JPH05251527A - Electronic probe fine analyzer - Google Patents

Abstract

PURPOSE:To allow any body to specify a source of a foreign material with high reliability by providing the equipment with a storage device which stores the specification result and a fuzzy controlling circuit for making inference on the source of a foreign material with a combination of analytical peaks and the information about the analytical peaks. CONSTITUTION:The characteristic X-ray emitted from a foreign material which is detected by a detecting section 1 is processed on CPU 2 and constituent elements of the X-ray are expressed as analytical peaks. In order to specify a source of the foreign material from the obtained analytical peaks, the information about the analytical peaks is inputted from a key board 5. These information and the specification result of the analytical data which is stored in a storge device 3, or the data about each analytical peak and the source specification data are combined and processed in a fuzzy controlling circuit 4. Then, the source is specified according to the inference on the source and the result is displayed on a CRT 6. By this method, anybody can automatically specify the source of a foreign material easily and accurately.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron probe microanalyzer for easily identifying the source of foreign matter with high accuracy.

[0002]

2. Description of the Related Art In recent years, an electron probe microanalyzer linked with a foreign substance inspection device has come to be used for the purpose of analyzing a foreign substance generated during a semiconductor device process.

However, even if a foreign substance is analyzed using an electron probe microanalyzer and the constituent elements are identified, it is not easy to actually specify the source of the foreign substance. This is because it is not possible to distinguish whether the foreign material being analyzed is generated from a device or material unique to the current sample or from other human or environment detected. Also, the waveform of the detected analysis peak differs depending on the measurement conditions during the foreign matter analysis, that is, the acceleration voltage and the beam current of the electron beam.

Therefore, in order to identify the source, it is necessary to accumulate analysis data and have the skill of the analyst.

[0005]

In the prior art, when trying to identify the source of the foreign matter, it took a huge amount of time and labor to analyze the accumulated analysis data. There is also a problem that the interpretation of the analysis peak differs depending on the judgment of the analyst.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide an electron probe microanalyzer capable of easily identifying a highly reliable foreign substance generation source without individual differences.

[0007]

In order to achieve this object, the electron probe microanalyzer of the present invention combines a storage device for storing a specific result with an analysis peak and information relating to the analysis peak to process the source of a foreign substance. It is composed of a fuzzy control circuit that infers.

[0008]

According to this configuration, the source of foreign matter generated from the detected analysis peak is processed and determined by the fuzzy control circuit in combination with the identification result accumulated in the storage device, so that it can be easily and without individual difference. It is possible to specify the source of foreign matter generation with high reliability.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall configuration diagram of an electron probe microanalyzer in one embodiment of the present invention. In FIG. 1, 1 is a characteristic X-ray detection unit from a foreign substance, 2 is a central processing unit, 3 is a storage device for storing a specific result, 4 is a fuzzy control circuit, 5 is a keyboard for inputting information regarding an analysis peak, 6 Is a CRT, and 7 is an electron probe microanalyzer.

The operation of the electron probe microanalyzer of the present embodiment constructed as above will be described below.

First, the characteristic X-rays from the foreign matter detected by the detector 1 are processed by the central processing unit 2 and the constituent elements are expressed as analysis peaks. Next, in order to identify the source of foreign matter from the obtained analysis peak, information related to the analysis peak, such as the acceleration voltage and beam current as measurement conditions, the material used for sample preparation, the material of the device used for sample preparation Input the method of distribution of foreign matter from the keyboard 5.

It is considered that the probability is high when the fuzzy control circuit 4 combines and processes these information and the specific result accumulated in the storage device 3 of the analytical data, for example, the data relating to each analytical peak and the specific data of the generation source. The source is inferred from the source, and the result is displayed on the CRT 6.

If the inferred result is correct, the information on this analysis peak is stored in the storage device 3 together with the information on the analysis peak and the source identification result. If the inference is wrong, identify the next most likely source.

As described above, according to the present embodiment, by collecting and inferring the identification results of the foreign matter source, anyone can easily and automatically identify the foreign matter source. it can.

[0016]

The present invention provides an electron probe microanalyzer,
By providing a storage device that stores specific results and a fuzzy control circuit that processes the analysis peak and the information related to the analysis peak and infers the source of the substance, anyone can easily and accurately generate the source of the foreign matter. It is possible to realize an electron probe microanalyzer capable of identifying

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of an electron probe microanalyzer according to an embodiment of the present invention.

FIG. 2 is a flowchart of foreign matter identification in the electron probe microanalyzer in one embodiment of the present invention.

[Explanation of symbols]

 1 Detection Unit 2 Central Processing Unit 3 Storage Device 4 Fuzzy Control Circuit 5 Keyboard 6 CRT 7 Electronic Probe Microanalyzer

Claims (1)

[Claims] 1. A detection means for detecting a characteristic X-ray of an element, a central processing means for processing a signal detected by the detection means to generate analysis information, a storage means for storing the analysis information, and the detection means. An electronic probe microanalyzer comprising: an input means for inputting information on a signal detected in step 1; and a fuzzy control circuit for deducing a source of the element by fuzzy control from the information and the analysis information.