JPH05209742A - Inspecting method and machining method for v-shaped groove - Google Patents

Abstract

PURPOSE:To inspect a V-shaped groove more highly accurately by using a contact-type shape measuring apparatus or an optical contact type measuring apparatus, and measuring the positions along the inner surface of the V-shaped groove. CONSTITUTION:For example, V-shaped grooves used in an SV optical connector are formed as follows. V-shaped grooves 12 for positioning optical fibers and V-shaped grooves 13 for positioning guide pins are formed an the surface of a silicon substrate 11 by grinding using V-shaped grindstones. The shape of the surface in the direction orthogonal to the longitudinal direction of the V-shaped groove is measured by using, e.g. laser microscope measurement, optical microscope measurement for measuring transmitted light or a contact type shape measuring device. The scanning directions of the measurement of the surface shape are B from A and D from C. The measured data from A to B and the measured data from C to D are approximated with secondary curves. The shapes of the respective slant surfaces are grasped. At this time, e.g. from C to D, only the range from C' to D', which are located in the vicinity of the contact point between a circle 14 having the same diameter as a cylinder body mounted on the V-shaped groove 12 or 13 and the slant surface is measured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a processing method for inspecting a V-shaped groove formed on an optical connector board with high accuracy.

[0002]

2. Description of the Related Art As an optical connector for optically coupling optical fibers, a pair of substrates having a plurality of V-shaped grooves formed on the surface thereof,
Alternatively, there is an optical connector that positions and fixes each optical fiber by holding the optical fiber between the substrate and the plane.

For example, in an SV optical connector, a plurality of V-shaped grooves 2 for positioning an optical fiber and a V-shaped groove 3 for positioning a guide pin are formed on a silicon substrate 1 as shown in FIG. A resin mold 5 is applied in a state where a flat plate 4 is placed on the V-shaped groove 2 for a fiber. When such optical connectors are optically coupled to each other, the guide pin hole 6 and the V-shaped groove 2
Since the connection loss is determined by the accuracy of the positional relationship with the optical fiber inserted between the flat plate 4 and the flat plate 4, the processing accuracy of the V-shaped grooves 2 and 3 is extremely important.

Processing of such V-shaped grooves 2 and 3 is usually performed by V
It is carried out by processing a grindstone such as a model grindstone or a rotary grindstone, but it is necessary to feed back the inspection result to the processing conditions while performing highly accurate inspection.

When inspecting such a V-shaped groove, as shown in FIG. 5, the surface position is measured along the slopes 7a and 7b of the V-shaped groove 7 to grasp the shape of the V-shaped groove 7, A circle 8 having the same diameter as the cylindrical body supported by the V-shaped groove 7 is formed on the sloped surface 7 of the V-shaped groove 7.
The center point O when contacting a and 7b is calculated.

[0006]

Generally, the slope 7
The surface positions of a and 7b are measured at regular intervals, and each data is connected by a straight line to form the slopes 7a and 7b.
For example, even in the method described in Japanese Patent Application Laid-Open No. 2-96609, it is understood that the V-shaped groove is formed in a straight line.

By the way, with the technical innovation, there has been a demand for higher precision of the optical connector, and there is a problem that the variation due to the processing error of the V-shaped groove has to be further reduced. According to the method, it is not possible to respond sufficiently.

In view of such circumstances, it is an object of the present invention to provide a method for inspecting and processing a V-shaped groove with higher accuracy.

[0009]

A method for inspecting a V-shaped groove according to the present invention which achieves the above object, is a contact type shape measuring device or an optical contact when inspecting the shape of a V-shaped groove on which a cylindrical body is mounted. Position along the inner surface of the V-shaped groove using a type measuring machine,
The V-shaped groove shape is inspected by approximating its shape as a curve using at least the measured value in the vicinity of the contact point with the cylindrical body.

The V-shaped groove processing method according to the present invention is
When machining the V-shaped groove on which the cylindrical body is mounted, the method is characterized by performing inspection by the above method and feedback controlling the processing conditions based on the inspection result.

[0011]

By approximating the position measurement data along the inner surface of the V-shaped groove with a curve that fits the actual inner surface shape and grasping the shape, the difference from the true shape becomes extremely small. Then, more accurate machining can be performed by feedback controlling the machining conditions based on the inspected shape.

[0012]

EXAMPLES The present invention will be described below based on examples.

FIG. 1 shows the shape of the V-shaped groove to be inspected in this embodiment. As shown in FIG. 3A, this is a V-shaped groove used for an SV optical connector, and a V-shaped groove 12 for positioning an optical fiber and a V-shaped groove 13 for positioning a guide pin are formed on a surface of a silicon substrate 11. It is formed by a grinding process using a model grindstone.

The surface shape of the V-shaped groove in the direction perpendicular to the longitudinal direction is measured by a conventional method. This measuring method is not particularly limited. For example, as a non-contact type measuring method, laser light is scanned from above the V-shaped groove and the reflected light thereof is measured, or laser light is irradiated from a direction orthogonal to the longitudinal direction to measure the transmitted light. Optical microscope measurement or the like can be adopted. Moreover, you may make it measure using a contact type shape measuring device.

The scanning direction for measuring the surface profile is as shown in FIG. 1 (B), and is A to B and C to D. And
In this embodiment, the measurement data of A to B and the measurement data of C to D are approximated by a quadratic curve to grasp the shape of each slope. At this time, for example, in C to D, as shown in FIG.
It suffices to measure only in the range from C ′ to D ′, which is near the contact point between the circle 14 having the same diameter as the columnar body mounted on 2 or 13 and the slope.

In this way, the shape of the measured data is approximated by a quadratic curve in order to grasp its shape. In fact, the slope of the V-shaped groove ground by the V-shaped grindstone is actually almost curved. This is because this curve cannot be ignored when high-precision processing of 1 μm or less is performed. Although the quadratic curve is easy to handle in this embodiment, it is preferable to adopt a curve formula close to the actual shape in some cases.

FIG. 2 is a graph showing the results of almost continuous measurement from C to D, where the horizontal axis is the distance (μm) from the A side, and the vertical axis is the vertical position with the straight line CD as the origin. Indicates. As shown in the figure, A to B have a shape close to a quadratic curve having a concave central portion.

FIG. 3 shows the circle 14 based on this data.
The coordinates of the center O of are calculated. The horizontal axis of FIG. 3 shows the distance L (see FIG. 1C) in the vicinity of the contact C′D ′ where the data is actually used. In addition, in FIG. 3, the same data is used to perform linear approximation to grasp the shape,
The results of obtaining the coordinates of the center O of are also shown.

From the results shown in FIG. 3, in the present example in which the quadratic curve was approximated, the position of the center O did not always change even if the measurement range L was changed. This means that the shape of the slope is accurately known. On the other hand, in the comparative example in which the linear approximation is performed, since the accurate shape is not grasped, the position of the center O changes when the measurement range L is changed.

As described above, in the present embodiment, the slope shape of the V-shaped groove can be accurately grasped and the center position of the columnar body to be mounted can be accurately obtained. By feeding back to the processing conditions such as the feed distance in the direction orthogonal to the V-shaped groove longitudinal direction of the V-shaped grindstone and the feed distance in the depth direction of the V-shaped groove, more accurate processing can be realized. ..

[0021]

As described above, according to the present invention,
For example, the V-shaped groove used for the optical connector can be inspected and processed with extremely high accuracy.

[Brief description of drawings]

FIG. 1 is an explanatory diagram illustrating an example.

FIG. 2 is a graph showing the measurement results of one example.

FIG. 3 is a graph showing the results of one example and a comparative example.

FIG. 4 is a perspective view showing an example of an optical connector.

FIG. 5 is an explanatory diagram showing inspection of a V-shaped groove.

[Explanation of symbols]

 11 substrate 12 V-shaped groove for optical fiber 13 V-shaped groove for guide pin 14 V-shaped groove 15 yen

Claims (3)

[Claims] 1. When inspecting the shape of a V-shaped groove on which a cylindrical body is mounted, the position along the inner surface of the V-shaped groove is measured using a contact type shape measuring device or a non-contact type measuring device, and at least the above A method of inspecting a V-shaped groove, which comprises inspecting a V-shaped groove shape by approximating the shape as a curve using measured values in the vicinity of a contact point with a cylindrical body. 2. The method for inspecting a V-shaped groove according to claim 1, wherein the curve approximated by using the measured value is a quadratic curve. 3. When machining a V-shaped groove on which a cylindrical body is mounted, while inspecting by the method of claim 1 or 2, the machining condition is feedback-controlled according to the inspection result. Processing method.