JPH05212374A - Surfactant removal device - Google Patents

Abstract

PURPOSE:To regenerate easily and recycle an activated charcoal of a deteriorated absorptive activity. CONSTITUTION:A treatment tank 11 for supplying part of a treatment water is connected to a membrane module device 6, and an activated charcoal washed away from a membrane module in the membrane module device 6, is allowed to flow into an activated charcoal regeneration tank 14. A surfactant captured by the activated charcoal is decomposed by oxidation in an activated charcoal regeneration tank 14, and is desorbed from the activated charcoal. The regenerated activated charcoal is returned again to the membrane module device 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surfactant-removing apparatus for waste water containing a surfactant, which is discharged from a washing process in a manufacturing line of a semiconductor factory.

[0002]

2. Description of the Related Art Conventionally, a surfactant removing device has been proposed in which a surfactant is adsorbed on powdered activated carbon and the powdered activated carbon is supplemented by a membrane module (Japanese Patent Application No. 3-238).
269).

FIG. 4 is a block diagram showing a conventional surfactant removing device. As shown in FIG. 4, the waste water sent to the waste water tank 1 is sent to the line mixer 4 by the filtration pump 3. On the other hand, the powdered activated carbon is stored in the activated carbon storage tank 7 in the form of a slurry, and is sent to the line mixer 4 by the activated carbon injection pump 9 while being stirred by the activated carbon storage tank agitator 8. In the line mixer 4, wastewater and powdered activated carbon are mixed, and a mixture of these is sent to the tube-type membrane module device 6,
A precoat layer of powdered activated carbon is formed on the surface of the membrane module of the membrane module device 6.

After forming the powder activated carbon precoat, only the wastewater is sent to the tubular membrane module device 6 by the filtration pump 3 so that the surfactant in the wastewater is adsorbed by the powder activated carbon precoated on the surface of the membrane module. .. In this way, the surfactant in the wastewater is removed by the tubular membrane module device 6. The treated water that has passed through the tubular membrane module device 6 is then stored in the treated water tank 11 by the permeated water outlet 10 of the tubular membrane module device 6.

When the adsorbing power of the powdered activated carbon of the tubular type membrane module device 6 is lost, the washing water supply pump 1
2, the treated water in the treated water tank 11 is sent to the tubular membrane module device 6. Then, the activated carbon powder on the surface of the membrane module of the tubular membrane module device 6 is washed off. The waste water after cleaning is discharged from the cleaning water outlet 13 of the tubular membrane module device 6, and the powdered activated carbon flowing out is discarded.

Then, new powdered activated carbon is supplied from the activated carbon storage tank 7 to the tubular membrane module device 6 to form a precoat layer on the surface of the membrane module again. This operation is repeated to remove the surfactant.

[0007]

As described above, in the conventional surfactant removal, the powdered activated carbon supplemented by the membrane module adsorbs the surfactant and discards the powdered activated carbon when the adsorption ability is lost. There is. However, by discarding the powdered activated carbon that has no adsorption capacity,
It produces a large amount of waste.

The present invention has been made in consideration of the above points, and an object of the present invention is to provide a surfactant removing device capable of suppressing the amount of powdered activated carbon to be discarded.

[0009]

Means for Solving the Problems The present invention provides a membrane module device having a membrane module in which a precoat layer of activated carbon is formed, and a waste water tank for storing waste water containing a surfactant and supplying the waste water to the membrane module device. A treated water tank for storing treated water from the membrane module device and returning a part of the treated water to the membrane module device; and an activated carbon regeneration tank into which activated carbon washed from the membrane module connected to the membrane module device flows. The surfactant removal device is characterized in that the activated carbon regeneration tank is configured to oxidatively decompose and separate the surfactant captured by the activated carbon and to return the activated carbon to the membrane module device. ..

[0010]

[Function] The activated carbon formed as a precoat layer on the membrane module adsorbs the surfactant. When the adsorption capacity decreases, a part of the treated water from the treated water tank is returned to the membrane module device to wash the activated carbon from the membrane module. After that, the surfactant adsorbed on the activated carbon is oxidatively decomposed in the activated carbon regenerating tank and separated from the activated carbon.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 are views showing an embodiment of a surfactant removing apparatus according to the present invention. In FIG. 1, the surfactant removing device includes a tubular membrane module device 6 that performs a surfactant removing process. The tubular membrane module device 6 has a plurality of tubular membrane modules 25 as shown in FIG. 3 therein, and a precoat layer 26 of powdered activated carbon is formed on the surface of the tubular membrane module 25. Is becoming

Further, as shown in FIG. 1, waste water containing a surfactant is stored in a waste water tank 1, and the waste water tank 1 is passed through a filtration pump 3 and a line mixer 4 in this order to a tubular membrane module device 6 to be used. To supply.
A treated water tank 11 in which treated water from the membrane module device 6 is stored is connected to the permeated water outlet 10 of the tubular membrane module device 6, and a part of the treated water in the treated water tank 11 is washed water supply pump 12 Is returned to the tubular membrane module device 6.

An activated carbon regeneration tank 14 is connected to the washing water outlet 13 of the tubular membrane module device 6, and an activated carbon regeneration tank agitator 17 is installed in the activated carbon regeneration tank 14. Further, an ozone treatment device 15 is connected to the activated carbon regeneration tank 14 in order to oxidize and decompose the activated carbon in the regeneration tank 14.

A powder activated carbon storage tank 7 is connected to the line mixer 4 via a powder activated carbon supply pump 9 as in the conventional apparatus, and a powder activated carbon storage tank agitator 8 is installed in the powder activated carbon storage tank 7. ..

Next, the operation of this embodiment having such a configuration will be described. In FIG. 1, the wastewater sent to the wastewater tank 1 is sent to the line mixer 4 by the filtration pump 3.
It is mixed with the powdered activated carbon supplied from the powdered activated carbon storage tank 7. Then, these mixtures are sent to the inside of the tubular membrane module device 6, thereby forming a precoat layer 26 of powdered activated carbon on the surface of the tubular membrane module 25 (FIG. 3). During this period, the powdered activated carbon is stored in the powdered activated carbon storage tank 7 in the form of a slurry and is sent to the line mixer 4 by the powdered activated carbon supply while being stirred by the powdered activated carbon storage tank agitator 8.

After forming the precoat layer 26 on the surface of the tubular membrane module 25, only the wastewater is filtered by the pump 3
To the tubular membrane module device 6. As a result, the surfactant in the wastewater is adsorbed by the powdered activated carbon precoated on the surface of the membrane module 25, and thus the surfactant is removed by the tubular membrane module device. The treated water that has passed through the tubular membrane module device 6 is sent from the permeated water outlet 10 of the tubular membrane module device 6 to the treated water tank 11 and stored therein.

Next, the adsorption action of the surfactant by the powdered activated carbon will be described. Adsorption of the surfactant according to the present invention to the powdered activated carbon is different from physical adsorption in which general organic substances are trapped in the fine pores (pores) of the activated carbon. Figure 2
As shown in (b), the surfactant 21 is a polymer compound having a hydrophobic portion (hydrophobic group) 21b and a hydrophilic portion (hydrophilic group) 21a. Then, the hydrophobic portion of the surface of the powdered activated carbon 20 shown in FIG. 2 (c) and the hydrophobic portion (hydrophobic group) 21b of the activator 21 shown in FIG. 2 (b) are connected (FIG. 2). (A)). In this way, the surfactant 21 and the powdered activated carbon 20 are adsorbed by the weak force of about van der Waalsca.

When the adsorption capacity of the powdered activated carbon precoated on the surface of the membrane module 25 of the tubular membrane module device 6 is lost, a part of the treated water in the treated water tank 11 is removed by the washing water supply pump 12 from the tubular membrane module device. 6, the precoated layer 26 of powdered activated carbon formed on the surface of the tubular membrane module 25 is washed off. The waste water after cleaning is discharged from the cleaning water outlet 13 of the tubular membrane module device 6 and sent to the powder activated carbon regenerating tank 14.

Next, the ozone treatment device 15 connected to the powder activated carbon regenerating tank 14 desorbs and decomposes the surfactant supplied to the powder activated carbon to regenerate the powder activated carbon 20.
The powdered activated carbon 20 regenerated in the powdered activated carbon regenerating tank 14 is
It is returned to the inflow side of the tubular membrane module device 6 by the powdered activated carbon transfer pump 16, the precoat layer 26 is formed on the surface of the tubular membrane module 25, and the adsorption treatment of the surfactant is performed.

Next, the regeneration action in the powder activated carbon regeneration tank 14 will be described. As described above, the adsorption of the powdered activated carbon 20 and the surfactant 21 shown in FIG. 2 is performed by the binding between the hydrophobic portion of the surface of the powdered activated carbon 20 and the hydrophobic group 21b of the surfactant 21. Therefore, the surface active agent 21 is desorbed from the powdered activated carbon 20 by decomposing the surface active agent 21 by oxidative decomposition by an oxidizing agent to obtain a compound which is not a polymer compound having a hydrophobic group 21b and a hydrophilic group 21a. You can

As described above, according to this embodiment, it is possible to easily and easily regenerate the powdered activated carbon having a reduced adsorption capacity by the powdered activated carbon regenerator 14. For this reason,
The amount of powdered activated carbon treated as waste can be reduced.

In the above embodiment, an example using powdered activated carbon is shown, but it is not limited to powder and granular activated carbon may be used. An ultraviolet decomposition treatment device may be used instead of the ozone treatment device 15. Furthermore, although the example using the tubular membrane module 25 is shown, the invention is not limited to this, and a hollow fiber membrane module or a flat membrane module may be used.

[0023]

As described above, according to the present invention,
By sending the powdered activated carbon having a reduced adsorption ability to the powdered activated carbon regenerator and oxidatively decomposing the surfactant, the surfactant can be easily and easily released to regenerate the powdered activated carbon.

[Brief description of drawings]

FIG. 1 is a schematic view showing an embodiment of a surfactant removing device according to the present invention.

FIG. 2 is a diagram showing the operation of a powder activated carbon regenerating device.

FIG. 3 is a sectional view showing a tubular membrane module.

FIG. 4 is a schematic view showing a conventional surfactant removing device.

[Explanation of symbols]

 1 Waste Water Tank 4 Line Mixer 6 Tubular Type Membrane Module Device 11 Treated Water Tank 14 Powder Activated Carbon Regeneration Tank 15 Ozone Treatment Tank 20 Activated Carbon 21 Surfactant 25 Tubular Type Membrane Module

Claims (1)

[Claims] 1. A membrane module device having a membrane module on which a precoat layer of activated carbon is formed, a waste water tank for storing waste water containing a surfactant and supplying the waste water to the membrane module device, and a treatment from the membrane module device. The activated carbon regeneration tank is provided with a treated water tank that stores water and returns a part of the treated water to the membrane module device, and an activated carbon regeneration tank that is connected to the membrane module device and into which activated carbon washed away from the membrane module flows. Is a device for removing a surfactant, wherein the surfactant captured by the activated carbon is oxidatively decomposed and released, and the activated carbon is returned to the membrane module device.