JPH05196523A - Method and device for measuring stress of moving metallic belt body in noncontact state - Google Patents

Abstract

PURPOSE:To obtain a noncontact stress measuring instrument which can instantly measure the stress given to a belt-like metallic body which is continuously driven in its advancing direction by means of a linear motor in a noncontact state. CONSTITUTION:A supporting structure 31 is fixed to a base section 30. In the structure 31, linear motor driving sections 32U and 32D are supported so that the sections 32U and 32D can be moved by fixed distances in orthogonal directions and move a metallic belt body 2 in its advancing direction (Y direction). Load cells 33a, 33b, 33c, 34a, and 34b are provided between the sections 32U and 32D and the structure 31 so that the cells can detect the reaction forces Y' and Z' of the thrust and vertical force Z given to the body 2. Detecting signals of the cells 33a, 33b, 33c, 34a, and 34b are inputted to a signal processing circuit 11 which finds the thrust Y and vertical force Z given to the metallic belt body 2 from the linear motor driving sections 32U and 32D.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, when a metal belt is linearly moved by a linear motor, can measure the propulsive force and vertical force applied to the metal belt from the linear motor in a non-contact manner. The present invention relates to a method and a device for measuring non-contact stress of a metal strip.

[0002]

2. Description of the Related Art It is well known that in the process of manufacturing a strip-shaped steel sheet, the tension applied to the steel sheet to be manufactured significantly affects the quality of the steel sheet. Therefore, in the strip steel plate manufacturing process described above, appropriately controlling the tension applied to the steel plate is
This is an extremely important technique.

Conventionally, in the above-described strip-shaped steel sheet manufacturing process, as a method of controlling the tension applied to the steel sheet, the position of the roll in contact with the steel sheet is displaced by an external force, or the steel sheet is wound around a roll and the roll is rolled. Was controlled by an external force. In such a tension control method, in the case of a high-speed, mass-production line, there is a problem that the steel sheet tension controllable length needs to be more than a few meters because of equipment size restrictions and equipment cost restrictions. ..

In order to solve such a problem, a method is conceivable in which a linear motor is used to apply stress to the steel sheet in a non-contact manner. When the linear motor is used in this manner, the dimension of the linear motor becomes the minimum steel plate tension control target length, the texture can be finely controlled, and the tension control of any part of the steel plate can be performed to improve the quality of the steel plate. Will contribute.

Another example of applying such a linear motor to a strip steel plate manufacturing process is meandering control of the strip steel plate.

Conventionally, the meandering control method for a strip-shaped steel sheet has been performed by displacing the position of the roll contacting the steel sheet by an external force. However, in the case of such a conventional meandering control method for a strip-shaped steel sheet, since the high-quality steel sheet is brought into contact with the roll, the surface of the steel sheet may be scratched or sometimes its shape may be changed. There was a problem.

Therefore, the problem caused by such a conventional meandering control can be solved by applying a linear motor and applying stress to the steel sheet in a non-contact manner from the linear motor drive section.

However, when stress is applied to the steel sheet from the linear motor drive unit in a non-contact manner as described above, it is essential to measure the stress applied to the steel sheet in real time online.

By the way, regarding the method of measuring the stress applied to the secondary conductor (on the moving body side) from the linear motor drive section (primary winding), some offline methods have been proposed, and will be briefly described below. ..

11 and 12 are views showing an apparatus for detecting the thrust applied to the secondary conductor from the linear motor drive section (primary winding). FIG. 11 is a front view and FIG.
2 is a plan view.

In the figure, the secondary conductor 112 on a circular arc and the load cell drive piece 117 are mechanically connected by a pin, a joint or the like, and the linear motor drive unit 111 to the secondary conductor 11 are connected.
The thrust applied to 2 is a load cell 11 which is a piezoelectric conversion element.
Transmit to 3. The load cell 113 is fixed to a support base 115 fixed to the base.

13 and 14 are views showing a device for detecting a vertical force applied from a linear motor (primary winding) to a secondary conductor. FIG. 13 is a front view and FIG. It is a top view.

In the figure, this measuring device is capable of moving in the same direction as the thrust direction applied to the secondary conductor 112, and can maintain a constant distance from the secondary conductor.
15 and a plurality of load cells 116 are arranged between the secondary conductor 112, and a vertical force (compressive force) applied to the secondary conductor 112 from the linear motor drive unit 111 is applied to the load cell 1.
16 is transmitted. As a result, the linear motor drive unit 11
Vertical force (compressive force) applied to the secondary conductor 112 from 1
Can be taken out from the load cell 113.

FIG. 15 is a principle block diagram for explaining the first device for measuring the thrust of a linear pulse motor.

In FIG. 15, the linear pulse motor 21
1 is movable on the base 212 with wheels 213, and is fixed via a spring 214.
In this device, the thrust can be estimated from the amount of expansion or contraction of the spring 214.

FIG. 16 is a principle block diagram for explaining a second device for measuring the thrust of a linear pulse motor.

In FIG. 16, the linear pulse motor 21
Reference numeral 1 is a structure in which a wire rope 217 is movably mounted on the base 212 by means of wheels 213, and a wire rope 217 for suspending a heavy load 216 by using a pulley 215 is connected. In this device, the thrust can be estimated from the heavy object 216.

FIG. 17 is a principle block diagram for explaining a third device for measuring thrust of a linear pulse motor.

In FIG. 17, the linear pulse motor 21
1 is movable on the base 212 with wheels 213, and has a load 218 directly mounted thereon. In this device, the linear pulse motor 21
The thrust can be estimated from the load 218 on which the vehicle 1 can travel.

FIG. 18 is a principle block diagram for explaining a fourth device for measuring the thrust of a linear pulse motor.

In FIG. 18, the linear pulse motor 21
1 is a power supply 220, a drive circuit 221, and a pulse generator 2
It is pulse-driven by a motor drive unit 22.
The linear pulse motor 211 is movable on the base 212 with wheels 213, and also has a wire rope 223a, a spring 224, and a wire rope 223b.
It is connected to the load cell 225 via. The strain amount detected by the load cell 225 is displayed on the memory scope 227 after being amplified by the strain amplifier 226. The thrust of the linear pulse motor 211 can be obtained from the display on the memory scope 227.

However, the measurement of the thrust force and the like by each of the above-mentioned measuring devices was conducted offline and experimentally by measuring the stress applied to the secondary conductor from the linear motor.

Therefore, in these measurements, in the case of the measuring apparatus shown in FIGS. 11, 12 and 13 and 14, the secondary conductor 112 is in a substantially stationary state, and the secondary conductor is It is necessary to mechanically connect pins or the like and compress (or pull) the load cell that is the detection means.
In the case of the measuring device shown in FIGS. 15 to 18, the linear motor 211 and the detecting means (the spring 214, the heavy object 216, the load 218, or the load cell 225) need to be mechanically connected to each other by an integral structure.

Therefore, a method of measuring the stress applied to the steel sheet from the amount of excitation of the linear motor can be considered. However, in this method, the stress applied to the steel sheet even with the same amount of excitation is such that the gap amount between the linear motor and the steel sheet, the shape / thickness / material / temperature of the steel sheet, and the driving frequency of the linear motor,
Since it is governed by many other factors, it is impossible to estimate the stress applied to the steel sheet from the excitation amount, which is not practical.

[0025]

As described above, in the case of the device for applying the stress to the steel sheet by using the linear motor,
Since the applied stress needs to be controlled accurately, the stress applied to the steel plate must be detected accurately and reliably. However, in the above-mentioned conventional measuring method, etc.,
Since the linear motor and the stress detecting means need to be mechanically connected, the detecting means must be moved in synchronization with the steel plate. However, since this steel plate moves via a large number of rolls, it is extremely difficult to move the detection means in synchronization with the steel plate, and it has been impossible to put it into practical use.

The present invention solves the above-mentioned inconvenient problems, and makes it possible to measure the stress applied to a strip-shaped metal body continuously linearly driven by a linear motor in a non-contact, online real-time manner. An object of the present invention is to provide a non-contact stress measuring method and device for a metal strip.

[0027]

The above object is to support a linear motor drive unit so as to be movable for a fixed distance in the orthogonal direction, and to perform piezoelectric conversion of each reaction force of thrust and vertical force applied from this linear motor drive unit. This is achieved by transmitting to the element so that they can be detected.

That is, in the non-contact stress measuring method according to the present invention, the supporting structure fixed to the base and the supporting structure are movably supported by a predetermined distance, and the metal strip is linearly moved. A method for measuring non-contact stress in a device consisting of a linear motor drive unit driven by a method for detecting a reaction signal from a piezoelectric conversion element provided so as to detect each reaction force of a thrust force and a vertical force applied to a metal strip. Based on this, the thrust and vertical force applied to the metal strip from the linear motor drive unit are measured.

In the non-contact stress measuring device according to the second aspect of the present invention, the support structure fixed to the base and the support structure are movably supported by a predetermined distance, and the metal strip is linearly moved. A linear motor drive unit to be driven, and a piezoelectric conversion element provided between the linear motor drive unit and the support structure so as to detect each reaction force of thrust and vertical force applied to the metal strip. It is characterized by having.

Further, in the non-contact stress measuring device according to the third aspect of the present invention, the support structure fixed to the base is movably supported by the support structure by a predetermined distance, and the metal strip is linearly moved. A linear motor driving section that is driven by the linear motor driving section, and a piezoelectric conversion element that is provided between the linear motor driving section and the support structure and that is capable of detecting reaction forces of thrust and vertical force applied to the metal strip. A signal processing circuit for determining the thrust force and the vertical force applied to the metal strip by the linear motor drive unit based on the detection signals from the respective piezoelectric conversion elements.

In addition, in the non-contact stress measuring device according to the invention of claim 4, the support structure comprises a support frame fixed to the base and a support base fixed to the support frame. A piezoelectric conversion element that detects the reaction force of thrust,
It is characterized in that it is arranged between the support frame and the linear motor drive section.

According to a fifth aspect of the present invention, in the non-contact stress measuring device, the supporting structure is composed of a supporting frame fixed to a base and a supporting base fixed to the supporting frame, and A piezoelectric conversion element for detecting a reaction force is disposed between the support and the linear motor drive section.

According to a sixth aspect of the non-contact stress measuring apparatus of the present invention, the supporting structure is composed of a supporting frame fixed to a base and a supporting base fixed to the supporting frame, and the supporting frame is attached to the supporting frame. Is characterized in that the linear motor drive portion is supported via a bearing that slides in the reaction force direction of the thrust.

According to a seventh aspect of the non-contact stress measuring apparatus of the present invention, the support structure comprises a support frame fixed to a base and a support base fixed to the support frame, and the support frame is attached to the support base. Is characterized in that the linear motor driving section is supported with a gap corresponding to a mechanical displacement amount of the piezoelectric conversion element provided at least in the reaction force direction of the vertical force.

[0035]

In the invention of the above structure, since the thrust and vertical force are applied from the linear motor drive unit to the metal strip, the linear motor drive unit can be moved by a certain distance in the orthogonal direction, and these reaction forces are piezoelectrically converted. Since the thrust force and the normal force are transmitted to the element and the thrust force and the vertical force are measured from these piezoelectric conversion elements based on the detection signal corresponding to the reaction force, the measurement can be performed without contact with the metal strip.

Further, since the linear motor drive unit is supported by using bearings, the amount of reaction stress in the linear motor drive unit being damaged in the process of transmitting through the support mechanism can be sufficiently reduced. As a result, the measured values of the thrust and the normal force are dramatically improved in sensitivity, reproducibility and accuracy, and sufficiently practical results are obtained.

[0037]

The present invention will be described below with reference to the illustrated embodiments.

1 to 5 are views showing an embodiment of a method and apparatus for measuring non-contact stress of a moving metal strip according to the present invention. 1 to 4 are views showing a mechanism portion, and FIG.
1 is a side view, FIG. 2 is a sectional view taken along the line AA of FIG. 1, FIG. 3 is a sectional view taken along the line BB of FIG. 1, and FIG. FIG. 5 is a block diagram showing a signal processing system.

The non-contact stress measuring device shown in these figures is
The stress is measured on the basis of the stress detection signal, and the electric circuit section 1 for generating electric power for driving the linear motor and the driving electric power supplied from the electric circuit section 1 exerts stress (thrust and vertical force) on the metal strip 2. And a mechanical section 3 capable of detecting a stress and supplying a stress detection signal to the electric circuit section 1.

As shown in FIGS. 1 to 4, the mechanical section 3 is supported by a support structure 31 fixed to a base 30 and a movable structure in a direction orthogonal to the support structure 31 by a predetermined distance. Linear motor drive units 32U and 32D for driving the band 2 in the Y and Z directions, and the linear motor drive unit 32
Piezoelectric conversion elements (load cells) 33a, 33 provided between the U, 32D and the support structure 31 to detect reaction forces of thrust and vertical force applied to the metal strip 2 respectively.
b, 33c, 34a, 34b.

Here, the metal strip 2 is the support structure 3
In the inside of 1, it continuously moves straight from left to right (in the Y direction) in the drawing. The support structure 31 includes a base 30.
A support frame 35 fixed to the support frame 35 and a support base 36 fixed to the support frame 35. The support base 36 has an inverted concave shape, and flat mounting pieces 37 are provided at both lower ends. A bearing 39 is interposed between the mounting piece 37 of the support base 36 and the upper side of the linear motor mounting plate 38, and the lower side of the linear motor mounting plate 38 and the supporting plate 40 are mounted.
A linear motor mounting plate 38 is mounted on the mounting piece 37 with bolts 41 and nuts 42 with a bearing 39 interposed therebetween. This linear motor mounting plate 3
8 is a guide roller 43 provided at the four corners of the support base 36,
While being regulated by 44, 45, and 46, the through hole 47 of the linear motor mounting plate 38 is largely drilled with respect to the bolt 41 to form the gap L as shown in FIGS. The load cells 33a, 33b, and 33c are movable in the Y'direction, and are adjustable between the linear motor mounting plate 38 and the mounting piece 37 of the support base 36 by adjusting the bolt 41 and the nut 42. It is possible to move in the Z and Z'directions by providing a gap D that is several times that amount.

Further, the load cells 33a, 33b, 3
3c is disposed with a pin 48 interposed between the recess of the support base 36 of the support structure 31 and the linear motor mounting plate 38, and reacts with the vertical force Z from the linear motor drive units 32U and 32D. The force Z'is transmitted to the load cells 33a, 33b, 33c via the linear motor mounting plate 38. Further, as shown in FIG. 2, the load cells 34a and 34b are arranged between one end of the linear motor mounting plate 38 to which the linear motor drive units 32U and 32D are fixed and the support 35p of the support frame 35. ing. Between the other end of the linear motor mounting plate 38 and the support 35q of the support frame 35, a load cell set spring 49,
Also, a load cell set bolt 50 and a load cell set nut 51 are provided. These load cells 33a, 33
The detection signals detected by b and 33c and the load cells 34a and 34b are supplied to the electric circuit unit 1. The electric circuit unit 1 supplies drive power to the linear motor drive units 32U and 32D.

FIG. 5 is a block diagram showing the configuration of the electric circuit section 1 of the present invention.

In FIG. 5, load cells 33a, 33
The detection signal of the reaction force Z ′ of the vertical force Z of b and 33c and the detection signal of the reaction force Y ′ of the thrust Y of the load cells 34a and 34b are supplied to the signal processing circuit 11 of the electric circuit unit 1. The signal processing circuit 11 calculates the thrust Y and the vertical force Z applied to the metal strip 2 in real time based on these detection signals. The signals of the thrust force Y and the vertical force Z obtained by the signal processing circuit 11 are supplied to the linear motor drive control circuit 12. This linear motor drive control circuit 12
Then, the thrust Y from the signal processing circuit 11 and the thrust target value setting signal 13 and the vertical force Z and the vertical force target value setting signal 14 are respectively compared, and based on the comparison result, the linear motor drive units 32U and 32D The driving power that can control the generated stress is generated.

The operation of the embodiment thus constructed is shown in FIG.
Based on FIG. 5 to FIG. 6, description will be made with reference to FIGS.

Here, FIG. 6 shows load cells 34a, 34
It is a characteristic view which shows the relationship between the measured data of b, and an ideal curve. FIG. 7 shows the characteristics when there is no gap L between the mounting piece 37 and the linear motor mounting plate 38. 8 to 10 are characteristic diagrams showing the respective characteristics of the load cells 33a to 33c together with ideal curves.

First, the drive power generated by the linear motor drive control circuit 12 of the electric circuit section 1 is supplied to the linear motor drive sections 32U and 32D. As a result, stress (propulsion force and vertical force) is applied to the metal strip 2 from the linear motor drive units 32U and 32D, and the metal strip 2 is
In the illustrated example, the metal strip that is moving from left to right receives a thrust from left to right (acting as a braking force in this case) in the Y direction and in the vertical direction (Z direction).

At this time, the linear motor mounting plate 38 is
The reaction force Y ′ of the propulsive force Y is transmitted to the load cells 34a and 34b between the support 35p and the reaction force Z ′ of the vertical force Z is transmitted to the support bases 36a and 33b.
33c.

Here, if a bearing 39 is provided between the mounting piece 37 and the linear motor mounting plate 38, the output Lcy from the load cells 34a and 34b is given by the applied thrust [as shown in FIG. [kg] almost coincides with the ideal straight line Idy. However, if the bearing 39 and the gap L are not provided between the mounting piece 37 and the linear motor mounting plate 38, as shown in FIG. 6, the output Lcy from the load cells 34a and 34b is equal to the applied thrust. It becomes away from the ideal straight line Idy with respect to [kg].

In addition, the load cells 33a, 33b, 33c
Outputs from Lcza, Lczb, and Lczc are shown in FIG. 7, FIG. 8, and FIG.
As shown respectively in Fig.
g], they are almost ideal straight lines Idza, Idzb and Idzc.

Then, such ideal measurement data (Lcy, Lcza, Lczb, Lczc) are input to the signal processing circuit 11 of the electric circuit section 1, respectively. The input measurement data (Lcy, Lcza, Lczb, Lczc) is converted into thrust Y and vertical force Z in the signal processing circuit 11 according to a predetermined procedure. The thrust force Y and the vertical force Z are fed back to the linear motor drive control circuit 12 and compared with the thrust force target value setting signal 13 and the vertical force target value setting signal 14 in the linear motor drive control circuit 12, respectively. Based on the corrected driving power, the driving power is supplied again to the linear motor driving units 32U and 32D. As a result, even if a linear motor is applied to the strip-shaped steel sheet manufacturing process, the metal strip 2 to be manufactured is given an accurate tension of a target value, and the meandering control can be performed in a non-contact manner. Will be able to improve the quality of.

In the above embodiment, the positions of the load cell set bolt 50 and the load cell set nut 51 are adjusted, and the load cell set spring 49 does not generate the reaction force Y '(in the arrow direction) of the thrust Y. Sometimes, the linear motor mounting plate 38 is attached to the load cell 34.
It is pressed so as to make light contact with a and 34b.

In the above embodiment, the vertical force is applied in the Z direction. However, when the vertical force Z is in the opposite direction, the mechanical displacement is set by, for example, the bolt 41 and the support. It is realized by interposing a disc spring between the plate 40 and the plate 40.

Further, in the above embodiment, the load cell 33
As shown in FIG. 2, the a, 33b, and 33c are three, and the plane position is a center of gravity position that divides the output area of the reaction Z ′ into ⅓, as shown in FIG. It is not limited to. In addition, in the above embodiment,
The load cells 34a and 34b are mounted on the linear motor mounting plate 38.
Although it is arranged on the right side of the drawing, it may be provided on the left side or both sides of the linear motor mounting plate 38 according to the application. In this case, when the load cells 34a and 34b are provided on both sides, the load cell set spring 49, the load cell set bolt 50 and the nut 51 may be omitted.

[0055]

As described above, in the non-contact stress measuring method according to the first aspect of the present invention, the stress applied to the metal strip from the linear motor driving section can be measured in a non-contact manner.

Further, in the non-contact stress measuring device according to the second aspect of the present invention, the stress applied to the metal strip from the linear motor drive unit can be taken out from the piezoelectric conversion element in a non-contact manner.

Further, in the non-contact stress measuring device according to the third aspect of the present invention, the stress applied to the metal strip from the linear motor drive unit is taken out from the piezoelectric conversion element in a non-contact manner and applied to the metal strip. There is an effect that the stress that is being generated can be immediately obtained.

Further, according to the invention of claim 3, since the stress applied to the metal strip can be obtained, there is an effect that this stress can be used for various controls to improve the control accuracy. ..

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of a method and a device for measuring non-contact stress of a moving metal strip according to the present invention.

FIG. 2 is a diagram viewed from AA in FIG.

FIG. 3 is a sectional view taken along line BB of FIG.

FIG. 4 is an enlarged view of a main part of FIG.

FIG. 5 is a block diagram showing a configuration of an electric circuit unit of the present invention.

FIG. 6 is a characteristic diagram showing the relationship between the thrust obtained by the present invention and the output of the load cell.

FIG. 7 is a characteristic diagram showing the relationship between the output of the load cell and the thrust obtained by the absence of some parts in the present invention.

FIG. 8 is a characteristic diagram showing the relationship between the output of the load cell and the vertical force obtained by the present invention.

FIG. 9 is a characteristic diagram showing the relationship between the output of the load cell and the vertical force obtained by the present invention.

FIG. 10 is a characteristic diagram showing the relationship between the output of the load cell and the vertical force obtained by the present invention.

FIG. 11 is a front view showing a conventional apparatus for measuring the thrust of a linear motor.

FIG. 12 is a plan view showing a conventional apparatus for measuring the thrust of a linear motor.

FIG. 13 is a front view showing a device for measuring vertical force of a conventional linear motor.

FIG. 14 is a plan view showing a device for measuring vertical force of a conventional linear motor.

FIG. 15 is a principle diagram of a first device for obtaining thrust of a conventional linear pulse motor.

FIG. 16 is a principle diagram of a second device for obtaining thrust of a conventional linear pulse motor.

FIG. 17 is a principle diagram of a third device for obtaining thrust of a conventional linear pulse motor.

FIG. 18 is a principle diagram of a fourth device for obtaining thrust of a conventional linear pulse motor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Electric circuit part 2 Metal strip 3 Machine part 11 Signal processing circuit 12 Linear motor drive control circuit 13 Thrust target value setting signal 14 Vertical force target value setting signal 30 Base 31 Support structure 32U Linear motor drive part 32D Linear motor drive part 33a load cell 33b load cell 33c load cell 34a load cell 34b load cell 35 support frame 36 support base 37 mounting piece 38 linear motor mounting plate 39 bearing 40 support plate 47 through hole 48 pin 49 load cell set spring 50 load cell set bolt 51 load cell set nut L clearance D clearance

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shun Hamahama 3077-1 Yokoo, Oita City, Oita Prefecture Yokoo Dormitory (72) Inventor Shuichi Sato 20-1 Shintomi, Futtsu City, Chiba Nippon Steel Co., Ltd. (72) Inventor Mori ▲ Saki ▼ Ryuichi 20-1 Shintomi, Futtsu City, Chiba Shin Nippon Steel Co., Ltd.

Claims (7)

[Claims] 1. A non-contacting device in a device comprising a support structure fixed to a base and a linear motor drive part which is supported by the support structure so as to be movable by a predetermined distance and linearly drives a metal strip. A method for measuring stress, in which the linear motor drive unit applies a force to the metal strip based on a detection signal from a piezoelectric conversion element provided so as to detect each reaction force of thrust and vertical force applied to the metal strip. A method for measuring non-contact stress, which comprises measuring the generated thrust force and normal force. 2. A support structure fixed to a base, a linear motor drive unit that is supported by the support structure so as to be movable a predetermined distance, and linearly drives a metal strip, and the linear motor drive unit. Between the support structure,
A non-contact stress measurement device, comprising: a piezoelectric conversion element provided so as to detect reaction forces of thrust and vertical force applied to a metal strip. 3. A support structure fixed to a base, and movably supported by the support structure by a predetermined distance,
A linear motor drive unit that drives the metal strip in a straight line, and between the linear motor drive unit and the support structure,
A piezoelectric conversion element provided so as to detect each reaction force of thrust and vertical force applied to the metal strip, and the linear motor drive section applied to the metal strip based on the detection signal from each piezoelectric conversion element. A non-contact stress measuring device comprising: a signal processing circuit for obtaining thrust and vertical force. 4. The support structure includes a support frame fixed to a base and a support base fixed to the support frame. A piezoelectric conversion element for detecting a reaction force of the thrust is provided on the support frame. The non-contact stress measurement device according to claim 2 or 3, wherein the non-contact stress measurement device is arranged between the linear motor drive part and the linear motor drive part. 5. The support structure includes a support frame fixed to a base and a support base fixed to the support frame. The support structure includes a piezoelectric conversion element for detecting a reaction force of the vertical force. The non-contact stress measuring device according to claim 2, wherein the non-contact stress measuring device is arranged between the linear motor driving part and the linear motor driving part. 6. The support structure includes a support frame fixed to a base and a support frame fixed to the support frame, and the support frame has a bearing that slides in the reaction force direction of the thrust. 6. The non-contact stress measuring device according to claim 2, wherein the linear motor driving unit is supported by the linear motor driving unit. 7. The support structure includes a support frame fixed to a base portion and a support base fixed to the support frame, and the support base has at least piezoelectric conversion in a reaction force direction of the vertical force. 7. The non-contact stress measuring device according to claim 2, wherein the linear motor driving portion is supported with a gap corresponding to the mechanical displacement of the element. ..