrier 18 stacks the trays 15 for untested products, and then places them along the guide rails 19 at positions corresponding to the rows of the autoloader 12 and the autounloaders 13, 14. The automatic tester 12 moves the trays 15 for untested products stacked at this position.
It is supposed to be handed over to. In addition, the automatic carrier 18 receives the trays 16 for non-defective products stacked from the automatic unloader 13 for non-defective products, and the trays 17 for stacked non-defective products from the automatic unloader 14 for non-defective products. It is designed to be transported to the next processing step.

The control device manages and controls each part according to pre-arranged control software. As shown in FIG. 8, the control software includes a lot management program 30, an operation program for each part on the handler body side, and an autoloader / autounloader operation program. The operation program of each part on the handler main body side is an untested tray operation program (displayed as “untested operation program” in FIG. 8) 31
, A loader robot operating program 32, a test socket unit loading device operating program 33, an unloading device operating program 34, an unloader robot operating program 35, and an empty tray buffer unit tray transporting device operating program (“8” in FIG. 8). (Collection tray operation program "is displayed) 36. The autoloader / autounloader operation program includes an autoloader operation program 37 and a non-defective autounloader operation program 3.
8 and automatic unloader operation program 39 for defective products
And have.

The control software manages and controls through the following steps. That is, as shown in FIG. 9, in step 40, the operation program of each part on the handler body side (1) requests the IC supply to the preceding process, and (2) accepts the report of the IC supply completion from the preceding process. , (3) Accept the request for IC supply from the subsequent process,
(4) After reporting the end of IC supply to the subsequent process, (5)
The lot management program 30 is notified of the completion of management in its own process. Next, in step 41, the lot management program 3
0 is the operation program 31 for all parts on the handler body side
After receiving the completion report from ~ 36, the auto loader operation program 37 and the auto unloader operation programs 38, 39 are requested to exchange lots. Next, at step 42, the autoloader 12 and the autounloaders 13 and 14 are operated by the autoloader operation program 37 and the autounloader operation programs 38 and 39,
The completion of lot exchange is reported to the lot management program 30. Then, in step 43, the lot management program 3
Management program 3 from 0 to all parts on the handler body side
Request operation start from 1 to 36. The above steps are repeated for a predetermined lot until the inspection is completed.

Next, the operation of the IC handler according to the above embodiment will be described.

First, the untested trays 15 are stacked on the automated guided vehicle 18 shown in FIG.
8 is an auto loader 12 and an auto unloader 13, 1
Send to the position corresponding to column 4. Tray 15 for untested products
A plurality of predetermined untested ICs are arranged in the. Further, the untested product trays 15 stacked in a predetermined number of stages are set as the inspection target of one lot.

Then, the operator transfers the untested product trays 15 stacked on the automatic carrier 18 onto the autoloader 12 in the inspection preparation stage, and presses the preparation completion switch (not shown). In the case of the first time, after transferring the untested product tray 15 onto the autoloader 12, the automatic carrier 18 is returned to the storage and loading position of the untested product IC to prepare for stacking the next untested product tray 15. Then, the control device (not shown) controls the autoloader 12 by the control software as follows.

That is, as shown in FIG. 3 and FIG. 4, the fluid pressure cylinder 20 is controlled to the approach side, the piston rod 21 and the tray pushing plate 22 are advanced, and the stacking on the tray receiving base 23 is not performed. The inspection tray 15 is collectively pushed out to the uninspected tray unit 1 and handed over. Then,
The fluid pressure cylinder 20 is controlled to the return side, and the piston rod 21 and the tray pushing plate 22 are returned to the initial position.

The autoloader 12 delivers the untested product tray 15 to the untested product tray unit 1 and then reports it to the lot management program 30 according to the control software. After receiving the report from the autoloader 12, the lot management program 30 requests the operation programs of all the parts on the handler body side to start the operation. Thereby, each part arranged on the handler body 11 is controlled as follows according to the operation program.

That is, the loader robot 2 approaches the untested product tray unit 1 shown in FIG. 1, and the loader robot 2 picks up the untested product ICs from the stacked untested product trays 15 and carries in the test socket unit 3. After being handed over to the device 4, the loader robot 2 returns to the initial position.

The carry-in device 4 carries the untested IC received from the loader robot 2 to the test socket unit 3, sets it in the socket, and inspects it by an IC tester (not shown).

The untested IC is replaced by the I of the test socket unit 3.
The C tester determines whether the product is a good product or a defective product, removes it from the socket by the carry-out device 5 of the test socket unit 3, and delivers the inspection completion IC from the carry-out device 5 to the unloader robot 6.

The unloader robot 6 includes the unloading device 5
According to the inspection result, the non-defective product is sent to the non-defective product tray 7 and stored in the non-defective product tray 16 set at this position, and the defective product is carried to the defective product tray 8 at this position. It is stored in the defective product tray 17 set in, and is sorted into good products and defective products and collected. The unloader robot 6 stores the inspection completed IC in the good product tray 16 or the defective product tray 17, and then returns to the initial position.

The loader robot 2 sequentially picks up untested ICs, and the uppermost tray 15 for untested products is picked up.
When the tray is emptied, the emptied tray is taken in by the tray transport device 9, temporarily stored in the empty tray buffer unit 10, and collected. The empty tray 15 for non-inspection is detected by, for example, counting the number of uninspected ICs taken out from the tray 15 for uninspected goods by a counter, or the tray 1 for uninspected goods by a sensor.
This is done by observing the inside of 5.

The inspection end ICs are one after another as good product storage tray section 7
When the non-defective product tray 16 is stored in the non-defective product tray 16 or the defective product storage tray portion 8 is stored in the defective product tray 17 and the non-defective product tray 16 and the defective product tray 17 are full, the tray transport device 9 empties them. Empty trays are stacked on the non-defective product tray 16 and the defective product tray 17 from the tray buffer section 10 to prepare for storing the next non-defective product IC and defective product IC.

While inspecting the untested IC,
A predetermined number of untested product trays 15 containing untested product ICs are stacked on the automatic carrier 18 and sent again to the position of the row of the auto loader 12 and the auto unloaders 13 and 14, and the operator has no relation to the end of the inspection / sorting operation. Auto loader 12
The above-mentioned stacked untested product trays 15 are transferred and the preparation completion switch is pushed.

When the inspection / selection operation described above progresses and the inspection of all the uninspected ICs for one lot stored in the uninspected product tray 15 stacked in the uninspected product tray unit 1 is completed, The tray unit 1 has no untested product tray 15, the good product storage tray unit 7 has a stack of good product trays 16 each containing a good product IC, and the defective product storage tray unit 8 has a defective product IC. The defective product trays 17 are stacked.

Here, after the lot management program 30 receives the completion reports from all the operation programs of the handler body side, it requests the autoloader / autounloader for lot exchange. Therefore, the autoloader 12 collectively pushes out the untested product trays 15 stacked on the autoloader 12 to the untested product tray unit 1 in accordance with a tray transfer command from the control device.

On the other hand, the control device sends tray transfer commands to the non-defective auto unloader 13 and the defective auto unloader 14, respectively, and causes the auto loader 13 and the auto unloader 14 to respectively operate programs 38 and 39 shown in FIG. Control is performed as follows.

That is, the fluid pressure cylinder 24 shown in FIG. 8 is controlled to the approach side, the piston rod 25 and the tray pushing plate 26 are advanced, and the automatic unloader 13 for good products is stacked on the good product storage tray section 7. The trays 16 for non-defective products are collectively pushed out onto the tray pedestal 27, and the automatic unloader 14 for defective products stores the defective product storage tray section 8 therein.
The tray 17 for the defective products stacked in the
Push it up and hand it over at once. The auto unloaders 13 and 14 make the tray 1 for the good tray 1 on the tray receiving stand 27.
6 and the defective product tray 17 are pushed out, the fluid pressure cylinder 24 is controlled to the return side, and the piston rod 2
5 and the tray push plate 26 are returned to the initial positions. In this way, the auto loader 12 and the auto unloader 1
After lot exchange, 3 and 14 report the completion to the lot management program 30. The lot management program 30, after receiving the report of the completion of the lot exchange operation from the autoloader / autounloader side, requests all the parts on the handler body side to restart the operation.

By repeating the above operation, I
The C inspection can be continuously performed, the IC handler can be operated unattended for a long time, and the loss time can be almost eliminated. Therefore, the efficiency of the IC inspection can be significantly improved.

The non-defective product tray 16 and the defective product tray 17 delivered to the tray receivers 27 of the automatic unloaders 13 and 14 are sorted and transferred onto the waiting automatic carrier vehicle 18, and the automatic carrier is carried out. It is sent to the next processing step by car 18.

Next, FIG. 10 is a side view showing another embodiment of the autoloader and the autounloader in the IC handler of the present invention.

The autoloader and the autounloader shown in FIG. 10 have a built-in motor 45 as a drive source, a ball screw 46 connected to the motor 45, and a nut (not shown) screwed to the ball screw 46. And ball screw 46
And a tray receiving stand 47 that reciprocates in the axial direction of the above.

In this embodiment, in the case of the untested autoloader, the untested trays are stacked on the tray cradle 47 and the motor 45 is rotated in the forward direction so that the ball screw 46 and the nut The tray cradle 47 is pushed out and delivered to the untested tray portion by the screw action by, and then the motor 45 is rotated in the opposite direction to return the tray cradle 47 to the initial position. In the case of a good product or defective product automatic unloader, the good product tray or the bad product tray is stacked on the tray cradle 47 at the good product storage tray portion or the bad product storage tray portion, and the motor 45 is moved in the forward direction. Tray pedestal 4
7 is moved toward the tray tray 48 of the other party, and the tray for non-defective product or the tray for defective article is pushed out from the tray tray 47 onto the tray tray 48 of the other party and delivered,
After that, the tray 45 is returned to the initial position by rotating the motor 45 in the opposite direction.

Therefore, even in the auto loader and the auto unloader using the ball screw 46, I
The C inspection can be continuously performed, the IC handler can be operated unattended for a long time, and the efficiency of the IC inspection can be improved.

The above-mentioned FIGS. 2 to 4, FIGS. 5 to 7, and FIG.
In each of the embodiments shown in FIG. 0, the autoloader and the autounloader are configured to push out and deliver an untested product tray, a non-defective product tray, and a defective product tray, respectively. The piston rod may be pulled out and delivered by a fluid pressure cylinder that reciprocates.

FIG. 11 is a front view showing another embodiment of the autoloader and the autounloader in the IC handler of the present invention.

The autoloader 5 of the embodiment shown in FIG.
0 and the automatic unloader 51 include a guide rail 52 attached to the ceiling, a traveling body 53 traveling along the guide rail 52, a tray holder 54 suspended from the traveling body 53, an elevating mechanism for the tray holder 54, and An opening / closing mechanism (neither is shown) is provided. Further, each part of the auto loader 50 and the auto unloader 51 is controlled by a control device based on control software that is organized in advance.

In the case of the autoloader 50, the tray holder 54 is used for the tray 1 for the untested product in which the untested product IC is put.
5 are stored in multiple stages, and the traveling body 5 is installed along the guide rail 52.
3, the tray holder 5 is moved through the traveling body 53.
4 is moved above the uninspected product tray unit 1. Next, the tray holder 54 is lowered via the elevating mechanism, and the tray holder 54 is opened by the opening / closing mechanism at a position close to the uninspected product tray unit 1, and the uninspected product trays 15 are unloaded in multiple stages in the uninspected product tray unit 1. After handing over, the empty tray holder 54 is raised by the elevating mechanism, and the tray holder 54 is closed by the opening / closing mechanism, and returned to the storage and loading place of the untested IC via the traveling body 53.

In the case of the automatic unloader 51, the tray holder 54 is moved to the non-defective product storage tray portion 7 or the defective product storage tray portion 8 as shown in FIG. Then, it is lowered by the elevating mechanism and opened by the opening / closing mechanism, and the good product tray 16 stacked in the good product storage tray unit 7 or the defective product stacked in the defective product storage tray unit 8 as shown in FIG. It comes close to the tray 17 for use. Next, the tray holder 54 is closed by the opening / closing mechanism to receive the trays 16 for good products or the trays 17 for defective products that have been stacked, raised by the lifting mechanism, and moved to the next processing step via the traveling body 53. Is configured.

Therefore, IC inspection can be continuously performed even by using the overhead traveling type auto loader 50 and auto unloader 51, the IC handler can be operated unattended for a long time, and the efficiency of the IC inspection is high. Can be improved.

[0057]

According to the invention described in claim 1 of the present invention described above, an autoloader for supplying an untested product tray containing untested product ICs to the untested product tray portion arranged on the handler body is provided. Therefore, there is an effect that the IC inspection can be continuously performed, unmanned operation can be performed for a long time, and efficiency can be improved.

According to the second aspect of the present invention, the uninspected product tray portion arranged on the handler main body is equipped with an autoloader for supplying the uninspected product tray containing the uninspected product IC, and The good product storage tray part and the defective product storage tray part are equipped with an automatic unloader that collects the good product tray and the bad product tray that store the inspection completion ICs separately, so that the unattended operation can be performed more accurately and for a long time. It is possible to improve the efficiency of IC inspection.

Further, according to the third aspect of the present invention, the set of the untested product tray section, the non-defective product storage tray section, and the defective product tray section and the set of the autoloader and the automatic unloader are provided at the time of tray transfer. Only the tray operation commands from the control device are interrelated with each other, and in other cases, they operate independently of each other.By external setup, supply of untested product trays to the autoloader and non-defective product trays from the auto unloader Since the tray for defective products can be collected and the autoloader and the unloader are operated in an interrelated manner by external setup, there is an effect that the setup time can be shortened.

According to the fourth aspect of the present invention, the inspection is completed for all the uninspected ICs in the uninspected product tray that accommodates a plurality of uninspected ICs and is supplied to the uninspected product tray section. Then, in accordance with the tray transfer command from the control device, the uninspected IC is transferred from the autoloader to the uninspected tray section.
Since it is configured to supply a new non-inspection product tray that stores the new non-inspection product tray, there is an effect that a new non-inspection product tray can be automatically and more reliably supplied from the autoloader to the non-inspection product tray section.

According to the fifth aspect of the present invention, the inspection is completed for all the uninspected ICs in the uninspected product tray that accommodates a plurality of uninspected ICs and is supplied to the uninspected product tray section. Then, according to the tray transfer command from the control device, the uninspected product I is transferred from the autoloader to the uninspected product tray section.
It is configured to supply a new tray for non-inspected products containing C, and transfers the non-defective product tray and the non-defective product tray from the non-defective product storage tray unit and the defective product storage tray unit to the auto unloader in a classified manner. Since it is configured to collect, it supplies the untested product tray from the autoloader to the untested product tray part, and the good product tray and the defective product tray from the good product storage tray part and the defective product storage tray part to the auto unloader. There is an effect that the recovery can be automatically performed more reliably.

[Brief description of drawings]

FIG. 1 is a plan view showing the outline of an embodiment of the present invention.

FIG. 2 is a side view showing an example of an autoloader.

FIG. 3 is an operation explanatory diagram of the autoloader shown in FIG.

FIG. 4 is an operation explanatory view of the autoloader shown in FIG.

FIG. 5 is a side view showing an example of an automatic unloader.

FIG. 6 is an operation explanatory view of the auto unloader shown in FIG.

7 is an operation explanatory diagram of the auto unloader shown in FIG.

8 is an explanatory diagram showing an outline of control software of the embodiment shown in FIG. 1. FIG.

9 is an explanatory diagram showing an internal logic of the control software shown in FIG.

FIG. 10 is a side view showing another embodiment of the automatic loader and the automatic unloader.

FIG. 11 is a front view showing another embodiment of the auto loader and the auto unloader.

FIG. 12 is a plan view showing a conventional technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Uninspected product tray part, 2 ... Loader robot, 3 ... Test socket part, 4 ... Uninspected product IC carry-in device, 5 ... Inspection completed IC carry-out device, 6 ... Unloader robot, 7 ... Non-defective product storage tray part, 8 ... Defective product storage tray unit, 9 ... Tray transport device, 10 ... Empty tray buffer unit, 11 ... Handler body, 12 ... Auto loader, 13, 14 ... Auto unloader, 15 ... Untested product tray, 16 ... Good product tray, 17
... Tray for defective products, 18 ... Automatic guided vehicle, 20 ... Fluid pressure cylinder of autoloader, 21 ... Piston rod, 22
... Tray push plate, 23 ... Tray cradle, 24 ... Fluid pressure cylinder of auto unloader, 25 ... Piston rod, 26 ... Tray push plate, 27 ... Tray cradle, 30
... Lot management program of control software, 31-36 ... Operation program of each part on the handler body side, 37 ... Auto loader operation program, 38, 39 ... Auto unloader operation program, 40-43 ... Steps of internal logic, 45 ... Motor of autoloader and unloader, 46 ... Ball screw, 47 ... Tray cradle, 48 ... Counter tray cradle, 50 ... Autoloader, 51 ... Autounloader, 52 ... Guide rail of autoloader and autounloader, 53 … The same vehicle,
54 ... Same tray holder.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shintaro Masuda, 390 Muramatsu, Shimizu City, Shizuoka Prefecture, Hitachi Shimizu Engineering Co., Ltd.

Claims (5)

[Claims] 1. A handler main body, at least an untested product tray section, an untested product IC loader, a test socket unit, an inspection completion IC unloader, a non-defective product storage tray unit, and a defective product storage tray unit. In the IC handler described above, an automatic loader for supplying an untested product tray accommodating untested product ICs is provided in the untested product tray section. 2. At least an uninspected product tray section, an uninspected IC loader, a test socket section, an inspection end IC unloader, a non-defective article storage tray section, and a defective article storage tray section are arranged on the handler body. In the IC handler described above, an autoloader for supplying an untested product tray accommodating untested product ICs is provided in the untested product tray part, and the non-defective product storage tray part and the defective product storage tray part are provided with:
An IC handler equipped with an automatic unloader that collects a tray for non-defective products and a tray for defective products, each containing an inspection completion IC. 3. The set of the untested product tray unit, the non-defective product storage tray unit, and the defective product tray unit, and the set of the autoloader and the automatic unloader are related to each other only when a tray is delivered, in accordance with a tray delivery command from a control device. However, at other times, they operate independently of each other and are configured so that external setup can supply the trays for untested products to the autoloader and the trays for good products and defective products from the auto unloader. The IC handler according to claim 2, wherein: 4. After the inspection of all the uninspected ICs in the uninspected product tray that has stored a plurality of uninspected ICs and is supplied to the uninspected product tray section, the autoloader is operated in accordance with the tray transfer command from the control device. In the uninspected tray section,
The IC handler according to claim 1, wherein the IC handler is configured to supply a new tray for an uninspected product in which an uninspected IC is stored. 5. After the completion of the inspection of all the uninspected ICs in the uninspected product tray that accommodates a plurality of uninspected ICs and is supplied to the uninspected product tray section, the autoloader is operated in accordance with a tray transfer command from the control device. In the uninspected tray section,
It is configured to supply a new tray for non-inspected products storing the non-inspected product ICs, and the non-defective product tray and the defective product tray are classified and transferred from the non-defective product tray portion and the defective product tray portion to the auto unloader. 3. The IC handler according to claim 2, wherein the IC handler is configured to collect and collect.