JPH05231980A - Multipurpose airtight apparatus - Google Patents

Abstract

PURPOSE:To enable multipurpose use with simple operation by dividing a sealed vessel and bringing a connection nozzle of a sealed relay unit into contact airtightly with the vessel so that a valve body attached to the vessel is covered. CONSTITUTION:A sealed vessel 21 is divided, a work is housed inside it, and a connection nozzle 33 of a sealed relay unit 32 is brought into contact airtightly with the vessel so that a valve body 28 attached to the vessel 21 is covered. Then a fastener device 35 is made to protrude from the unit 32 into the nozzle 33, to be engaged with and protruded into the valve body 28 and released. Thus inside the vessel 21 and inside the unit 32 can be connected with each other. Therefore by connecting a leak detector 55 for detecting leakage of fluid to be inspected put into the work, an exhausting device 57 for vacuum- pumping the vessel 21 and inside the unit 32 and a purge line 53 for purging, etc., to a suction/discharge nozzle 50 of the unit 32, a task according a purpose can be done with simple operation of bringing the nozzle 33 into contact airtightly with the vessel 21 and releasing the valve body 28 by a device 35.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multipurpose airtight device,
In particular, the present invention relates to a novel multipurpose airtight device used for leak inspection with a test fluid such as helium, vacuum drying and purging.

[0002]

2. Description of the Related Art Conventionally, as an airtight device 1 of this type, one having a structure as shown in FIG. 4, for example, has been known. As shown in the figure, a plurality of closed containers 3 are placed on a base 2 formed in a ring shape. Each closed container 3 is formed, for example, so that it can be divided into upper and lower parts, and accommodates a work in each of them. Also,
A rotary valve 4 is provided at the center of the ring-shaped base 2, and a nozzle 5 is attached to each closed container 3 so as to face the rotary valve 4. Each nozzle 5 is connected to a spool pipe 6 extending radially from the rotary valve 4, and these systems are hermetically sealed and sealed at each connection.

The rotary valve 4 has a fixed flange 7 and a rotary flange 8 as shown in FIG. 5, for example.
Are contacted with each other, the rotary flange 8 is rotated, and the arcuate groove 9 formed in the rotary flange 8 is communicated with the arcuate groove 10 formed in the fixed flange 7, thereby supplying and discharging the fluid. ing.

Therefore, a plurality of closed containers 3 are arranged around one rotary valve 4, and fluid is supplied to and discharged from each closed container 3, so that the fixed flange 7 and the rotary flange 8 are provided.
In addition, a plurality of arc-shaped grooves (not shown) corresponding to the number of the closed containers 3 are formed in multiple concentric circles.

For example, when leak inspection of a work is performed using the airtight device 1 configured as described above, the work filled with a test fluid such as helium is stored in each closed container 3, and the rotary valve 4 is used. The exhaust device 11 is connected to the fixed flange 7 or the rotary flange 8 of the above, the inside of each closed container 3 is made into a high vacuum through the rotary valve 4, and a detector (not shown) connected to the rotary valve 4
The presence or absence of leakage of the inspection fluid filled in the work was detected.

[0006]

By the way, in the conventional airtight device 1, since the fluid is supplied to and discharged from the plurality of closed containers 3 through the single rotary valve 4, the test fluid such as helium is used. Therefore, when performing the leakage inspection of the work, the entire apparatus must be used as a leakage inspection apparatus, and some of the closed containers 3 cannot be used for other purposes such as vacuum drying and purging of the work.

In addition, in order to supply and discharge the fluid to and from the plurality of closed containers 3 by one rotary valve 4, a plurality of arcuate grooves are concentrically formed in the fixed flange 7 and the rotary flange 8. Therefore, there is a problem that the structure of the rotary valve 4 and the pipes around it are complicated.

In view of the above problems, an object of the present invention is to provide a versatile use for leak inspection by a test fluid such as helium, vacuum drying and purging with a simple operation without using a rotary valve having a complicated structure. It is to provide an airtight device that can be.

[0009]

According to the multi-purpose airtight device of the present invention, at least one hermetically-sealed container which is dividable so as to accommodate a work, and attached to the hermetically-sealed container so as to be movable back and forth. At least one valve element which is opened when it is advanced to the outside and closed when it is retracted to the inside, and at least a communication nozzle which is airtightly contacted with the closed container so as to cover the valve element. One closed relay unit, a chucking device that is provided so as to be able to advance and retract from inside the relay unit into the communication nozzle, and that is for engaging with the valve body to open it, and at least attached to the relay unit. A leak detector for detecting a leak of the inspection fluid filled in the work at the supply / discharge nozzle, the sealed container, and the relay unit. The by connecting the purge line for evacuating device and purging the closed container with the relay unit for vacuum pull is achieved.

[0010]

According to the above construction, the closed container is divided and the work is housed therein, and the communication nozzle of the closed relay unit is hermetically sealed in the closed container so as to cover the valve body attached thereto. Abut. In this state, the chucking device is advanced from the relay unit into the communication nozzle,
The chucking device is engaged with the valve body to advance and open it. As a result, the inside of the closed container and the inside of the relay unit are communicated with each other.

Therefore, a leak detector for detecting the leakage of the inspection fluid filled in the work, a closed container, an exhaust device for evacuating the inside of the relay unit, and a closed container for the supply / discharge nozzle of the relay unit. If you connect a purge line etc. to purge the inside of the relay unit,
The operation according to each purpose can be performed by a simple operation of airtightly contacting the communication nozzle of the relay unit with the closed container and opening the valve body with the chucking device.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the multipurpose airtight device according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a system diagram of a multipurpose airtight device according to the present invention, and FIG. 2 is a plan view showing the main part thereof. As shown, on the endless base 20,
A plurality of closed containers 21 are placed, and the endless base 20 is provided with a drive means (not shown) so as to rotate and move with the closed containers 21 placed. Each closed container 21 has a cylindrical body with both ends closed, and is formed so as to be capable of being divided into an upper container 21a and a lower container 21b in order to accommodate a work W. A seal packing 22 is provided at a connecting portion between the upper container 21a and the lower container 21b so as to be hermetically sealed when they are integrated. In the present embodiment, the closed container 21 is formed of a cylindrical body whose both ends are closed.
The shape is not limited to this, and may be formed in other shapes such as a hollow rectangular parallelepiped. Further, the closed container 21 does not necessarily have to be formed so as to be vertically dividable, but may be formed so as to be horizontally dividable if it is hermetically sealed when integrated.

Further, each upper container 21a has an elevating means 2 for dividing or integrating the closed container 21.
3 are provided respectively, and the elevating means 23 are supported by the endless base 20 so as to rotate together with the rotational movement of the endless base 20. In the present embodiment, the elevating means 23 is constituted by, for example, a first cylinder device 24 driven by a pressure fluid such as hydraulic pressure or pneumatic pressure. The cylinder device 24 is connected to a pressure pump 26 via first fluid supply / discharge lines 25a and 25b. In the first fluid supply / discharge lines 25a and 25b,
A first switching valve 27 for switching between supply and discharge of pressure fluid is provided, and a fluid storage tank 64 is connected to the first switching valve 27. In the present embodiment, the elevating means 23 is formed by the cylinder device 24, but the invention is not limited to this, and a mechanism such as a ball screw and a nut may be adopted. It is possible to use an overhead crane or the like without providing 24, although the workability is poor.

Two valve bodies 28 are attached to the side walls of each lower container 21b so as to be movable back and forth.
The valve body 28 is formed of a cylindrical body whose one end is closed, and the closed portion 28a has a disk shape, and protrudes radially outward from the cylindrical portion 28b, and the knob portion 28 is provided at the center thereof.
c is formed so as to project outward in the axial direction. Further, a plurality of slits (not shown) are cut along the axial direction of the cylindrical portion 28b of the valve body 28.
The valve body 28 is inserted into a valve body mounting nozzle 29 formed in the lower container 21b, and a coil spring 30 is externally mounted on a cylindrical portion 28b of the valve body 28.
The coil spring 30 is provided at the opening end 2 of the valve body 28.
It is interposed in a compressed state between 8d and the valve body mounting nozzle 29. Further, a seal packing 31 such as an O-ring is provided in a portion of the closing portion 28b of the valve body 28 that comes into contact with the valve body mounting nozzle 29, and the extension of the coil spring 30 causes the valve body mounting nozzle 29 to move. Plane part 2
9a is urged to seal the inside of the closed container 21. That is, the valve body 28 is attached by a coil spring 30 so as to be able to move back and forth.
When the valve body 28 is retracted into the valve body mounting nozzle 29, the seal packing provided in the closed portion 28b is opened when the inside of the airtight container 21 is opened by being communicated with the outside by the slit cut in the inside. 31 is biased by the flat surface portion 29a of the valve body mounting nozzle 29 to be closed. In this embodiment, the valve body 28 is attached to the lower container 21.
Although it is attached to the side wall of b, it may be attached to the upper container 21a. Further, it is not always necessary to attach the two valve bodies 28 to the closed container 21, and it is sufficient that at least one valve body 28 is attached.

A plurality of relay units 32 are provided around the endless base 20. The unit body 32a of the relay unit 32 is formed of a rectangular parallelepiped casing, and a side wall facing the closed container 21 is provided with a communication nozzle 33 for connecting the relay unit 32 and the closed container 21. .. The inner diameter of the communication nozzle 33 on the tip end side is formed to be larger than the outer diameter of the closed portion 28b of the valve body 28 attached to the closed container 21. Further, the flat surface portion 3 of the communication nozzle 33.
The 3a is provided with a seal packing 34 such as an O-ring so as to be in airtight contact with the flat surface portion 29a of the valve body mounting nozzle 29.

Further, inside the relay unit 32, a chucking device 35 for engaging with the valve element 28 and opening it is provided. This chucking device 35
Is provided in a cylindrical rod guide 36 supported by the unit body 32a.
Are airtightly connected coaxially with the communication nozzle 33. That is, the communication nozzle 33 and the rod guide 36 directly penetrate the unit body 32a, and the seal packing 37,
It is done through 38.

The chucking device 35 is attached to the chuck rod 39 inserted into the rod guide 36, the chuck 40 attached to the end of the chuck rod 39 on the communicating nozzle 33 side, and the other end. And a second cylinder device 41. The cylinder device 41 is adapted to be driven by a pressure fluid such as hydraulic pressure or air pressure.
It is supported and fixed to the frame 2a by a frame 41a. The cylinder device 41 includes a second fluid supply / discharge line 42a,
It is connected to the pressure pump 26 via 42b.
A second switching valve 43 for switching the supply and discharge of the pressure fluid is interposed in the second fluid supply / discharge lines 42a and 42b, and the second switching valve 43 is provided in the fluid storage tank 6
4 is connected.

By supplying / discharging the pressurized fluid to / from the second cylinder device 41, the chuck rod 39 is moved by the rod guide 3.
6 moves back and forth, so that the claw 40 of the chuck 40 is
a is designed to open and close. Specifically, a coil spring 44 is interposed between the claws 40 a of the chuck 40, and the coil spring 44 causes the claw 4 to move.
0a is biased in the opening direction. Further, a tapered portion 40b is formed on the outer side of each claw 40a, and when the chuck rod 39 advances in the rod guide 36, the claw 40a is guided by the tapered portion 40b to expand the communication nozzle 33. When reaching the diameter portion 33b, the chuck 40
Is designed to open. On the other hand, when the chuck rod 39 retracts into the rod guide 36, the claw 40a is guided by the tapered portion 40b and the reduced diameter portion 3 of the communicating nozzle 33.
By reaching 3c, the coil spring 44 is compressed and the chuck 40 is closed.
A double seal packing 45 is provided on the rod guide 36 to support the chuck rod 39 in an airtight manner.

The unit body 32a is the closed container 21.
The relay unit 32 is mounted on a moving base 46 for reciprocating. On this moving base 46,
A third cylinder device 47 is provided, and the cylinder device 47 is driven by a pressure fluid such as hydraulic pressure or pneumatic pressure. The cylinder device 47 is connected to the pressure pump 26 via third fluid supply / discharge lines 48a and 48b. A third switching valve 49 for switching the supply and discharge of the pressure fluid is interposed in the third fluid supply / discharge lines 48a, 48b, and the third switching valve 49 is connected to the fluid storage tank 64. It is connected. By supplying / discharging the pressure fluid to / from the third cylinder device 47, the moving base 46 reciprocates with the relay unit 32 mounted thereon, and when it moves forward, the communication nozzle 33 provided in the relay unit 32. Plane portion 33a of the valve body attachment nozzle 29 provided in the closed container 21
The seal packing 34 provided on the flat surface portion 33a of the communication nozzle 33 maintains the airtightness therebetween.

Further, a supply / discharge nozzle 50 is attached to the unit main body 32a of the relay unit 32, and the supply / discharge nozzle 50 is hermetically connected to the rod guide 36. A leak inspection line 51, a vacuum drawing line 52, and a purge line 53 are connected to the supply / discharge nozzle 50 via piping fittings (not shown) such as teeth.

In the leakage inspection line 51, the fourth switching valve 5
A leak detector 55 is connected via 4 to detect the leak of the inspection fluid filled in the work W in advance. In addition, a gate valve 56 is provided at a connection portion of the evacuation line 52 on the side of the supply / discharge nozzle 50, and the evacuation line 52 evacuates the inside of the closed container 21 and the relay unit 32. It is connected to 57. Further, the vacuum drawing line 52 is branched before the exhaust device 57, and is connected to an auxiliary purge line 52a provided with a fifth switching valve 58. And
The gate valve 56 has a fourth fluid supply / discharge line 59.
It is connected to the pressure pump 26 via a and 59b. A sixth switching valve 60 for switching the supply and discharge of the pressure fluid is interposed in the fifth fluid supply / discharge lines 59a and 59b, and the sixth switching valve 60 is connected to the fluid storage tank 64. It is connected. The gate valve 56 is provided with a detection gauge 61 for detecting the internal pressure of the gate valve 56. Further, the purge line 53 is a line for purging the inside of the closed container 21 and the relay unit 32, and the seventh switching valve 62 is interposed.
By opening / closing the fourth switching valve 54, the gate valve 56, and the seventh switching valve 62, it is possible to select any one of a leak inspection by a test fluid such as helium, a vacuum drying operation, and a purge operation. In this embodiment,
Via one pipe fitting to one supply / discharge nozzle 50,
The leak inspection line 51, the vacuum drawing line 52, and the purge line 53 are connected, but three feed / discharge nozzles 50 are attached to the relay unit 32, and the leak inspection line 51, the vacuum drawing line 52, and the purge line 53 are connected to each. You may. The same applies when a line used for other purposes is connected to the supply / discharge nozzle 50.

In the present embodiment, as shown in FIG. 2, the endless base 2 on which the closed container 21 is placed and which is rotationally moved.
An appropriate number of manipulators 63 are provided around 0. In this manipulator 63, the two valve bodies 28 are attached to the airtight container 21 so that they can move back and forth. Therefore, by grasping and pulling the knob portion 28c of one of the valve bodies 28, the inside of the airtight container 21 is purged. It is used when doing.

Next, the operation of the first embodiment will be described. As described above, the endless base 20 that rotates and moves.
A plurality of closed containers 21 are placed on the top, and a predetermined number of relay units 32 are provided around them. The closed container 21 is sequentially moved toward and away from the relay unit 32 by being rotationally moved. On the other hand, the relay unit 32 is placed on the movable base 46 that reciprocates while facing the closed container 21, and is placed close to or separated from the closed container 21. That is,
When the closed container 21 to be worked is rotated and positioned in front of the relay unit 32, the endless base 20 is temporarily stopped.

In this state, the operation of the multipurpose airtight device of this embodiment is performed, for example, according to the flow chart shown in FIG. First, by operating the first switching valve 27 in the first cylinder device 24 as the elevating means 23, the pressure fluid is supplied and discharged from the first fluid supply lines 25a and 25b, and the upper container 21a is raised. The airtight container 21 is divided into an upper part and a lower part, and the work W is housed inside thereof. And the first
The switching valve 27 of the first fluid supply line 2
The pressure fluid is reversely supplied and discharged from 5a and 25b, and the upper container 21a
Is lowered to integrate the closed container 21 (step A in the figure).

Next, the third cylinder device 47 is provided with a third
The switching valve 49 of the third fluid supply / discharge line 48 is operated.
The pressure fluid is supplied and discharged from a and 48b, the moving base 46 is moved forward, and the relay unit 32 placed on this is brought close to the closed container 21 to be worked. Then, the flat surface portion 33a of the communication nozzle 33 provided in the relay unit 32.
Is a valve body mounting nozzle 29 provided in the closed container 21.
It is brought into contact with the flat surface portion 29a. At this time, the communication nozzle 3
Reference numeral 3 is in contact with the valve body mounting nozzle 29 so as to cover the valve body 28 inserted through the valve body mounting nozzle 29.
Since the seal packing 34 is provided on the flat surface portion 33a of the communication nozzle 33, the airtightness between the communication nozzle 33 and the valve body mounting nozzle 29 is maintained by this (step B in the figure). ).

In this state, the second switching valve 43 is operated in the second cylinder device 41 of the chucking device 35 to supply and discharge the pressure fluid from the second fluid supply lines 42a, 42b, and the rod. The chuck rod 39 is advanced from the inside of the guide 36, whereby the claws 40 of the chuck 40 are moved.
A is advanced toward the valve body 28 of the closed container 21 and is opened by the biasing force of the coil spring 44. Then, the second switching valve 43 is switched to the second switching valve 43.
To the cylinder device 41 of the second fluid supply line 42
The pressure fluid is supplied and exhausted from a and 42b in reverse, and the chuck rod 39 is retracted into the rod guide 36, whereby the claw 40a of the chuck 40 engages and pulls the valve element 28 to release it. At this time, the coil spring 30 mounted on the cylindrical portion 28b of the valve body 28 is in a compressed state. Since a slit is formed in the cylindrical portion 28b of the valve body 28, the inside of the closed container 21 and the inside of the relay container 32 are communicated with each other.

Next, the seventh switching valve 62 of the purge line 53 is opened, and the inside of the closed container 21 is cleaned by the purge line 53 via the relay unit 32 (step C in the figure). At this time, the leak inspection line 5
The fourth switching valve 54 of No. 1 and the gate valve 56 of the evacuation line 52 are closed.

Alternatively, the gate valve 56 of the evacuation line 52 is opened and the evacuation device 5 of the evacuation line 52 is opened.
7 through the relay unit 32, the closed container 2
Vacuum drying of the work W stored in 1 is performed (step D in the figure). At this time, the seventh switching valve 62 of the purge line 53 and the fourth switching valve 5 of the leakage inspection line 51.
4 is closed. Then, after the vacuum drying of the work W is completed, the fifth switching valve 58 of the auxiliary purge line 52a branched from the vacuum drawing line 52 is opened to purge the inside of the closed container 21.

Alternatively, the work W in the closed container 21 is filled with a test fluid such as helium (step E in the figure), the gate valve 56 of the vacuum drawing line 52 is opened, and the vacuum drawing line 52 is evacuated. After the inside of the closed container 21 is made into a vacuum atmosphere by the device 57 via the relay unit 32 (step F in the drawing), the fourth switching valve 54 of the leak inspection line 51 is opened to open the inside of the closed container 21. Charge the leak sample (step G in the figure). Next, the workpiece W is leaked by the leak detector 55 of the leak inspection line 51.
It is determined whether or not the leakage inspection is successful (step H in the figure). After that, the seventh switching valve 62 of the purge line 53 is opened to evacuate the gas in the closed container 21 and the relay unit 32 (step I in the drawing) or after performing air supply cleaning ( In the figure, step J), the above work W
Based on the pass / fail judgment of
Step K).

As described above, by opening and closing the fourth switching valve 54, the gate valve 56 and the seventh switching valve 62, any operation of leak inspection by a test fluid such as helium, vacuum drying or purging is performed. Can be selected.

Accordingly, the leak detector 55 for detecting the leak of the inspection fluid filled in the work W, the supply / discharge nozzle 50 of the relay unit 32, and the closed container 2 are described.
If the exhaust device 57 for evacuating the inside of the relay unit 32 and the relay unit 32, and the purge line 53 for purging the inside of the relay unit 32 and the closed container 21 are connected, the communication nozzle 33 of the relay unit 32 is closed. 21 is airtightly brought into contact with the valve body mounting nozzle 29, and the chucking device 35 pulls the knob portion 28c of the valve body 28 to open it. You will be able to do it.

As described above, according to the present embodiment, by incorporating the relay unit 32, it is possible to cope with various types and mass production, and since a single process is simplified, there are few troubles of the apparatus and the apparatus is small. Maintenance is easy, so even if a problem occurs, you can recover with a short outage,
The operating time can be improved.

In the present embodiment, a plurality of closed containers 21 and a plurality of relay units 32 are provided, but it is needless to say that basically at least one of them is a multipurpose airtight device. Yes.

[0035]

As described above, according to the multi-purpose airtight device of the present invention, the leak inspection by the inspection fluid such as helium, the vacuum drying and the simple operation can be performed without using the rotary valve having the complicated structure. It has an excellent effect that it can be used for multiple purposes such as purging.

[Brief description of drawings]

FIG. 1 is a system diagram showing an embodiment of a multipurpose airtight device according to the present invention.

FIG. 2 is a plan view showing a main part of a multipurpose airtight device according to the present invention.

FIG. 3 is a flowchart showing an example of operation of the multipurpose airtight device according to the present invention.

FIG. 4 is a plan view showing a conventional airtight device.

FIG. 5 is a cross-sectional view showing a rotary valve used in a conventional airtight device.

[Explanation of symbols]

 20 ... Endless base, 21 ... Closed container, W ... Work, 21a ... Upper container, 21b ... Lower container, 22 ... Seal packing, 23 ... Lifting means , 24 ... First cylinder device, 25a, 25b ... First fluid supply / discharge line, 26 ... Pressure pump, 27 ... First switching valve, 64 ... Fluid storage tank, 28 ... Valve body, 28a ... Valve body closed portion, 28b ... Valve body cylindrical portion, 28c ... Valve body knob portion, 29 ... Valve body mounting nozzle, 29a ... Flat part of valve body mounting nozzle, 30 ... Coil spring, 31 ... Seal packing, 32 ... Relay unit, 32a ... Unit body, 33 ... Communication nozzle, 33a ... Communication nozzle Flat part, 34 ... Seal packing, 35 ... Chuck King device, 36 ... Rod guide, 37, 38 ... Seal packing, 39 ... Chuck rod, 40 ... Chuck, 41 ... Second cylinder device, 42a, 42b ... Second Fluid supply / discharge line, 43 ... Second switching valve, 40a ... Claw of chuck, 40b ... Tapered portion of claw, 44 ... Coil spring, 45 ... Seal packing, 46 ... -Movement base, 47 ... Third cylinder device, 48a, 48b ... Third fluid supply / discharge line, 49 ... Third switching valve, 50 ... Supply / discharge nozzle, 51 ...・ Leakage inspection line, 52 ... Vacuuming line, 53 ... Purge line, 54 ... Fourth switching valve, 55 ... Leak detector, 56 ... Gate valve, 57 ... Exhaust device , 58 ... Fifth switching valve, 5 9a, 59b ... Fourth fluid supply / discharge line, 60 ... Sixth switching valve, 61 ... Detection gauge, 62 ... Seventh switching valve, 63 ... Manipulator.

Claims (8)

[Claims] 1. At least one hermetically sealed container formed so as to accommodate a work, and attached to the hermetically sealed container so as to be capable of advancing and retreating, and opened when advancing to the outside and closed when retracting to the inside. At least one valve body, and at least one hermetic relay unit including a communication nozzle that is in airtight contact with the hermetically sealed container so as to cover the valve body, and from the relay unit to the communication nozzle. A chucking device that is provided so as to move back and forth to engage with and open the valve body, and at least one supply / discharge nozzle attached to the relay unit. Multipurpose airtight device. 2. The multipurpose airtight device according to claim 1, wherein the hermetically sealed container is mounted on a moving base that is close to or separated from the relay unit. 3. The multipurpose airtight device according to claim 1, wherein the relay unit is mounted on a moving base that is close to or away from the closed container. 4. The multipurpose airtight device according to claim 1, wherein the airtight container is provided with an elevating means for dividing or integrating the airtight container. 5. The leak detector for detecting a leak of a test fluid filled in the work is connected to the supply / discharge nozzle.
The multipurpose airtight device according to any one of 1. 6. The multipurpose object according to claim 1, wherein an exhaust device for evacuating the airtight container and the relay unit is connected to the supply / discharge nozzle. Airtight device. 7. The multipurpose hermetic seal according to claim 1, wherein a purge line for purging the inside of the closed container and the relay unit is connected to the supply / discharge nozzle. apparatus. 8. A plurality of divisible hermetic containers for housing a work, an endless base for placing and rotating the plurality of hermetic containers, and a hermetic container provided in each hermetic container. Elevating means for dividing or integrating, and at least one valve element that is provided in each closed container so as to be able to move forward and backward and that is opened when entering the outside and closed when retracting inside, and the valve element A predetermined number of hermetic relay units equipped with communication nozzles that are airtightly contacted with the hermetically-sealed container so as to cover them, and an advancing / retreating base for mounting the relay units and reciprocally moving the hermetically-sealed container facing the hermetically-sealed container. A stand, a chucking device that is provided so as to be able to move back and forth from inside the relay unit into the communication nozzle, and that engages with the valve element to open it; a supply / discharge nozzle attached to the relay unit; The supply and discharge Leak detector for detecting leakage of the inspection fluid filled in the work, an exhaust device for evacuating the airtight container and the relay unit, and the airtight container and the relay unit connected through A multi-purpose airtight device comprising: a purge line for purging the air.