JPH05212318A - Liquid jet nozzle - Google Patents
Liquid jet nozzleInfo
- Publication number
- JPH05212318A JPH05212318A JP4019628A JP1962892A JPH05212318A JP H05212318 A JPH05212318 A JP H05212318A JP 4019628 A JP4019628 A JP 4019628A JP 1962892 A JP1962892 A JP 1962892A JP H05212318 A JPH05212318 A JP H05212318A
- Authority
- JP
- Japan
- Prior art keywords
- liquid passage
- liquid
- spray
- width
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B45/00—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
- B21B45/02—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills for lubricating, cooling, or cleaning
- B21B45/0203—Cooling
- B21B45/0209—Cooling devices, e.g. using gaseous coolants
- B21B45/0215—Cooling devices, e.g. using gaseous coolants using liquid coolants, e.g. for sections, for tubes
- B21B45/0233—Spray nozzles, Nozzle headers; Spray systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧延鋼材の冷却や連続
鋳造における二次冷却、物品の洗浄、薬剤散布、消泡等
に使用される、所謂、フラットスプレーノズルの一種で
あって、詳しくは、ノズル本体内に当該ノズル本体の先
端側に向けて液体通路が設けられ、前記液体通路の出口
側近くの内面が砲弾形に形成されているとともに、前記
ノズル本体の先端部に、前記液体通路の中心軸線を含む
仮想平面に沿って溝を設けて、前記液体通路の出口側端
部に、前記中心軸線から一側方に偏らせた状態で、前記
仮想平面に沿って横長の液体噴射用オリフィスが形成さ
れている液体噴射ノズルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is a kind of so-called flat spray nozzle used for cooling rolled steel, secondary cooling in continuous casting, washing of articles, spraying chemicals, defoaming, etc. The liquid passage is provided in the nozzle body toward the tip side of the nozzle body, the inner surface near the outlet side of the liquid passage is formed into a shell shape, and the liquid is provided at the tip portion of the nozzle body. A groove is provided along an imaginary plane that includes the central axis of the passage, and a liquid jet that is laterally long along the imaginary plane is provided at the outlet side end of the liquid passage, which is biased to one side from the central axis. The present invention relates to a liquid ejecting nozzle having an orifice for use therein.
【０００２】[0002]
【従来の技術】冒記液体噴射ノズルは、例えば、液体通
路の中心軸線に沿う方向での被噴射物との間隔が変動し
ても、被噴射物に対するスプレー幅の一端位置が変動し
ないよう、液体通路の中心軸線から一側方に偏らせた状
態で、液体通路の中心軸線を含む仮想平面に沿って横長
の液体噴射用オリフィスを形成し、液体噴射方向を液体
通路の中心軸線方向とその方向よりも左右いずれか一側
方に振った方向とに亘る扇形範囲に規制したものであ
る。このような液体噴射ノズルとして、従来、図５乃至
図７に示すように、ノズル本体０１内に当該ノズル本体
０１の先端側に向けて液体通路０２を設け、液体通路０
２の出口側近くの内面を砲弾形に形成するとともに、ノ
ズル本体０１の先端部に、液体通路０２の中心軸線Ｘを
含む仮想平面Ａに沿って、当該ノズル本体０１の前面０
３側から一側面０４側に亘る断面Ｖ字状の溝０５を設け
て、液体通路０２の出口側端部に、仮想平面Ａに沿って
長い楕円状の液体噴射用オリフィス０６を、中心軸線Ｘ
から一側方に偏らせた状態で形成したものがある。図８
は、噴射圧力を1.0kgf/cm2、ノズル前面０３から被噴射
面Ｇ迄の距離Ｌを125mmに設定して、上記従来の液体噴
射ノズル０７で水を噴射した場合のスプレーパターンの
実験例を示し、図８（イ）は、被噴射面Ｇをスプレー幅
Ｂ方向に等間隔で分割して、各分割幅部分に一分間に噴
射された流量（流量密度）のスプレー幅Ｂ方向での分布
を示し、図８（ロ）は、スプレー幅中央位置での分割幅
部分を、更にスプレー厚さＤ方向に等間隔で分割して、
各分割厚さ部分に一分間に噴射された流量（流量密度）
のスプレー厚さＤ方向での分布を示す。図８（イ）に示
すように、スプレー幅Ｂ方向での流量密度分布がスプレ
ー幅Ｂ方向の略中央位置にピークが存在する凸形に分布
しており、図８（ロ）に示すように、スプレー厚さＤが
比較的薄い特徴を有している。2. Description of the Related Art In a liquid jet nozzle, for example, even if the space between the liquid jet nozzle and the object to be jetted in the direction along the central axis of the liquid passage changes, one end position of the spray width with respect to the object to be jetted does not change. A laterally long liquid ejection orifice is formed along a virtual plane including the central axis of the liquid passage in a state of being deviated to one side from the central axis of the liquid passage, and the liquid ejection direction is defined by the central axis direction of the liquid passage and its direction. The fan-shaped range is defined so as to extend to the left or right side rather than the direction. As such a liquid jet nozzle, conventionally, as shown in FIGS. 5 to 7, a liquid passage 02 is provided in the nozzle body 01 toward the tip side of the nozzle body 01, and the liquid passage 0 is provided.
The inner surface near the outlet side of No. 2 is formed in a shell shape, and the front surface 0 of the nozzle body 01 is provided at the tip of the nozzle body 01 along a virtual plane A including the central axis X of the liquid passage 02.
A groove 05 having a V-shaped cross section extending from the third side to the one side surface 04 side is provided, and an elliptical liquid jet orifice 06 having a long shape along the imaginary plane A is provided at the outlet side end of the liquid passage 02.
There is one formed in a state of being biased to one side. Figure 8
Is an injection pressure of 1.0 kgf / cm 2 , a distance L from the nozzle front surface 03 to the ejection surface G is set to 125 mm, and an experimental example of a spray pattern when water is jetted by the conventional liquid jet nozzle 07. FIG. 8A shows a distribution in the spray width B direction of the flow rate (flow rate density) of the sprayed surface G divided at equal intervals in the spray width B direction and sprayed in one minute at each divided width portion. FIG. 8B shows that the divided width portion at the spray width center position is further divided in the spray thickness D direction at equal intervals,
Flow rate (flow density) injected into each divided thickness part for one minute
The distribution of the spray thickness in the D direction is shown. As shown in FIG. 8 (a), the flow density distribution in the spray width B direction is a convex shape having a peak at a substantially central position in the spray width B direction, and as shown in FIG. 8 (b). The spray thickness D is relatively thin.
【発明が解決しようとする課題】上記従来の液体噴射ノ
ズルによれば、例えば、水を圧延鋼材に噴射して冷却す
るときのように、スプレー幅Ｂの全幅に亘って極力均等
な流量密度分布で流体を噴射させることが要求される場
合、スプレー幅Ｂ方向での流量密度分布がスプレー幅Ｂ
方向の略中央位置にピークが存在する凸形に分布してい
る為に、その要求に充分応じにくい欠点があるととも
に、スプレー厚さＤが比較的薄い為に、多数のノズルを
そのスプレー範囲が互いにラップする状態で配設しなけ
れば、広範囲に亘って効率よく噴射できない欠点があ
る。これらの欠点を解決する為、例えば実公昭61-43555
号公報に記載されていると同様に、液体通路０２の入口
側に絞りＯ８（図７中に、仮想線で示す）を設けて液体
通路０２を流れる液体流速を高速化し、オリフィス０６
手前で乱流を生じさせてスプレー厚さＤを厚くすること
が考えられるが、図５に示すように、オリフィス０６が
中心軸線Ｘに沿う方向視で楕円状に広がる状態で、しか
も、中心軸線Ｘから一側方に偏らせた状態で形成されて
いる為、絞り０８を通過してオリフィス０６が形成され
ていない側の液体通路０２内周面に沿って高速で流れる
流体が、中心軸線Ｘから径方向に離れている円弧状のオ
リフィス周縁０９に沿って流出してしまって、その圧力
がオリフィス０６長手方向に沿って伝わり難く、オリフ
ィス０６長手方向に沿っての圧力分布が不均一になっ
て、スプレー幅Ｂ方向での流量密度分布が一層不均一化
するおそれがある。本発明は上記実情に鑑みてなされた
ものであって、液体噴射用オリフィスの形状を工夫する
ことにより、スプレー厚さを厚くしながらも、スプレー
幅方向での流量密度分布を従来よりも均一化できるよう
にすることを目的とする。According to the above-described conventional liquid jet nozzle, the flow density distribution is as uniform as possible over the entire width of the spray width B, for example, when water is jetted to the rolled steel material to cool it. When it is required to inject the fluid at the spray width B, the flow density distribution in the spray width B direction is
Since it is distributed in a convex shape having a peak at a substantially central position in the direction, there is a drawback that it is difficult to meet the requirement, and since the spray thickness D is relatively thin, a large number of nozzles have their spray ranges covered. If they are not arranged so as to be overlapped with each other, there is a drawback that they cannot be ejected efficiently over a wide range. In order to solve these drawbacks, for example, Jikho Sho 61-43555
In the same manner as described in Japanese Patent Publication No. JP-A-2003-264, a restriction O8 (shown by an imaginary line in FIG. 7) is provided on the inlet side of the liquid passage 02 to increase the flow velocity of the liquid flowing in the liquid passage 02, and the orifice 06
It is conceivable that turbulent flow is generated in front to increase the spray thickness D. However, as shown in FIG. 5, the orifice 06 spreads in an elliptical shape when viewed along the central axis X, and the central axis is Since the fluid is formed to be deviated to one side from X, the fluid flowing at a high speed along the inner peripheral surface of the liquid passage 02 on the side where the orifice 06 is not formed, passing through the restriction 08, Is discharged along a circular-arc-shaped orifice peripheral edge 09 that is distant from the radial direction from the pressure direction, and it is difficult for the pressure to be transmitted along the longitudinal direction of the orifice 06, and the pressure distribution along the longitudinal direction of the orifice 06 becomes uneven. As a result, the flow density distribution in the spray width B direction may become more uneven. The present invention has been made in view of the above circumstances, and by devising the shape of the orifice for liquid injection, the spray thickness is made thicker and the flow density distribution in the spray width direction is made more uniform than before. The purpose is to be able to.
【０００３】[0003]
【課題を解決するための手段】上記目的を達成する為の
本発明の特徴構成は、冒記液体噴射ノズルにおいて、前
記液体通路の入口側に絞りが設けられ、前記オリフィス
の前記仮想平面に直交する方向の開口幅が、前記仮想平
面に沿って一連に同幅又は略同幅に形成されている点に
あり、かかる構成から次の作用効果を奏する。In order to achieve the above object, the present invention is characterized in that a liquid injection nozzle is provided with a throttle on the inlet side of the liquid passage and is orthogonal to the virtual plane of the orifice. The width of the opening in the direction is defined as the same width or substantially the same width in series along the virtual plane, and the following operational effects are obtained from this configuration.
【０００４】[0004]
【作用】液体通路の入口側に絞りを設けた構成により、
液体通路を流れる流体が高速流となってオリフィス手前
で乱流を生じさせ、オリフィス通過後の液体にスプレー
厚み方向への拡散傾向を与えてスプレー厚さを厚くする
ことができるのであるが、オリフィスの仮想平面に直交
する方向の開口幅が、仮想平面に沿って一連に同幅又は
略同幅に形成されている構成により、オリフィスが仮想
平面に沿って細幅に形成されることになるので、絞りを
通過してオリフィスが形成されていない側の液体通路内
周面に沿って高速で流れる流体の圧力が、オリフィス長
手方向に沿って伝わり易くなり、オリフィス長手方向に
沿っての圧力分布が均一化されると考えられる。[Operation] With the configuration in which the throttle is provided on the inlet side of the liquid passage,
The fluid flowing through the liquid passage becomes a high-speed flow to generate turbulent flow in front of the orifice, and the liquid after passing through the orifice tends to diffuse in the spray thickness direction to increase the spray thickness. Since the opening width in the direction orthogonal to the virtual plane is continuously formed to have the same or substantially the same width along the virtual plane, the orifice is formed to have a narrow width along the virtual plane. , The pressure of the fluid flowing at high speed along the inner peripheral surface of the liquid passage on the side where the orifice is not formed passing through the restrictor is easily transmitted along the longitudinal direction of the orifice, and the pressure distribution along the longitudinal direction of the orifice is It is considered to be homogenized.
【０００５】[0005]
【発明の効果】従って、スプレー厚さを厚くしながら
も、スプレー幅方向での流量密度分布を従来よりも均一
化できる。As a result, the flow density distribution in the spray width direction can be made more uniform than before, while increasing the spray thickness.
【０００６】[0006]
【実施例】図１乃至図３は、本発明による液体噴射ノズ
ル７を示し、黄銅やステンレス鋼等で製作されたノズル
本体１内に、当該ノズル本体１の先端側に向けて、内径
20mm程度の円形の液体通路２が設けられ、ノズル本体１
の先端面１ａに、液体通路２の中心軸線Ｘを含む仮想平
面Ａに沿って溝３を設けて、液体通路２の出口側端部
に、中心軸線Ｘから一側方に偏らせた状態で、仮想平面
Ａに沿って横長（15mm程度）の液体噴射用オリフィス４
が形成されている。前記液体通路２の出口側近くの内面
が砲弾形に形成されて、液体通路２の入口側に黄銅やス
テンレス鋼等で製作された内径17mm程度のリング部材５
を圧入して、絞り６が設けられている。前記オリフィス
４は、底面角部が面取りされた断面形状がコの字状の溝
３を、仮想平面Ａに沿ってノズル本体１の先端面１ａ側
から一側面１ｂ側に横断する状態で円弧状に切削して形
成され、オリフィス４の仮想平面Ａに直交する方向の開
口幅Ｃが、仮想平面Ａに沿って一連に同幅（６mm程度）
に形成されている。図４は、噴射圧力を1.0kgf/cm2、ノ
ズル本体の先端面１ａから被噴射面Ｇ迄の距離Ｌを 125
mmに設定して、上記液体噴射ノズル７で水を噴射した場
合のスプレーパターンの実験例を示し、図４（イ）は、
被噴射面Ｇをスプレー幅Ｂ方向に等間隔で分割して、各
分割幅部分に一分間に噴射された流量（流量密度）のス
プレー幅Ｂ方向での分布を示し、図４（ロ）は、スプレ
ー幅中央位置での分割幅部分を、更にスプレー厚さＤ方
向に等間隔で分割して、各分割厚さ部分に一分間に噴射
された流量（流量密度）のスプレー厚さＤ方向での分布
を示す。図４（イ）に示すように、スプレー幅Ｂ方向で
の流量密度分布が従来に比べて均一化され、図４（ロ）
に示すように、スプレー厚さＤが従来に比べて厚くなっ
ている。 〔その他の実施例〕ノズル先端部設けられる溝の断面形
状は、実施例に示したようなコの字状に限定されず、仮
想平面に直交する方向でのオリフィスの開口幅が、仮想
平面に沿って一連に同幅又は略同幅に形成されているな
らば、例えば台形状に形成されていても良い。1 to 3 show a liquid jet nozzle 7 according to the present invention, in which a nozzle body 1 made of brass, stainless steel or the like is provided with an inner diameter toward the tip side of the nozzle body 1.
A circular liquid passage 2 of about 20 mm is provided, and the nozzle body 1
A groove 3 is provided on the front end surface 1a of the liquid passage 2 along an imaginary plane A including the central axis line X of the liquid passage 2, and the outlet side end portion of the liquid passage 2 is biased to one side from the central axis line X. , A horizontally long (about 15 mm) liquid jetting orifice 4 along the virtual plane A
Are formed. The inner surface of the liquid passage 2 near the outlet side is formed into a shell shape, and the ring member 5 having an inner diameter of about 17 mm is made of brass or stainless steel at the inlet side of the liquid passage 2.
And a diaphragm 6 is provided. The orifice 4 has a circular arc shape in a state where the groove 3 having a U-shaped cross section with chamfered bottom corners traverses from the tip surface 1a side of the nozzle body 1 to the one side surface 1b side along the virtual plane A. The opening width C of the orifice 4 formed in the direction orthogonal to the virtual plane A is the same width in series along the virtual plane A (about 6 mm).
Is formed in. In FIG. 4, the injection pressure is 1.0 kgf / cm 2 , and the distance L from the tip surface 1a of the nozzle body to the injection surface G is 125.
mm is set and an experimental example of a spray pattern when water is jetted by the liquid jet nozzle 7 is shown. FIG.
The jetted surface G is divided in the spray width B direction at equal intervals, and the distribution in the spray width B direction of the flow rate (flow rate density) injected per minute to each divided width portion is shown. FIG. , The division width portion at the spray width center position is further divided at equal intervals in the spray thickness D direction, and in the spray thickness D direction of the flow rate (flow density) injected in one minute to each division thickness portion. Shows the distribution of. As shown in FIG. 4 (a), the flow density distribution in the spray width B direction is made more uniform than in the conventional case.
As shown in, the spray thickness D is thicker than the conventional one. [Other Examples] The cross-sectional shape of the groove provided at the nozzle tip is not limited to the U-shape as shown in the examples, and the opening width of the orifice in the direction orthogonal to the virtual plane is in the virtual plane. If they are formed to have the same width or substantially the same width in series, they may be formed in a trapezoidal shape, for example.
【０００７】尚、特許請求の範囲の項に図面との対照を
便利にするために符号を記すが、該記入により本発明は
添付図面の構成に限定されるものではない。It should be noted that reference numerals are given in the claims for convenience of comparison with the drawings, but the present invention is not limited to the structures of the accompanying drawings by the entry.
【図１】液体噴射ノズルの正面図FIG. 1 is a front view of a liquid jet nozzle.
【図２】液体噴射ノズルの側面図FIG. 2 is a side view of a liquid jet nozzle.
【図３】液体噴射ノズルの縦断面図FIG. 3 is a vertical sectional view of a liquid jet nozzle.
【図４】（イ）は、スプレー幅方向での流量密度分布を
示すグラフ （ロ）は、スプレー厚さ方向での流量密度分布を示すグ
ラフ4A is a graph showing a flow density distribution in a spray width direction, and FIG. 4B is a graph showing a flow density distribution in a spray thickness direction.
【図５】従来の液体噴射ノズルの正面図FIG. 5 is a front view of a conventional liquid jet nozzle.
【図６】従来の液体噴射ノズルの側面図FIG. 6 is a side view of a conventional liquid jet nozzle.
【図７】従来の液体噴射ノズルの縦断面図FIG. 7 is a vertical sectional view of a conventional liquid jet nozzle.
【図８】（イ）は、従来のスプレー幅方向での流量密度
分布を示すグラフ （ロ）は、従来のスプレー厚さ方向での流量密度分布を
示すグラフFIG. 8A is a graph showing a flow rate density distribution in the conventional spray width direction, and FIG. 8B is a graph showing a flow rate density distribution in the conventional spray thickness direction.
１ ノズル本体 ２ 液体通路 ３ 溝 ４ オリフィス ６ 絞り Ａ 仮想平面 Ｃ 開口幅 Ｘ 中心軸線 1 Nozzle Main Body 2 Liquid Passage 3 Groove 4 Orifice 6 Aperture A Virtual Plane C Opening Width X Central Axis
───────────────────────────────────────────────────── フロントページの続き (72)発明者 畠中 淳 岡山県倉敷市水島川崎通１丁目（無番地) 川崎製鉄株式会社水島製鉄所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Atsushi Hatanaka, 1-chome, Kawasaki-dori, Mizushima, Kurashiki-shi, Okayama (no house) Kawasaki Steel Co., Ltd. Mizushima Works
Claims (1)
（１）の先端側に向けて液体通路（２）が設けられ、前
記液体通路（２）の出口側近くの内面が砲弾形に形成さ
れているとともに、前記ノズル本体（１）の先端部に、
前記液体通路（２）の中心軸線（Ｘ）を含む仮想平面
（Ａ）に沿って溝（３）を設けて、前記液体通路（２）
の出口側端部に、前記中心軸線（Ｘ）から一側方に偏ら
せた状態で、前記仮想平面（Ａ）に沿って横長の液体噴
射用オリフィス（４）が形成されている液体噴射ノズル
において、前記液体通路（２）の入口側に絞り（６）が
設けられ、前記オリフィス（４）の前記仮想平面（Ａ）
に直交する方向の開口幅（Ｃ）が、前記仮想平面（Ａ）
に沿って一連に同幅又は略同幅に形成されていることを
特徴とする液体噴射ノズル。1. A liquid passage (2) is provided in the nozzle body (1) toward the tip side of the nozzle body (1), and the inner surface of the liquid passage (2) near the outlet side is formed into a bullet shape. And at the tip of the nozzle body (1),
A groove (3) is provided along an imaginary plane (A) including the central axis (X) of the liquid passage (2) to provide the liquid passage (2).
Ejection nozzle (4) having a horizontally long liquid ejection orifice (4) formed along the imaginary plane (A) at the outlet side end of the same while being deviated to one side from the central axis (X) At the inlet side of the liquid passage (2), a throttle (6) is provided, and the imaginary plane (A) of the orifice (4) is provided.
The opening width (C) in the direction orthogonal to the virtual plane (A)
A liquid ejecting nozzle characterized in that the liquid ejecting nozzle is formed to have the same width or substantially the same width in series along the line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4019628A JP2651308B2 (en) | 1992-02-05 | 1992-02-05 | Liquid injection nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4019628A JP2651308B2 (en) | 1992-02-05 | 1992-02-05 | Liquid injection nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05212318A true JPH05212318A (en) | 1993-08-24 |
| JP2651308B2 JP2651308B2 (en) | 1997-09-10 |
Family
ID=12004467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4019628A Expired - Fee Related JP2651308B2 (en) | 1992-02-05 | 1992-02-05 | Liquid injection nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2651308B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006015223A (en) * | 2004-06-30 | 2006-01-19 | Asahi Sunac Corp | Nozzle for cleaning substrate |
| US7107058B2 (en) * | 2001-03-28 | 2006-09-12 | Seiko Epson Corporation | Printing device, diagnosing method for printing device, and diagnosing program for printing device |
| WO2015174384A1 (en) * | 2014-05-14 | 2015-11-19 | 春重 三井 | Dispersion nozzle |
-
1992
- 1992-02-05 JP JP4019628A patent/JP2651308B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7107058B2 (en) * | 2001-03-28 | 2006-09-12 | Seiko Epson Corporation | Printing device, diagnosing method for printing device, and diagnosing program for printing device |
| JP2006015223A (en) * | 2004-06-30 | 2006-01-19 | Asahi Sunac Corp | Nozzle for cleaning substrate |
| WO2015174384A1 (en) * | 2014-05-14 | 2015-11-19 | 春重 三井 | Dispersion nozzle |
| JPWO2015174384A1 (en) * | 2014-05-14 | 2017-05-18 | 春重 三井 | Watering nozzle |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2651308B2 (en) | 1997-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |