JPH052449Y2 - - Google Patents
Info
- Publication number
- JPH052449Y2 JPH052449Y2 JP1987105941U JP10594187U JPH052449Y2 JP H052449 Y2 JPH052449 Y2 JP H052449Y2 JP 1987105941 U JP1987105941 U JP 1987105941U JP 10594187 U JP10594187 U JP 10594187U JP H052449 Y2 JPH052449 Y2 JP H052449Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- container
- dust
- air
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 claims description 19
- 230000000694 effects Effects 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105941U JPH052449Y2 (ko) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105941U JPH052449Y2 (ko) | 1987-07-10 | 1987-07-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6411945U JPS6411945U (ko) | 1989-01-23 |
JPH052449Y2 true JPH052449Y2 (ko) | 1993-01-21 |
Family
ID=31339006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987105941U Expired - Lifetime JPH052449Y2 (ko) | 1987-07-10 | 1987-07-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH052449Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5398595B2 (ja) * | 2010-03-04 | 2014-01-29 | 東京エレクトロン株式会社 | 基板収納装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
-
1987
- 1987-07-10 JP JP1987105941U patent/JPH052449Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
Also Published As
Publication number | Publication date |
---|---|
JPS6411945U (ko) | 1989-01-23 |
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