JPH05210880A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH05210880A
JPH05210880A JP3854592A JP3854592A JPH05210880A JP H05210880 A JPH05210880 A JP H05210880A JP 3854592 A JP3854592 A JP 3854592A JP 3854592 A JP3854592 A JP 3854592A JP H05210880 A JPH05210880 A JP H05210880A
Authority
JP
Japan
Prior art keywords
film
magneto
recording medium
optical recording
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3854592A
Other languages
Japanese (ja)
Inventor
Hideo Kaneko
英雄 金子
Katsushi Tokunaga
勝志 徳永
Yoshio Tawara
好夫 俵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP3854592A priority Critical patent/JPH05210880A/en
Publication of JPH05210880A publication Critical patent/JPH05210880A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a magneto-optical recording medium having high reflectivity, low thermal conductivity of a reflecting film, high sensitivity, and high CN ratio for reproducing by using a Cu alloy containing at least one kind of rare earth metal as a reflecting film. CONSTITUTION:This recording medium has a four-layer structure comprising a first dielectric film, recording film, second dielectric film, and reflecting film on a transparent substrate. The reflecting film consists of a Cu alloy containing at least one kind of rare earth metal. The rare earth element is yttrium or tantalum, and its amt. is 0.05-6 atomic %. Thereby, the obtd. reflecting film has higher reflectivity and lower thermal conductivity than a conventional Al alloy film Thus, the obtd. magneto-optical recording medium has high sensitivity and high CN ratio for reproducing.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光磁気記録媒体、特には
反射率が高く、かつ熱伝導率の低い反射膜を有する光磁
気記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium, and more particularly to a magneto-optical recording medium having a reflective film having a high reflectance and a low thermal conductivity.

【0002】[0002]

【従来の技術】近年、情報化社会の進展に伴って、高密
度、大容量の記録媒体が要求されているが、これらのな
かでも光磁気ディスクは情報の書き換えができ、かつ、
媒体を交換することができるために注目され、研究開発
が続けられている。現在実用化されている記録媒体には
記録膜にTbFeCoなどの希土類−遷移金属膜等が用
いられているが、これはこの記録膜自身のカー回転角は
小さいが、再生時のCN比はカー回転角と反射率の平方
根の積に比例するため、CN比は小さいものになってし
まうという不利がある。そのため、これについてはカー
回転角を大きくする目的で干渉膜を設けるものや反射膜
を設ける膜構造が広く用いられるようになっているが、
最もよく用いられる膜構成は第4図に示したような、透
明基板の上に第一の誘電体膜、記録膜、第二の誘電体
膜、反射膜の順に成膜した4層膜構造である。
2. Description of the Related Art In recent years, with the progress of information-oriented society, high-density and large-capacity recording media are required. Among them, magneto-optical disks are capable of rewriting information and
Since the medium can be exchanged, attention and research and development are continuing. Currently used recording media include a rare earth-transition metal film such as TbFeCo used as a recording film, which has a small Kerr rotation angle, but has a C / N ratio during reproduction. Since it is proportional to the product of the rotation angle and the square root of reflectance, the CN ratio is disadvantageously small. Therefore, for this purpose, a film structure having an interference film or a film structure having a reflection film is widely used for the purpose of increasing the Kerr rotation angle.
The most commonly used film structure is a four-layer film structure in which a first dielectric film, a recording film, a second dielectric film and a reflective film are formed in this order on a transparent substrate as shown in FIG. is there.

【0003】このような反射膜を有する膜構造において
は、反射膜の性質は光磁気記録媒体の性能と深くかかわ
りがある。第4図の第二の誘電体膜の欠如した構造に於
てはドライブのヘッドから光磁気記録媒体に入射された
光は記録膜を透過し反射膜で反射されもう一度記録膜を
透過し、この記録膜を透過するときのファラデー回転を
利用して旋光角を大きくしている。また、第二の誘電体
膜を有する構造に於ては、この膜が欠如している構造に
加えて、記録膜と反射膜の間の第二の誘電体膜での多重
反射を利用して読み出し時の旋光角をさらに大きなもの
にし、読み出し時のCN比を大きくしている。そのため
反射膜の反射率は大きいほどよい。さらに、光磁気記録
媒体は入射された光が記録膜に吸収されて温度が上昇し
キュリー温度もしくは補償温度近傍まであげることより
記録を行なう。そのため記録膜に蓄熱されやすいほうが
小さなパワーで記録することができる。そこで放熱量を
減らすには反射膜の熱伝導度は小さいほうがよい。
In the film structure having such a reflective film, the property of the reflective film is closely related to the performance of the magneto-optical recording medium. In the structure in which the second dielectric film is absent in FIG. 4, light incident on the magneto-optical recording medium from the drive head is transmitted through the recording film, reflected by the reflective film, and transmitted through the recording film again. The optical rotation angle is increased by utilizing the Faraday rotation when transmitting through the recording film. In addition, in the structure having the second dielectric film, in addition to the structure lacking this film, the multiple reflection at the second dielectric film between the recording film and the reflective film is utilized. The optical rotation angle at the time of reading is further increased, and the CN ratio at the time of reading is increased. Therefore, the larger the reflectance of the reflective film, the better. Further, in the magneto-optical recording medium, the incident light is absorbed by the recording film and the temperature rises to raise the temperature to near the Curie temperature or the compensation temperature for recording. Therefore, it is possible to record with a smaller power when the recording film is more likely to accumulate heat. Therefore, in order to reduce the heat radiation amount, it is preferable that the thermal conductivity of the reflective film is small.

【0004】[0004]

【発明が解決しようとする課題】しかして、この反射膜
としては従来からAlが用いられているのであるが、純
Alでは光磁気ディスクで用いられている半導体レーザ
ーの波長 800nmでは反射率が約86%と大きいけれども、
このものも熱伝導率も 150W/mKと大きい値をもつため
に記録感度が十分ではないし、転送速度を早くするため
にドライブの回転数を上げ、線速度を大きくしているけ
れどもこれに伴なって光磁気記録媒体の単位面積当りの
レーザー照射量が小さくなり、充分な記録感度が得られ
ないという不利がある。そのため、これについては熱伝
導率の小さなPdやPtを用いた反射膜も提案されてい
る(特開平1-264649号公報参照)が、このような金属は
反射率が60〜70%と低く、読み出し時のCN比が減少な
るという不利があることから、高反射率で熱伝導率の低
いAl−希土類合金の使用も提案されている(特開平3-
259695号公報参照)が、さらによい反射膜がのぞまれて
いる。
Although Al is conventionally used as the reflective film, pure Al has a reflectance of about 800 nm at the wavelength of the semiconductor laser used in the magneto-optical disk of 800 nm. Although it is as large as 86%,
Since both this and thermal conductivity have a large value of 150 W / mK, the recording sensitivity is not sufficient, and the rotational speed of the drive is increased and the linear velocity is increased in order to increase the transfer speed. As a result, the laser irradiation amount per unit area of the magneto-optical recording medium becomes small, and there is a disadvantage that sufficient recording sensitivity cannot be obtained. Therefore, a reflective film using Pd or Pt having a small thermal conductivity has been proposed for this (see JP-A-1-264649), but such a metal has a low reflectance of 60 to 70%, The use of Al-rare earth alloys with high reflectance and low thermal conductivity has also been proposed because of the disadvantage that the CN ratio at the time of reading is reduced (JP-A-3-
However, a better reflection film is desired.

【0005】[0005]

【課題を解決するための手段】本発明はこのような不利
を解決した光磁気記録媒体に関するもので、これは基板
の上に少なくとも、記録膜と反射膜とを有する光磁気記
録媒体において、反射膜が少なくとも希土類元素を1種
以上含んだCu合金であることを特徴とするものであ
る。
SUMMARY OF THE INVENTION The present invention relates to a magneto-optical recording medium which has solved such disadvantages, and it is a magneto-optical recording medium having at least a recording film and a reflective film on a substrate, The film is a Cu alloy containing at least one kind of rare earth element.

【0006】すなわち、本発明者らは反射率が高く、熱
伝導率も低い反射膜を開発すべく種々検討した結果、こ
れを少なくとも希土類元素を1種以上含んだCu合金で
作ると、高い反射率を保ったままで、熱伝導率を小さく
した反射膜を得ることができ、したがってこれによれば
記録感度が高く、あるいはこれを調節することのできる
光磁気記録媒体を得ることができるということを見出
し、このCu合金に使用される希土類元素の添加量など
についての研究を進めて本発明を完成させた。以下にこ
れをさらに詳述する。
That is, the inventors of the present invention have conducted various studies to develop a reflective film having a high reflectance and a low thermal conductivity. As a result, if it is made of a Cu alloy containing at least one rare earth element, a high reflectance is obtained. It is possible to obtain a reflective film having a small thermal conductivity while maintaining the rate, and therefore, it is possible to obtain a magneto-optical recording medium having a high recording sensitivity or capable of adjusting the recording sensitivity. The present invention has been completed by finding and advancing research on the amount of rare earth elements used in this Cu alloy. This will be described in more detail below.

【0007】[0007]

【作用】本発明は光磁気記録媒体に関するものであり、
これは基板の上に少なくとも記録膜と反射膜とを有する
光磁気記録媒体において、反射膜が少なくとも希土類元
素を1種以上含んだCu合金であることを特徴とするも
のであるが、このようにして作られた反射膜はAl−希
土類合金よりも反射率が大きく、熱伝導率の低いものと
なるので、これを反射膜とした光磁気記録媒体は高感度
で読み出し時のCN比の大きいものになるという有利性
が与えられる。
The present invention relates to a magneto-optical recording medium,
In a magneto-optical recording medium having at least a recording film and a reflective film on a substrate, this is characterized in that the reflective film is a Cu alloy containing at least one kind of rare earth element. Since the reflection film formed by this has a higher reflectance and a lower thermal conductivity than the Al-rare earth alloy, a magneto-optical recording medium using this as a reflection film has a high sensitivity and a large CN ratio at the time of reading. The advantage is that

【0008】本発明の光磁気記録媒体は基板の上に少な
くとも記録膜と反射膜をもつものであり、これは公知の
図4に示した透明基板の上に第一の誘電体膜、記録膜、
第二の誘電体膜、反射膜の順に成膜した4層構造体とさ
れるが、このものは第一の誘電体膜のない膜構造体、第
二の誘電体膜のない膜構造体、また記録膜が希土類遷移
金属合金単層膜だけでなく交換結合多層膜、Fe−Co
などの薄膜多層膜などであるものであってもよい。
The magneto-optical recording medium of the present invention has at least a recording film and a reflective film on a substrate, which is a known first dielectric film and recording film on the transparent substrate shown in FIG. ,
A four-layer structure is formed by depositing a second dielectric film and a reflective film in this order. This is a film structure without the first dielectric film, a film structure without the second dielectric film, Further, the recording film is not only a rare earth transition metal alloy single layer film but also an exchange coupling multilayer film, Fe-Co.
It may be a thin film multilayer film such as.

【0009】しかし、本発明の光磁気記録媒体における
反射膜は少なくとも希土類元素を1種以上含むCu合金
からなるものとされる。このCu合金中に含まれる希土
類元素はYまたはタンタノイド元素とされるが、この含
有量は0.05原子%未満では電子の熱伝導率が 100W/mK
以上となり、6原子%より大きくすると反射率が86%以
下となるので、これは0.05〜6原子%の範囲とすること
がよく、これによれば反能膜にAl合金を用いたものよ
りも高感度で読み出し時のCN比の大きい光磁気記録媒
体が得られる。
However, the reflective film in the magneto-optical recording medium of the present invention is made of a Cu alloy containing at least one rare earth element. The rare earth elements contained in this Cu alloy are Y or tantanoid elements, but if the content is less than 0.05 atomic%, the thermal conductivity of electrons is 100 W / mK.
Since the reflectance becomes 86% or less when it is larger than 6 atom%, it is preferable to set it in the range of 0.05 to 6 atom%. A magneto-optical recording medium having high sensitivity and a large CN ratio at the time of reading can be obtained.

【0010】なお、本発明の光磁気記録媒体における反
射膜については、線速度が大きくなり、記録感度が悪く
なる外周部で希土類の添加量を内周部より増やして熱伝
導度を小さくしてもよいし、内周から外周にむけて添加
物の濃度分布をつけてもよく、さらには反射膜を内周よ
り外周の方が薄くなるように膜厚に勾配をつけるように
してもよい。
Regarding the reflective film in the magneto-optical recording medium of the present invention, the thermal conductivity is reduced by increasing the amount of rare earth added in the outer peripheral portion where the linear velocity becomes high and the recording sensitivity deteriorates, compared with the inner peripheral portion. Alternatively, the concentration distribution of the additive may be provided from the inner circumference to the outer circumference, and further, the reflection film may have a film thickness gradient so that the outer circumference is thinner than the inner circumference.

【0011】[0011]

【実施例】つぎに本発明の実施例をあげる。 実施例 銅(Cu)にイットリューム(Y)を0.05〜15原子%添
加した6種類のCu合金を作り、このCu合金の反射率
を波長 780nmで測定したところ図1に示したとおりの結
果が得られ、このCu合金の熱伝導率の値は室温でシー
ト抵抗を測定し、Widemann-Frantz の法則で求めたとこ
ろ図2に示したとおりの結果が得られた。このCu−Y
合金の反射率と熱伝導率をAl−Y合金と比較したとこ
ろ、図3に示したとおりであることから、図1、図2と
合わせて、このCu合金は希土類の添加量が0.05〜6 原
子%添加されたものはAl合金に比べて反射率が高く、
熱伝導率の低いものであることが確認された。なお、こ
のCu−Y合金の反射率と電子の熱伝導率をAl−Y合
金と比較したところ、図3に示したとおりであることか
ら、このCu−Y合金はAl−Y合金にくらべて反射率
が高く、熱伝導率の低いものであることが確認された。
EXAMPLES Next, examples of the present invention will be given. Example 6 kinds of Cu alloys were prepared by adding 0.05-15 atom% of yttrium (Y) to copper (Cu), and the reflectance of this Cu alloy was measured at a wavelength of 780 nm. The results shown in FIG. 1 were obtained. The value of the thermal conductivity of this Cu alloy was obtained by measuring the sheet resistance at room temperature and obtaining it according to Widemann-Frantz's law, and the result as shown in FIG. 2 was obtained. This Cu-Y
When the reflectance and the thermal conductivity of the alloy are compared with those of the Al-Y alloy, they are as shown in FIG. 3. Therefore, in addition to FIG. 1 and FIG. The one with atomic% added has a higher reflectance than the Al alloy,
It was confirmed that the thermal conductivity was low. In addition, when the reflectance and the thermal conductivity of electrons of this Cu-Y alloy are compared with those of the Al-Y alloy, they are as shown in FIG. 3, and thus this Cu-Y alloy is superior to the Al-Y alloy. It was confirmed that the reflectance was high and the thermal conductivity was low.

【0012】[0012]

【発明の効果】本発明は光磁気記録媒体に関するもので
あり、これは前記したように基板の上に少なくとも記録
膜と反射膜を有する光磁気記録媒体において、反射膜を
少なくとも希土類元素の1種以上を含んだCu合金から
なるものとしてなることを特徴とするものであるが、こ
れによればこの種のCu合金がAl合金にくらべて反射
率が高く、熱伝導率の低いものであることから、この光
磁気記録媒体には高感度で、しかも読み出し時のCN比
が大きくなるという有利性が与えられる。
The present invention relates to a magneto-optical recording medium, and in the magneto-optical recording medium having at least a recording film and a reflective film on a substrate as described above, the reflective film is at least one of rare earth elements. It is characterized by comprising a Cu alloy containing the above. According to this, a Cu alloy of this kind has a higher reflectance and a lower thermal conductivity than an Al alloy. Therefore, this magneto-optical recording medium has the advantages of high sensitivity and a large CN ratio at the time of reading.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光磁気記録媒体に反射膜として使用さ
れるCu−Y合金のY添加量と反射率との関係グラフを
示したものである。
FIG. 1 is a graph showing the relationship between the amount of Y added and the reflectance of a Cu—Y alloy used as a reflective film in the magneto-optical recording medium of the present invention.

【図2】本発明の光磁気記録媒体に反射膜として使用さ
れるCu−Y合金のY添加量と熱伝導率との関係グラフ
を示したものである。
FIG. 2 is a graph showing the relationship between the amount of Y added and the thermal conductivity of a Cu—Y alloy used as a reflective film in the magneto-optical recording medium of the present invention.

【図3】本発明で使用されるCu−Y合金と公知のAl
−Y合金との反射率、熱伝導率との関係グラフを示した
ものである。
FIG. 3 Cu—Y alloy used in the present invention and known Al
3 is a graph showing a relationship between reflectance with respect to a Y alloy and thermal conductivity.

【図4】公知の四層膜構造体からなる光磁気記録媒体の
構成図を示したものである。
FIG. 4 is a diagram showing a configuration of a magneto-optical recording medium having a known four-layer film structure.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 俵 好夫 神奈川県川崎市高津区坂戸3丁目2番1号 信越化学工業株式会社コーポレートリサ ーチセンター内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Tawara Shin-Etsu Chemical Co., Ltd. Corporate Research Center, 3-2-1 Sakado, Takatsu-ku, Kawasaki City, Kanagawa Prefecture

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】基板の上に少なくとも記録膜と反射膜とを
有する光磁気記録媒体において、反射膜が少なくとも希
土類元素を1種以上含んだCu合金であることを特徴と
する光磁気記録媒体。
1. A magneto-optical recording medium having at least a recording film and a reflective film on a substrate, wherein the reflective film is a Cu alloy containing at least one or more rare earth elements.
【請求項2】Cu合金における希土類の量が0.05原子%
以上6原子%以下である請求項1に記載された光磁気記
録媒体。
2. The amount of rare earth in the Cu alloy is 0.05 atomic%.
The magneto-optical recording medium according to claim 1, wherein the content is 6 atomic% or less.
JP3854592A 1992-01-29 1992-01-29 Magneto-optical recording medium Pending JPH05210880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3854592A JPH05210880A (en) 1992-01-29 1992-01-29 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3854592A JPH05210880A (en) 1992-01-29 1992-01-29 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH05210880A true JPH05210880A (en) 1993-08-20

Family

ID=12528262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3854592A Pending JPH05210880A (en) 1992-01-29 1992-01-29 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH05210880A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100491931B1 (en) * 2002-01-25 2005-05-30 가부시키가이샤 고베 세이코쇼 Reflective film, reflection type liquid crystal display, and sputtering target for forming the reflective film
WO2006017471A3 (en) * 2004-08-06 2007-04-19 Williams Advanced Materials In Copper based alloys and optical media containing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100491931B1 (en) * 2002-01-25 2005-05-30 가부시키가이샤 고베 세이코쇼 Reflective film, reflection type liquid crystal display, and sputtering target for forming the reflective film
US7022384B2 (en) 2002-01-25 2006-04-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Reflective film, reflection type liquid crystal display, and sputtering target for forming the reflective film
WO2006017471A3 (en) * 2004-08-06 2007-04-19 Williams Advanced Materials In Copper based alloys and optical media containing same

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