JPH0520412Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a sound deadening box in a filter device for a clean room.

[Prior Art] Conventionally, a sound deadening box in a filter device for a clean room consists of a blower 3 installed on one side of a filter housing 31, as shown in FIG.
In front of the air outlet 33 of No. 2, a bump-full plate 35 to which a sound-absorbing material 34 is fixed is installed in an inclined manner, and the air from the blower 32 is first sent to the bump-full plate 35, where it absorbs the sound. After the sound is diffused upward and further absorbed by the sound absorbing material 34 fixed to the inner wall 36 of the filter housing 31, the air is sent to the upstream side of the filter 37 to muffle the noise generated by the blower 32. It had been.

[Problem to be solved by the invention] However, in the conventional sound deadening box, the filter 37 is separated from the buffer plate 35.
The air is sent to the sound absorbing material 3.
There was a problem that a sufficient noise reduction effect could not be expected because the contact time with 4 was short.

The present invention aims to solve this problem by providing a sound deadening box for a filter device.

[Means for Solving the Problems] The present invention divides a filter casing with a partition wall, and provides a blower room and a filter room in which a plurality of blowers are installed in one or more stages in the front and back, In addition, a rectangular air outlet is opened in the center of the rectangular plate, the four sides are fixed in contact with the inner wall above the filter of the filter chamber, a lower chamber is provided between the rectangular plate and the filter, and each blower is A buttful plate is planted and fixed along the opening edge of the air outlet on the side of the air outlet and the opening edges on both sides connected thereto, and an opening facing the opening edge on the side of the air outlet. A baffle plate is planted and fixed at the edge with an air supply opening, and a diversion buffle plate is provided between the center of the buttfull plate at the edge of the opening on the side of the air outlet and the center of the partition wall. are planted and fixed, and the upper edge of each of the buttful plates is fixed in contact with the top plate of the filter, and an upper chamber surrounded by each of the buttful plates is provided, while a sound absorbing material is attached and fixed to the air supply passage surface. This solved the above problems.

[Function] According to the present invention having the above configuration, the air supply distance from the air outlet of the blower to the filter can be made long, and by installing a sound absorbing material on the air supply passage surface in between, Absorbs most of the noise from blowers.

[Example] An example of the implementation of the present invention will be described in detail with reference to the drawings.A filter housing 1 is divided by a partition wall 2,
A blower chamber 3 and a filter chamber 4 are formed. In the blower room 3, a plurality of blowers 6 operated by motors 5 are arranged in one row in the front and back at intervals (embodiment);
Alternatively, the device may be installed in multiple stages, and an air duct 7 is communicated with the outer surface of the blower chamber 3, and the blower ports 8 at the front of each blower 6 are opened at the upper portion of the filter chamber 4, respectively.

A filter 9 is attached and fixed to the lower part of the filter chamber 4, and a noise reduction box 10 is attached to the upper part of the filter 9. The sound deadening box 10 has a rectangular air inlet 12 opened in the center of a rectangular plate 11, and the four sides of the rectangular plate 11 are fixed in contact with the inner wall 13 of the filter chamber 4 above the filter 9. square plate 11 and filter 9
A lower chamber 14 is provided therebetween, and an opening edge 12a of the air outlet 12 on the side of the air outlet 8 and the opening edge 1
Along the opening edges 12b and 12c on both sides continuous to 2a, the buffful plates 15a to 15c are successively planted and fixed, respectively, and the opening edge facing the opening edge 12a on the side of the air outlet 8. The portion 12d has a ventilation opening 16 in the center, and the buttful plate 15 is connected to the buttful plates 15b and 15c.
d and 15e are installed and fixed in series, and furthermore, between the central part of the baffle plate 15a and the partition wall 2, each air outlet 8 of each blower 6 arranged in the front and back is divided into front and rear. The dividing baffle plate 17 is fixed, and each of the baffle plates 15a to 15e, 1
The upper end edge of the filter housing 1 is fixed in contact with the top plate 18 of the filter housing 1, and an upper chamber surrounded by each baffle plate 15a, 15e and 17 is provided. A sound-absorbing material 22 having air permeability, for example, glass wool 20 is pasted and the front surface thereof is covered with glass cloth 21, is attached and fixed to the air supply passage surface that is in contact with the aerated air.

To explain the operation of the embodiment, motor 5
When each blower 6 is operated by energizing the air blower 6 and air is sent from each air outlet 8, the air sent to the filter chamber 4 is completely divided into two directions by the dividing baffle plate 17, as shown in the figure. First, as shown by the middle arrow, the buttful plate 1 is placed on the opening edge 12a.
5a to prevent dynamic pressure (velocity pressure) and create a turbulent flow, which then converts the air supply direction at right angles, and then collides with the inner circumferential wall of the filter casing 1, causing the respective opening edges 12b , 12c, and further collides with the inner circumferential wall of the filter housing 1, changing the direction of air supply at right angles, so that the air supplied from both directions is collides with the upper chamber 1 through the ventilation opening 16
Air is supplied to 9. Since the air is sent to the upper chamber 19 through a relatively long path, it has a long contact time with the sound-absorbing material 22, which acts as a noise-reducing elbow and reduces the noise from each blower 6. It mutes the sound. When the air from the upper chamber 19 is further transferred to the lower chamber 14 above the filter 9, the flow velocity is lower than that in the upper chamber 19 because the width of the lower chamber 14 is wider than that of the upper chamber 19. The air then decays, becomes an average rectified form, diffuses, is muffled again, and is sent to the filter 9.

By configuring the air supply distance from the air outlet 8 to the filter 9 to be long even in a compact width, the noise from each blower 6 is absorbed by the sound absorbing material 22 in the air supply passage. There is almost no noise downstream of the filter 9.

[Effects of the invention] Since the present invention is as described above, it is possible to lengthen the air delivery distance from the air outlet to the filter, and the sound-absorbing material attached to the air passageway surface makes it possible to increase the distance from each blower. This makes it possible to absorb the noise of each blower and blow clean air to the downstream side of the filter with almost no noise from each blower. In addition, the noise reduction box of the present invention can be attached to the filter housing as a unit.
Its advantages include low production costs,
There is something big.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional plan view, FIG. 2 is a vertical front view, and FIG. 3 is a vertical cross-sectional view showing a conventional example. In the figure, 1 is a filter case, 6 is a blower, 8 is an air outlet, 9 is a filter, 10 is a sound deadening box,
11 is a square plate, 12 is an air supply port, 12a to 12d are opening edges, 13 is an inner wall, 14 is a lower chamber, 15a
~ 15e is a baffle plate, 16 is an air supply opening, 17 is a diversion buffle plate, 18 is a top plate,
19 is an upper chamber, and 22 is a sound absorbing material.

Claims (1)

[Scope of utility model registration request] The filter casing is divided by a partition wall, and a blower room and a filter room are provided in which a plurality of blowers are installed in one or more stages in the front and back, and a rectangular air outlet is provided in the center of the rectangular plate. It is opened and the four sides are fixed in contact with the inner wall above the filter of the filter chamber to provide a lower chamber between the square plate and the filter,
Furthermore, the opening edge of the air outlet on the air outlet side of each blower,
A buttful plate is implanted and fixed along the opening edges on both sides connected to this, and an air supply opening is provided at the opening edge facing the opening edge on the side of the air outlet to make the buttful plate. A plate is planted and fixed, and a branching buff-full plate is planted and fixed between the center part of the buff-full plate at the opening edge on the side of the air outlet and the center part of the partition wall, and the upper end edge of each of the buff-full plates is planted and fixed. A sound-absorbing box for a filter device, which is fixed in contact with the top plate of the filter, has an upper chamber surrounded by each baffle plate, and has a sound-absorbing material attached and fixed to the air supply passage surface.