JPH05197951A - Manufacture of magnetic disk and varnishing device - Google Patents

Abstract

PURPOSE:To manufacture a magnetic disk warranting the floating height of a magnetic disk for low floating by varying the yaw angle of a slider for varnishing and varnishing by adjusting it. CONSTITUTION:A signal is sent to a vice coil motor 10 for adjusting the yaw angle of the slider 3 for varnishing and the slider 3 is seaked over a magnetic disk 1 entire surface in the state of generating the yaw angle to the slider 3 and the removal of a minute projection on the surface of the disk 1, that is, varnishing is performed. Then the carriage 8 of a head 7 sticking a piezo element 6 is moved to an optional position and the head 7 sticking the element 6 is loaded by operating a supporting rod 9. Then the head 7 sticking the element 6 is seaked over the disk l entire surface and the presence and the position of the minute projection on the disk 1 are detected. That is, varnishing is performed effectively and the magnetic disk with high reliability even for a quite low floating height is manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burnishing magnetic disk manufacturing method and burnishing apparatus having a burnishing slider for adjusting a yaw angle effective for smoothing the surface of a rigid magnetic disk. ..

[0002]

2. Description of the Related Art In a magnetic disk device for recording data,
Increasing recording density, shortening access time, and increasing transfer rate are advancing year by year.

Along with this, a magnetic disk is required to have a high coercive force and a high residual magnetic flux density, and a metal thin film magnetic disk manufactured by a sputtering method or a plating method is changed from an oxide coating medium. Further, in order to reduce the separation length between the magnetic head and the magnetic disk, the flying height of the magnetic head has been reduced from the conventional 300 nm to 200 nm, or even lower.

As the flying height decreases, it becomes very difficult to ensure reliability. For example, in the case of a magnetic disk manufactured by a sputtering method, a large number of fine particles due to dust during sputtering, minute projections during surface processing of the disk substrate, and minute projections due to abnormal film growth exist on the disk surface.

However, when the flying height is relatively high, such as 300 nm or 200 nm, the flying height is 100 nm even for minute protrusions, which is not a problem in terms of reliability.
Further, when the thickness drops below that, these minute protrusions rapidly affect the reliability of the disk device.
Here, reliability of the disk device means data destruction due to head crash due to collision between minute protrusion and magnetic head, data read failure due to reduction in head output due to damage of magnetic head by minute protrusion, etc. This is a recording device related to a fatal accident.

[0006] One of the magnetic disk manufacturing processes for obtaining excellent reliability is the above-described process of removing the minute protrusions that affect the reliability, that is, the burnishing process. Is removed to ensure the reliability of the magnetic disk.

FIG. 4 shows the structure of a conventional burnishing apparatus. A spindle 2 for rotating the magnetic disk 1,
Burnishing slider 3 for removing minute protrusions on the magnetic disk 1, carriage 4 for moving the burnishing slider 3 to an arbitrary position, and support for loading and unloading the burnishing slider 3. A rod 5, a head 7 in which a piezo element 6 for detecting the presence or absence of a minute protrusion on the magnetic disk 1 and its existing position is attached to the leading end within the range of guaranteeing the flying height of the magnetic disk 1, and this head 7 is optional. Carriage 8 for moving the head 7 to the position, a support rod 9 for loading and unloading the head 7, an amplifier for detecting a signal from the piezo element 6 attached to the leading end of the head 7, a filter, and the above-mentioned configuration. It consists of a computer for controlling the operation of.

Next, the operation will be described. Loading the burnishing slider 3 onto the magnetic disk 1 by moving the carriage 4 to an arbitrary position on the magnetic disk 1 rotating at a predetermined number of rotations and operating the support rod 5 of the burnishing slider 3. Let With the burnishing slider 3 in a state where the rotational speed of the magnetic disk 1 is slowed down,
That is, by performing a seek over the entire surface of the magnetic disk 1 at a flying height lower than the flying height for guaranteeing the flying height of the magnetic disk 1, fine protrusions on the surface of the magnetic disk 1, that is, burnishing is performed. The support rod 5 of the burnishing slider 3 is operated to move the burnishing slider 3
Unload. Next, the carriage 8 of the head 7 to which the piezo element 6 is attached is moved to an arbitrary position,
By operating the support rod 9, the head 7 to which the piezo element 6 is attached is loaded. The head 7 having the piezo element 6 attached thereto is sought over the entire surface of the magnetic disk 1 to detect the presence or absence and the presence position of a minute projection on the magnetic disk 1 within the range in which the flying height of the magnetic disk 1 is guaranteed. As a result, if the presence of minute protrusions on the magnetic disk 1 is confirmed within the range in which the flying height of the magnetic disk 1 is guaranteed, the above burnishing is further performed. Such a process is performed until the minute protrusions on the magnetic disk 1 are no longer detected within the range in which the flying height of the magnetic disk 1 is guaranteed. When the protrusions become minute, the burnishing slider 3
Since the yaw angle is constant, the peripheral speed of the magnetic disk 1 is lowered and the flying height of the burnishing slider 3 is lowered.

[0009]

In such a conventional method, when the slider flying height is as high as 200 nm to 300 nm, the presence of minute protrusions on the magnetic disk does not pose a problem, but the flying height is 100 nm. Furthermore, if it drops to less than that, the effects of minute protrusions will appear rapidly, and since these protrusions are very difficult to remove, the flying height of the burnishing slider will be low. In addition, since the peripheral speed of the magnetic disk is slowed down, it takes a considerable amount of time with the conventional burnishing device, and in the end, minute protrusions cannot be sufficiently removed, resulting in a high defect rate in the burnishing process and other production problems. was there.

The present invention solves the above problems, and a method of manufacturing a magnetic disk and a bar for ensuring the flying height of the magnetic disk for low flying to ensure excellent reliability with high productivity. It is an object to provide a niche device.

[0011]

In order to achieve the above object, the present invention is an apparatus having a mechanism capable of varying the yaw angle of a burnishing slider, and by adjusting the yaw angle of the burnishing slider, Is to do.

[0012]

According to the present invention, when the flying height of the burnishing slider is adjusted by the above apparatus and manufacturing method, it is possible to perform burnishing which can guarantee even a very low flying height.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic diagram of a burnishing apparatus according to an embodiment of the present invention. A spindle 2 for rotating the magnetic disk 1, a burnishing slider 3 for removing minute projections on the magnetic disk 1, a voice coil motor 10 for adjusting the yaw angle of the burnishing slider 3, a burnish A carriage 4 for moving the slider 3 for an arbitrary position, a support rod 5 for loading and unloading the burnishing slider 3, and a small amount on the magnetic disk 1 within a range in which the flying height of the magnetic disk 1 is guaranteed. Head 7 with a piezo element 6 attached to the leading end for detecting the presence or absence of such a protrusion and its position, a carriage 8 for moving the head 7 to an arbitrary position, and a support for loading and unloading the head 7. The signal from the piezo element 6 attached to the leading end of the rod 9 and the head 7 is detected. Amplifier for, consisting of a computer for controlling the operation of the filter and the above configurations. The voice coil motor 10 rotates in response to a predetermined signal to generate a yaw angle on the burnishing slider 3, which is shown in FIG. The relationship between the yaw angle and the flying height at this time is shown in FIG. From this figure, it is understood that the flying height can be reduced by adjusting the yaw angle without lowering the peripheral speed of the magnetic disk 1.

Next, the operation will be described. The operation consists of an operation of removing the minute protrusions on the magnetic disk 1 and an operation of detecting the presence or absence of the minute protrusions on the magnetic disk 1 within the range in which the flying height of the magnetic disk 1 is guaranteed.

The carriage 4 is moved to an arbitrary position on the magnetic disk 1 rotating at a predetermined number of revolutions, and the support rod 5 of the burnishing slider 3 is operated to move the burnishing slider 3 to the magnetic disk 1. Load on top. Send a signal to the voice coil motor 10 for adjusting the yaw angle of the burnishing slider 3,
With the yaw angle generated in the burnishing slider 3, the burnishing slider 3 is sought over the entire surface of the magnetic disk to remove minute protrusions on the surface of the magnetic disk 1, that is, burnishing is performed. The support rod 5 of the burnishing slider 3 is operated to unload the burnishing slider 3. Next, the carriage 8 of the head 7 to which the piezo element 6 is attached is moved to an arbitrary position and the support rod 9 is operated to load the head 7 to which the piezo element 6 is attached. The head 7 to which the piezo element 6 is attached is sought over the entire surface of the magnetic disk 1 to detect the presence or absence and the position of a minute protrusion on the magnetic disk 1 within the range in which the flying height of the magnetic disk 1 is guaranteed. As a result, if the presence of minute protrusions on the magnetic disk 1 is confirmed within the range in which the flying height of the magnetic disk 1 is guaranteed, the above burnishing is further performed. Such a process is repeated within the range of guaranteeing the flying height of the magnetic disk until the minute protrusions on the magnetic disk 1 are no longer detected, that is, until the flying height guarantee is satisfied.

Next, the burnishing was actually carried out using the burnishing apparatus of one embodiment of the present invention. A magnetic disk was manufactured by forming a Cr underlayer film, a CoNiCr magnetic film and a C protective film on a substrate obtained by coating an AlMg alloy substrate with a NiP alloy film by a DC magnetron sputtering method.

The time required for burnishing the magnetic disk thus manufactured was examined. The time required for burnishing was calculated by measuring the time required when 10 magnetic disks were burnished over the entire surface of the magnetic disk until the flying height guarantee was satisfied, and the burnishing time required for each magnetic disk was calculated. .. The flying height guarantee was set at 60 nm and examined.

Table 1 shows the burnishing time required for one magnetic disk for the burnishing apparatus of this embodiment and the conventional burnishing apparatus as a comparative example.

[0020]

[Table 1]

It can be seen that the burnishing time of this embodiment is much shorter than the burnishing time of the conventional example. This is because the burnishing slider of this embodiment can lower the flying height at the time of burnishing without lowering the peripheral speed of the magnetic disk. As compared with the conventional example in which the flying height is reduced, minute protrusions on the magnetic disk can be removed extremely efficiently. It has been confirmed that even if the minute protrusions on the magnetic disk are removed by changing the yaw angle of the burnishing slider, there is no problem in the error occurrence and reliability of the magnetic disk.

Further, in the conventional method, it is possible to reduce the flying height at the time of burnishing without lowering the peripheral speed by narrowing the polishing width, but at that time, the damping function of the slider is lowered, and the burnishing function is reduced. Occasionally there are many crashes and not very good results. In addition, this method is not versatile because the flying height during burnishing cannot be varied.

That is, in this embodiment, there is no contact between the magnetic disk and the magnetic head for the flying height of the magnetic head whose flying height is 100 nm or less, and therefore, head crash and recording / reproducing are performed. A magnetic disk satisfying excellent reliability with no deterioration of characteristics can be manufactured with high productivity.

Further, in the present embodiment, the burnishing slider and the head for detecting the minute protrusions on the magnetic disk are used. However, the minute protrusions on the magnetic disk are removed by the burnishing slider. By attaching a piezo element for detecting the minute protrusions on the magnetic disk, the burnish of the magnetic disk and the flying height of the magnetic disk can be guaranteed only by the slider for burnishing. In this case, the yaw angle of the burnishing slider should be large when performing burnishing, and the yaw angle of the burnishing slider should be appropriate when measuring the flying height that guarantees flying height. Thus, only a predetermined signal needs to be sent to the voice coil motor for each.

[0025]

As is apparent from the above-described embodiments, according to the present invention, the burnishing is performed by adjusting the yaw angle of the burnishing slider so that the magnetic head floats. Excellent for preventing head crashes and deterioration of recording / reproducing characteristics because fine protrusions can be removed without any contact between the magnetic disk and the magnetic head when the flying height of the magnetic head is 100 nm or less. The magnetic disk satisfying the high reliability can be manufactured with high productivity.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a burnishing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of the relationship between the magnetic disk and the burnishing slider as seen from above in the embodiment.

FIG. 3 is a diagram showing a relationship between a yaw angle and a flying height of a burnishing slider in the example.

FIG. 4 is a schematic configuration diagram of a conventional burnishing device.

[Explanation of symbols]

 1 magnetic disk 3 slider for burnish

Claims (2)

[Claims] 1. A method of manufacturing a magnetic disk, wherein the surface of the magnetic disk is burnished by adjusting a yaw angle of a burnishing slider. 2. A burnishing device for a magnetic disk comprising a mechanism for adjusting the yaw angle of a burnishing slider for burning the surface of the magnetic disk.