JPH05232163A - Electrode for measuring surface resistance - Google Patents

Abstract

PURPOSE:To accurately and efficiently measure surface resistance of an object to be measured which cannot be subjected to breakdown test by laying out ring-shaped main and counter electrodes coaxially on the object to be measured. CONSTITUTION:An electrode 1 for measurement is laid out, for example, coaxially on a magneto-optical disk 2. On the other hand, an S ring 4 and a hub 6 are provided at the center part of the magneto-optical disk 2. The electrode 1 is provided with a main electrode 10 and a counter electrode 12. The main electrode 10 is in ring or cylindrical shape with a space at the central part and is made of, for example, stainless steel. On the other hand, the counter electrode 12 is also in ring shape and is made of, for example, stainless steel. Both the main electrode 10 and the counter electrode 12 need to be completely in contact with the surface of the magneto-optical disk 2. It is preferable that both electrodes 10 and 12 are not miniaturized and have own weight to some extent since the surface resistance measuring value changes depending on how the contact is made.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface resistance measuring electrode for measuring the surface resistance of an object to be measured such as a magneto-optical disk.

[0002]

2. Description of the Related Art Conventionally, this type of electrode is composed of a main electrode and a ring-shaped counter electrode. The main electrode has a circular cross section, and has a diameter of 50 mm, for example. The ring-shaped counter electrode has, for example, an inner diameter of 7 to be measured.
It is 0 mm. These main electrode and ring-shaped electrode are arranged concentrically on a magneto-optical disk, for example.

[0003]

However, in such a magneto-optical disk as an object to be measured, a hub and an S ring are projected at the center of the disk. Therefore, the main electrode cannot be brought into direct contact with the disk surface. Therefore,
Conventionally, there is a problem that a complicated work of peeling the hub or the S ring from the disk is required. Further, when the surface of the disk cannot be destroyed, the surface resistance cannot be measured.

An object of the present invention is to provide a display resistance measuring electrode which can efficiently measure surface resistance.

[0005]

According to the present invention, the above object is achieved by a surface resistance measuring electrode comprising a main electrode and a counter electrode, wherein the main electrode has a ring shape. To be done.

[0006]

For example, the main electrode and the ring-shaped counter electrode are concentrically arranged on the object to be measured such as a sample magneto-optical disk. Here, since the main electrode is ring-shaped, even if it is arranged on the magneto-optical disk, for example, the hub and the S ring at the center of the magneto-optical disk do not interfere.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below in detail with reference to the accompanying drawings. It should be noted that the examples described below are suitable specific examples of the present invention, and therefore, various technically preferable limitations are attached thereto, but the scope of the present invention particularly limits the present invention in the following description. Unless otherwise stated, the present invention is not limited to these modes.

Please refer to FIG. 1 and FIG. The surface resistance measuring electrode 1 (hereinafter referred to as an electrode) of this embodiment is concentrically arranged on the magneto-optical disk 2, for example. On the other hand, the S ring 4 and the hub 6 are provided in the center of the magneto-optical disk 2.
Is provided. The electrode 1 has a main electrode 10 and a counter electrode 12. The main electrode 10 has a ring shape or a cylindrical shape having a space in the central portion, and is made of, for example, stainless steel. The main electrode 10 has an outer diameter L1 of 6
The inner diameter is 0 mm, the inner diameter is 50 mm, the height is 30 mm, and the own weight is about 100 g.

On the other hand, the counter electrode 12 has a ring shape as shown in the drawing, and is made of, for example, stainless steel. The counter electrode 12 has, for example, an inner diameter L2 of 70 mm, an outer diameter of 80 mm, a height of 30 mm, and a weight of about 150 g. The main electrode 10 and the counter electrode 12 are concentrically placed on the magneto-optical disk 2 as described above, and at this time, both the main electrode 10 and the counter electrode 12 are completely in contact with the surface of the magneto-optical disk 2. Need to be Since the measured surface resistance value changes depending on this contacting method, it is preferable that both electrodes 10 and 12 have their own weight to some extent without being downsized.

The surface resistance measuring electrode 1 of this embodiment is constructed as described above, and its operation will be described below. The reading surface of the magneto-optical disk is usually surface-treated to protect the substrate and prevent dust adsorption. It is very important to measure the surface resistance value of this surface treatment agent, for example, an ultraviolet curable resin. Here, the manufactured magneto-optical disk has a hub 6 and an S ring 4 in the central portion as described above.
Is installed.

Since the main electrode 10 is ring-shaped, the hub 6
Even if the S ring 4 exists, the main electrode 10 can be arranged on the magneto-optical disk 2 by wrapping the S ring 4 from the surroundings without contacting the hub 6 and the S ring 4. Therefore, it is possible to measure the surface resistance without requiring the work of peeling off the hub 6 and the S ring 4 as in the conventional case.

In actual measurement, as shown in FIG. 2, a constant voltage source 20 and an ammeter I are provided between the main electrode 10 and the counter electrode 12.
To set. That is, the voltage V is applied and the current i is measured. The measurement resistance R of the portion 25 surrounded by the two electrodes 10 and 12 is R = V / I (ohm).

The surface resistance Rs is generally expressed in the unit of (ohm / □), and is multiplied by the electrode constant K in order to convert the measured resistance R into the surface resistance Rs. That is, since the outer diameter of the main electrode 10 is L1 and the inner diameter of the counter electrode is L2, the electrode constant K is given by the formula 1.

[00014]

[Equation 1]

When the main electrode 10 and the counter electrode 12 are arranged on the magneto-optical disk 2, it is convenient to use a jig for alignment. The present invention is not limited to the above embodiment. The electrode of the present invention can measure the surface resistance of not only magneto-optical discs but also general discs such as CD, FD, and WO discs.

[0016]

As described above, by using the electrode of the present invention, for example, the hub or S ring of the magneto-optical disk does not interfere with the surface resistance measurement. For this reason, it becomes possible to accurately and efficiently measure the surface resistance of the sample or the object to be measured, which has an obstacle in the center and which cannot be subjected to a destructive test.

[Brief description of drawings]

FIG. 1 is a plan view showing a state in which a surface resistance measuring electrode according to a preferred embodiment of the present invention is placed on a magneto-optical disk.

FIG. 2 is a side view of FIG. 1 with a partial cross section.

[Explanation of symbols]

 1 electrode 2 magneto-optical disk 4 S ring 6 hub 10 main electrode 12 counter electrode

Claims (1)

[Claims] 1. A surface resistance measuring electrode comprising a main electrode and a counter electrode, wherein the main electrode has a ring shape.