JPH0521669Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The invention is a multi-stage pump equipped with a plurality of rotary vane pumps (hereinafter simply referred to as pumps) that can obtain a high degree of vacuum such as 10 Torr or less and high pressure fluid. Regarding rotary vane pumps.

[Prior Art] Conventionally, there has been a two-stage rotary vane pump as shown in FIG. 3, which can obtain a high degree of vacuum. below,
This pump will be explained. Pumps 4a and 4b are mounted on the side of the flange 3 on the output shaft 2 side of the drive motor (hereinafter simply referred to as motor) 1, and the shafts 5a and 5b of each rotor of the pump are placed on the extension line of the output shaft 2 of the motor. The rotor shafts 5a and 5b of each rotor of the two-stage pump are connected to the output shaft 2 of the motor.

In detail, the shaft 5 is attached to the rotor 6a of the first stage pump.
a, and a fitting hole 7a into which the output shaft 2 of the motor is fitted is bored along the inside of the shaft 5a in front of the rotor. Then, the output shaft 2 is inserted into the fitting hole 7a.
Insert the tip. Then, the rotor 6a is integrally fitted around the output shaft 2 using a set screw 8.
Further, a cylindrical cylinder 9a is arranged around the rotor 6a.
Cover it all together. Furthermore, the rear end opening of the cylinder 9a is integrally covered with a center plate 10. The rear shaft 5a of the rotor is rotatably supported by the center plate 10 using a bearing 11. In this way, the flange 3 of the motor
A first stage pump 4a is integrally provided on the side, with the flange serving as a side plate, and a shaft 5a in front of the rotor rotatably supported on a bearing 12 provided in the flange 3 via the output shaft 2.

Further, a shaft 5 behind the rotor of the first stage pump 4a rotatably supported on the center plate 10 is provided.
a extends to the rear of the center plate 10. At the same time, the rotor 6 of the second stage pump 4b
b is integrally provided with a shaft 5b that protrudes to the rear of the rotor, and a fitting hole 7b is provided along the inside of the shaft 5b in the rotor.
Equipped with Then, insert the extended rear shaft 5a of the rotor of the first stage pump into the insertion hole 7b, and attach the rotor 6b of the second stage pump around the shaft 5a of the rotor using the set screw 8. Fit together. Further, the periphery of the rotor 6b of the second stage pump is integrally covered with a cylindrical cylinder 9b. Then, the rear end opening of the cylinder 9b is connected to the side plate 13.
Cover it all together. Further, the shaft 5b at the rear of the rotor of the second stage pump is rotatably supported by the side plate 13 using a bearing 14. In this way, the center plate 1 of the first stage pump 4a
0 side, the center plate 10 is used as a side plate, and the shaft 5 of the first rotor is attached to the bearing 11 with the rotor 6b inside the center plate 10.
It is provided integrally with the second stage pump 4b, which is rotatably supported via a.

Furthermore, the shaft 5b behind the rotor of the second stage pump
extends outward from the side plate 13, and the blowing fan 15 is integrally fitted around the extended shaft 5b of the rotor.

In addition, the rotors 6 of the first and second stage pumps are
A fluid discharge port (not shown) of the first-stage pump 4a and a fluid suction port (not shown) of the second-stage pump 4b are communicated in the center plate 10 interposed between a and 6b. A fluid flow path 16 is provided.

Furthermore, side plates 3 and 1 through which the rotor shafts 5a and 5b of the first and second stage pumps are inserted.
3 and the rotor shaft 5 in the center plate 10.
A sealing material 18 is provided to close the gap between the surroundings of a and 5b and the inner circumferential wall of the insertion hole 17 through which the shaft is inserted.

The two-stage rotary vane pump shown in FIG. 3 has the above configuration.

Next, its operation will be explained. Motor output shaft 2
Rotate. The rotor 6a of the first stage pump fitted around the output shaft and the shaft 5a of the rotor
The rotor 6b of the second stage pump fitted around the
It is rotated together with the output shaft 2. Then, due to the conventionally well-known pumping action, the fluid sucked from the fluid suction port of the first stage pump 4a,
The rotors 6a of the first and second stage pumps are passed through the fluid flow passage 16 in the center plate.
The liquid is sequentially pumped around the fluid 6b by vanes (not shown) and discharged to the outside from the fluid discharge port of the second stage pump 4b.

[Problems to be solved by the invention] By the way, in the conventional two-stage rotary vane pump described above, the rotor shafts 5a and 5b of the first and second stage pumps are connected in series to the output shaft 2 of the motor.
The bearing 1 provided in the flange 3 of the motor
2 and the rotors 6a and 6b of the first and second stage pumps
The bearing 11 in the center plate 10 provided between the bearing 11 and the side plate 13 at the rear end of the second stage pump
It was rotatably supported using a total of three bearings 14 provided inside. Therefore,
It is difficult to adjust the position of the rotor shafts 5a and 5b of the first and second stage pumps relative to the output shaft 2 of the motor, and the axes of the first and second stage rotor shafts 5a and 5b relative to the motor output shaft 2 are difficult to adjust. It was easy to lose my mind.

Therefore, in the conventional two-stage rotary vane pump described above, in consideration of the misalignment of the shaft center positions of the shafts 5a and 5b of the first and second stage rotors with respect to the output shaft 2 of the motor, the first and second stage rotors are The side clearance between the end faces of the rotors 6a, 6b of the pump and the end faces of the side plates 3, 13 and center plate 10 facing the end faces, and the rotor 6
It was necessary to significantly increase the top clearance between the surrounding surfaces of cylinders a and 6b and the inner surfaces of cylinders 9a and 9b.

At the same time, during use, the rotors 6a and 6b of the first and second stage pumps connected in series to the output shaft 2 of the motor vibrate greatly in the vertical and horizontal directions due to their axial center positions being out of alignment. Due to the vibration, the setscrews 8 that fit the rotors 6a and 6b around the output shaft 2 and around the rotor shaft 5a loosen, causing the rotors 6a and 6 of the first and second stage pumps to loosen.
The side clearance between the b end face and the end faces of the side plates 3, 13 and center plate 10 was sometimes disturbed.

Further, in the conventional two-stage rotary vane pump described above, when the rotor shaft 5b is press-fitted into the inner race 14a of the bearing in the side plate 13 at the rear end of the second-stage pump during assembly, the rotor Due to the pressing force applied to the shaft 5b, the rotor shafts 5a,
The setscrews 8, etc. that connect 5b in series become loose, and the length of the rotor shafts 5a and 5b connected in series becomes incorrect. The end faces of the rotors 6a and 6b, the side plates 3 and 13, and the center plate 10
There were cases where the side clearance between the end face and the end face became incorrect.

This means that three or more stages of pumps are arranged side by side on the side of the flange 3 on the output shaft 2 side of the motor, and the rotor shafts of the pumps in each stage are connected to the output shaft 2 of the motor in the same structure as described above. The same applies to conventional multi-stage rotary vane pumps connected in series.

The present invention was made to solve this problem, and its purpose is to connect the rotor shafts 5a and 5b of the pumps of each stage connected in series to the output shaft 2 of the motor. Accurately determine the axis center position,
Another object of the present invention is to provide a multi-stage rotary vane pump in which the side clearances between the end faces of the rotors 6a, 6b of the pumps at each stage and the end faces of the side plates 3, 13 and the center plate 10 are not disturbed during assembly.

[Means for Solving the Problems] In order to achieve the above object, the multistage rotary vane pump of the present invention has a plurality of pumps 4a and 4b are arranged side by side with their rotor shafts 5a and 5b located on an extension line of the output shaft 2 of the motor, and the output shaft 2 of the motor and the shafts 5a of the rotors of the plurality of pumps are arranged side by side. , 5b in series, and the fluid discharge port of one pump 4a adjacent to the plurality of pumps 4a, 4b and the other pump 4b.
In the multistage rotary vane pump, the rotor 6a of the first stage pump 4a adjacent to the motor 1 is connected to the fluid suction port of the rotor 6a of the first stage pump 4a adjacent to the motor 1.
The shaft 5a of the rotor, which is integrally provided in the
b Extends to the rear end, and this extended rotor shaft 5a
The rear part is rotatably supported by the side plate 13 at the rear end of the final stage pump using a bearing 14, and the rotor 6b of each succeeding stage pump is supported around the extended rotor shaft 5a. It is characterized in that it is fitted using a set screw 8 or the like.

[Function] In the multistage rotary vane pump of the present invention,
A rotor shaft 5a integrally provided with the rotor 6a of the first-stage pump extends rearward to be shared with the rotor shaft 5b of the subsequent second-stage pump 4b, and the rear part of the rotor shaft 5a that extends above. is supported by the side plate 13 at the rear end of the final stage pump using a bearing 14, and a bearing supporting the rotor shaft 5a is installed in the center plate 10 between the rotors 6a and 6b of each stage pump. I tried not to prepare. Therefore, the shaft 5a of the rotor of each stage of the pump can be accurately and easily positioned with respect to the output shaft 2 of the motor. Therefore, when using it,
Since the rotor shafts 5a of the pumps in each stage are misaligned with respect to the output shaft 2 of the motor, they do not vibrate significantly vertically or horizontally.

Furthermore, even if a pressing force is applied to the rotor shaft 5a when press-fitting the rotor shaft 5a into the inner race 14a of the bearing in the side plate 13 at the rear end of the pump in the final stage during assembly, each Since the rotor shafts 5a of the stage pumps are integrated, the lengths of the rotor shafts 5a do not vary.

Furthermore, the rear part of the rotor shaft 5a of the first stage pump is connected to the side plate 13 at the rear end of the last stage pump.
When press-fitting into the inner race 14a of the inner bearing, if it is possible to press the end face of the rotor 6a of the first stage pump against the end face of the opposing side plates 3, 3a, the side plates 3, 3
By pressing and supporting the end face of the rotor 6a of the first stage pump on the end face a, the pressure applied to the shaft 5a of the rotor when the bearing 14 is installed causes the second stage pump to fit around the shaft 5a of the rotor. The end face of the rotor 6b of the subsequent pump is strongly pressed against the end face of the center plate 10 facing it, and it is possible to accurately prevent the rotor 6b from moving back and forth around the rotor shaft 5a due to loosening of the set screw 8, etc. .

[Example] Next, an example of the present invention will be described with reference to the drawings.
FIG. 1 shows a preferred embodiment of a two-stage rotary vane pump, which is a multi-stage rotary vane pump of the present invention.
In detail, a structural explanatory diagram of the pump is shown. The embodiment shown in the above figure will be described below. In FIG. 1, the same members as those of the conventional two-stage rotary vane pump shown in FIG. 3 are given the same reference numerals, and their explanations will be omitted. The shaft 5a of the rotor of the first-stage pump adjacent to the motor 1 is passed through the second-stage pump 4b that follows, and extends to the rear of the second-stage pump 4b. The extended rotor shaft 5a is rotatably supported on the side plate 13 at the rear end of the second stage pump using a bearing 14. At the same time, the rotor 6b of the second stage pump is integrally fitted around the extended rotor shaft 5a using a set screw 8. The two-stage rotary vane pump shown in FIG. 1 is characterized by the above configuration. Others are
This is the same as the conventional two-stage rotary vane pump shown in FIG. 3 described above, and its explanation will be omitted.

Next, the operation will be described.
Then, the rotor shaft 5a connected in series to the output shaft 2 rotates, and similarly to the two-stage rotary vane pump shown in Fig. 3, a fluid such as a gas is pumped from the fluid intake port of the first-stage pump 4a through the first-stage and second-stage pumps 4a and 4b in sequence through the fluid flow passage 16 in the center plate by a conventionally known pumping action, and is then discharged to the outside from the fluid discharge port of the second-stage pump 4b.

Next, its effect will be explained. The rotor shaft 5a of the first stage pump is shared with the rotor shaft 5b of the succeeding second stage pump, and both sides of the rotor shaft 5a are connected to sides supporting the output shaft via the output shaft 2 of the motor. Bearing 12 in flange 3 which is a plate and side plate 1 at the rear end of the second stage pump
The shaft 5a of the rotor is supported by a total of two bearings of the bearings 14 in the center plate 10, so that no bearing for supporting the shaft 5a of the rotor is provided in the center plate 10. Therefore, during assembly, the shafts 5a of the rotors of the first and second pumps can be accurately and easily positioned relative to the output shaft 2 of the motor. In addition, since the shafts 5a of the rotors of the first and second stage pumps can be accurately positioned, the rotors 6a and 6b of the first and second stage pumps vibrate significantly vertically and horizontally during operation. There's nothing to do.

In addition, since the rotor shafts 5a of the first and second stage pumps are integrated, the rotor shafts 5a are inserted into the inner race 14a of the bearing in the side plate 13 at the rear end of the second stage pump when assembled. Even if a pressing force is applied to the rotor shaft 5a during press-fitting, the rotor shafts 5a of the first and second stage pumps will expand or contract. Also, the side clearance between the end surfaces of the rotors 6a, 6b of the second-stage pump and the end surfaces of the side plates 3, 13 and the center plate 10 does not go out of order.

Furthermore, in the multi-stage rotary vane pump shown in FIG. A force is applied to the output shaft 2 so that the output shaft 2 can be moved a predetermined distance behind the motor 1 against the elastic force of the wave spring. Therefore, when the rear part of the shaft 5a of the first stage rotor is press-fitted into the inner race 14a of the bearing in the side plate 13 at the rear end of the second stage pump, the shaft 5a of the rotor is connected in series. By moving the output shaft 2 of the motor in the direction of the motor against the elastic force of the wave spring, the end surface of the rotor 6a of the first stage pump is pressed against and supported by the end surface of the flange 3 of the motor, which is a side plate. Due to the pressing force applied to the rotor shaft 5a when the bearing 14 is installed, the end surface of the rotor 5b of the second stage pump fitted around the rotor shaft 5a is strongly pressed against the opposing end surface of the center plate 10. Therefore, it is possible to accurately prevent the rotor 5b from moving back and forth around the rotor shaft 5a due to loosening of the set screw 8. Therefore, the pressing force applied to the shaft 5a of the rotor when mounted on the bearing 14 is applied to the end surfaces of the rotors 6a and 6b of the first and second stage pumps and the side plates 3 and 13, which are adjusted using a stiffness gauge etc. The side clearance between the end face of the center plate 10 is not disturbed.

Further, FIG. 2 shows a preferred embodiment of another two-stage rotary vane pump, which is a multi-stage rotary vane pump of the present invention, and in detail, shows a structural diagram of the pump. The embodiment shown in the above figure will be described below. In the figure, the same parts as those of the two-stage rotary vane pump shown in Fig. 3 are given the same reference numerals.
The explanation will be omitted. Similar to the two-stage rotary vane pump shown in FIG. 1, the rotor shaft 5a of the first-stage pump extends to the rear of the second-stage pump 4b. And this extended rotor shaft 5
The rear part of a is rotatably supported via a bearing 14 on the side plate 13 of the second stage pump, which is the final stage. At the same time, a rotor 6b of a subsequent second-stage pump is fitted around the extended rotor shaft 5a using a set screw 8. Also,
A side plate 3a is provided before and after the first stage pump, and a bearing 12 is provided on the side plate 3a.
is used to rotatably support the front part of the shaft 5a of the first stage rotor. Furthermore, the outer races 12b, 14b of the bearings 12, 14 in the side plates 3a, 13 at the front end of the first stage pump and the rear end of the second stage pump.
A ring-shaped bearing holder 20 integrally covers the side surface and the surrounding surface of the opening of the fitting hole 19 of both side plates into which the bearings 12 and 14 are fitted, and the bearing holder 20 is used to connect the side plates to each other. A liner 21 such as paper is interposed between the opening surrounding surface of the hole 19 and the bearing retainer 20, and the liner 21 is screwed using bolts 22. Then, the bearing retainer 20 is pressed against the side surfaces of the outer races 12b and 14b of the bearings in the fitting holes 19 of both side plates. Also,
One side of the cylindrical joint 23 around the tip of the output shaft 2 of the motor is press-fitted and fixed by shrink fitting or the like. Further, a cylindrical body 24 is integrally extended from the peripheral edge of the flange 3 of the motor toward the front thereof. Then, the front end opening of the cylindrical body 24 is integrally covered with the side plate 3a at the front end of the first stage pump, and the side plate 3a is integrally fixed to the periphery of the opening. At the same time, the shaft 5a of the rotor of the first stage pump
passes through the side plate 3a at the front end of the pump and extends forward thereof. Then, insert the tip of the shaft 5a of the rotor extending forward of the side plate 3a of the first stage pump into the inside of the other side of the joint 23 fitted around the tip of the output shaft 2 of the motor. 2 and the shaft 5a of the rotor of the first stage pump are serially connected via the key 25 using the joint 23. The two-stage rotary vane pump shown in FIG. 2 is characterized by the above configuration. The rest is the same as the two-stage rotary vane pump shown in FIG. 3 described above, and the explanation thereof will be omitted.

Next, its operation will be explained. Motor output shaft 2
Rotate. Then, the shaft 5a of the rotor, which is serially connected to the output shaft 2 using the joint 23, rotates, and as in the vane pump shown in FIG. The fluid sucked into the inside passes through the fluid flow passage 16 in the center plate 10, is sequentially pressure-fed through the first and second stage pumps 4a and 4b, and is then released from the fluid discharge port of the second stage pump 4b. Spit out to the outside.

Next, its effect will be explained. The rotor shafts 5a of the first and second stage pumps are integrated, and the integrated rotor shafts 5a are connected to the bearing 12 in the side plate 3a at the front end of the first stage pump and the side of the rear end of the second stage pump. It is supported by a total of two bearings 14 in the plate 13. Therefore, during assembly, the shafts 5a of the rotors of the first and second pumps can be accurately and easily positioned relative to the output shaft 2 of the motor. Therefore, during the operation, the shafts 5a of the rotors of the first and second stage pumps do not vibrate significantly in the vertical, horizontal, etc. directions.

In addition, since the rotor shafts 5a of the first and second stage pumps are integrated, the rotor shafts 5a are inserted into the inner race 14a of the bearing in the side plate 13 at the rear end of the second stage pump when assembled. Even if a pressing force is applied to the rotor shaft 5a during press-fitting, the rotor shafts 5a of the first and second stage pumps will expand or contract, causing the rotor 6a of the first and second stage pumps to expand or contract. , 6b and the end surfaces of the side plates 3, 13 and center plate 10 will not be disturbed.

Furthermore, before connecting the rotor shaft 5a to the output shaft 2 of the motor in series via the joint 23 and screwing the bearing retainer 20 to the peripheral surface of the opening of the fitting hole 19 of the side plate using the bolt 22, ,
When press-fitting the rear part of the rotor shaft 5a of the first stage pump into the inner race 14a of the bearing in the side plate 13 at the rear end of the second stage pump, move the rotor shaft 5a back and forth, The end face of the rotor 6a of the second pump can be pressed against the end face of the opposing side plate 3a. Therefore,
When installing the bearing 14 on the rear part of the rotor shaft 5a, the end surface of the rotor 6a of the first stage pump is pressed against and supported by the end surface of the side plate 3a, so that the bearing 14 is placed on the rotor shaft 5a when the bearing 14 is installed. Due to the pressing force, the end face of the rotor 6b of the second stage pump is strongly pressed against the end face of the center plate 10, and the rotor 6b of the second stage pump is moved back and forth around the rotor shaft 5a as the set screw 8 is loosened. This can be accurately prevented. Therefore, when installing the bearing 14 on the rear part of the rotor shaft 5a, the rotor 6a, 6b end face of the first stage or second stage pump, the side plate 3a, 13, or the center plate 10 is adjusted using a thickness gauge or the like.
The side clearance between the end face and the end face will not be disturbed.

In the embodiments shown in FIGS. 1 and 2, three or more stages of pumps are arranged side by side on the side of the motor 1, and the shaft 5a of the rotor of the first stage pump is connected to the shaft 5a of the rotor of each stage from the second stage onwards. The shaft 5a of the extended rotor passes through the inside of the pump and extends rearward for a long time, and the rear part of the extended rotor shaft 5a is rotatably supported by a side plate at the rear end of the final stage pump using a bearing. A multi-stage rotary vane pump with three or more stages may be formed by fitting the rotors of the pumps in the second and subsequent stages around the shaft 5a using setscrews 8. A multi-stage rotary vane pump having the same effects as a stage-type rotary vane pump can be constructed.

In addition, using a key etc. around the shaft 5a of the rotor of the first-stage pump, the rotor 5b of the second-stage and subsequent pumps is attached.
You may also fit it.

[Effects of the invention] As explained above, in the multi-stage rotary vane pump of the invention, the rotor shaft of the first stage pump extends rearward and is shared with the rotor shaft of the subsequent second and subsequent stage pumps. The rear part of the extended rotor shaft is rotatably supported by a side plate at the rear end of the last stage pump using a bearing, and the shaft of the rotor is placed in the center plate between the rotors of each stage pump. It is not equipped with a bearing to support it. Therefore, the rotor of each stage of the pump can be accurately and easily positioned with respect to the output shaft of the motor. Therefore, during use, the shaft of the rotor of the first stage pump vibrates significantly vertically and horizontally, causing the rotor of the second and subsequent pumps fitted around the shaft to loosen and move back and forth. Never move.

In addition, since the rotor shafts of the pumps in each stage are integrated, when assembling the rotor shaft, when press-fitting the rotor shaft into the inner race of the bearing in the side plate at the rear end of the pump in the final stage, the shaft of the rotor The length never goes out of order. Therefore, due to the pressing force applied to the rotor shaft when installing the above-mentioned bearings, the common rotor shaft of each stage pump expands or contracts, causing the end faces of the rotor, side plate, and center plate of each stage pump to The side clearance between the two will not go out of order.

Furthermore, the rear part of the shaft of the rotor of the first stage pump,
When press-fitting into the inner race of the bearing in the side plate at the rear end of the final stage pump, if it is possible to press the end face of the rotor of the first stage pump against the end face of the opposite side plate, use the method described above. By pressing and supporting the rotor end face of the first stage pump against the opposing side plate end face, the second stage pump is fitted around the rotor shaft by the pressing force applied to the rotor shaft when the bearing is installed. The end faces of the rotors of the subsequent pumps are strongly pressed against the end faces of the center plate facing them, and it is possible to accurately prevent the rotors from moving back and forth around the shaft of the rotor of the first stage pump. Therefore, the side clearance between the end face of the rotor of each stage of the pump and the side plate or center plate will not be disturbed due to the pressing force applied to the rotor shaft when the bearing is installed.

As a result, according to the present invention, the side clearance between the end face of the rotor of the pump in each stage and the end face of the side plate or center plate, and the top clearance between the peripheral surface of the rotor and the inner face of the cylinder of the pump in each stage are reduced. It is possible to construct a highly efficient multi-stage rotary vane pump by narrowing the width accurately without too much or too little.

[Brief explanation of drawings]

Fig. 1 is a structural explanatory diagram of a two-stage rotary vane pump of the present invention, Fig. 2 is a structural explanatory diagram of another two-stage rotary vane pump of the present invention, and Fig. 3 is a structural explanatory diagram of a conventional two-stage rotary vane pump. It is a diagram. 1... Drive motor, 2... Output shaft, 3... Flange, 4a, 4b... Pump, 5a, 5b... Rotor shaft, 6a, 6b... Rotor, 8... Set screw, 10... Center Plate, 11, 12, 1
4... Bearing, 3, 3a, 13... Side plate, 16... Fluid flow path, 19... Fitting hole,
20...Bearing holder, 21...Liner, 2
3...Joint.

Claims (1)

[Scope of utility model registration request] A plurality of rotary vane pumps are arranged side by side on the side of the drive motor, with the shafts of their rotors located on an extension line of the output shaft of the drive motor, and the output shaft of the drive motor and the rotors of the plurality of rotary vane pumps are arranged side by side. A multi-stage rotary vane pump formed by connecting the shafts in series, and communicating the fluid discharge port of one of the plurality of rotary vane pumps with the fluid suction port of the other rotary vane pump adjacent to each other through a fluid flow passage. , a rotor shaft integrally provided with the rotor of the first stage rotary vane pump adjacent to the drive motor is passed through the inside of each subsequent stage rotary vane pump and extends to the rear end of the last stage rotary vane pump, The shaft rear part of this extended rotor is rotatably supported by a side plate at the rear end of the rotary vane pump of the last stage using a bearing, and the shaft of each of the succeeding stages is supported around the shaft of the extended rotor. A multi-stage rotary vane pump characterized by a rotor fitted into the rotary vane pump.