JPH05212569A - Method and device for precision machining - Google Patents

Abstract

PURPOSE:To enable precise laser machining of a die for producing a three- dimensional shaped product after the shape of a master model by following the master model. CONSTITUTION:The three-dimensional shape of the master model 1 is processed into die data by inverting a digitized model shape data and executing shape correction, the die data are made into laser beam machining data by dividing them into small pieces by X-Y planes and also calculating the output parameter of pulse laser in each divided region and, based on this laser beam machining data, pulse laser of output claculated at each region is radiated to a workpiece. In this way, the die after the shape of master model can be easily and precisely machined without personal difference.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision processing method and apparatus, and more specifically, by laser processing, for example, a master model having a fine three-dimensional shape is used to produce a product having the same shape as the master model. For manufacturing a master model, processing a master model having a fine three-dimensional shape from design data input to CAD, or using the design data without the master model, a fine three-dimensional shape as designed can be obtained. The present invention relates to a precision processing method and apparatus used for directly manufacturing a mold for producing a product having the same.

[0002]

2. Description of the Related Art As a conventional precision processing method, for example, there is a photoetching method whose process is shown in FIG.

Further, Japanese Patent Laid-Open No. 62-24221 includes a laser oscillator 51, a cylindrical convex total reflection mirror 52, a cylindrical concave total reflection mirror 53, a mask plate 54, and a lens 55, as shown in FIG. A laser marking device is disclosed and the laser oscillator 5 is disclosed.
The laser light emitted from 1 is reflected and transmitted by the convex and concave total reflection mirrors 52 and 53 to change the optical axis,
It passes through the mask plate 54. Then, an image such as a character hollowed out on the mask plate 54 is formed on the workpiece 56 by the lens 55, and the image is marked on the workpiece 56.

[0004]

However, among the conventional precision processing methods described above, in the photoetching method, as shown in FIG. 5, an original drawing of a fine pattern is created from a master model and etching is performed. It is difficult to automate processes such as reversal, exposure, development, printing, pattern pasting, correction, etching, and finishing, and the skill is required. There is a point.

Further, the laser marking device described in Japanese Patent Laid-Open No. 62-24221 merely marks a two-dimensional pattern on a part of the surface of the material to be processed, and a tertiary marking is applied to the entire surface of the material to be processed. There is a problem that the original shape cannot be processed, and it has been a problem in the conventional precision processing method to solve these problems.

[0006]

SUMMARY OF THE INVENTION The present invention has been made by paying attention to the above-mentioned problems in the conventional precision machining method, does not require any special skill, and follows a master model if it exists. , If not, by directly inputting the design data, a product having a fine three-dimensional shape according to the master model or the design drawing or a mold for producing the product can be easily manufactured without individual differences. It is an object of the present invention to provide a precision processing method and device capable of performing.

[0007]

The precision machining method according to the first aspect of the present invention reads the three-dimensional shape of the master model and converts it into numerical values to create model shape data, and the model shape data is stored. Along with numerical inversion, the dimensional difference between the master model and the product is corrected based on the transfer characteristic data of the shape from the mold to the product obtained in advance to form the mold data, and the reference XY plane of the mold data is obtained. Laser processing is performed by dividing the area into suitable intervals for processing and converting a coordinate value Z representing the height with respect to the X and Y coordinates indicating the position of each divided area into an output parameter of a pulse laser corresponding to the height. Data is created, and further, based on the laser processing data, it is configured to irradiate the surface of the material to be processed with a pulse laser of the output determined for each of the divided regions, The precision processing apparatus for, by reading the three-dimensional shape of the master model, by numerically converting the three-dimensional shape of the master model into model shape data, model shape data creating means, and by the model shape data creating means The obtained model shape data is numerically inverted, and the dimensional difference between the master model and the product is corrected based on the transfer characteristic data of the shape from the mold to the product obtained in advance to convert the model shape data into mold data. The mold data creating means for converting and the reference XY plane of the mold data obtained by the mold data creating means are divided into small intervals suitable for processing, and the X and Y coordinates representing the position of each divided area are set. The laser machining data is created by converting the coordinate value Z representing the height into the output parameter of the pulse laser corresponding to the height. The processing data creating means, the positioning means for relatively moving and positioning the material to be processed based on the laser processing data obtained by the laser processing data creating means, and the positioning based on the laser processing data. Further, the surface of the material to be processed is provided with a laser processing means for irradiating a pulse laser having an output corresponding to the X and Y coordinate values indicating the position.

In the precision machining method according to the second aspect of the present invention, the shape data is created by converting the designed three-dimensional shape into numerical values, and the reference X- of the shape data is used.
The Y plane is divided into small intervals suitable for processing, and the coordinate value Z representing the height with respect to the X and Y coordinates indicating the position of each divided area is converted into the output parameter of the pulse laser corresponding to the height. According to the laser processing data, based on the laser processing data, the surface of the material to be processed is irradiated with a pulse laser having an output determined for each of the divided regions. Shape data creating means for converting the created three-dimensional shape into shape data by converting it into a numerical value, and a reference XY of the shape data obtained by the shape data creating means.
By dividing the plane into small intervals suitable for processing and converting the coordinate value Z representing the height with respect to the X and Y coordinates representing the position of each divided area into the output parameter of the pulse laser corresponding to the height. Laser processing data creating means for creating laser processing data, positioning means for relatively moving and positioning a material to be processed based on the laser processing data obtained by the laser processing data creating means, and the laser processing data X, Y indicating the position on the surface of the positioned material to be processed based on
The laser processing means for irradiating a pulse laser having an output corresponding to the coordinate value is provided.

Further, in the precision machining method according to the third aspect of the present invention, shape data is created by converting the designed three-dimensional shape into numerical values, and the model shape data is numerically inverted, and The dimensional difference between the design and the product is corrected based on the transfer characteristic data of the shape from the mold to the product obtained in advance to form the mold data, and the reference XY plane of the mold data is divided into small intervals suitable for machining. At the same time, the laser processing data is created by converting the coordinate value Z representing the height with respect to the X and Y coordinates representing the position of each divided area into the output parameter of the pulse laser corresponding to the height,
Furthermore, based on the laser processing data, it is configured to irradiate the surface of the material to be processed with a pulsed laser of the output determined for each of the divided areas, and the precision processing device for this has a designed three-dimensional shape. Shape data creating means for converting the shape data into numerical data and numerically inverting the shape data obtained by the shape data creating means, and based on the transfer characteristic data of the shape from the mold obtained in advance to the product. Suitable for machining the mold data creating means for correcting the dimensional difference between the design and the product and converting the model shape data into mold data, and the reference XY plane of the mold data obtained by the mold data creating means. The pulse laser output parameter corresponding to the height is set to a coordinate value Z representing the height with respect to the X and Y coordinates indicating the position of each divided area. Laser processing data creating means for creating laser processing data by converting into laser data, and positioning for relatively moving and positioning the material to be processed based on the laser processing data obtained by the laser processing data creating means. And a laser processing means for irradiating the positioned surface of the material to be processed with a pulse laser having an output corresponding to the X and Y coordinate values indicating the position, based on the laser processing data. It is characterized in that the above-described configuration of the processing method and apparatus is used as means for solving the above-mentioned conventional problems.

[0010]

In the precision machining method and apparatus according to the present invention, when manufacturing a master model or a mold for producing a product as designed, the three-dimensional shape of the master model is read by the model shape data creating means, Shape data obtained by converting a numerical value or designing a three-dimensional shape without a master model and directly inputting the three-dimensional shape into the shape data creating means to form the shape data by the type data creating means. In addition to processing the data, the laser processing data creating means finely divides the XY plane of the mold data, and the height Z of each divided area.
Is converted into the output parameter of the pulsed laser calculated from the height of the pulse laser to form laser processing data, and the laser processing means and the positioning means are controlled on the basis of the laser processing data to position the X and Y respectively. The material to be processed is irradiated with a pulse laser having an output corresponding to the processing amount of each region according to the coordinate value, whereby the material is processed into a shape according to the mold data. Become. At this time, the mold data is finely divided into intervals suitable for the precision machining on the XY plane, and the mold data is a numerical value corresponding to the inversion of the shape data from the convex shape to the concave shape. In addition to performing inversion, data correction is performed to eliminate the dimensional difference between the master model or the design shape and the product by the function previously obtained from the transfer characteristic data of the shape from the mold to the product. It is possible to easily obtain a mold for producing a product having a fine three-dimensional shape that does not differ from the master model or the design without any individual skill, without requiring any skill.

Further, when the master model or the product is directly processed from the design data instead of the mold processing, the shape data obtained by the shape data creating means is not processed into the mold data and It is sent to the laser processing data creating means and converted into laser processing data, and the same laser processing is performed based on the laser processing data, and anyone can easily obtain the master model or product of the three-dimensional shape as designed. Will be obtained.

[0012]

【Example】

Embodiment 1 FIG. 1 is a system diagram showing a configuration of an embodiment of a precision machining apparatus according to the present invention, in which the precision machining apparatus reads a three-dimensional shape of a master model 1 and digitizes it to obtain the master model. A contact-type surface roughness measuring instrument 2 as a model shape data creating means for converting the three-dimensional shape of 1 into model shape data; and numerical inversion and data correction of the model shape data to obtain the model shape data. First computer 3 as a mold data creating means for processing into mold data
A second computer 4 as a laser processing data creating means for calculating output parameters of a pulse laser for each area of the mold data and converting the mold data into laser processing data; and a second computer 4 based on the laser processing data. According to an instruction from the computer 4, the positioning means 7 for moving and positioning the material 6 to be processed with respect to the laser processing means 5 described below and the second computer 4 based on the laser processing data also perform the positioning. It comprises laser processing means 5 for processing the material 6 to be processed by irradiating the surface of the material 6 to be processed, which is positioned by the means 7, with a pulse laser having an output according to the position.

Next, the processing procedure using the above-described precision processing apparatus will be described. First, the surface roughness measuring instrument 2 reads the three-dimensional shape of the master model 1 and the arithmetic section provided in the surface roughness measuring instrument 2. In the first computer 3 as a means for creating shape data as shape data
Sent to.

The surface roughness measuring device 2 as the model shape data creating means may be a stylus type,
When the irregularities on the surface of the master model are particularly minute, it is preferable to use a non-contact type roughness measuring device such as a laser rather than a stylus type.

Since such a roughness measuring device is designed to measure the shape profile in one axial direction, the scanning line is used to read the three-dimensional shape of the master model and obtain the three-dimensional shape data. The shape must be measured by sequentially shifting. The amount to shift the scanning line is appropriately selected according to the precision of the processing to be performed or the degree of fineness of the irregularities on the master model surface.

Since the shape data thus obtained has the shape of the master model as shown in FIG. 4 (a), for example, it is used as mold data for processing a mold according to the shape of the master model. In addition, in the first computer 3, the inversion of the shape data corresponding to the shape inversion from the convex shape of the master model to the concave shape of the mold is numerically executed. Simultaneously with this inversion, in order to eliminate the dimensional difference between the master model and the product and faithfully reproduce the master model shape, the shape transfer rate from the mold to the product that was previously obtained for the product material By correcting the data using a function that takes into account
The mold data as shown in (b) is created, and the mold data is sent to the second computer 4 as a laser processing data creating means, where it is processed into laser processing data.

In the second computer 4, the reference XY plane of the mold data is finely divided as shown in FIG. 4 (c), for example. This division is shown in FIG. 4D when shown in a cross section corresponding to the shape data shown in FIG.

The width of division at this time is selected according to the processing accuracy required as a product. For example, since the division width may be such that the roughness of the processed pattern is equal to or less than the resolution of human eyes, the division width of 30 μm or less is desirable when the product is observed from a position about 30 cm away, If viewed at a distance of about 1 m, the dividing width may be about 90 μm.

Then, the height Z with respect to the X and Y coordinates of each divided area is obtained, and this height Z is converted into the output parameter of the pulse laser. That is, the type data reference X
-For each region obtained by dividing the output parameter of the pulse laser capable of performing the removal processing by the amount corresponding to the distance (D-Z) from the reference plane P separated from the Y plane by a predetermined distance D to the surface of each region. The laser processing data is obtained by calculating and combining with the X and Y coordinates indicating the position of the area.

The output parameters of this pulse laser include, for example, pulse wave height, duty ratio, number of pulses, and the like, and the laser processing amount can be controlled by adjusting these, but among these, the pulse wave height and duty ratio are constant. However, it is most convenient and reproducible to control by the number of pulses.

Further, by adopting a surface that coincides with the top of the mold data (the deepest portion in the master model) as the reference plane P, the machining amount can be reduced, and economical machining becomes possible.

Based on this laser processing data, the second computer 4 controls the positioning means 7 and the laser processing means 5 to correspond to the positioned X and Y coordinate values and correspond to the processing amount of each area. The material 6 is irradiated with a pulsed laser having an output of only, the material 6 is processed into a shape according to the mold data, and a mold for producing a product having the same shape as the master model can be obtained.

In this case, it is preferable that the pulsed laser has a flat bottom surface of the processed hole without being greatly affected by heat in the peripheral part of the processed hole. That is, for the YAG laser, a pulsed laser having a profile such as a Gaussian distribution obtained by oscillating a CW laser having a single mode or a low order mode by Q switch oscillation is preferable. It is desirable that the laser beam is passed through the mask and then imaged by the objective lens in order to cut the low power portion around the beam that causes sagging around the processed hole. Also in the case of an excimer laser, it is desirable to use a homogenizer or the like to average the power of the beam so that the bottom surface of the processed hole becomes flat.

After the laser processing, sandblasting or the like may be performed as necessary to finish the processing.

Since a series of processes from data creation and data processing to laser processing are all performed by a computer, no special skill is required and anyone can easily obtain a correctly processed mold. be able to.

In the above embodiment, the two computers 3 and 4 control the creation of the mold data from the model shape data, the creation of the laser processing data from the mold data, and the control of the laser processing means 5 and the positioning means 7. Although the configuration has been described, it is possible to perform all of these data processing and control by one computer or separately by using three computers.

Further, when the material 6 to be processed has a three-dimensional curved surface, the laser processing means 5 and the positioning means 7 are used.
Can be replaced with a device as shown in FIG. That is, in FIGS. 3A and 3B, the laser processing means 5 is configured to move along the surface of the material 6 to be processed by the positioning means 7.
Between the laser oscillator (not shown) and the processed portion, an optical path is provided by the optical system including the optical fiber 8 or the mirror 9.

Embodiment 2 FIG. 2 is a system diagram showing the configuration of another embodiment of the precision machining apparatus according to the present invention, in which the precision machining apparatus numerically represents the three-dimensional shape input based on the design. A CAD (computer-aided design device) 11 as a shape data creating unit that converts the shape data into shape data, and an output parameter of a pulse laser is calculated for each area of the shape data to convert the shape data into laser processing data. A computer 12 as a laser processing data creating means, a positioning means 7 for moving and positioning a material 6 to be processed with respect to the laser processing means 5 in accordance with an instruction from the computer 12 based on the laser processing data, and also laser processing. According to an instruction from the computer 12 based on the data, the object positioned by the positioning means 7 is positioned. It is composed of a laser processing means 5 for processing the material 6 to be processed by irradiating the surface of the processing material 6 with a pulse laser having an output according to its position.

Next, the machining procedure using the precision machining apparatus will be described. First, the three-dimensional shape table is numerically input by inputting the three-dimensional shape into the CAD 11 as the shape data creating means based on the design. Figure 4
The shape data as shown in (a) is sent to the computer 12 as a laser processing data creating means.

In the computer 12, the shape data is divided as shown in FIG. 4C, and the same processing as the data processing in the second computer 4 which is the laser processing data creating means of the above embodiment is performed. Is executed,
The shape data is converted into laser processing data.

Then, the computer 12 controls the positioning means 7 and the laser processing means 5 based on the laser processing data, and corresponds to the processing amount of each area corresponding to the positioned X and Y coordinate values. The pulsed laser with a constant output is applied to the material 6 to be processed,
Is processed into a three-dimensional shape as designed, and anyone can easily process a product as designed without using a master model, which can also be used as a master model. .

In this embodiment, the CAD 11 is also substantially a computer, and the computer of the CAD can also be used as the control of the laser processing means 5 and the positioning means 7 and the laser processing data creation means.

Further, in the case of directly machining a die for producing a product in accordance with the designed shape without the master model, it has the same function as the first computer 3 (die data creating means) in the first embodiment. Another computer is the CAD 11 and the computer 1 in the second embodiment.
By inserting it between the two, the shape data created by the CAD 11 is numerically inverted and the shape correction between the mold and the product is performed in the same manner as in the first embodiment, thereby processing the shape data into mold data. You can do it. In this case, it goes without saying that a program for converting shape data into type data may be added to the computer 12 of the second embodiment.

[0034]

As described above, the precision processing method and apparatus according to the present invention have the above-mentioned configuration.
If you have a master model,
If there is no master model, by directly inputting the design data, the master model, the product having a fine three-dimensional shape as designed, or the mold for producing this can be easily and individually processed. It has a very excellent effect of being able to do.

[Brief description of drawings]

FIG. 1 is a configuration diagram illustrating an embodiment of a precision processing apparatus according to the present invention.

FIG. 2 is a configuration diagram for explaining another embodiment of the precision processing device according to the present invention.

FIG. 3A and FIG. 3B are schematic views showing examples of the shapes of laser processing means and positioning means applied when the surface of the material to be processed is a three-dimensional curved surface.

4A to 4E are schematic views conceptually showing a data processing procedure in the precision processing method according to the present invention.

FIG. 5 is a block diagram showing steps of a photoetching method as a conventional precision processing method.

FIG. 6 is a schematic diagram showing a configuration of a laser marking device as a conventional precision processing device.

[Explanation of symbols]

 1 Master Model 2 Surface Roughness Measuring Device (Model Shape Data Creating Means) 3 First Computer (Model Data Creating Means) 4 Second Computer (Laser Machining Data Creating Means) 5 Laser Machining Means 6 Work Material 7 Positioning Means 11 CAD (Shape data creating means) 12 Computer (laser processing data creating means)

Claims (6)

[Claims] 1. Reading a three-dimensional shape of a master model,
The model shape data is created by converting it into a numerical value, and the model shape data is numerically inverted, and the dimensional difference between the master model and the product is calculated based on the transfer characteristic data of the shape from the mold obtained in advance to the product. Corrected to form mold data, the reference XY plane of the mold data is divided into small intervals suitable for machining, and X, Y representing the position of each divided region
Laser processing data is created by converting the coordinate value Z representing the height with respect to the coordinates into the output parameter of the pulse laser corresponding to the height, and further, based on the laser processing data, for each of the divided areas. A precision processing method comprising irradiating a surface of a material to be processed with a pulsed laser having a predetermined output. 2. Shape data is created by converting a designed three-dimensional shape into numerical values, and a reference XY plane of the shape data is divided into small intervals suitable for machining, and each divided area is divided. X, which represents the position
Laser processing data is obtained by converting a coordinate value Z representing the height with respect to the Y coordinate into an output parameter of a pulse laser corresponding to the height, and is defined for each of the divided areas based on the laser processing data. A precision processing method, which comprises irradiating a surface of a material to be processed with a pulsed laser of high output. 3. Shape data is created by converting a designed three-dimensional shape into numerical values, and the model shape data is numerically inverted, and at the same time, the transfer characteristic data of the shape obtained from a mold to a product is obtained in advance. Based on this, the dimensional difference between the design and the product is corrected to form mold data, and the reference XY plane of the mold data is divided into small intervals suitable for processing, and X, Y representing the position of each divided region.
Laser processing data is created by converting the coordinate value Z representing the height with respect to the coordinates into the output parameter of the pulse laser corresponding to the height, and further, based on the laser processing data, for each of the divided areas. A precision processing method comprising irradiating a surface of a material to be processed with a pulsed laser having a predetermined output. 4. Reading the three-dimensional shape of the master model,
Model shape data creating means for converting the three-dimensional shape of the master model into model shape data by digitizing, and the model shape data obtained by the model shape data creating means are numerically inverted and determined in advance. A mold data creating means for correcting the dimensional difference between the master model and the product based on the transfer characteristic data of the shape from the mold to the product and converting the model shape data into mold data, and the mold data creating means. The reference XY plane of the mold data is divided into small intervals suitable for processing, and the coordinate value Z representing the height with respect to the X and Y coordinates representing the position of each divided area is set to the pulse laser corresponding to the height. The laser processing data creating means for creating the laser processing data by converting into the output parameter, and the laser processing data creating means Positioning means for relatively moving and positioning the material to be processed based on the obtained laser processing data, and X, Y indicating the position on the surface of the processed material positioned based on the laser processing data. A precision processing apparatus comprising a laser processing means for irradiating a pulse laser having an output corresponding to a coordinate value. 5. A shape data creating means for converting a designed three-dimensional shape into shape data by digitizing it, and a reference XY plane of the shape data obtained by the shape data creating means suitable for processing. Laser processing data is created by dividing the area into small intervals and converting the coordinate value Z representing the height with respect to the X and Y coordinates indicating the position of each divided area into the output parameter of the pulse laser corresponding to the height. Laser processing data creating means, positioning means for relatively moving and positioning the material to be processed based on the laser processing data obtained by the laser processing data creating means, and positioning based on the laser processing data. A laser processing means for irradiating the surface of the material to be processed with a pulse laser having an output corresponding to X and Y coordinate values indicating the position Precision processing equipment characterized by having. 6. A shape data creating means for converting a designed three-dimensional shape into shape data by numerically converting the shape data, and the shape data obtained by the shape data creating means are numerically inverted and previously obtained. A mold data creating unit that corrects the dimensional difference between the design and the product based on the transfer characteristic data of the shape from the mold to the product and converts the model shape data into mold data, and a mold obtained by the mold data creating unit. The reference XY plane of the data is divided into small intervals suitable for processing, and the coordinate value Z indicating the height with respect to the X and Y coordinates indicating the position of each divided region is output from the pulse laser corresponding to the height. Laser processing data creating means for creating laser processing data by converting into parameters, and laser processing data obtained by the laser processing data creating means Positioning means for relatively moving and positioning the material to be processed based on the laser processing data, and an output corresponding to X and Y coordinate values indicating the position on the surface of the material to be processed positioned based on the laser processing data. A precision processing apparatus comprising a laser processing means for irradiating a pulse laser.