JPH0523881A - Method for confirming position to be irradiated with laser beam - Google Patents

Abstract

PURPOSE:To make a position to be irradiated with a secondary laser beam accurate against an object by means of a visible ray pattern by constructing in such a manner as a part to be heat-processed with the secondary laser beam is directly indicated by each part of the visible ray. CONSTITUTION:The energy E of the laser beam 2a is set by means of a control signal 3a to the extent that the irradiation energy of the laser beam 2b on the object to be worked is not more than a prescribed limit so that, after an object 14 to be worked is irradiated with the laser beam 2b to generate the visible ray by the part of the object irradiated, and when this irradiation is stopped, few traces of the visible ray generation may be left on the object 14 to be worked. Then, when the object 14 to be worked is irradiated with the laser beam 2b, the visible ray is partially generated by this object 14, and therefore, the visible ray pattern 16 corresponding to a scanning pattern G, which is drawn in the space by the laser beam 2b based on the action of a laser beam deflecting mechanism 5, appears on the face of the object 14 to be worked.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention scans an object with a laser beam as invisible light such as a 1.06 .mu.m infrared laser beam emitted from a YAG laser oscillator and scans the portion of the object irradiated with this laser beam. The present invention relates to a method for confirming a position irradiated by a laser beam in a laser processing apparatus that is subjected to thermal processing, and particularly to a method capable of confirming the accurate position.

[0002]

2. Description of the Related Art FIG. 2 is a block diagram of a conventional laser processing apparatus 1. In FIG. 2, 2 indicates that at least one of the energy E of the laser light 2a and the pulse frequency Fp of the laser light 2a continuously emits the pulsed laser light 2a having a wavelength of 1.06 μm and is dependent on the input control signal 3a. A controlled YAG laser oscillator, 3 is an oscillating laser control device that outputs a control signal 3a, 4 is a laser light emitting portion including an oscillator 2 and a control device 3, and 5 is a semitransparent mirror 11.
By scanning the space with the secondary laser beam 2b as the laser beam 2a obtained by changing the traveling direction of the laser beam 2a that has passed through the laser beam by using at least one reflecting mirror, etc., and according to the input control signal 6a. Pattern G for scanning the space with the laser beam 2b and the scanning speed V
And at least one of them is a laser beam deflection mechanism. Then, 6 is a deflection mechanism controller for outputting the control signal 6a, 7 is a condenser lens for condensing the secondary laser light 2b on the workpiece 8, and 9 is the deflection mechanism 5, the controller 6 and the lens 7. In the laser beam scanning unit consisting of 10, 10 is 0.63 μm
He-Ne laser oscillator 12 that emits the visible laser light 12a and a reflecting mirror 13 that reflects the laser light 12a
And the above-mentioned semi-transparent mirror 11 which further reflects the laser light 12a reflected by the mirror 13 into the positioning laser light 12b coaxial with the laser light 2a. In FIG. 2, since the laser processing apparatus 1 is composed of the above-mentioned parts, the laser beam 2
Energy E of a, pulse frequency Fp, and laser light 2
By appropriately setting the scanning pattern G and the scanning speed V for scanning with b in advance by the above-mentioned control devices 3 and 6 and a means (not shown), the secondary laser beam 2b focused by the lens 7 is used. Marking along the pattern G, thermal processing such as welding can be performed on the workpiece 8,
Further, the reference laser light 12c as the positioning laser light 12b deflected by the laser light deflection mechanism 5
It is clear that the position of the thermal processing by the laser beam 2b can be confirmed by using the laser beam scanning unit 9 and the reference laser beam 12c has conventionally been used to form the cross pattern P as shown in FIG. And the workpiece 8 is positioned on the basis of this pattern P.

[0003]

In the laser processing apparatus 1, since the laser light 2a is invisible, the position of the workpiece 8 irradiated with the laser light 2b is confirmed by the positioning device 10 described above. In this case, the wavelengths of the laser beams 2b and 12c are different wavelengths, and the lens 7 exhibits a refractive index according to the wavelength of the transmitted light.
The focused spots of the laser beams 2b and 12c by the lens 7 are formed at different positions on the workpiece 8, and therefore, it is not possible to confirm the position of the thermal processing performed by using the positioning device 10. There is a problem of being accurate.

An object of the present invention is to enable the thermal machining position to be directly confirmed by the laser beam 2b without using the laser beam 12c so that the thermal machining position can be accurately confirmed. is there.

[0005]

To achieve the above object, according to the present invention,

1) A laser light emitting portion that periodically emits a pulsed laser light as invisible light as a primary laser light and has at least one of the energy and pulse frequency of the primary laser light variable, and the primary laser light. Laser light scanning in which at least one of a scanning pattern and a scanning speed for scanning a space with a secondary laser light as the primary laser light obtained by changing the traveling direction and scanning the space with the secondary laser light is variable. A laser processing apparatus that heats a workpiece by irradiation with the secondary laser light, the energy of the primary laser light, the pulse frequency of the primary laser light, and the secondary laser light. Laser beam irradiation parameter that is at least one of the scanning speed of A first procedure for setting and a second procedure for generating a visible light pattern corresponding to the scanning pattern for emitting visible light on the target by scanning the target arranged in the space with the secondary laser light. And a laser light irradiation position confirmation method for confirming the irradiation position of the secondary laser light on the target object by the visible light pattern, wherein the predetermined condition in the first procedure is the second procedure. After irradiating the target with the secondary laser light and then irradiating the target with the secondary laser light, the target is irradiated with the secondary laser light so that almost no trace of the visible light pattern remains. The method for confirming the laser light irradiation position is configured so that the irradiation energy of the portion of the target is reduced, and

2) In the confirmation method described in the above item 1), when the target object is set so that the laser beam irradiation parameter satisfies a predetermined condition, the part of the target object irradiated by the secondary laser beam is A method for confirming the laser light irradiation position is configured as either a workpiece made of a material that generates visible light by a combustion reaction or a laser light positioning object made of the material, and

3) In the confirmation method described in the above item 1), when the target object is set such that the laser beam irradiation parameter satisfies a predetermined condition, the part of the target object irradiated by the secondary laser beam is Either the first laser light positioning object made of a fluorescent material that generates fluorescence in the visible region or the second laser light positioning object covered with the film made of the fluorescent material is used. As a method of confirming the laser light irradiation position.

[0009]

[Operation] With any of the above confirmation methods, it is clear that each part of the visible light pattern directly represents the part that is heat-processed by the secondary laser light when configured as described above. The irradiation position of the secondary laser light on the target can be accurately confirmed by the visible light pattern.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view for explaining that the position of a target object irradiated with a secondary laser beam 2b can be confirmed by the method of the present invention.
2 is that the laser beam positioning device 10 shown in FIG. 2 is not provided. And then
Further, in FIG. 1, 14 is a workpiece corresponding to the workpiece 8 of FIG. 2, and in this case, the workpiece 14 is the lens 7
When the irradiation energy of the portion irradiated with the laser beam 2b through the laser beam is large, a predetermined thermal processing is performed by the light 2b, and when the irradiation energy is below a predetermined limit, the light 2b is emitted.
For example, Al ₂ as a material that leaves almost no traces in the portion that has generated visible light until the visible light is generated by the combustion reaction without discoloring the portion irradiated by O ₃ is formed by TiC, also heat radiation energy of the portion of the workpiece 14 is irradiated with the laser beam 2b by the laser-light emitting unit 4 for adjusting the energy E of the laser beam 2a by a control signal 3a The size is set so that it can be processed, or can be set to a size not larger than the predetermined limit.

In FIG. 1, since each part is configured as described above, first, the irradiation energy of the laser beam 2b on the workpiece 14 is visible at the portion of the workpiece 14 irradiated by the laser beam 2b. When the work 14 is irradiated with the laser beam 2b so as to generate light and then the irradiation is stopped, the irradiation energy below the above-mentioned predetermined limit that hardly leaves the trace of visible light emission on the work 14 Laser beam 2a by control signal 3a
When the energy E is set and the laser beam 2b irradiates the workpiece 14 thereafter, the workpiece 14 partially emits visible light as described above, so that the surface of the workpiece 14 is irradiated with the laser light. Based on the operation of the light deflecting mechanism 5, a visible light pattern 16 corresponding to the scanning pattern G drawn in the space by the laser light 2b appears. In addition, in FIG. 1, the position of the portion of the workpiece 14 that is irradiated with the laser beam 2b through the lens 7 remains unchanged regardless of the energy level of the beam 2b. Therefore, when the visible light pattern 16 is formed on the workpiece 14 as described above, the position of thermal processing by the laser beam 2b on the workpiece 14 can be accurately confirmed by this pattern. When the irradiation of the work piece 14 by 2b is stopped, the visible light pattern 16 also disappears, and almost no trace of the visible light pattern remains on the work piece 14. Then, in the case of FIG. 1, after confirming the laser beam irradiation position as described above, the workpiece 14 is correctly positioned, and then the energy E of the laser beam 2a is increased by the signal 3a. Therefore, it is clear that the workpiece 14 can be subjected to correct thermal processing by the laser beam 2b.

In the above description, when the energy E of the infrared laser light 2a is reduced, the irradiation energy of the portion of the workpiece 14 irradiated with the light 2b is such that the irradiation of the workpiece 14 with the light 2b is stopped. Workpiece 14
Although the irradiation position of the laser beam 2b is confirmed by setting the energy so that the trace of the visible light pattern 16 is hardly left, the energy E of the laser beam 2a is confirmed in the present invention. After irradiating the workpiece 14 with the laser beam 2b, the laser beam irradiation parameter defined by at least one of the three items of the pulse frequency Fp of the laser beam 2a and the scanning speed V of the laser beam 2b. When this irradiation is stopped, the predetermined condition that the irradiation energy of the portion of the workpiece 14 irradiated by the laser beam 2b is reduced so that the traces of the visible light pattern 16 described above hardly remain on the workpiece 14 is satisfied. It is obvious that the setting may be made so that the irradiation position by the laser beam 2b may be confirmed. Then, again, in the above description, the workpiece 14
The position of the laser light irradiation is confirmed by forming the visible light pattern 16 on the laser beam. However, in the present invention, when the laser light irradiation parameter is set to satisfy the predetermined condition, the laser light 2b is set. In order to confirm the laser beam irradiation position, a laser beam positioning object made of the same material as that of the workpiece 14 is used instead of the workpiece 14, in which the irradiated portion generates visible light by the combustion reaction. It is also clear that it is okay.

Further, in the present invention, when the laser beam irradiation parameter is set so as to satisfy the above predetermined condition, the portion irradiated with the laser beam 2b produces fluorescence in the visible region. A first laser beam positioning object made of a fluorescent material may be used instead of the workpiece 14 to check the laser beam irradiation position,
Also, the second laser beam positioning object whose portion irradiated by the laser beam 2b is covered with the film body made of the fluorescent material described above is used instead of the workpiece 14 to confirm the laser beam irradiation position. But it doesn't matter.

[0014]

As described above, according to the present invention,

1) A laser light emitting portion that periodically emits a pulsed laser light as invisible light as a primary laser light, and at least one of energy and pulse frequency of the primary laser light is variable, and a traveling direction of the primary laser light. By scanning a space with a secondary laser light as a primary laser light obtained by changing the laser light and a scanning pattern and at least one of a scanning speed for scanning the space with the secondary laser light are variable. In a laser processing device that performs thermal processing on a workpiece by irradiation with a secondary laser light, the energy of the primary laser light,
A first step of setting a laser light irradiation parameter that is at least one of a pulse frequency of the primary laser light and a scanning speed of the secondary laser light so as to satisfy a predetermined condition; and a second laser light arranged in the space. And a second step of generating a visible light pattern corresponding to the scanning pattern of emitting visible light on the target by scanning the target, the irradiation position of the secondary laser light on the target by the visible light pattern. Is a method of confirming the laser light irradiation position for confirming that the predetermined condition in the first procedure is the second
When the target is irradiated with the secondary laser light in the procedure and then the irradiation of the secondary laser light on this target is stopped, the target is irradiated with the secondary laser light so that almost no trace of the visible light pattern remains on the target. Configure the method for confirming the laser light irradiation position under the condition that the irradiation energy of the part is reduced, and

2) In the confirmation method described in the above item 1), when the target is set such that the laser beam irradiation parameter satisfies a predetermined condition, the part of the target irradiated by the secondary laser beam burns. A method for confirming the laser light irradiation position is configured as either a workpiece made of a material that generates visible light by a reaction or a laser light positioning object made of the material, and

3) In the confirmation method described in the above item 1), when the target object is set so that the laser beam irradiation parameter satisfies a predetermined condition, the part of the target object irradiated by the secondary laser beam is visible. Either as a first laser light positioning object made of a fluorescent material that generates fluorescent light in a region, or as a second laser light positioning object covered with a film made of the fluorescent material. A method for confirming the laser light irradiation position was constructed.

Therefore, with the above-mentioned structure, it is clear that in each of the confirmation methods, each part of the visible light pattern directly represents a part to be thermally processed by the secondary laser light. Therefore, it is possible to accurately confirm the irradiation position of the secondary laser light on the target object by the visible light pattern. Therefore, in the present invention, the thermal processing is performed on the workpiece for the first time by the secondary laser light. When performing or changing the workpiece that has already been work-processed by the secondary laser light and has a predetermined scanning pattern, the workpiece is to be thermally processed in a scanning pattern different from the above scanning pattern. In this case, it is possible to reduce the setup time of the thermal processing work and to reduce the occurrence of defective thermal processing as the workpiece that has been thermally processed at an incorrect position. There is an effect that can be.

[Brief description of drawings]

FIG. 1 is a block diagram of a laser processing apparatus for explaining a method of the present invention.

FIG. 2 is a configuration diagram of a laser processing apparatus for explaining a conventional method for confirming a laser light irradiation position.

FIG. 3 is an auxiliary explanatory diagram of FIG.

[Explanation of symbols]

2a Infrared laser light (primary laser light) 2b Secondary laser light 4 Laser light emitting part 9 Laser light scanning unit 14 Workpiece 15 Laser processing equipment 16 visible light pattern

Claims (3)

[Claims] 1. A laser light emitting part that periodically emits pulsed laser light as invisible light as primary laser light and has at least one of the energy and pulse frequency of the primary laser light variable, and the primary laser light. Laser light scanning in which at least one of a scanning pattern and a scanning speed for scanning a space with a secondary laser light as the primary laser light obtained by changing the traveling direction and scanning the space with the secondary laser light is variable. A laser processing apparatus that heats a workpiece by irradiation with the secondary laser light, the energy of the primary laser light, the pulse frequency of the primary laser light, and the secondary laser light. The laser light irradiation parameter, which is at least one of the scanning speeds, is set so as to satisfy the predetermined condition. A first procedure of a second to generate a visible light pattern corresponding to the scanning pattern which emits visible light to the target by scanning the target object disposed in the space the secondary laser beam
A laser light irradiation position confirmation method for confirming an irradiation position of the secondary laser light on the target object by the visible light pattern, wherein the predetermined condition in the first step is the second step. In the case where after irradiating the target with the secondary laser light after irradiating the target with the secondary laser light, the secondary laser light is used so that almost no trace of the visible light pattern remains on the target. A method of confirming a laser beam irradiation position, characterized in that the irradiation energy of a portion of the target to be irradiated is reduced. 2. The confirmation method according to claim 1, wherein when the target is set such that a laser beam irradiation parameter satisfies a predetermined condition, a part of the target irradiated by the secondary laser beam is burned. A method for confirming a laser light irradiation position, characterized in that it is either a work piece made of a material that generates visible light by a reaction or a laser light positioning object made of the material. 3. The confirmation method according to claim 1, wherein when the target object is set so that a laser beam irradiation parameter satisfies a predetermined condition, the part of the target object irradiated by the secondary laser beam is visible. Either the first laser light positioning object made of a fluorescent material that generates fluorescent light in the region or the second laser light positioning object covered with the film made of the fluorescent material. A method of confirming a laser beam irradiation position, which is characterized by the above.