JPH0520856B2 - - Google Patents
Info
- Publication number
- JPH0520856B2 JPH0520856B2 JP61235397A JP23539786A JPH0520856B2 JP H0520856 B2 JPH0520856 B2 JP H0520856B2 JP 61235397 A JP61235397 A JP 61235397A JP 23539786 A JP23539786 A JP 23539786A JP H0520856 B2 JPH0520856 B2 JP H0520856B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- energy
- scattered
- acceleration
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 25
- 230000001133 acceleration Effects 0.000 claims description 21
- 238000005211 surface analysis Methods 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000000704 physical effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 12
- 238000001228 spectrum Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 230000002730 additional effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61235397A JPS6388743A (ja) | 1986-10-01 | 1986-10-01 | 表面解析装置 |
| US07/070,252 US4829179A (en) | 1986-07-12 | 1987-07-06 | Surface analyzer |
| DE8787110018T DE3781963T2 (de) | 1986-07-12 | 1987-07-10 | Oberflaechenanalysegeraet. |
| EP87110018A EP0253336B1 (en) | 1986-07-12 | 1987-07-10 | Surface analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61235397A JPS6388743A (ja) | 1986-10-01 | 1986-10-01 | 表面解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6388743A JPS6388743A (ja) | 1988-04-19 |
| JPH0520856B2 true JPH0520856B2 (enrdf_load_stackoverflow) | 1993-03-22 |
Family
ID=16985483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61235397A Granted JPS6388743A (ja) | 1986-07-12 | 1986-10-01 | 表面解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6388743A (enrdf_load_stackoverflow) |
-
1986
- 1986-10-01 JP JP61235397A patent/JPS6388743A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6388743A (ja) | 1988-04-19 |
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