JPH05229127A - Nozzle plate and production thereof - Google Patents
Nozzle plate and production thereofInfo
- Publication number
- JPH05229127A JPH05229127A JP4032228A JP3222892A JPH05229127A JP H05229127 A JPH05229127 A JP H05229127A JP 4032228 A JP4032228 A JP 4032228A JP 3222892 A JP3222892 A JP 3222892A JP H05229127 A JPH05229127 A JP H05229127A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- nozzle
- punch
- meniscus
- nozzle plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Nozzles (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明はインクジェットプリンタ
用ノズルプレートとノズルプレートの製造方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nozzle plate for an ink jet printer and a method for manufacturing the nozzle plate.
【0002】[0002]
【従来の技術】インクジェット用プリンタのヘッドには
幾つかのタイプがあり、インク加圧室に連通するインク
通路をノズルプレートにより覆って、インク通路の部分
に開口したノズルからインクを吐出させるように構成し
たものでは、加圧したインクをノズルの軸線方向に正し
く吐出させるために、通常、メッキによる電鋳法によっ
て図7で示すような円を4分割した円弧状のインク導入
部102−bとインク吐出口102cをもつノズル10
2が形成されたノズルプレート101が用いられる。イ
ンクジェットヘッドにおいてインクがノズルから吐出す
る際に、インク導入部に接触点と接線を持つようにメニ
スカスが形成される。このメニスカスの形状は一定の形
とならなければインク飛翔は安定化しない。しかし、こ
のような円弧状のインク導入部102では、メニスカス
103(接触点a)とメニスカス103a(接触点b)
との比較で分かるように、円弧の各点において異なる角
度の接線を持つため、インク4の接触のしかたによって
メニスカス3の形状が安定しない。また、温度変化によ
ってインクの物性、特に粘性が変化によっても、接触の
しかたが変わるため同様なことがおきる。つまり円弧状
のインク導入部102ではインク飛翔は安定化しない。
しかも、ノズルプレートの生産方法がメッキという化学
的方法であるためインク吐出口102cの最小直径部の
管理が大変むずかしく、生産性も悪いためコストも高い
ものであった。2. Description of the Related Art There are several types of ink jet printer heads, in which an ink passage communicating with an ink pressurizing chamber is covered with a nozzle plate so that ink is ejected from nozzles opened in the ink passage portion. In order to discharge the pressurized ink correctly in the axial direction of the nozzle, the structure is such that an arc-shaped ink introduction portion 102-b is formed by dividing a circle into four as shown in FIG. 7 by electroplating by plating. Nozzle 10 having ink ejection port 102c
The nozzle plate 101 on which 2 is formed is used. When the ink is ejected from the nozzle in the inkjet head, a meniscus is formed in the ink introduction portion so as to have a contact point and a tangent line. If the shape of this meniscus does not become a constant shape, the ink flight is not stabilized. However, in such an arc-shaped ink introducing portion 102, the meniscus 103 (contact point a) and the meniscus 103a (contact point b)
As can be seen by comparison with, since the arcs have tangent lines with different angles at each point, the shape of the meniscus 3 is not stable due to the way the ink 4 contacts. The same applies because the contacting method changes even when the physical properties of the ink, particularly the viscosity, change due to temperature changes. That is, the ink flight is not stabilized in the arc-shaped ink introducing portion 102.
In addition, since the nozzle plate is produced by a chemical method such as plating, it is very difficult to control the minimum diameter portion of the ink ejection port 102c, and the productivity is poor, so that the cost is high.
【0003】また特公平1−26837公報に開示され
た方法もあるが、この様なノズルを形成するために、単
葉曲線状的広がりを持つポンチが、ポンチが当接するこ
とにより膨出する体積に見合う体積を持つ凹部を持つダ
イに載置された金属プレートに当接し、形成された膨出
部を研削加工し所要の形状を得るようになっている。と
ころが本方法では、例えばポンチの下降精度とくに下死
点の精度が狂い、下降し過ぎた場合、膨出部の体積がダ
イの凹部より大きくなり、ポンチを圧縮し摩耗を早め
る、また最悪の場合はポンチの細径部を破断してしまう
という問題や、金属プレートがバネ性を有している場合
はポンチを上昇させた直後に形成されたノズル形状が縮
んでしまい、ノズル形状が安定的にできない、高精度に
ならないという問題を有している。また、その他にも金
属プレートの板厚の変化、ポンチ、ダイの加工精度によ
っても膨出部の体積は変化し上記問題は発生し、低コス
トでの安定的なノズルプレートの製作は不可能である。
また、単葉曲線状の導入部は前述したとうり円弧形状に
なるため、インク飛翔は安定化しない。There is also a method disclosed in Japanese Patent Publication No. 1-26837, but in order to form such a nozzle, a punch having a unilateral curvilinear expansion has a volume that swells when the punch abuts. It comes into contact with a metal plate mounted on a die having a recess having a matching volume, and the bulging portion formed is ground to obtain a desired shape. However, in this method, for example, when the punch lowering accuracy, especially the bottom dead center accuracy is incorrect and the tool is lowered too much, the volume of the bulging portion becomes larger than the recess of the die, compressing the punch and accelerating wear, and in the worst case. Is a problem that the small diameter part of the punch is broken, or if the metal plate has spring properties, the nozzle shape formed immediately after raising the punch contracts and the nozzle shape is stable. There is a problem that it is not possible to achieve high precision. In addition, the volume of the bulging portion also changes due to changes in the thickness of the metal plate, punch and die processing accuracy, and the above problems occur, making it impossible to manufacture a stable nozzle plate at low cost. is there.
Further, since the single-leaf curvilinear introducing portion has the shape of a circular arc as described above, ink flight is not stabilized.
【0004】[0004]
【発明が解決しようとする課題】そこで、本発明はこの
ような問題点を解決するもので、その目的とするところ
は安定的に生産のできる低コストで高精度なノズルプレ
ートを提供するところにある。SUMMARY OF THE INVENTION Therefore, the present invention is intended to solve such problems, and an object thereof is to provide a low-cost and highly-accurate nozzle plate that can be stably produced. is there.
【0005】[0005]
【課題を解決するための手段】インク流路を持つ基板
と、インクを飛翔させる手段と、該インクを吐出するノ
ズルが形成されたノズルプレートを持つインクジェット
ヘッドにおいて、該ノズルプレートの該ノズルが該イン
ク飛翔方向に対しインク吐出口最小径部から1度〜10
度の広がり角度をもつ円柱部と、少なくとも該円柱部の
広がり角度より大きい広がり角度を持つ円錐部を持った
漏斗形状であり、該ノズルを有する該ノズルプレートの
製造方法が、厚さ数百ミクロン以下の金属シートに対し
最小直径が数十ミクロンの漏斗状の該ノズルの形成にお
いて、該ノズル形状に見合う漏斗形状を持つポンチと、
該ポンチ先端の細径部より僅かに大きい孔と、該孔入口
に該ポンチが該金属シートに当接、貫通することにより
該金属シートが膨出する体積より少ない体積を持つ面取
り部を設けたダイを持ち、前記ポンチの大径軸部を案内
するストリッパプレートと前記ダイとの間に押圧挟示し
た前記金属プレートに前記ポンチが当接することによっ
て形成された膨出部を、研削加工によって除去しノズル
形状を得ることを特徴としている。In an ink jet head having a substrate having an ink flow path, a means for ejecting ink, and a nozzle plate having nozzles for ejecting the ink, the nozzle of the nozzle plate is 1 degree to 10 degrees from the smallest diameter portion of the ink ejection port with respect to the ink flight direction
Of a funnel shape having a cylindrical portion having a divergence angle of at least 10 degrees and a conical portion having a divergence angle at least larger than the divergence angle of the cylindrical portion, and a method of manufacturing the nozzle plate having the nozzle has a thickness of several hundred microns. In forming the funnel-shaped nozzle having a minimum diameter of several tens of microns with respect to the following metal sheet, a punch having a funnel shape corresponding to the nozzle shape,
A hole slightly larger than the small-diameter portion at the tip of the punch and a chamfered portion having a volume smaller than the volume at which the metal sheet bulges when the punch abuts and penetrates the metal sheet are provided at the hole entrance. A swelling portion formed by abutting the punch against the metal plate pressed between the stripper plate holding the die and guiding the large-diameter shaft portion of the punch and the die is removed by grinding. The feature is that the nozzle shape is obtained.
【0006】[0006]
【実施例】本発明の一実施例を図面を用いて詳細に説明
する。An embodiment of the present invention will be described in detail with reference to the drawings.
【0007】図1が本発明のノズルプレートとノズル形
状を示す図である。2がノズルであり、2−aが円柱部
であり、2−bが円錐部がインク導入部として構成され
ている。このノズル2が多数個形成されたものがノズル
プレート1となる。3がインク4のメニスカス(接触点
a)であり、インク4の導入部として機能する円錐部2
−bの綾に接線を有して形成されている。この接線は円
錐部2−bの綾が直線であるため接する角度が一定に保
たれる。その結果、インク4の円錐部2−bへの接触位
置が接触点aから接触点bへ変化した状態のメニスカス
103−aの形状が示すとうり、メニスカス3で示す形
状と大きな差は無くメニスカスの形成の安定化が図れ
る。このことを従来例を示す図7で示す電鋳法で製作さ
れたノズルプレート101と比較してみる。103がメ
ニスカス(接触点a)であり、103−aはメニスカス
(接触点b)がインク導入部102とインク104が接
触位置が接触点aから接触点bへ変化した状態を示して
いる。インク導入部102は円弧で形成されているた
め、インク4の接触位置によって、接線の角度が変化
し、図1のメニスカス3−aと図7のメニスカス103
−aとの比較により分かるように、図7のメニスカス1
03に対するメニスカス103−aの変形は、図1のメ
ニスカス3に対するメニスカス3−a変形より大きくな
る。FIG. 1 is a view showing the nozzle plate and nozzle shape of the present invention. 2 is a nozzle, 2-a is a cylindrical part, and 2-b is a conical part as an ink introducing part. The nozzle plate 1 is formed by forming a large number of the nozzles 2. Reference numeral 3 denotes a meniscus (contact point a) of the ink 4, and the conical portion 2 functions as an introduction portion of the ink 4.
It is formed to have a tangent line on the line of -b. This tangent line maintains a constant contact angle because the traverse of the conical portion 2-b is straight. As a result, the shape of the meniscus 103-a in the state where the contact position of the ink 4 with the conical portion 2-b changes from the contact point a to the contact point b is similar to that of the meniscus 3 and there is no significant difference. Formation can be stabilized. This will be compared with the nozzle plate 101 manufactured by the electroforming method shown in FIG. 7 showing a conventional example. Reference numeral 103 denotes a meniscus (contact point a), and reference numeral 103-a denotes a state in which the contact position of the meniscus (contact point b) between the ink introducing portion 102 and the ink 104 changes from the contact point a to the contact point b. Since the ink introducing portion 102 is formed by an arc, the angle of the tangent line changes depending on the contact position of the ink 4, and the meniscus 3-a of FIG. 1 and the meniscus 103 of FIG.
As can be seen by comparison with −a, the meniscus 1 of FIG.
The deformation of the meniscus 103-a with respect to 03 is larger than the deformation of the meniscus 3-a with respect to the meniscus 3 of FIG.
【0008】このメニスカス3の形状の安定化は、イン
クジェットヘッドの特性の安定化に大きな影響を及ぼす
ことを図2、図3、図4を用いて説明する。図2はイン
ク吐出前のノズル内の状態を示す。この状態で例えば、
流路上部に振動を伝える上蓋部材と圧電素子を載置した
もの、流路上に発熱素子を載置したもの等に代表される
インク吐出手段5が動作すると、図3で示すようにイン
ク滴4−aが吐出する。インク滴4−aの吐出後の状態
が図4であり、吐出した量に見合うインク空僚部4−b
(ハッチング部)が形成される。この空僚部4−bをメ
ニスカス3の再形成によって元のメニスカスの状態に戻
す。このため、メニスカス3の形が正確に戻るかどうか
がインク飛翔に大きな影響を与える。メニスカス3の形
が毎回変動すると1回に飛翔するインク重量が変化や、
インクが飛び出す時の、メニスカス3からの抵抗力が変
わるため、インク飛翔スピードが変化がおき印字品質に
重大な影響を与える。メニスカス3の円錐部2−bへの
接触点は、連続インク吐出中や間欠インク吐出中等の印
字の状態や、温度、湿度等の外的要因によるインク物性
の変化によっても変化するため、本発明のようにインク
導入部を円錐形とし接触点の多少の変動に対してメニス
カス3の形が大きな変化を起こさないようにしたこと
は、インク飛行安定性に大きな効果ある。The stabilization of the shape of the meniscus 3 has a great influence on the stabilization of the characteristics of the ink jet head, which will be described with reference to FIGS. 2, 3 and 4. FIG. 2 shows a state inside the nozzle before ink ejection. In this state, for example,
When the ink ejecting means 5 typified by an upper lid member for transmitting vibrations and a piezoelectric element mounted on the upper part of the flow path, or a heating element mounted on the flow path operates, the ink droplets 4 are ejected as shown in FIG. -A discharges. FIG. 4 shows a state after the ink droplet 4-a is ejected, and the ink vacancy unit 4-b corresponding to the ejected amount.
(Hatching part) is formed. This air force section 4-b is returned to the original meniscus state by reforming the meniscus 3. For this reason, whether or not the shape of the meniscus 3 accurately returns has a great influence on ink flight. When the shape of the meniscus 3 changes each time, the weight of the ink flying at one time changes,
Since the resistance force from the meniscus 3 when the ink is ejected is changed, the ink ejection speed is changed and the print quality is seriously affected. The contact point of the meniscus 3 with the conical portion 2-b also changes depending on the printing state during continuous ink ejection or intermittent ink ejection, or due to changes in the ink physical properties due to external factors such as temperature or humidity. As described above, the ink introduction portion is formed into a conical shape so that the shape of the meniscus 3 does not change significantly with respect to a slight change in the contact point, which is very effective in ink flight stability.
【0009】図5、図6が本発明のノズルプレートにノ
ズルを形成する時の加工概念図である。10がノズル2
に見合う形状をしてるポンチであり、円錐部10−a、
円柱部10−bで構成されている。12がダイでありポ
ンチ10先端の細径部より僅かに大きい孔13と、孔1
3入口にポンチ10が金属のノズルプレート原料1−a
に当接、貫通する際に膨出する体積(ばり16+抜きカ
ス15)より少ない体積を持つ面取り部14を設けてあ
る。図6のようにポンチ10の大径軸部10−cを案内
するストリッパプレート11とダイ12との間に押圧挟
示した厚さ数百ミクロン以下の金属のノズルプレート素
材1−aにポンチ10が当接、貫通することによって抜
きカス15が孔13に落ち、ばり16が形成する。この
ばり16を研削加工によって除去し図1で示すようなノ
ズル形状を得ることができる。本方法であれば、抜きカ
ス15は抜けてしまうため、ポンチ10先端を圧縮する
力が軽減するため、従来例でみられたポンチ10の先端
部を圧縮して円柱部10−aを破断してしまうようなこ
とは発生しなかった。また、ノズルプレート1に残る膨
出部はばり16のみであり、従来例では研削の必要な体
積が抜きカス15とばり16を合わせた体積分であった
ことに比べ、研削加工で取る際も大幅な時間短縮を図れ
た。ポンチ10の先端部を円柱形状と円錐形状の複合形
状としたため、円弧状の複雑な曲線加工が不要となりポ
ンチ加工の高精度化、加工の簡易化が図れ、また円柱部
10−aを1度より10度迄の広がり角度をつけたこと
により、ポンチ10がノズルプレート1−aを貫通する
際、またはポンチ10を抜く際の抵抗を軽減できるた
め、ポンチ10の低摩耗化に効果があり、結果的に安価
で高精度のノズルプレートを製造できる。ただし、広が
り角度を10度以上取るとポンチの下降精度によって
は、インク吐出口2−cの径の変化が、円柱部2−aの
広がり角度をθとすると、式(インク吐出口2−cの変
化量=2xポンチ10の下降誤差xtanθ)であるた
め、ノズルの円柱部2−aのインク吐出口2−aの径の
寸法変化が大きくなるので、広がり角度は10度以下が
望ましい。5 and 6 are conceptual views of processing when forming nozzles on the nozzle plate of the present invention. 10 is nozzle 2
Is a punch having a shape suitable for
It is composed of a columnar portion 10-b. 12 is a die, which is a hole 13 slightly larger than the small-diameter portion at the tip of the punch 10;
Nozzle plate raw material 1-a in which punch 10 is metal at 3 inlets
The chamfered portion 14 has a volume smaller than the volume (bulb 16 + scrap 15) that swells when coming into contact with or penetrating. As shown in FIG. 6, the punch 10 is formed on the metal nozzle plate material 1-a having a thickness of several hundreds of microns or less, which is pressed and sandwiched between the die 12 and the stripper plate 11 for guiding the large-diameter shaft portion 10-c of the punch 10. The scraps 15 drop into the holes 13 by contacting and penetrating with each other to form burrs 16. By removing this flash 16 by grinding, the nozzle shape as shown in FIG. 1 can be obtained. According to this method, since the punched dust 15 comes off, the force for compressing the tip of the punch 10 is reduced, so that the tip portion of the punch 10 seen in the conventional example is compressed to break the columnar portion 10-a. No such thing happened. Further, the bulging portion remaining on the nozzle plate 1 is only the flash 16, and in the conventional example, the volume required for grinding is the volume of the scraps 15 and flash 16 combined, and I was able to save a lot of time. Since the tip of the punch 10 has a composite shape of a cylindrical shape and a conical shape, complicated arc-shaped curve machining is not required, so that the punch machining can be performed with high accuracy and the machining can be simplified. Since the punch 10 has a divergence angle of up to 10 degrees, the resistance when the punch 10 penetrates the nozzle plate 1-a or when the punch 10 is pulled out can be reduced, which is effective in reducing the wear of the punch 10. As a result, an inexpensive and highly accurate nozzle plate can be manufactured. However, if the divergence angle is 10 degrees or more, the diameter of the ink ejection port 2-c may change depending on the descending accuracy of the punch. If the divergence angle of the columnar portion 2-a is θ, the formula (ink ejection port 2-c Change amount = 2 × descent error of the punch 10 × tan θ), the dimensional change of the diameter of the ink ejection port 2-a of the cylindrical portion 2-a of the nozzle becomes large, and therefore the spread angle is preferably 10 degrees or less.
【0010】本実施例のノズルプレートを使用したイン
クジェットヘッドを製作したところ、インク吐出スピー
ド、インク重量の非常に安定した高印字品質のインクジ
ェットヘッドを得ることができた。When an ink jet head using the nozzle plate of this embodiment was manufactured, it was possible to obtain an ink jet head of high print quality with extremely stable ink ejection speed and ink weight.
【0011】[0011]
【発明の効果】以上述べてきた様に、本発明を実施する
ことにより高性能なノズルプレートを高精度で簡単に加
工ができるという効果を有する。As described above, by carrying out the present invention, a high-performance nozzle plate can be easily processed with high precision.
【図1】本発明のノズル形状実施例を示す断面図。FIG. 1 is a cross-sectional view showing a nozzle shape embodiment of the present invention.
【図2】本発明のノズルプレートを用いた時のインクの
挙動を示す図。FIG. 2 is a diagram showing the behavior of ink when the nozzle plate of the present invention is used.
【図3】本発明のノズルプレートを用いた時のインクの
挙動を示す図。FIG. 3 is a diagram showing the behavior of ink when the nozzle plate of the present invention is used.
【図4】本発明のノズルプレートを用いた時のインクの
挙動を示す図。FIG. 4 is a diagram showing the behavior of ink when the nozzle plate of the present invention is used.
【図5】本発明の加工実施例を示す図。FIG. 5 is a view showing a working example of the present invention.
【図6】本発明の加工実施例を示す図。FIG. 6 is a view showing a working example of the present invention.
【図7】従来例のノズル形状を示す断面図。FIG. 7 is a sectional view showing a nozzle shape of a conventional example.
1 ノズルプレート 1−a ノズルプレート素材 2 ノズル 2−a 円柱部 2−b 円錐部 2−cインク吐出口 3 メニスカス 3−a メニスカス 4 インク 4−a インク滴 4−b インク空僚 5 インク吐出手段 10 ポンチ 11 ストリッパプレート 12 ダイ 13 孔 14 面取り部 15 抜きカス 16 ばり 101 ノズルプレート 102 ノズル 102−b インク導入部 102−c インク吐出口 103 メニスカス 103−a メニスカス 104 インク 1 Nozzle plate 1-a Nozzle plate material 2 Nozzle 2-a Column part 2-b Cone part 2-c Ink ejection port 3 Meniscus 3-a Meniscus 4 Ink 4-a Ink droplet 4-b Ink bureaucracy 5 Ink ejection means 10 Punch 11 Stripper Plate 12 Die 13 Hole 14 Chamfer 15 Cutout 16 Burr 101 Nozzle Plate 102 Nozzle 102-b Ink Inlet 102-c Ink Ejection 103 Meniscus 103-a Meniscus 104 Ink
Claims (2)
せる手段と、該インクを吐出するノズルが形成されたノ
ズルプレートを持つインクジェットヘッドにおいて、該
ノズルが該インク飛翔方向に対しインク吐出口最小径部
から1度〜10度の広がり角度をもつ円柱部と、少なく
とも該円柱部の広がり角度より大きい広がり角度を持つ
円錐部を持った漏斗形状であることをを特徴とするノズ
ルプレート。1. An ink jet head having a substrate having an ink flow path, means for ejecting ink, and a nozzle plate having nozzles for ejecting the ink, wherein the nozzle is an ink ejection port in the ink ejection direction. A nozzle plate having a funnel shape having a cylindrical portion having a divergence angle of 1 to 10 degrees from a minimum diameter portion and a conical portion having a divergence angle larger than at least the divergence angle of the cylindrical portion.
最小直径が数十ミクロンの該漏斗形状の該ノズルの形成
において、該ノズルの該漏斗形状に見合う漏斗形状を持
つポンチと、該ポンチ先端の細径部より僅かに大きい孔
と、該孔入口に該ポンチが該金属シートに当接、貫通す
ることにより該金属シートが膨出する体積より少ない体
積を持つ面取り部を設けたダイを持ち、該ポンチの大径
軸部を案内するストリッパプレートと該ダイとの間に押
圧挟示した前記金属プレートに、前記ポンチが当接、貫
通することによって形成された該膨出部を、研削加工に
よって除去しノズル形状を得ることを特徴とするノズル
プレートの製造方法。2. A punch having a funnel shape corresponding to the funnel shape of the nozzle in forming the funnel-shaped nozzle having a minimum diameter of several tens of microns for a metal sheet having a thickness of several hundreds of microns or less, and the punch. A die provided with a hole slightly larger than the small-diameter portion at the tip and a chamfered portion having a volume smaller than the volume at which the punch abuts and penetrates the metal sheet at the hole entrance and the metal sheet swells Grinding the bulged portion formed by abutting and penetrating the metal plate, which is held between the stripper plate for guiding the large-diameter shaft portion of the punch and the die, and the punch. A method for manufacturing a nozzle plate, characterized by removing by processing to obtain a nozzle shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3222892A JP3389256B2 (en) | 1992-02-19 | 1992-02-19 | Nozzle plate and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3222892A JP3389256B2 (en) | 1992-02-19 | 1992-02-19 | Nozzle plate and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05229127A true JPH05229127A (en) | 1993-09-07 |
JP3389256B2 JP3389256B2 (en) | 2003-03-24 |
Family
ID=12353116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3222892A Expired - Fee Related JP3389256B2 (en) | 1992-02-19 | 1992-02-19 | Nozzle plate and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3389256B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6170934B1 (en) | 1997-02-18 | 2001-01-09 | Fujitsu Limited | Method for apparatus for producing a nozzle plate of an ink-jet head printer |
EP1520703A1 (en) * | 2003-09-30 | 2005-04-06 | Brother Kogyo Kabushiki Kaisha | Method of producing nozzle plate and said nozzle plate |
US7086154B2 (en) | 2002-06-26 | 2006-08-08 | Brother Kogyo Kabushiki Kaisha | Process of manufacturing nozzle plate for ink-jet print head |
JP2008001072A (en) * | 2006-06-26 | 2008-01-10 | Fujifilm Corp | Inkjet recording device |
US8226210B2 (en) | 2009-09-03 | 2012-07-24 | Seiko Epson Corporation | Liquid ejecting head and method of manufacturing the same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155772A (en) * | 1980-02-22 | 1981-12-02 | Celanese Corp | Precise orifice nozzle device for ink injecting printer and its manufacture |
JPS57113079A (en) * | 1980-11-11 | 1982-07-14 | Philips Nv | Method and apparatus for manufacturing jet nozzle board for ink jet printer |
JPH0437426A (en) * | 1990-05-31 | 1992-02-07 | Tanaka Kikinzoku Kogyo Kk | Manufacture of disklike part having fine hole made with straight part and dish part at center part |
JPH0439053A (en) * | 1990-06-04 | 1992-02-10 | Seiko Epson Corp | Production of nozzle |
JPH0577425A (en) * | 1991-02-21 | 1993-03-30 | Hewlett Packard Co <Hp> | Nozzle plate and its preparation |
-
1992
- 1992-02-19 JP JP3222892A patent/JP3389256B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155772A (en) * | 1980-02-22 | 1981-12-02 | Celanese Corp | Precise orifice nozzle device for ink injecting printer and its manufacture |
JPS57113079A (en) * | 1980-11-11 | 1982-07-14 | Philips Nv | Method and apparatus for manufacturing jet nozzle board for ink jet printer |
JPH0437426A (en) * | 1990-05-31 | 1992-02-07 | Tanaka Kikinzoku Kogyo Kk | Manufacture of disklike part having fine hole made with straight part and dish part at center part |
JPH0439053A (en) * | 1990-06-04 | 1992-02-10 | Seiko Epson Corp | Production of nozzle |
JPH0577425A (en) * | 1991-02-21 | 1993-03-30 | Hewlett Packard Co <Hp> | Nozzle plate and its preparation |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6170934B1 (en) | 1997-02-18 | 2001-01-09 | Fujitsu Limited | Method for apparatus for producing a nozzle plate of an ink-jet head printer |
US7086154B2 (en) | 2002-06-26 | 2006-08-08 | Brother Kogyo Kabushiki Kaisha | Process of manufacturing nozzle plate for ink-jet print head |
EP1520703A1 (en) * | 2003-09-30 | 2005-04-06 | Brother Kogyo Kabushiki Kaisha | Method of producing nozzle plate and said nozzle plate |
CN1330490C (en) * | 2003-09-30 | 2007-08-08 | 兄弟工业株式会社 | Method for manufacturing nozzle plate and said nozzle plate |
US7513041B2 (en) | 2003-09-30 | 2009-04-07 | Brother Kogyo Kabushiki Kaisha | Method for producing a nozzle plate |
US7823288B2 (en) | 2003-09-30 | 2010-11-02 | Brother Kogyo Kabushiki Kaisha | Method of producing nozzle plate and said nozzle plate |
JP2008001072A (en) * | 2006-06-26 | 2008-01-10 | Fujifilm Corp | Inkjet recording device |
US8226210B2 (en) | 2009-09-03 | 2012-07-24 | Seiko Epson Corporation | Liquid ejecting head and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JP3389256B2 (en) | 2003-03-24 |
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