JPH05251186A - Light emitting element and manufacture thereof - Google Patents

Light emitting element and manufacture thereof

Info

Publication number
JPH05251186A
JPH05251186A JP4989192A JP4989192A JPH05251186A JP H05251186 A JPH05251186 A JP H05251186A JP 4989192 A JP4989192 A JP 4989192A JP 4989192 A JP4989192 A JP 4989192A JP H05251186 A JPH05251186 A JP H05251186A
Authority
JP
Japan
Prior art keywords
light emitting
emitting element
electrode
layer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4989192A
Other languages
Japanese (ja)
Other versions
JP3284249B2 (en
Inventor
Satoru Miyashita
悟 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP4989192A priority Critical patent/JP3284249B2/en
Publication of JPH05251186A publication Critical patent/JPH05251186A/en
Application granted granted Critical
Publication of JP3284249B2 publication Critical patent/JP3284249B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8052Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Led Devices (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

PURPOSE:To provide an organic light emitting element having an electrode pattern capable of displaying a large capacity, having a high initial yield and a high in-plane uniformity, and excellent in long-term reliability. CONSTITUTION:In a light emitting element having at least an organic light emitting layer 14 between electrodes, at least one of the electrodes is constituted of a high polymer layer 15 where conductive particles are dispersed. Application of a high polymer solution where conductive particles are dispersed by a printing method can provide a pattern, followed by fixing the aid of heat, thus manufacturing the light emitting element. Otherwise, application of a solution including conductive particles and high polymer molecules by a printing method can provide a pattern, followed by polymerization and fixing by heating or ultraviolet ray irradiation, thereby manufacturing the light emitting element.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、表示素子に利用可能な
有機発光物質を用いた発光素子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting device using an organic light emitting material applicable to a display device.

【0002】[0002]

【従来の技術】従来の有機発光物質を用いた発光素子と
しては、単層または、正孔注入層や電子注入層を有する
多層構造の素子が知られている(斎藤ら、化学と工業
第42巻 第11号(1989)p143 など)。
発光層、正孔注入層、電子注入層の各有機層は、真空蒸
着やスピンコーティングにより1000オングストロー
ム程度の厚さの均一な薄膜で形成されている。電極は基
板側にITOや酸化スズ等の透明電極を用い、有機層上
にはインジウムやマグネシウム−銀合金等の金属電極を
真空蒸着により形成している。直流10ボルト程度の駆
動電圧で、1000cd/m2以上の発光輝度が得られてい
る。
2. Description of the Related Art As a conventional light emitting device using an organic light emitting material, a device having a single layer or a multilayer structure having a hole injection layer and an electron injection layer is known (Saito et al., Kagaku and Kogyo).
42, No. 11 (1989) p143).
Each of the light emitting layer, the hole injecting layer, and the electron injecting layer is formed as a uniform thin film having a thickness of about 1000 Å by vacuum deposition or spin coating. As the electrode, a transparent electrode such as ITO or tin oxide is used on the substrate side, and a metal electrode such as indium or magnesium-silver alloy is formed on the organic layer by vacuum evaporation. With a driving voltage of about 10 V DC, an emission luminance of 1000 cd / m 2 or more was obtained.

【0003】[0003]

【発明が解決しようとする課題】しかしこのように作成
した発光素子は、有機層上に金属電極を真空蒸着により
形成する際、非常に薄い有機層に変質や破壊が起こりや
すく、素子のばらつきや信頼性が低いなどの課題があっ
た。更に、金属電極の酸化等による経時変化も表示特性
を劣化させた。また、有機層が通常のフォトエッチング
プロセスに耐えないため、大容量表示を行なうための電
極のパターン形成ができなという課題があった。
However, in the light-emitting device thus produced, when a metal electrode is formed on the organic layer by vacuum vapor deposition, alteration or destruction is likely to occur in a very thin organic layer, which may cause variations in the device. There were issues such as low reliability. Furthermore, the display characteristics are also deteriorated due to changes with time due to oxidation of the metal electrodes. Further, since the organic layer does not withstand a normal photoetching process, there is a problem that it is not possible to form an electrode pattern for displaying a large capacity.

【0004】本発明は前記課題を解決するためのもので
あり、初期歩留まりと面内均質性が高く、長期信頼性に
優れた発光素子、及び大容量表示が可能な電極パターン
を有する発光素子の製造方法を提供することを目的とす
る。
The present invention is intended to solve the above problems, and provides a light-emitting element having high initial yield and in-plane homogeneity, excellent long-term reliability, and a light-emitting element having an electrode pattern capable of large-capacity display. It is intended to provide a manufacturing method.

【0005】[0005]

【課題を解決するための手段】上記目的は、電極間に少
なくとも有機発光層を有する発光素子において、少なく
とも一方の電極を、導電性微粒子が分散した高分子層で
構成することにより達成される。
The above object can be achieved by forming at least one electrode of a polymer layer in which conductive fine particles are dispersed in a light emitting device having at least an organic light emitting layer between electrodes.

【0006】また、電極間に少なくとも有機発光層を有
する発光素子において、少なくとも一方の電極を、導電
性微粒子が分散した高分子溶液を印刷法で塗布すること
によりパターン形成し、乾燥、加熱により定着させるこ
とで製造できる。更に、導電性微粒子と重合性分子を含
む液を印刷法で塗布することによりパターン形成し、加
熱や紫外線照射等により重合、定着させることでも製造
できる。
Further, in a light emitting device having at least an organic light emitting layer between electrodes, at least one electrode is patterned by applying a polymer solution in which conductive fine particles are dispersed by a printing method, and is fixed by drying and heating. Can be manufactured. Further, it can be produced by applying a liquid containing conductive fine particles and a polymerizable molecule by a printing method to form a pattern, and then polymerizing and fixing by heating, irradiation with ultraviolet rays or the like.

【0007】[0007]

【実施例】【Example】

(実施例1)図1は本実施例における構成を模式的に示
す発光素子の断面図である。基板としては、表面を光学
研磨したパイレックスガラス11を用い、ITOの導電
体膜をスパッターもしくは蒸着で形成し、フォトエッチ
ングによって100μm幅にパターンを形成して陰極1
2とした。この基板上に、1000Åの膜厚となるよう
にオキサジアゾール誘導体を蒸着し、正孔注入層13と
した。その上にアントラセンを真空蒸着により、500
Åの膜厚で形成し発光層14とした。ここでは発光物質
としてアントラセンを用いたが、ピレン、ベンズアント
ラセン、ペリレン、テトラセン、ナフタセン、コロネ
ン、クマリン、シクロペンタジエン、キノリン、及びこ
れら有機発光物質の誘導体などが同様に利用できる。
(Embodiment 1) FIG. 1 is a cross-sectional view of a light emitting device schematically showing the construction of this embodiment. As the substrate, a Pyrex glass 11 having an optically polished surface is used, an ITO conductive film is formed by sputtering or vapor deposition, and a pattern is formed in a width of 100 μm by photoetching to form a cathode 1.
It was set to 2. On this substrate, an oxadiazole derivative was vapor-deposited so as to have a film thickness of 1000 Å to form a hole injection layer 13. Anthracene is vacuum-deposited on it by 500
The light emitting layer 14 was formed with a film thickness of Å. Although anthracene was used as the light emitting substance here, pyrene, benzanthracene, perylene, tetracene, naphthacene, coronene, coumarin, cyclopentadiene, quinoline, and derivatives of these organic light emitting substances can be similarly used.

【0008】次に「サイトップCTX」(旭硝子社製)
を適度な蒸気圧のフッ素系溶媒に溶解し、サブミクロン
オーダーの粒径のインジウム微粒子を添加し、均一に分
散させた。この液をオフセット印刷法を用いて、基板電
極と直交するよう100μm幅に塗布し、80℃に加熱
して定着させ正極15とし、大容量表示が可能な発光素
子が得られた。正孔注入層と発光層は、変質も変形もせ
ず、面内で均一な発光特性が観察された。400ライン
での時分割駆動が可能であり、前述したような高精細化
も可能となった。
Next, "Cytop CTX" (made by Asahi Glass Co., Ltd.)
Was dissolved in a fluorine-based solvent having an appropriate vapor pressure, and indium fine particles having a particle size of submicron order were added and uniformly dispersed. This liquid was applied by offset printing to a width of 100 μm so as to be orthogonal to the substrate electrode, heated to 80 ° C. and fixed to form the positive electrode 15, and a light-emitting element capable of large-capacity display was obtained. The hole injection layer and the light emitting layer were neither altered nor deformed, and uniform emission characteristics were observed in the plane. The time-divisional driving of 400 lines is possible, and the high definition as described above is also possible.

【0009】(実施例2)表面を光学研磨したガラス上
に、数百オングストロームの粒径の酸化スズ微粒子が分
散したアクリル−エポキシ系樹脂溶液を、暗室内でスク
リーン印刷法を用いて100μm間隔で300μm幅に
塗布し、紫外線を照射した後150℃の加熱により高分
子化させ、パターン電極を形成した。絶縁体のポリジシ
クロヘキシルフマレートと、正孔注入物質であるトリフ
ェニルアミン誘導体とを共にトルエンに溶解させ、0.
5μmのフィルターを通して原料溶液とした。基板上に
1200Åの膜厚となるように回転数と時間を制御し
て、スピンコーターで前述の原料溶液を塗布し、正孔注
入層とした。
(Example 2) An acrylic-epoxy resin solution in which fine particles of tin oxide having a particle diameter of several hundred angstroms are dispersed on glass whose surface is optically polished is screen-printed in a dark room at 100 μm intervals. It was applied to a width of 300 μm, irradiated with ultraviolet rays, and then polymerized by heating at 150 ° C. to form a pattern electrode. The polydicyclohexyl fumarate, which is an insulator, and the triphenylamine derivative, which is a hole-injecting substance, are both dissolved in toluene,
A raw material solution was obtained through a 5 μm filter. The rotation speed and time were controlled so that the film thickness was 1200Å on the substrate, and the above-mentioned raw material solution was applied by a spin coater to form a hole injection layer.

【0010】その上にキノリンの誘導体を真空蒸着によ
り、800Åの膜厚で形成し発光層とした。更にフタロ
シアニン誘導体を真空蒸着により、500Åの膜厚で形
成し電子注入層とした。
A quinoline derivative was formed thereon by vacuum vapor deposition to a thickness of 800 Å to form a light emitting layer. Further, a phthalocyanine derivative was vacuum-deposited to a thickness of 500 Å to form an electron injection layer.

【0011】次にアクリル酸誘導体及びそのオリゴマー
に、サブミクロンオーダーの粒径のカーボン微粒子を添
加し、均一に分散させた。この液を暗室内でスクリーン
印刷法を用いて、基板電極と直交するよう100μm間
隔で300μm幅に塗布し、紫外線を照射した後80℃
に加熱して高分子化させ正極とした。縦480、横64
0画素の大容量表示が可能な発光素子が得られた。正孔
注入層と発光層と電子注入層は、変質も変形もせず、面
内で均一な発光特性が観察された。また、フォトエッチ
ングによりパターンニングした電極で度々見られる、基
板電極エッジ付近でのショート不良は全く発生しなかっ
た。480ラインでの時分割駆動が可能であり、パーソ
ナルコンピューター端末の表示が可能となった。
Next, fine carbon particles having a particle size of submicron order were added to the acrylic acid derivative and its oligomer and dispersed uniformly. This solution was applied by screen printing in a dark room at intervals of 100 μm so as to have a width of 300 μm so as to be orthogonal to the substrate electrode, and was irradiated with ultraviolet rays, then at 80 °
It was heated to a high temperature and polymerized to obtain a positive electrode. Vertical 480, horizontal 64
A light emitting device capable of displaying a large capacity of 0 pixels was obtained. The hole injecting layer, the light emitting layer, and the electron injecting layer were neither altered nor deformed, and uniform emission characteristics were observed in the plane. In addition, the short circuit defect near the edge of the substrate electrode, which is often seen in the electrodes patterned by photoetching, did not occur at all. The time-divisional drive of 480 lines is possible, and the display of a personal computer terminal is possible.

【0012】(実施例3)表面を光学研磨したパイレッ
クスガラス上にITOの導電体膜をスパッターもしくは
蒸着で形成し、フォトエッチングによって100μm角
にパターンを形成して画素電極とした。更に、各電極毎
にMIM(メタル−インシュレーター−メタル)2端子
素子を形成した。この基板上に、ジスチリルアントラセ
ン誘導体を1000Åの膜厚となるように真空蒸着によ
り形成し、発光層とした。
(Example 3) A conductive film of ITO was formed on a Pyrex glass whose surface was optically polished by sputtering or vapor deposition, and a pattern of 100 μm square was formed by photoetching to form a pixel electrode. Furthermore, a MIM (metal-insulator-metal) two-terminal element was formed for each electrode. A distyryl anthracene derivative was formed on this substrate by vacuum vapor deposition so as to have a film thickness of 1000 Å to form a light emitting layer.

【0013】ビニルアルコールのオリゴマーをアルコー
ルに溶解し、サブミクロンオーダーの粒径のカーボン微
粒子を添加し、均一に分散させた。この液をスクリーン
印刷法を用いて、基板画素電極に重なるよう100μm
幅に塗布し、100℃に加熱した後、電子線を200キ
ロボルトの加速電圧で照射した。高分子化して安定な電
極となり、大容量表示が可能な発光素子が得られた。発
光層は変質も変形もせず、面内で均一な発光特性が観察
された。各画素毎のフィールド反転駆動が可能であり、
前述したような高精細化も可能となった。応答速度が非
常に高速なため、動画の表示も可能であった。
An oligomer of vinyl alcohol was dissolved in alcohol, and carbon fine particles having a particle size of submicron order were added and uniformly dispersed. This liquid is applied by screen printing to 100 μm so as to overlap the substrate pixel electrode.
After being applied to the width and heated to 100 ° C., an electron beam was applied at an accelerating voltage of 200 kilovolts. A light emitting device capable of high-capacity display was obtained by polymerizing into a stable electrode. The light emitting layer was neither altered nor deformed, and uniform light emitting characteristics were observed in the plane. Field inversion drive for each pixel is possible,
Higher definition as described above has become possible. Since the response speed was extremely high, it was possible to display a movie.

【0014】[0014]

【発明の効果】以上述べたように、本発明によれば少な
くとも一方の電極を、導電性微粒子が分散した高分子層
で構成される発光素子を提供することにより、電極形成
の際有機層にダメージを与えないため初期歩留まりがと
面内均質性が高く、長期信頼性に優れた表示が可能とな
った。
As described above, according to the present invention, by providing a light emitting device in which at least one electrode is composed of a polymer layer in which conductive fine particles are dispersed, an organic layer is formed during electrode formation. Since no damage is given, the initial yield is high and the in-plane homogeneity is high, which enables display with excellent long-term reliability.

【0015】また、少なくとも一方の電極を、導電性微
粒子が分散した高分子溶液を印刷法で塗布することによ
りパターン形成し、乾燥、加熱により定着させること、
あるいは、導電性微粒子と重合性分子を含む液を印刷法
で塗布することによりパターン形成し、加熱や紫外線照
射等により重合、定着させる発光素子の製造方法を提供
することにより、大容量表示が可能な電極パターンを有
する発光素子の製造が可能となった。
Further, at least one of the electrodes is patterned by applying a polymer solution in which conductive particles are dispersed by a printing method, and is fixed by drying and heating.
Alternatively, a large-capacity display is possible by providing a method for manufacturing a light-emitting element in which a liquid containing conductive fine particles and a polymerizable molecule is applied by a printing method to form a pattern, which is polymerized and fixed by heating, ultraviolet irradiation, or the like. It has become possible to manufacture a light emitting device having various electrode patterns.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1における発光素子の構成を模
式的に表す断面図である。
FIG. 1 is a cross-sectional view schematically showing a configuration of a light emitting device in Example 1 of the present invention.

【符号の説明】[Explanation of symbols]

11‥‥‥‥‥基板ガラス 12‥‥‥‥‥透明電極 13‥‥‥‥‥正孔注入層 14‥‥‥‥‥発光層 15‥‥‥‥‥導電性微粒子が分散した高分子電極 11 Glass substrate 12 Transparent electrode 13 Hole injection layer 14 Light emitting layer 15 Polymer electrode in which conductive particles are dispersed

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 電極間に少なくとも有機発光層を有する
発光素子において、少なくとも一方の電極を、導電性微
粒子が分散した高分子層で構成することを特徴とする発
光素子。
1. A light emitting device having at least an organic light emitting layer between electrodes, wherein at least one electrode is composed of a polymer layer in which conductive fine particles are dispersed.
【請求項2】 電極間に少なくとも有機発光層を有する
発光素子において、少なくとも一方の電極を、導電性微
粒子が分散した高分子溶液を印刷法で塗布することによ
りパターン形成し、乾燥、加熱により定着させることを
特徴とする発光素子の製造方法。
2. In a light emitting device having at least an organic light emitting layer between electrodes, at least one electrode is patterned by applying a polymer solution in which conductive fine particles are dispersed by a printing method, and is fixed by drying and heating. A method of manufacturing a light-emitting element, comprising:
【請求項3】 電極間に少なくとも有機発光層を有する
発光素子において、少なくとも一方の電極を、導電性微
粒子と重合性分子を含む液を印刷法で塗布することによ
りパターン形成し、加熱や紫外線照射等により重合、定
着させることを特徴とする発光素子の製造方法。
3. In a light emitting device having at least an organic light emitting layer between electrodes, at least one of the electrodes is patterned by applying a liquid containing conductive fine particles and a polymerizable molecule by a printing method, and heating or ultraviolet irradiation. A method for producing a light-emitting element, which comprises polymerizing and fixing by a method such as.
JP4989192A 1992-03-06 1992-03-06 Light emitting device manufacturing method Expired - Lifetime JP3284249B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4989192A JP3284249B2 (en) 1992-03-06 1992-03-06 Light emitting device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4989192A JP3284249B2 (en) 1992-03-06 1992-03-06 Light emitting device manufacturing method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2001383519A Division JP2002237389A (en) 2001-12-17 2001-12-17 Light-emitting element and personal computer terminal

Publications (2)

Publication Number Publication Date
JPH05251186A true JPH05251186A (en) 1993-09-28
JP3284249B2 JP3284249B2 (en) 2002-05-20

Family

ID=12843658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4989192A Expired - Lifetime JP3284249B2 (en) 1992-03-06 1992-03-06 Light emitting device manufacturing method

Country Status (1)

Country Link
JP (1) JP3284249B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000058265A (en) * 1998-07-28 2000-02-25 Eastman Kodak Co Organic luminescence element and its manufacture
JP2002237382A (en) * 2001-02-13 2002-08-23 Stanley Electric Co Ltd Organic led element and its manufacturing method
JP2003168560A (en) * 2001-11-27 2003-06-13 Osram Opto Semiconductors Gmbh Manufacturing method of organic electroluminescence display and this kind of display
WO2003054981A1 (en) * 2001-12-20 2003-07-03 Add-Vision, Inc. Screen printable electrode for organic light emitting device
US7056180B2 (en) 2002-12-26 2006-06-06 Seiko Epson Corporation Manufacturing method of organic electroluminescent device, organic electroluminescent device, and electronic apparatus
DE10324880B4 (en) * 2003-05-30 2007-04-05 Schott Ag Process for the preparation of OLEDs
JP2007149577A (en) * 2005-11-30 2007-06-14 Alps Electric Co Ltd Light emitting device
JP2007149578A (en) * 2005-11-30 2007-06-14 Alps Electric Co Ltd Method of manufacturing light emitting device
KR100982411B1 (en) * 2007-12-27 2010-09-15 (주)에이디에스 Organic light emitting diode and method for manufacturing the same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000058265A (en) * 1998-07-28 2000-02-25 Eastman Kodak Co Organic luminescence element and its manufacture
JP2002237382A (en) * 2001-02-13 2002-08-23 Stanley Electric Co Ltd Organic led element and its manufacturing method
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