JPH0520158B2 - - Google Patents
Info
- Publication number
- JPH0520158B2 JPH0520158B2 JP61089575A JP8957586A JPH0520158B2 JP H0520158 B2 JPH0520158 B2 JP H0520158B2 JP 61089575 A JP61089575 A JP 61089575A JP 8957586 A JP8957586 A JP 8957586A JP H0520158 B2 JPH0520158 B2 JP H0520158B2
- Authority
- JP
- Japan
- Prior art keywords
- wastewater
- coagulation
- pac
- flocculant
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002351 wastewater Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 14
- 239000010802 sludge Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000004062 sedimentation Methods 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 5
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 claims description 4
- 238000005345 coagulation Methods 0.000 claims description 4
- 230000015271 coagulation Effects 0.000 claims description 4
- 229920000620 organic polymer Polymers 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000006228 supernatant Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 230000001580 bacterial effect Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005189 flocculation Methods 0.000 description 2
- 230000016615 flocculation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000005909 Kieselgur Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Landscapes
- Separation Of Suspended Particles By Flocculating Agents (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、切削、研磨等により生じた排水の凝
集沈殿処理方法である。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is a method for coagulation and sedimentation treatment of wastewater generated by cutting, polishing, etc.
（従来の技術）
シリコンウエーハの製造工程における代表的な
排水の一つとして、シリコンインゴツトの切削、
スライスおよびウエーハの研磨工程から出る排水
があげられるが、これには高濃度のシリコン粉の
ほかに、種々の研磨剤、海面活性剤、珪藻土等の
プレコート濾過助剤および切削油等が含まれてい
るのが一般的で、その浮遊物濃度（以下SSとい
う）は数百mg／〜数千mg／、浮遊物粒子径は
数μm〜数百μmの範囲になる。(Prior art) As one of the typical wastewaters in the silicon wafer manufacturing process, cutting of silicon ingots,
Wastewater from the slicing and wafer polishing process is a wastewater that contains high concentrations of silicon powder, as well as various abrasives, sea surfactants, pre-coated filter aids such as diatomaceous earth, and cutting oil. Generally, the suspended solids concentration (hereinafter referred to as SS) ranges from several hundred mg/ to several thousand mg/, and the suspended solid particle diameter ranges from several μm to several hundred μm.
このような切削、研磨排水の処理方法として、
塩基性塩化アルミニウム（以下PACという）等
の無機系凝集剤を数百mg／〜二千mg／、およ
び高分子系凝集剤を数mg／添加する凝集沈殿法
により固液分離をする方法が行われている。この
とき沈殿池で生成したスラツジは汚泥処理工程へ
送り、上澄み液は放流するか、あるいは溶解性
BOD等を含む場合は次段の活性汚泥処理等の
BOD除去工程へ導かれる。 As a treatment method for such cutting and polishing wastewater,
Solid-liquid separation is carried out by a coagulation-sedimentation method in which several hundred mg/~2,000 mg of an inorganic flocculant such as basic aluminum chloride (hereinafter referred to as PAC) and a few mg of a polymer flocculant are added. It is being said. At this time, the sludge generated in the settling tank is sent to the sludge treatment process, and the supernatant liquid is either discharged or
If it contains BOD, etc., the next stage of activated sludge treatment, etc.
This will lead to the BOD removal process.
（発明が解決しようとする問題点）
一般に、排水の凝集沈殿処理方法では、流入排
水のSSの上昇に応じて、PACを増量する必要が
あり、また切削油等に含まれる分散剤、防錆剤等
が多いときは、PACをさらに増量する必要があ
る。その結果PACより生ずる水酸化アルミニウ
ムのスラツジ量も増えるため、汚泥処理費にかな
りの負担増を招く結果となる。(Problems to be Solved by the Invention) Generally, in the coagulation-sedimentation treatment method for wastewater, it is necessary to increase the amount of PAC as the SS of the inflowing wastewater increases. When there are many drugs, etc., it is necessary to further increase the amount of PAC. As a result, the amount of aluminum hydroxide sludge produced by PAC increases, resulting in a considerable increase in sludge treatment costs.
全処理系のランニングコストにおいては、前記
PACに係る処理費が支配的であり、コストダウ
ンのために有効な薬注量の低減策がかねてより要
望されていた。 The running cost of the entire processing system is
Processing costs related to PAC are predominant, and effective measures to reduce the amount of medicine to be injected have been desired for some time in order to reduce costs.
（問題点を解決するための手段）
上記要望にそうため本発明者は、鋭意検討を重
ねた結果本発明を達成したのであつて、これは
PACと有機高分子系の凝集剤を添加する切削研
磨排水の凝集沈殿処理方法において、該凝集剤に
加えて、活性汚泥法等の生物処理により生ずる、
水量比で１〜５％の余剰泥を該排水に添加し予備
混合することを特徴とする排水の凝集沈殿処理方
法である。(Means for solving the problem) In order to meet the above request, the present inventor has achieved the present invention as a result of intensive studies.
In a coagulation-sedimentation treatment method for cutting and polishing wastewater that adds PAC and an organic polymer-based flocculant, in addition to the flocculant,
This is a method for coagulation-sedimentation treatment of wastewater, which is characterized by adding 1 to 5% of surplus mud in terms of water amount to the wastewater and premixing it.
（作用） つぎに本発明を詳しく説明する。(effect) Next, the present invention will be explained in detail.
活性汚泥法等の生物処理より生ずるところの、
水量費で１〜５％程度の余剰泥を、前記排水に連
続的あるいは断続的に添加し、数時間以上の予備
混合をした後凝集槽へ導き、H2SO4、Ca（OH）2
によつてPHを6.5〜7.0に調整しながら、PACと有
機高分子凝集剤を添加した後、沈殿池に導くと迅
速、確実に固液分離させることができる。 Generated from biological treatment such as activated sludge method,
Excess mud of about 1 to 5% in terms of water consumption is added continuously or intermittently to the waste water, and after preliminary mixing for several hours or more, it is led to a flocculation tank, where it is converted into H 2 SO 4 , Ca(OH) 2
After adding PAC and an organic polymer flocculant while adjusting the pH to 6.5 to 7.0, solid-liquid separation can be carried out quickly and reliably by introducing the mixture into a settling tank.
余剰泥を使うことによつて固液分離が促進され
る理由は、当該排水とZooglea等の生物フロツク
が数時間以上予備混合されることにより、数μm
〜数百μmの微細なシリコン粉を包み込んだ凝集
核が適度に成長するため、凝集槽でなされる
PACと有機高分子系凝集剤による凝集現象がよ
り効果的に促進されるためである。 The reason why solid-liquid separation is promoted by using surplus mud is that the wastewater and biological flocs such as Zooglea are premixed for several hours or more, resulting in microscopic particles of several μm.
This is done in an agglomeration tank because the agglomeration nuclei surrounding the fine silicon powder of ~ several hundred μm grow appropriately.
This is because the aggregation phenomenon by PAC and organic polymer flocculant is promoted more effectively.
（実施例）
まずシリコンの切削、研磨工程で生じた排水
（SS1500mg／）を、最大貯量240m3、平均貯量
150m3の原水槽に平均７時間滞留させる（原水槽
は貯量が70m3になつたとき送水ポンプが停止し、
240m3で水位高限アラームとなるので、原水槽レ
ベルは70〜240m3の範囲で上下する。通常400〜
700m3／日の流入量があるので、排水の滞留時間
は約３〜８時間となる）。この間にSSが4000mg／
の生物系余剰泥を20m3／日の割合で添加した。
この間の曝気量は60Nm3-air／時であつた。(Example) First, wastewater (SS1500mg/) generated in the silicon cutting and polishing process was collected with a maximum storage volume of 240m 3 and an average storage volume of
The water is allowed to stay in a raw water tank of 150m3 for an average of 7 hours (when the storage capacity of the raw water tank reaches 70m3 , the water pump stops,
Since the water level high limit alarm occurs at 240m3 , the raw water tank level will rise and fall within the range of 70 to 240m3 . Usually 400~
Since there is an inflow of 700 m 3 /day, the residence time of the wastewater is about 3 to 8 hours). During this period, SS was 4000mg/
of biological surplus mud was added at a rate of 20 m 3 /day.
The aeration amount during this period was 60Nm 3-air /hour.
原水槽の滞留を終えた排水は容量５m3の凝集槽
に導かれ、ここには12分間滞留するが、この間
に、H2SO4、Ca（OH）2を添加して排水のPH6.5に
自動制御しながら、ポリ塩化アルミニウム（Al2
O3分を10％含有）500mg／、クリフロツク
2ppmを注入した。 The wastewater that has finished staying in the raw water tank is led to a coagulation tank with a capacity of 5 m3 , where it stays for 12 minutes. During this time, H 2 SO 4 and Ca(OH) 2 are added to reduce the pH of the wastewater to 6.5. Polyaluminum chloride (Al 2
Contains 10% of O 3 minutes) 500mg/, Cliff Lock
Injected 2ppm.
ついで排水を広さ36m2、深さ３ｍの沈殿池に流
速0.7ｍ／時で導き、４時間滞留させたところ、
排水規制を十分満足させる上澄濁度の排水とする
ことができた。 Next, the wastewater was introduced into a sedimentation tank with a width of 36 m 2 and a depth of 3 m at a flow rate of 0.7 m/hour, and was left there for 4 hours.
It was possible to produce wastewater with a supernatant turbidity that satisfies wastewater regulations.
生物泥を注入しないときは、同じ上澄濁度を得
るために、前記ポリ塩化アルミニウムを1200mg／
まで増加しなければならなかつた。 When not injecting biological mud, the polyaluminum chloride was added at 1200 mg/kg to obtain the same supernatant turbidity.
had to increase to.
（発明の効果）
本発明によれば、下記のような多くの効果をあ
げることができるので、産業上きわめて優れたも
のであることは明白である。(Effects of the Invention) According to the present invention, many effects as described below can be achieved, so it is clear that the present invention is extremely excellent industrially.
ａ PAC等の無機系凝集剤消費量の大幅削減が
可能となつた。a) It has become possible to significantly reduce the consumption of inorganic flocculants such as PAC.
ｂ 前記ａ）に伴うアルミニウム系スラツジ生成
量の削減により、汚泥処理費が低減された。b Due to the reduction in the amount of aluminum-based sludge produced in accordance with a) above, the sludge treatment cost was reduced.
ｃ PACの単独使用では、ともすれば凝集を安
定させるために必要以上に凝集剤を加える傾向
がある。このため次段に生物処理工程を有する
場合は、凝集剤のリークにより菌体フロツクを
不必要に大きくし過ぎ、菌体単位重量あたりの
比表面積が大となり、生物反応速度を遅くする
おそれがあるが、PACを大幅に低減できるの
でこのおそれは少ない。c When PAC is used alone, there is a tendency to add more flocculant than necessary to stabilize flocculation. For this reason, when a biological treatment step is included in the next step, the bacterial floc may become unnecessarily large due to flocculant leakage, resulting in a large specific surface area per unit weight of bacterial cells, which may slow down the biological reaction rate. However, since PAC can be significantly reduced, this possibility is less likely.
ｄ 生物処理系余剰泥は、本来直接脱水処理工程
に導かれるのが一般的であるが、それを切削研
磨排水の凝集助剤として用いるので、汚泥処理
への負担増とならないだけでなく、逆に比較的
濃度の低い沈殿池底泥を一ケ所に集中させるわ
けであるから、汚泥処理工程へ導かれる水量が
減り、濃度は高くなり、汚泥処理の負担は軽減
される。d Generally, surplus sludge from the biological treatment system is directly led to the dewatering process, but since it is used as a coagulation aid for cutting and polishing wastewater, it not only does not add to the burden on sludge treatment, but also has the opposite effect. Since sedimentation tank bottom sludge with a relatively low concentration is concentrated in one place, the amount of water introduced to the sludge treatment process is reduced, the concentration is increased, and the burden of sludge treatment is reduced.
Claims (1)
剤を添加する切削研磨排水の凝集沈殿処理方法に
おいて、該凝集剤に加えて、活性汚泥法等の生物
処理により生ずる、水量比で１〜５％の余剰泥を
該排水に添加し予備混合することを特徴とする排
水の凝集沈殿処理方法。1. In a coagulation-sedimentation treatment method for cutting and polishing wastewater in which basic aluminum chloride and an organic polymer-based flocculant are added, in addition to the flocculant, 1 to 5% of the water volume ratio generated by biological treatment such as the activated sludge method is added. A method for coagulation and sedimentation treatment of wastewater, characterized by adding surplus mud to the wastewater and premixing it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957586A JPS62247888A (en) | 1986-04-18 | 1986-04-18 | Flocculating and setting treatment for waste water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957586A JPS62247888A (en) | 1986-04-18 | 1986-04-18 | Flocculating and setting treatment for waste water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62247888A JPS62247888A (en) | 1987-10-28 |
| JPH0520158B2 true JPH0520158B2 (en) | 1993-03-18 |
Family
ID=13974599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8957586A Granted JPS62247888A (en) | 1986-04-18 | 1986-04-18 | Flocculating and setting treatment for waste water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62247888A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104671590B (en) * | 2015-01-23 | 2017-12-29 | 先达恩那社水处理工程（天津）有限公司 | The method of wastewater treatment of chip production line |
| CN104609668A (en) * | 2015-01-23 | 2015-05-13 | 先达恩那社水处理工程（天津）有限公司 | Wastewater treatment method for chip production line |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5053280A (en) * | 1973-09-12 | 1975-05-12 | ||
| JPS5215901A (en) * | 1975-07-29 | 1977-02-05 | Babcock Hitachi Kk | Water collector from exhaust smoke |
-
1986
- 1986-04-18 JP JP8957586A patent/JPS62247888A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5053280A (en) * | 1973-09-12 | 1975-05-12 | ||
| JPS5215901A (en) * | 1975-07-29 | 1977-02-05 | Babcock Hitachi Kk | Water collector from exhaust smoke |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62247888A (en) | 1987-10-28 |
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