JPH05209766A - Ultrasonic transmitter-receiver - Google Patents

Ultrasonic transmitter-receiver

Info

Publication number
JPH05209766A
JPH05209766A JP3350140A JP35014091A JPH05209766A JP H05209766 A JPH05209766 A JP H05209766A JP 3350140 A JP3350140 A JP 3350140A JP 35014091 A JP35014091 A JP 35014091A JP H05209766 A JPH05209766 A JP H05209766A
Authority
JP
Japan
Prior art keywords
shoe
piezoelectric vibrator
receiver
ultrasonic
ultrasonic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3350140A
Other languages
Japanese (ja)
Inventor
Hiroshi Watanabe
洋 渡邊
Hideo Kobayashi
秀夫 小林
Yukihiko Suzuki
由起彦 鈴木
Akio Anzai
秋雄 安斎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Gas Co Ltd
Tokimec Inc
Original Assignee
Tokyo Gas Co Ltd
Tokimec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Gas Co Ltd, Tokimec Inc filed Critical Tokyo Gas Co Ltd
Priority to JP3350140A priority Critical patent/JPH05209766A/en
Publication of JPH05209766A publication Critical patent/JPH05209766A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the release of an internal piezoelectric vibrator from a shoe (or a wedge) even when an ultrasonic transmitter-receiver receives a heat shock from an object to be measured. CONSTITUTION:An ultrasonic transmitter-receiver is constituted by bonding a piezoelectric vibrator to a shoe 4 and transmits and receives ultrasonic waves in the direction oblique with respect to a mounting surface. A synthetic material having many grooves 8, 9 provided thereto at a predetermined interval is provided to the entire area of the surface bonded to the piezoelectric vibrator 3 of the shone 4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電気と超音波の相互間
を変換する超音波送受波器に関し、特に、比較的高温ま
たは低温、例えばLPG(液化石油ガス)やLNG(液
化天然ガス)などの低温流体が流れる管路に装着され
て、該流体の流速または流量測定に供する超音波送受波
器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic wave transmitter / receiver for converting between electricity and ultrasonic waves, and particularly to a relatively high or low temperature such as LPG (liquefied petroleum gas) or LNG (liquefied natural gas). The present invention relates to an ultrasonic wave transmitter / receiver which is attached to a pipeline through which a low temperature fluid flows and which is used for measuring the flow velocity or flow rate of the fluid.

【0002】[0002]

【従来の技術】従来、管路内に流れる流体の流速または
流量の測定については、一対の超音波送受波器を、前記
管路の管軸に対して斜め方向に、互いに対向するように
装着する。そして該送受波器の装着面に対して斜め方向
に、かつ前記流体の流れと順方向または逆方向に超音波
を伝搬させ、該超音波の伝搬時間差またはシングアラウ
ンド周波数差などを計測し、これに基づいて行なわれて
いた。
2. Description of the Related Art Conventionally, for measuring the flow velocity or flow rate of a fluid flowing in a pipe, a pair of ultrasonic wave transmitters / receivers are mounted so as to face each other in an oblique direction with respect to the pipe axis of the pipe. To do. Then, the ultrasonic wave is propagated in an oblique direction with respect to the mounting surface of the transducer, and in a forward direction or a reverse direction to the flow of the fluid, and a propagation time difference or a singaround frequency difference of the ultrasonic wave is measured, It was carried out based on.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、前記管
路に装着される超音波送受波器にあっては、その構造は
圧電振動子を合成樹脂材から成るシュー(または、くさ
びともいう)に接合したもので、これにより管路内の流
体に対して斜め方向に超音波を伝搬させている。
However, in the ultrasonic transmitter / receiver mounted on the conduit, the structure is such that the piezoelectric vibrator is bonded to the shoe (or also referred to as a wedge) made of a synthetic resin material. With this, ultrasonic waves are propagated in an oblique direction with respect to the fluid in the conduit.

【0004】通常、前記管路内に測定対象流体が流れな
いときは、該管壁の温度は周囲温度に近い温度にある
が、該管路にLPGやLNGなどの低温流体が流れはじ
めると、該管壁の温度は急激に低下する。そして、前記
超音波送受波器は大きな熱衝撃を受けると共に、その内
部温度は著しく低下する。
Usually, when the fluid to be measured does not flow in the pipe, the temperature of the pipe wall is close to the ambient temperature, but when a low temperature fluid such as LPG or LNG begins to flow in the pipe, The temperature of the tube wall drops sharply. Then, the ultrasonic transmitter / receiver receives a large thermal shock, and the internal temperature thereof is significantly lowered.

【0005】このため、前記超音波送受波器内におい
て、互いに接合されている前記圧電振動子と、前記シュ
ーとは、その熱膨張率が異なるため、相互間に過大な応
力が発生し、前記圧電振動子の一部または全部が前記シ
ューから剥離するという問題点があった。
Therefore, in the ultrasonic wave transmitter / receiver, the piezoelectric vibrator and the shoe bonded to each other have different coefficients of thermal expansion, so that excessive stress is generated between them, and There is a problem that part or all of the piezoelectric vibrator is separated from the shoe.

【0006】従って、該圧電振動子と該シューとの接合
面積が減少して、相互間の超音波伝達効率が低下し、遂
には超音波送受波器としての性能を喪失し、互いに適正
な超音波の送波および受波ができなくなる。すなわち、
前記流体の流速または流量測定が不能になってしまう恐
れがあった。
Therefore, the joint area between the piezoelectric vibrator and the shoe is reduced, the ultrasonic transmission efficiency between them is reduced, and the performance as an ultrasonic transmitter / receiver is finally lost. Sound waves cannot be transmitted or received. That is,
There is a risk that the flow velocity or flow rate of the fluid may not be measured.

【0007】本発明はかかる点に鑑みなされたもので、
その目的は前記問題点を解消し、測定対象となる比較的
高温または低温の流体、例えば低温のLPGやLNGな
どにより、熱衝撃を受けても、内部の圧電振動子とシュ
ー(またはくさび)との間の剥離を防止した超音波送受
波器を提供することにある。
The present invention has been made in view of the above points,
The purpose is to eliminate the above-mentioned problems, and even if the internal piezoelectric vibrator and the shoe (or wedge) are subjected to thermal shock by a fluid having a relatively high temperature or a low temperature to be measured, such as low temperature LPG or LNG. An object of the present invention is to provide an ultrasonic wave transmitter / receiver that prevents separation between the two.

【0008】[0008]

【課題を解決するための手段】前記目的を達成するため
の本発明の構成は、次のとおりである。 (1) 圧電振動子をシューに接合してなり、かつ装着
面に対して斜め方向に超音波を送受波する超音波送受波
器において、前記シューが前記圧電振動子と接合する面
の全領域にわたり、所定間隔の複数の溝が設けられた合
成樹脂材から成ることを特徴とする。
The structure of the present invention for achieving the above object is as follows. (1) In an ultrasonic wave transmitter / receiver in which a piezoelectric vibrator is bonded to a shoe and which transmits and receives ultrasonic waves in an oblique direction with respect to a mounting surface, the entire area of the surface where the shoe is bonded to the piezoelectric vibrator And is made of a synthetic resin material provided with a plurality of grooves at predetermined intervals.

【0009】(2) 前記(1)における前記複数の溝
が、互いに直交する溝であることを特徴とする。
(2) The plurality of grooves in (1) above are grooves that are orthogonal to each other.

【0010】(3) 前記(1)における前記合成樹脂
材が高耐熱エンジニアリングプラスチックであることを
特徴とする。
(3) The synthetic resin material in (1) is a high heat resistant engineering plastic.

【0011】(4) 圧電振動子をシューに接合してな
り、かつ装着面に対して斜め方向に超音波を送受波する
超音波送受波器において、前記圧電振動子を、所定間隔
の複数の切込線によって、複数の振動子素子に分割する
と共に、該各振動子素子を分割前の位置にそれぞれ前記
切込線幅を隔てて配置し、かつ該各振動子素子の同一極
性をなす電極から、導電部材により同時に励振すること
を特徴とする。
(4) In an ultrasonic wave transmitter / receiver in which a piezoelectric vibrator is joined to a shoe and which transmits / receives ultrasonic waves in an oblique direction with respect to a mounting surface, the piezoelectric vibrators are provided at a plurality of predetermined intervals. An electrode which is divided into a plurality of transducer elements by a cutting line, each of the transducer elements is arranged at a position before the division with the cut line width, and each of the transducer elements has the same polarity. Therefore, it is characterized in that they are simultaneously excited by a conductive member.

【0012】(5) 前記(4)における前記複数の切
込線が、互いに直交する切込線であることを特徴とす
る。
(5) The plurality of cut lines in (4) are cut lines that are orthogonal to each other.

【0013】[0013]

【作用】本発明は以上のように構成されているので、シ
ューの圧電振動子との接合面は、その全領域にわたり複
数に分割されており、または、圧電振動子が所定間隔の
複数の切込線によって、複数の振動子素子に分割されて
おり、外部から熱衝撃により圧電振動子とシューとの間
に熱膨張率の差があっても、その相互間に生ずる応力は
著しく低減され、接合面の剥離の発生を防止する。
Since the present invention is configured as described above, the joint surface of the shoe with the piezoelectric vibrator is divided into a plurality of parts over the entire area thereof, or the piezoelectric vibrator is cut into a plurality of parts at predetermined intervals. Even if there is a difference in the coefficient of thermal expansion between the piezoelectric vibrator and the shoe due to a thermal shock from the outside, the stress generated between them is significantly reduced. Prevents peeling of the joint surface.

【0014】[0014]

【実施例】以下、図面に基づいて本発明の好適な実施例
を例示的に詳しく説明する。 (第1実施例)図1および図2は本発明の超音波送受波
器の第1実施例を示し、図1は該超音波送受波器の構成
断面図、第2は図1のII−II線矢視による図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be illustratively described in detail below with reference to the drawings. (First Embodiment) FIGS. 1 and 2 show a first embodiment of an ultrasonic wave transmitter / receiver according to the present invention, FIG. 1 is a sectional view of the structure of the ultrasonic wave transmitter / receiver, and FIG. It is a figure by the II line arrow.

【0015】図において、1は超音波送受波器、2は下
面が開口されたケース、3はセラミック材などからなる
圧電振動子、4は圧電振動子3が接合されたシュー(ま
たはくさび)で、前記ケース2内に配設され、5は前記
圧電振動子3に電気パルスを送受する信号ケーブル、6
は充填材で、ケース2内の空間を充填すると共に、前記
圧電振動子3の有害振動エネルギを吸収する。前記シュ
ー4は、比較的高温から比較的低温(例えばLPGやL
NGの凍結温度程度まで)の範囲で熱変形が少なく、か
つ、使用される周波数範囲で安定した電気的特性を有す
る高耐熱エンジニアリングプラスチックで、例えばポリ
エーテルイミド樹脂やポリイミド樹脂などである。
In the figure, 1 is an ultrasonic wave transmitter / receiver, 2 is a case whose bottom surface is opened, 3 is a piezoelectric vibrator made of ceramic material, and 4 is a shoe (or wedge) to which the piezoelectric vibrator 3 is joined. , A signal cable arranged in the case 2, and 5 for transmitting and receiving electric pulses to and from the piezoelectric vibrator 3, 6
Is a filler that fills the space inside the case 2 and absorbs harmful vibration energy of the piezoelectric vibrator 3. The shoe 4 has a relatively high temperature to a relatively low temperature (for example, LPG or L
It is a high heat resistant engineering plastic that has little thermal deformation in the range of up to about NG freezing temperature) and has stable electrical characteristics in the frequency range used, such as polyetherimide resin or polyimide resin.

【0016】このシュー4には、その前記圧電振動子3
との接合面7の全域にわたり、互いに直交し、かつ所定
間隔および所定の深さを有するそれぞれ複数の溝群8,
9が設けられ、該溝群8,9によって複数に分割された
各分割シュー4aの面に、それぞれ前記圧電振動子3が
接着剤で接合されている。
The shoe 4 has the piezoelectric vibrator 3
A plurality of groove groups 8 which are orthogonal to each other and have a predetermined interval and a predetermined depth over the entire joining surface 7 of
9 is provided, and the piezoelectric vibrator 3 is bonded to the surface of each split shoe 4a divided by the groove groups 8 and 9 with an adhesive.

【0017】この接合に使用される接着剤は、前記温度
範囲で接着性能が維持できる変性シリコーン系などの弾
性接着剤が好ましい。
The adhesive used for this bonding is preferably an elastic adhesive such as a modified silicone which can maintain the adhesive performance in the above temperature range.

【0018】今、前記シュー4に設けられるそれぞれ複
数の溝群8,9は、例えば間隔が3mm、溝幅が50μ
mの場合、圧電振動子3とシュー4との熱膨張率の差に
より、温度差が200℃のときの膨張差が約38μmあ
っても、溝群8,9の溝幅以内であるので、前記膨張差
による歪は吸収される。従って、前記圧電振動子3とシ
ュー4と間に生ずる応力は著しく緩和され、両者の接合
面における剥離の発生が防止できる。
Now, each of the plurality of groove groups 8 and 9 provided on the shoe 4 has, for example, an interval of 3 mm and a groove width of 50 μm.
In the case of m, the difference in thermal expansion coefficient between the piezoelectric vibrator 3 and the shoe 4 is within the groove width of the groove groups 8 and 9 even if the expansion difference is about 38 μm when the temperature difference is 200 ° C. The strain due to the difference in expansion is absorbed. Therefore, the stress generated between the piezoelectric vibrator 3 and the shoe 4 is remarkably relieved, and the occurrence of peeling at the joint surface between them can be prevented.

【0019】更に、前記溝群8,9を設けたシュー4と
圧電振動子3との接合部分の面積の変化は、前記溝群
8,9の面積に相当し、全体の4%以下であるので圧電
振動子3とシュー4との間の超音波伝達効率への影響は
小さくできる。
Furthermore, the change in the area of the joint between the shoe 4 provided with the groove groups 8 and 9 and the piezoelectric vibrator 3 corresponds to the area of the groove groups 8 and 9 and is 4% or less of the total area. Therefore, the influence on the ultrasonic wave transmission efficiency between the piezoelectric vibrator 3 and the shoe 4 can be reduced.

【0020】このため、前記超音波送受波器1は、本来
の性能が保持されて、比較的高温から比較的低温の範囲
において、所定の性能が発揮できる。
Therefore, the ultrasonic wave transmitter / receiver 1 retains its original performance and can exhibit a predetermined performance in a range of relatively high temperature to relatively low temperature.

【0021】図3は本発明の超音波送受波器の一実装例
を示す。図において、低温流体、例えばLPGまたはL
NG10が矢印方向に流れる鋼管を用いた管路11に、
一対の超音波送受波器1,1が管軸12に対して斜め方
向に、互いに対向するように装着される。そして、前記
管路11は前記超音波送受波器1,1を含め、グラスウ
ールなどの保冷材13にて被覆されている。
FIG. 3 shows an example of mounting the ultrasonic transmitter / receiver of the present invention. In the figure, a cryogenic fluid such as LPG or L
NG10 to the pipeline 11 using the steel pipe flowing in the direction of the arrow,
A pair of ultrasonic wave transmitters / receivers 1, 1 are attached to the tube shaft 12 in an oblique direction so as to face each other. The conduit 11 including the ultrasonic transmitters / receivers 1 and 1 is covered with a cold insulating material 13 such as glass wool.

【0022】なお、図3で前記一方の超音波送受波器1
から装着面に対して斜め方向に送出される超音波は、管
路11を介して前記他方の超音波送受波器1で受波され
ると共に、その逆も同様である。従って、該超音波は実
線で示される経路14を交互に通過する。
In FIG. 3, the one ultrasonic wave transmitter / receiver 1 is used.
The ultrasonic waves transmitted from the device in an oblique direction with respect to the mounting surface are received by the other ultrasonic wave transmitter / receiver 1 via the conduit 11 and vice versa. Therefore, the ultrasonic waves alternately pass through the path 14 shown by the solid line.

【0023】図3において、管路11にLPGまたはL
NG10が流れはじめると、該管路11および超音波送
受波器1,1は流体温度に依存する熱衝撃が加わって冷
却される。このとき、前記超音波送受波器1内の圧電振
動子3とシュー4との接合部7には、両者の熱膨張率の
差に基づく応力が発生するが、シュー4は接合部7全域
にわたり所定間隔の複数の溝、特に直交する複数の溝群
8,9が設けられているので、発生応力は著しく緩和さ
れ、圧電振動子3とシュー4との剥離は防止される。
In FIG. 3, LPG or L is provided in the conduit 11.
When the NG 10 starts to flow, the conduit 11 and the ultrasonic wave transmitters / receivers 1, 1 are cooled by thermal shock depending on the fluid temperature. At this time, stress is generated in the joint 7 between the piezoelectric vibrator 3 and the shoe 4 in the ultrasonic transmitter / receiver 1 due to the difference in thermal expansion coefficient between the two, but the shoe 4 covers the entire joint 7. Since a plurality of grooves at a predetermined interval, particularly a plurality of orthogonal groove groups 8 and 9, are provided, the generated stress is remarkably relieved, and the piezoelectric vibrator 3 and the shoe 4 are prevented from being separated from each other.

【0024】また、両者間の超音波伝達効率への影響は
小さいので、超音波送受波器1は所定の性能が発揮され
る。前記間路11に比較的高温流体が流れたときも、同
様の性能が発揮できる。
Further, since the ultrasonic transmission efficiency between them is small, the ultrasonic transmitter / receiver 1 exhibits a predetermined performance. Similar performance can be exhibited even when a relatively high-temperature fluid flows in the passage 11.

【0025】(第2実施例)図4ないし図6は本発明の
超音波送受波器の第2実施例を示し、図4は該超音波送
受波器の構成断面図、図5は図4のV−V線矢視による
図、図6は図5のVI−VI線矢視による断面図である。図
において、図1および図2と同一部材には同一符号を付
して説明を省略する。
(Second Embodiment) FIGS. 4 to 6 show a second embodiment of the ultrasonic transmitter / receiver of the present invention, FIG. 4 is a sectional view of the structure of the ultrasonic transmitter / receiver, and FIG. 5 is FIG. 5 is a view taken along the line V-V in FIG. 6, and FIG. 6 is a sectional view taken along the line VI-VI in FIG. In the figure, the same members as those in FIGS. 1 and 2 are designated by the same reference numerals and the description thereof will be omitted.

【0026】図において、21は超音波送受波器、23
はセラミック材などからなる圧電振動子素子群、24は
圧電振動子素子群23が接合されたシュー(またはくさ
び)、25a,25bは前記圧電振動子素子群23を、
導線26を介して、同一電気パルスで同時に励振する導
電部材で、これらは前記ケース2内に配設される。
In the figure, reference numeral 21 denotes an ultrasonic wave transmitter / receiver, and 23
Is a piezoelectric vibrator element group made of a ceramic material, 24 is a shoe (or wedge) to which the piezoelectric vibrator element group 23 is joined, and 25a and 25b are the piezoelectric vibrator element group 23,
Conductive members that are simultaneously excited by the same electric pulse via the conductors 26, and these are arranged in the case 2.

【0027】前記圧電振動子素子群23は、ひとつの圧
電振動子の前記シュー24と接合する全域にわたり、互
いに直交し、かつ所定間隔かつ所定幅を有する複数の切
込線27,28によって、複数の振動子素子23aに分
割されると共に、前記各振動子素子23aは分割前の位
置に、それぞれほぼ前記切込線27,28の線幅を隔て
て配置され、前記シュー24に接合される。
A plurality of piezoelectric vibrator element groups 23 are formed by a plurality of cut lines 27, 28 which are orthogonal to each other and have a predetermined interval and a predetermined width over the entire region of the piezoelectric vibrator element 23 which is joined to the shoe 24. The transducer elements 23a are divided into the transducer elements 23a, and the respective transducer elements 23a are arranged at positions before the division with the line widths of the cut lines 27 and 28 separated from each other, and are joined to the shoe 24.

【0028】そして、これら各振動子素子23aは同一
極性をなす電極から該電極に接合された前記各導電部材
25a,25bにより、同時に励振されるように電気的
に接続されている。
The vibrator elements 23a are electrically connected to each other by the conductive members 25a and 25b joined to the electrodes having the same polarity so as to be simultaneously excited.

【0029】前記シュー24は、前記シュー4と同様な
高耐熱エンジニアリングプラスチックで、例えばポリエ
ーテルイミド樹脂やポリイミド樹脂などであり、前記各
振動子素子23aとは接着剤29により接合される。
The shoe 24 is a high heat resistant engineering plastic similar to the shoe 4, and is, for example, a polyetherimide resin or a polyimide resin, and is joined to each of the transducer elements 23a by an adhesive 29.

【0030】この接合に使用される接着剤28は前記温
度範囲で接着性能が維持できる伸び300%以上の変性
シリコーン系などの弾性接着剤が好ましい。
The adhesive 28 used for this bonding is preferably an elastic adhesive such as a modified silicone-based adhesive having an elongation of 300% or more which can maintain the adhesive performance in the above temperature range.

【0031】今、前記複数の圧電振動子素子23aを得
るための前記複数の切込線27,28が、例えば間隔3
mm、線幅が50μmの場合、振動子素子23a,23
aとシュー24との熱膨張率の差により、温度差が20
0℃のときの膨張差が約38μmあっても、切込線27
の線幅以内であるので、前記膨張差による歪は吸収され
る。従って、前記各振動子素子23a,23aとシュー
24との間に生ずる応力は著しく緩和され、両者の接合
面における剥離の発生が防止できる。
Now, the plurality of cut lines 27 and 28 for obtaining the plurality of piezoelectric vibrator elements 23a are arranged, for example, at intervals of 3
mm, the line width is 50 μm, the vibrator elements 23a, 23
Due to the difference in the coefficient of thermal expansion between a and the shoe 24, the temperature difference is 20
Even if the expansion difference at 0 ° C is about 38 μm, the score line 27
Since it is within the line width of, the strain due to the difference in expansion is absorbed. Therefore, the stress generated between each of the transducer elements 23a and 23a and the shoe 24 is remarkably relieved, and the occurrence of peeling at the joint surface between them can be prevented.

【0032】更に、前記各振動子素子23a,23aと
シュー24との接合部分の面積の変化は、前記切込線2
7,28の面積に相当し、全体の4%以下であるので圧
電振動子素子群23とシュー24との間の超音波伝達効
率への影響は小さくできる。このため、前記超音波送受
波器21は、本来の性能が保持されて、比較的高温から
比較的低温の範囲において、所定の性能が発揮できる。
Furthermore, the change in the area of the joint portion between each of the transducer elements 23a, 23a and the shoe 24 depends on the cut line 2.
This corresponds to the area of 7 and 28, which is 4% or less of the whole, so that the influence on the ultrasonic wave transmission efficiency between the piezoelectric vibrator element group 23 and the shoe 24 can be reduced. Therefore, the ultrasonic transmitter / receiver 21 retains its original performance and can exhibit a predetermined performance in a range of relatively high temperature to relatively low temperature.

【0033】図7は本発明の超音波送受波器の他の実装
例を示す。図において、超音波送受波器21のほか、図
3と同一部材には同一符号を付して説明を省略する。
FIG. 7 shows another mounting example of the ultrasonic transmitter / receiver of the present invention. In the figure, in addition to the ultrasonic wave transmitter / receiver 21, the same members as those in FIG.

【0034】図7において、管路11にLPGまたはL
NG10が流れはじめると、該管路11および超音波送
受波器21,21は流体温度に依存する熱衝撃が加わっ
て冷却される。このとき、前記超音波送受波器21内の
圧電振動子素子群23とシュー24との接合部7には、
両者の熱膨張率の差に基づく応力が発生するが、圧電振
動子素子群23内には所定間隔の複数の切込線27、特
に直交する複数の切込線27,28が設けられているの
で、発生応力は著しく緩和され、圧電振動子素子群23
とシュー24との剥離は防止される。また、両者間の超
音波伝達効率への影響は小さいので、超音波送受波器2
1は所定の性能が発揮される。前記管路11に比較的高
温流体が流れたときも、同様の性能が発揮できる。
In FIG. 7, LPG or L is provided in the conduit 11.
When the NG 10 starts to flow, the pipe line 11 and the ultrasonic wave transmitters / receivers 21, 21 are cooled by thermal shock depending on the fluid temperature. At this time, at the joint 7 between the piezoelectric vibrator element group 23 and the shoe 24 in the ultrasonic transmitter / receiver 21,
Although a stress is generated based on the difference in thermal expansion coefficient between the two, a plurality of cut lines 27 at predetermined intervals, particularly a plurality of cut lines 27, 28 orthogonal to each other are provided in the piezoelectric vibrator element group 23. Therefore, the generated stress is remarkably relaxed, and the piezoelectric vibrator element group 23
The peeling between the shoe and the shoe 24 is prevented. Moreover, since the influence on the ultrasonic transmission efficiency between the two is small, the ultrasonic transmitter / receiver 2
1 shows a predetermined performance. Similar performance can be exhibited even when a relatively high temperature fluid flows through the pipe 11.

【0035】その他は、前述の第1実施例と同様であ
る。
Others are the same as those in the first embodiment described above.

【0036】なお、本発明の技術は前記実施例における
技術に限定されるものではなく、同様な機能を果す他の
態様の手段によってもよく、また本発明の技術は前記構
成の範囲内において種々の変更、付加が可能である。
Note that the technique of the present invention is not limited to the technique in the above-described embodiment, and may be implemented by means of another aspect having the same function, and the technique of the present invention is various within the scope of the above configuration. Can be changed or added.

【0037】[0037]

【発明の効果】以上の説明から明らかなように本発明の
超音波送受波器によれば、シューの圧電振動子との接合
面が、その全領域にわたり、所定間隔の複数の溝によ
り、複数に分割され、または、圧電振動子が、所定間隔
の複数の切込線によって、複数の振動素子に分割される
ので、熱衝撃により圧電振動子とシューとの間の熱膨張
率の差に基づいて発生する応力が著しく緩和され、両者
の接合面の剥離の発生を防止できる。
As is apparent from the above description, according to the ultrasonic transmitter / receiver of the present invention, the bonding surface of the shoe with the piezoelectric vibrator has a plurality of grooves formed at predetermined intervals over the entire area thereof. , Or the piezoelectric vibrator is divided into a plurality of vibrating elements by a plurality of cut lines at predetermined intervals, so that thermal shock can be used to determine the difference in the coefficient of thermal expansion between the piezoelectric vibrator and the shoe. The stress generated as a result is remarkably relieved, and it is possible to prevent the occurrence of peeling of the joint surface between the two.

【0038】このため、前記管路に比較的高温または低
温の流体が流れて、熱衝撃を受ける状態においても、本
発明の超音波送受波器は本来の性能が発揮でき、安定し
て前記流体の流速または流量測定に供することができ
る。
Therefore, even when a fluid having a relatively high temperature or a low temperature flows in the pipe line and is subjected to a thermal shock, the ultrasonic transducer of the present invention can exhibit its original performance, and the fluid is stable. Can be used for measuring the flow velocity or flow rate of

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の超音波送受波器の第1実施例を示す構
成断面図である。
FIG. 1 is a structural cross-sectional view showing a first embodiment of an ultrasonic wave transmitter / receiver of the present invention.

【図2】図1のII−II線矢視による図である。FIG. 2 is a view taken along the line II-II of FIG.

【図3】第1実施例の超音波送受波器の実装例を示す断
面図である。
FIG. 3 is a cross-sectional view showing a mounting example of the ultrasonic transmitter / receiver of the first embodiment.

【図4】本発明の超音波送受波器の第2実施例を示す構
成断面図である。
FIG. 4 is a sectional view showing the configuration of a second embodiment of the ultrasonic transmitter / receiver of the present invention.

【図5】図4のV−V線矢視による図である。5 is a view taken along the line VV of FIG.

【図6】図5のVI−VI線矢視による要部断面図である。6 is a cross-sectional view of a main part taken along the line VI-VI of FIG.

【図7】第2実施例の超音波送受波器の実装例を示す断
面図である。
FIG. 7 is a cross-sectional view showing an example of mounting the ultrasonic wave transmitter / receiver of the second embodiment.

【符号の説明】[Explanation of symbols]

1,21 超音波送受波器 3 圧電振動子 4 シュー 8,9 溝 14 超音波送受波経路 23 圧電振動子素子群 23a 圧電振動子素子 24 シュー 25a,25b 導電部材 27,28 切込線 1,21 Ultrasonic wave transmitter / receiver 3 Piezoelectric vibrator 4 Shoes 8,9 Groove 14 Ultrasonic wave transmitting / receiving path 23 Piezoelectric vibrator element group 23a Piezoelectric vibrator element 24 Shoes 25a, 25b Conductive member 27, 28 Cut line

───────────────────────────────────────────────────── フロントページの続き (72)発明者 鈴木 由起彦 東京都大田区南蒲田2丁目16番46号 株式 会社トキメック内 (72)発明者 安斎 秋雄 神奈川県綾瀬市寺釜田3−14−3 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yukiko Suzuki 2-16-46 Minami Kamata, Ota-ku, Tokyo Within Tokimec Co., Ltd. (72) Inventor Akio Ansai 3-14-3 Temple Kamata, Ayase City, Kanagawa Prefecture

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 圧電振動子をシューに接合してなり、か
つ装着面に対し斜め方向に超音波を送受波するものにお
いて、前記シューが前記圧電振動子と接合する面の全領
域にわたり、所定間隔の複数の溝が設けられた合成樹脂
材から成ることを特徴とする超音波送受波器。
1. A piezoelectric vibrator is joined to a shoe, and ultrasonic waves are transmitted and received in an oblique direction with respect to a mounting surface, and a predetermined area is provided over the entire area where the shoe is joined to the piezoelectric vibrator. An ultrasonic transducer comprising a synthetic resin material provided with a plurality of grooves at intervals.
【請求項2】 前記複数の溝が、互いに直交する溝であ
ることを特徴とする請求項1の超音波送受波器。
2. The ultrasonic transducer according to claim 1, wherein the plurality of grooves are grooves orthogonal to each other.
【請求項3】 前記合成樹脂材が高耐熱エンジニアリン
グプラスチックであることを特徴とする請求項1の超音
波送受波器。
3. The ultrasonic transducer according to claim 1, wherein the synthetic resin material is a high heat resistant engineering plastic.
【請求項4】 圧電振動子をシューに接合してなり、か
つ装着面に対し斜め方向に超音波を送受波するものにお
いて、前記圧電振動子を、所定間隔の複数の切込線によ
って、複数の振動子素子に分割すると共に、該各振動子
素子をそれぞれ前記切込線幅を隔てて配置し、かつ該各
振動子素子の同一極性をなす電極から、導電部材により
同時に励振することを特徴とする超音波送受波器。
4. A piezoelectric vibrator which is joined to a shoe and which transmits and receives ultrasonic waves in an oblique direction with respect to a mounting surface, wherein a plurality of the piezoelectric vibrators are provided by a plurality of score lines at predetermined intervals. Of the vibrator elements, the vibrator elements are arranged at the cut line widths, and the electrodes of the same polarity are simultaneously excited by a conductive member. And ultrasonic transducer.
【請求項5】 前記複数の切込線が、互いに直交する切
込線であることを特徴とする請求項4の超音波送受波
器。
5. The ultrasonic transducer according to claim 4, wherein the plurality of cut lines are cut lines orthogonal to each other.
JP3350140A 1991-12-10 1991-12-10 Ultrasonic transmitter-receiver Pending JPH05209766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3350140A JPH05209766A (en) 1991-12-10 1991-12-10 Ultrasonic transmitter-receiver

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3350140A JPH05209766A (en) 1991-12-10 1991-12-10 Ultrasonic transmitter-receiver

Publications (1)

Publication Number Publication Date
JPH05209766A true JPH05209766A (en) 1993-08-20

Family

ID=18408500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3350140A Pending JPH05209766A (en) 1991-12-10 1991-12-10 Ultrasonic transmitter-receiver

Country Status (1)

Country Link
JP (1) JPH05209766A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101693726B1 (en) * 2015-07-22 2017-01-06 숭실대학교산학협력단 Ultrasonic transducing apparatus for measuring pipe thickness and caliber and for measuring fluid flow and velocity using the same
US11879796B2 (en) 2019-10-29 2024-01-23 Minebea Mitsumi Inc. Force torque sensor device including sensor chip bonded to strain body by adhesive

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101693726B1 (en) * 2015-07-22 2017-01-06 숭실대학교산학협력단 Ultrasonic transducing apparatus for measuring pipe thickness and caliber and for measuring fluid flow and velocity using the same
US11879796B2 (en) 2019-10-29 2024-01-23 Minebea Mitsumi Inc. Force torque sensor device including sensor chip bonded to strain body by adhesive

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