JPH0523968A - Polishing method and device - Google Patents

Polishing method and device

Info

Publication number
JPH0523968A
JPH0523968A JP3176809A JP17680991A JPH0523968A JP H0523968 A JPH0523968 A JP H0523968A JP 3176809 A JP3176809 A JP 3176809A JP 17680991 A JP17680991 A JP 17680991A JP H0523968 A JPH0523968 A JP H0523968A
Authority
JP
Japan
Prior art keywords
work
tool
viscoelastic body
processed
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3176809A
Other languages
Japanese (ja)
Inventor
Kengo Ohira
研五 大平
Naoshi Takayama
直士 高山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Makino Milling Machine Co Ltd
Original Assignee
Makino Milling Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Makino Milling Machine Co Ltd filed Critical Makino Milling Machine Co Ltd
Priority to JP3176809A priority Critical patent/JPH0523968A/en
Publication of JPH0523968A publication Critical patent/JPH0523968A/en
Pending legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To provide a polishing method and device which is simple in structure and ease in handling and, moreover, capable of performing the automation of a finishing process in an easy manner. CONSTITUTION:This method is composed of having a work 6 with a concave work surface opening to the upper side, a tool 3 reciprocating in the vertical direction, and having a convex work surface formed into almost the same shape as the work surface of the work 6, a viscoelastic body 12 being held between the work 6 and the tool 3 and pressurized into deformation, and made up of kneading an abrasive grain, and two restoring devices 8, 14 adding some external pressure to the viscoelastic body 12 capable of overflowing to the outside as flowing from an interval between the work surface and the tool machining surface at the time of pressing the tool 3 to the work 6, and thereby restoring it onto the work machined surface. Accordingly, when the viscoelastic body 12 is pressed to the machined surface and made to flow therein, abrasive grains in the viscoelastic body cane to repeat an abrasive action on the work machined surface in consequence.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、放電加工等によって仕
上げ加工されたワークの被加工面を更に細かい面粗度に
なるよう研摩するための研摩方法および装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing method and apparatus for polishing a surface of a workpiece which has been finished by electrical discharge machining or the like so as to have a finer surface roughness.

【0002】[0002]

【従来の技術】EDM加工(形彫り)などの放電加工
は、加工形状に対して概ね同形状をした電極をワーク
(被加工物)に漸次近付けながら両者の間に放電現象を
励起させ、ワーク表面部分を除去することによって、ワ
ークを所定形状に形造る加工方法である。
2. Description of the Related Art In electrical discharge machining such as EDM machining (carving), an electrode having a shape substantially the same as the machined shape is gradually brought closer to a work (workpiece) to excite a discharge phenomenon between the two. This is a processing method for forming a work into a predetermined shape by removing the surface portion.

【0003】この放電加工方法は、回転切削工具では加
工できない内面コーナや微細部分を容易に加工すること
ができるという優れた特長を有するものの、放電現象が
スポット的に起きるのでワークの被加工面の面粗度には
自ら一定の限界があり且つ放電現象の際の熱によって被
加工面の材質が変化する等といった不可避的な課題が内
在する。
Although this electric discharge machining method has an excellent feature that an inner surface corner and a fine portion which cannot be machined by a rotary cutting tool can be easily machined, since an electric discharge phenomenon occurs spotwise, the surface to be machined of a workpiece is processed. The surface roughness has a certain limit by itself, and there is an unavoidable problem that the material of the surface to be processed changes due to heat during the electric discharge phenomenon.

【0004】このため、金型製作のようにそれ以上の加
工面粗度を必要とする場合や表面性状の変化・変質を嫌
う(従って、その部分を除去すべき)場合には、加工後
のワークに対して更に仕上げ加工(研摩作業)を別途施
す必要がある。
For this reason, in the case where a further processed surface roughness is required as in the case of die manufacture, or when the change or alteration of the surface properties is disliked (therefore, that portion should be removed), after the processing, It is necessary to additionally perform finishing (polishing work) on the work.

【0005】[0005]

【発明が解決しようとする課題】しかるに、上記仕上げ
加工は通常手作業によって行われ、斯かる作業は極めて
厄介であり面倒である。あるいは部分的に機械化されて
いる場合もあるが、構造が複雑で高価であり、またNC
プログラムを作らなければならない等、取扱いも複雑で
ある。よってこの仕上げ工程を簡単な構造及び取扱い
で、しかも自動化し得る研摩方法および装置の出現が希
求されている。
However, the above-mentioned finishing work is usually performed manually, and such work is extremely troublesome and troublesome. Or it may be partially mechanized, but its structure is complicated and expensive, and NC
Handling is complicated, such as having to create a program. Therefore, the advent of a polishing method and an apparatus capable of automating this finishing process with a simple structure and handling is desired.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に本発明に係る研摩方法は、ワークの上面に開口する凹
状の被加工面に砥粒が混練された粘弾性体を入れ、前記
ワークの上方に前記被加工面と概ね同形状をした凸状の
加工面を有する工具を対面させ、前記ワークと前記工具
との間で上下方向の相対的な往復運動を行わせ、前記工
具とワークとが所定距離まで接近して前記粘弾性体が前
記工具の加工面と前記ワークの加工面との間隙を流動し
ながら前記ワークの上面にはみ出す際に前記粘弾性体中
の砥粒が前記ワークの被加工面を圧接しながら擦過し、
前記工具とワークとが離間したときに前記はみ出した粘
弾性体を前記ワークの凹状の被加工面内に戻し、前記往
復運動と前記粘弾性体の戻し動作とを繰り返し行って前
記ワークの凹状の被加工面を研摩するようにしたことを
特徴とする。また、本発明に係る研摩装置は、上方側に
開口する凹状の被加工面を有するワークと、前記ワーク
の上方において駆動装置に連結されて上下方向に往復運
動し、前記ワークの被加工面と概ね同形状をした凸状の
加工面を有する工具と、前記ワークと工具との間で挟ま
れて加圧変形され、砥粒が混練された粘弾性体と、前記
ワークに対する前記工具の加圧押圧時に前記ワーク被加
工面と前記工具加工面との間から流動して外部にはみ出
し得る粘弾性体に対し、外圧を加え前記ワーク被加工面
上にこれを戻す戻し装置と、前記工具が上昇していると
きに前記戻し装置を動作させ、前記戻し装置の戻し動作
が終了したとき前記工具が下降するようにタイミングを
とる制御手段とを有し、前記粘弾性体が前記ワークの被
加工面に圧接された状態で流動する際に前記粘弾性体中
の砥粒が前記ワーク被加工面を繰り返し擦過し得るよう
に構成したことを特徴とする。
In order to solve the above-mentioned problems, a polishing method according to the present invention is characterized in that a viscoelastic body in which abrasive grains are kneaded is put into a concave processed surface opening on the upper surface of a work, Facing the tool having a convex processing surface having substantially the same shape as the surface to be processed, and performing relative reciprocating motion in the up-and-down direction between the work and the tool, and the tool and the work. And when approaching to a predetermined distance, the viscoelastic body flows through the gap between the machined surface of the tool and the machined surface of the work piece, and the abrasive grains in the viscoelastic body are projected on the upper surface of the work piece. Scrape while pressing the work surface of
When the tool and the work are separated from each other, the protruding viscoelastic body is returned to the concave work surface of the work, and the reciprocating motion and the returning operation of the viscoelastic body are repeatedly performed to form the concave shape of the work. The feature is that the surface to be processed is polished. Further, the polishing apparatus according to the present invention is a workpiece having a concave surface to be machined that is open upward, and a reciprocating motion in the up and down direction connected to a drive device above the workpiece, and the surface to be machined of the workpiece. A tool having a convex processing surface having substantially the same shape, a work piece and a tool, which is sandwiched between the work and the tool and deformed under pressure, and a viscoelastic body in which abrasive grains are kneaded, and the tool is pressed against the work. A viscoelastic body that flows from between the work surface and the tool processing surface at the time of pressing and can protrude to the outside, a returning device that applies external pressure to return the viscoelastic body to the work surface, and the tool moves upward. And a control means for timing the tool so as to descend when the returning operation of the returning device is completed, and the viscoelastic body has a surface to be processed of the workpiece. Flows while being pressed against Abrasive grains in the viscoelastic body is characterized by being configured so as to repeatedly rubbing the workpiece surface to be processed during that.

【0007】[0007]

【作用】上下動し得る工具によって粘弾性体が加圧さ
れ、これがワーク被加工面と工具加工面との間を流動す
ることによりワーク被加工面は効果的に良好に擦過され
る。このとき、外部にはみ出す粘弾性体は戻し装置によ
ってワーク被加工面上に容易に戻されるので、この擦過
作用が繰り返し得られ、これにより合理的・経済的な研
摩作業を行うことができる。
The viscoelastic body is pressed by the vertically movable tool and flows between the work surface and the tool processing surface, whereby the work surface is effectively and satisfactorily rubbed. At this time, the viscoelastic body protruding to the outside is easily returned to the work surface by the returning device, so that this rubbing action can be repeatedly obtained, whereby a rational and economical polishing operation can be performed.

【0008】[0008]

【実施例】以下、本発明の実施例を図面を参照して説明
する。図1は、本発明に係る研摩装置の一実施例の要部
側面断面図、図2は、図1のII−II線に沿い上方側から
見た図、図3は、実施例における加工工程図である。先
ず、図1及び2を参照して図示実施例装置の基本構造に
ついて説明すると、中央の上方に配置されているのは、
図示しない上下動装置に連結されたヘッド2であり、該
ヘッド2の下側には、加工用の工具3が取り付けられて
いる。この工具3の下方側には、装置本体(図示せず)
の固定ベース5上に取り付けられたワーク(被加工物)
6が位置する。このワーク6の外周には、これを取り囲
むように空圧作動式の複数のシリンダ8がベース9を介
して適宜取り付けられている。これらのシリンダ8の作
動部であるロッド10先端部分には、後述する加工工程時
にワーク6外側にはみ出す粘弾性体12を元の中央部分に
押し戻すためのプレート14が取着されている。
Embodiments of the present invention will be described below with reference to the drawings. 1 is a side sectional view of an essential part of an embodiment of a polishing apparatus according to the present invention, FIG. 2 is a view seen from above along the line II-II in FIG. 1, and FIG. It is a figure. First, the basic structure of the illustrated embodiment device will be described with reference to FIGS. 1 and 2. What is arranged above the center is
The head 2 is connected to a vertical movement device (not shown), and a machining tool 3 is attached to the lower side of the head 2. On the lower side of the tool 3, a device body (not shown)
Workpiece (workpiece) mounted on the fixed base 5 of
6 is located. A plurality of pneumatically operated cylinders 8 are appropriately attached to the outer circumference of the work 6 via a base 9 so as to surround the work 6. A plate 14 for attaching the viscoelastic body 12 protruding to the outside of the work 6 to the original central portion is attached to the tip portion of the rod 10, which is the operating portion of these cylinders 8, in the processing step described later.

【0009】ワーク6は、えぐられたような凹所6aを
その中央に有し、工具外形と概ね同じ形状を有するこの
凹所6aは、予め別の加工方法(例えば型彫り放電加
工)によって1次的に形造られ、凹所6aの内表面(被
加工面)はある程度精度良く出来上がっている。このワ
ーク凹所6a内には、所定の粘弾性度を有し砥粒が混練
された半固体状の粘弾性体12が放り込まれている。
The work 6 has a recess 6a, which has been carved, in the center thereof, and the recess 6a having substantially the same shape as the outer shape of the tool is previously formed by another machining method (for example, die-sinking electric discharge machining). Next, the inner surface (work surface) of the recess 6a is formed with a certain degree of accuracy. A semi-solid viscoelastic body 12 having a predetermined degree of viscoelasticity and kneaded with abrasive grains is thrown into the work recess 6a.

【0010】この粘弾性体12は、ゆっくり変形させた時
には小さい力で変形させることができるが、急激に変形
させる時には反発力が大きいというように、変形する速
度に応じて反発性(反発力)が異なり得る流動体であ
る。従って、粘弾性体12は、後述するように工具3とワ
ーク6とに挟まれて所定圧力が加えられると、その圧縮
状態のままワーク6の被加工面をこするようにして工具
3とワーク6との間隙を流動する。この際、砥粒が被加
工面に圧接された状態で移動するため、ワーク被加工面
の極微細な突起部が砥粒によって削り取られる(すなわ
ち、いわゆる擦過される)。この砥粒の流動による擦過
作用により、ワーク被加工面は全体的にきわめて良好な
面粗度に仕上げられることになる。
The viscoelastic body 12 can be deformed with a small force when it is slowly deformed, but has a large repulsive force when it is rapidly deformed. Fluids that can differ. Therefore, when the viscoelastic body 12 is sandwiched between the tool 3 and the work 6 as described later and a predetermined pressure is applied thereto, the viscoelastic body 12 rubs the work surface of the work 6 in the compressed state and the tool 3 and the work 6 are rubbed. Flow through the gap with 6. At this time, since the abrasive grains move while being pressed against the surface to be processed, the extremely fine protrusions on the surface to be processed of the work are scraped off by the abrasive particles (that is, so-called abrasion). Due to the rubbing action due to the flow of the abrasive grains, the surface to be processed of the workpiece is finished to have extremely good surface roughness as a whole.

【0011】砥粒としては、炭化ケイ素やダイヤモンド
等、そして基材としては、所定の粘弾性度を有する樹脂
材料等を用いることができる。尚、簡便には、粘弾性体
として市販品(例えば、株式会社東洋エクスツルードホ
ーンが提供する研磨材(商品名、メディア))を用いるこ
とができる。次に、図3を参照して実施例装置における
加工工程について以下説明する。
Silicon carbide, diamond, or the like can be used as the abrasive grains, and a resin material or the like having a predetermined viscoelasticity can be used as the base material. As a viscoelastic body, a commercially available product (for example, an abrasive (trade name, media) provided by Toyo Extrude Horn Co., Ltd.) can be simply used. Next, the processing steps in the apparatus of the embodiment will be described below with reference to FIG.

【0012】先ず、図示しない上下動装置によって工具
3が漸次下降されて工具3とワーク6との間隙が狭めら
れ、その間にある粘弾性体12が加圧されると、粘弾性体
12は、上述した特性に基づいて外方向(矢印方向)に流
動し始める(図3(a))。このとき砥粒流動によって、
ワーク被加工面は適切に擦過される。そして、工具3が
所定下降位置で停止すると、砥粒流動も停止し、このと
き粘弾性体12の大部分は、ワーク凹所6aを取り囲むワ
ーク上面部分にはみ出てしまう(図3(b))。
First, the tool 3 is gradually lowered by a vertical movement device (not shown) to narrow the gap between the tool 3 and the work 6, and when the viscoelastic body 12 between them is pressed, the viscoelastic body is pressed.
12 starts to flow outward (in the direction of the arrow) based on the characteristics described above (FIG. 3A). At this time, due to the flow of abrasive grains,
The work surface is properly rubbed. Then, when the tool 3 stops at a predetermined lowered position, the flow of abrasive grains also stops, and at this time, most of the viscoelastic body 12 protrudes into the work top surface portion surrounding the work recess 6a (FIG. 3 (b)). .

【0013】次いで、工具3を今度は上昇させることに
なるが(図3(c))、このままでは、粘弾性体12はそれ
自体の粘性故にワーク凹所6aの中央に復帰しないの
で、このはみ出た粘弾性体12を元の場所に強制的に戻す
べく、シリンダ8を駆動してロッド先端のプレート14を
移動させてこの粘弾性体12を凹所6a内に押し入れる
(図3(d))。
Next, the tool 3 is raised this time (FIG. 3 (c)). However, in this state, the viscoelastic body 12 does not return to the center of the work recess 6a due to its own viscosity, so this protrusion is generated. In order to forcibly return the viscoelastic body 12 to its original position, the cylinder 8 is driven to move the plate 14 at the tip of the rod and push the viscoelastic body 12 into the recess 6a (Fig. 3 (d)). ).

【0014】ここで工具3が上昇したことをリミットス
イッチで検出したらシリンダ8の駆動を開始し、シリン
ダ8が粘弾性体の戻し動作を終了して初期状態に復帰し
たことを別のリミットスイッチで検出したら工具3を下
降動作させるといった、工具3の上下動作とシリンダ8
の戻し動作とのタイミングをとる制御手段は、図示を省
略するが、これらのリミットスイッチと周知のシーケン
ス回路との組み合せで構成されている。
When the limit switch detects that the tool 3 has risen, driving of the cylinder 8 is started, and another limit switch indicates that the cylinder 8 has finished the returning operation of the viscoelastic body and has returned to the initial state. When it is detected, the tool 3 is lowered and the cylinder 8 is moved up and down.
Although not shown, the control means for controlling the timing of the return operation is constituted by a combination of these limit switches and a known sequence circuit.

【0015】以上の一連の工程で、1回の加工工程が終
了するが、これだけでは、充分な擦過効果を期待できな
い虞れがあるので、再度(a)乃至(d)から成る一連
の工程を必要な回数だけ繰り返すようにする。これによ
り、ワーク6の被加工面は、上述した砥粒流動による擦
過作用が多数回繰り返される結果、面粗度の極めて優れ
た仕上げ面に変貌することになる。
One processing step is completed by the above series of steps. However, since it may not be possible to expect a sufficient rubbing effect by this alone, the series of steps (a) to (d) is repeated. Repeat as many times as you need. As a result, the work surface of the work 6 is transformed into a finished surface having extremely excellent surface roughness as a result of the above-described rubbing action due to the flow of abrasive grains being repeated many times.

【0016】以上説明したように、本実施例装置によれ
ば、極めて簡易・簡便な構造から成るにも拘らず、手作
業を必要とせずに精度良い研摩(擦過)加工を行い得る
ように容易にシステム構成でき、しかもワークの被加工
面の面粗度を良好に仕上げることができ、作業能率や効
率が飛躍的に向上すると共に仕上げ工程の簡略化や自動
化が図れ、合理的・経済的である。
As described above, according to the apparatus of this embodiment, it is possible to perform accurate polishing (scratching) without requiring manual work, although it has an extremely simple and simple structure. The system can be configured in a good manner, and the surface roughness of the work surface of the workpiece can be excellently finished, work efficiency and efficiency are dramatically improved, and the finishing process can be simplified and automated, which is rational and economical. is there.

【0017】尚、ワーク6は、ワーク内側に粘弾性体12
が戻る(あるいは戻り易い)ような内面(被加工面)形
状であり、ワーク内側からワーク内面に沿って粘弾性体
が流動する(あるいは流動し易い)ような内面形状であ
る、例えば凹状の被加工面を有することが原則となる。
とすれば、例えばワイヤ放電加工によって穿設された上
下に貫通した穴を有するワークに対し、その穴の内周面
を表面粗さ的に良好に仕上げたいような場合、底が無い
のであるから、本実施例装置を用いて研摩作業を行うこ
とはできない。
The work 6 has a viscoelastic body 12 inside the work.
Has an inner surface (working surface) shape that returns (or easily returns), and an inner surface shape in which the viscoelastic body flows (or easily flows) along the inner surface of the work from the inside of the work, such as a concave work surface. In principle, it has a processing surface.
If so, for example, for a work having a hole penetrating vertically by wire electric discharge machining, if there is no bottom when it is desired to finish the inner peripheral surface of the hole with good surface roughness, Polishing work cannot be performed using the apparatus of this embodiment.

【0018】しかしながら、このようなワークに対して
も、ワーク下側に所定部材(図示せず)を当てがって下
穴を塞ぎ、便宜的・一時的に底を設けてやりさえすれ
ば、本実施例装置によって加工を行い得ることは言うま
でもない。また、例えばワークが型彫り放電加工によっ
て1次的に形造られたようなものの場合、その放電電極
をそのまま(あるいはある程度の表面処理を施して)本
実施例における工具として流用することも可能である。
However, even for such a work, if a predetermined member (not shown) is applied to the lower side of the work to close the prepared hole, and a bottom is provided for convenience and temporarily, It goes without saying that processing can be performed by the apparatus of this embodiment. Further, for example, in the case where the work is formed by die-sinking electric discharge machining, it is possible to use the electric discharge electrode as it is (or after a certain surface treatment) as a tool in this embodiment. is there.

【0019】更に、本明細書においては、加工時にはみ
出る粘弾性体12を凹所中央に戻す手段としては、シリン
ダ8等を用いて構成されているが、本発明の思想自体は
これに何ら制限されるものではなく、様々の態様のもの
が考えられ得ることは言うまでもない。ところで、ワー
ク被加工面(内面)の形状等にもよるが、工具3による
下降加圧時に粘弾性体12が内面を均等に流動するとは限
らない、従って研摩状態が不均一になるような虞れがあ
る場合には、例えば工具3の上下方向の中心軸線と、ワ
ーク6の対応する中心軸線、とを適宜(例えば、上記一
連の工程毎に順次)ずらして加圧パターンを変えていく
加工方法が考えられる。すなわち、このようにすると加
工時の工具及びワーク間の間隙寸法が不均一になり、粘
弾性体12の流動状態が変化・変動する、別言すれば、研
摩状態を制御することができ、これにより、更に優れた
面粗度の被加工面を容易にそして確実に得ることができ
る。
Further, in the present specification, the cylinder 8 or the like is used as a means for returning the viscoelastic body 12 protruding at the time of processing to the center of the recess, but the idea itself of the present invention is not limited thereto. It goes without saying that various modes can be considered instead. By the way, although it depends on the shape of the work surface (inner surface), etc., the viscoelastic body 12 does not always flow evenly on the inner surface when the tool 3 is pressed downward, and therefore the polishing state may become uneven. If there is such a change, for example, the vertical center axis of the tool 3 and the corresponding center axis of the work 6 are appropriately shifted (for example, sequentially in each of the above series of steps) to change the pressure pattern. A method can be considered. That is, in this way, the gap size between the tool and the work during machining becomes non-uniform, and the flow state of the viscoelastic body 12 changes or fluctuates.In other words, the polishing state can be controlled. By this, it is possible to easily and surely obtain a processed surface having a further excellent surface roughness.

【0020】[0020]

【発明の効果】以上説明したように本発明によれば、手
作業に依存することなく良好な面粗度を有する仕上げ面
を容易に形成することができ、作業能率や効率が著しく
向上する。また、これにより仕上げ工程の自動化が図
れ、簡単な構造でかつ取扱いも容易であることから合理
的・経済的である。
As described above, according to the present invention, a finished surface having a good surface roughness can be easily formed without depending on manual work, and work efficiency and efficiency are remarkably improved. Further, this makes it possible to automate the finishing process, has a simple structure, and is easy to handle, which is rational and economical.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は、本発明に係る研摩装置の一実施例の要
部側面断面図である。
FIG. 1 is a side sectional view of an essential part of an embodiment of a polishing apparatus according to the present invention.

【図2】図2は、図1のII−II線に沿い上方側から見た
図である。
FIG. 2 is a view seen from above along the line II-II in FIG.

【図3】図3は、実施例における加工工程図である。FIG. 3 is a process drawing of an example.

【符号の説明】[Explanation of symbols]

3…工具 6…ワーク(被加工物) 6a…凹所 8…シリンダ 12…粘弾性体 14…プレート 3 ... Tool 6 ... Work (workpiece) 6a ... recess 8 ... Cylinder 12 ... Viscoelastic body 14 ... Plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 ワークの上面に開口する凹状の被加工面
に砥粒が混練された粘弾性体を入れ、前記ワークの上方
に前記被加工面と概ね同形状をした凸状の加工面を有す
る工具を対面させ、前記ワークと前記工具との間で上下
方向の相対的な往復運動を行わせ、前記工具とワークと
が所定距離まで接近して前記粘弾性体が前記工具の加工
面と前記ワークの加工面との間隙を流動しながら前記ワ
ークの上面にはみ出す際に前記粘弾性体中の砥粒が前記
ワークの被加工面を圧接しながら擦過し、前記工具とワ
ークとが離間したときに前記はみ出した粘弾性体を前記
ワークの凹状の被加工面内に戻し、前記往復運動と前記
粘弾性体の戻し動作とを繰り返し行って前記ワークの凹
状の被加工面を研摩するようにしたことを特徴とする研
摩方法。
1. A viscoelastic body in which abrasive grains are kneaded is placed in a concave surface to be processed that is open on the upper surface of a work, and a convex surface to be processed having a shape substantially the same as the surface to be processed is provided above the work. A tool having is faced, and a relative reciprocating motion in the vertical direction is performed between the work and the tool, the tool and the work approach to a predetermined distance, the viscoelastic body and the processing surface of the tool. Abrasive grains in the viscoelastic body rubbed while pressing the work surface of the work while protruding into the upper surface of the work while flowing through the gap between the work surface of the work, and the tool and the work were separated from each other. Sometimes the protruding viscoelastic body is returned to the concave work surface of the work, and the reciprocating motion and the returning operation of the viscoelastic body are repeatedly performed to polish the concave work surface of the work. The polishing method characterized in that
【請求項2】 上方側に開口する凹状の被加工面を有す
るワークと、 前記ワークの上方において駆動装置に連結されて上下方
向に往復運動し、前記ワークの被加工面と概ね同形状を
した凸状の加工面を有する工具と、 前記ワークと工具との間で挟まれて加圧変形され、砥粒
が混練された粘弾性体と、 前記ワークに対する前記工具の加圧押圧時に前記ワーク
被加工面と前記工具加工面との間から流動して外部には
み出し得る粘弾性体に対し、外圧を加え前記ワーク被加
工面上にこれを戻す戻し装置と、 前記工具が上昇しているときに前記戻し装置を動作さ
せ、前記戻し装置の戻し動作が終了したとき前記工具が
下降するようにタイミングをとる制御手段とを有し、 前記粘弾性体が前記ワークの被加工面に圧接された状態
で流動する際に前記粘弾性体中の砥粒が前記ワーク被加
工面を繰り返し擦過し得るように構成したことを特徴と
する研摩装置。
2. A work having a concave work surface that opens upward, and a reciprocating motion in the up and down direction connected to a drive device above the work, and has a substantially same shape as the work surface of the work. A tool having a convex processing surface, a viscoelastic body sandwiched between the work and the tool, deformed under pressure, and kneaded with abrasive grains, and the work piece when the tool is pressed against the work. For a viscoelastic body that can flow out between the machining surface and the tool machining surface and protrude to the outside, a returning device that applies external pressure to return the viscoelastic body to the work surface, and when the tool is rising. A state in which the viscoelastic body is brought into pressure contact with the work surface of the workpiece by operating the returning device and controlling the timing such that the tool descends when the returning operation of the returning device is completed. When flowing with Polishing apparatus characterized by abrasive sex body in is constructed so as to repeatedly rubbing the workpiece surface to be processed.
JP3176809A 1991-07-17 1991-07-17 Polishing method and device Pending JPH0523968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3176809A JPH0523968A (en) 1991-07-17 1991-07-17 Polishing method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3176809A JPH0523968A (en) 1991-07-17 1991-07-17 Polishing method and device

Publications (1)

Publication Number Publication Date
JPH0523968A true JPH0523968A (en) 1993-02-02

Family

ID=16020222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3176809A Pending JPH0523968A (en) 1991-07-17 1991-07-17 Polishing method and device

Country Status (1)

Country Link
JP (1) JPH0523968A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105252405A (en) * 2015-09-22 2016-01-20 浙江工业大学 Airflow-assisted abrasive flow polishing method for internal cylindrical surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105252405A (en) * 2015-09-22 2016-01-20 浙江工业大学 Airflow-assisted abrasive flow polishing method for internal cylindrical surface

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