JPH05174767A - Method and device for setting image observation mode of charged beam device - Google Patents

Abstract

PURPOSE:To simply set the image observation mode setting conditions of a charged beam device. CONSTITUTION:Any one is selected from a plurality of register No. switch parts 9A-9C, and the image observation mode setting conditions of a charged beam device set in numerical parts 11-13 for the switch part selected are stored in a built-in memory. When this selected switch part is designated, the image observation mode setting conditions stored in correspondence to the designated switch part are set in the charged beam device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for setting an image observation mode of a charged beam apparatus, which is suitable for application to a console for setting an electron beam scanning mode of a scanning electron microscope.

[0002]

2. Description of the Related Art In a scanning electron microscope, a mode for observing an image having a plurality of functions such as a scanning speed of an electron beam, an accumulated number of images when averaging a plurality of scanned images to remove noise and the like and a scanning region. The operator must set the setting conditions from the operator console. A conventional procedure for setting the mode setting condition for image observation from the console will be described with reference to FIG. As shown in FIG. 5, first, in step 101, the scanning speed of the electron beam is set and read. Specifically, the operator sets the scanning speed by using the scanning speed setting switch on the console, and this scanning speed is read into the main body of the scanning electron microscope.

Next, at step 102, the operator turns a dial for setting the total number of sheets on a console, for example, to a predetermined position to set the total number of scanned images at the time of averaging. Read in. Similarly, in step 103, the operator sets the scanning region of the electron beam and reads it into the main body, and then in step 104, the main body scans the electron beam. As described above, conventionally, when setting the mode setting condition for image observation, it is necessary for the operator to operate the switch on the console corresponding to each of the functions that need to be set.

[0004]

In the conventional console, the operator must operate a large number of switches arranged on the console in order to set the mode setting conditions for image observation. There is an inconvenience that it takes time and the operation is troublesome. Further, in addition to the scanning electron microscope, for example, in an exposure apparatus that uses a charged beam for semiconductor manufacturing, an exposure mode such as an exposure time and an exposure region (also included in the “mode setting condition for image observation” in the present application)
There was a similar inconvenience when setting. In view of such a point, an object of the present invention is to provide a setting method capable of easily setting a mode setting condition for image observation of a charged beam apparatus and a setting apparatus capable of implementing such a setting method.

[0005]

In the method of setting the image observation mode of the charged particle beam system according to the present invention, an arbitrary registration number is selected from a plurality of registration numbers as shown in FIGS. 106), with respect to the selected registration number, the mode setting conditions (for example, the scanning speed of the charged beam, the cumulative number of sheets for averaging, the scanning region, etc.) for observing the image of the charged beam apparatus are registered (steps 107 to 11)
2) Next, when the selected registration number is designated (step 127), the mode setting condition for the image observation registered for the selected registration number is set in the charged beam device. Yes (steps 128-1)
30).

Further, the apparatus for setting the image observation mode of the charged particle beam apparatus according to the present invention is, for example, as shown in FIGS. 1 and 2, a selection for selecting an arbitrary registration number from a plurality of registration numbers (9A-9B). Means (4,5) and setting means (4,5) for presetting mode setting conditions for image observation of the charged particle beam system (2) with respect to the selected registration number,
Storage means (6) for storing the set mode setting condition for image observation in association with the selected registration number
And a teaching means (3) for teaching the charged beam device (2) the mode setting conditions for image observation read from the storage means (6) when the selected registration number is designated. It is a thing.

[0007]

According to such a setting method of the present invention, when the operator selects, for example, the registration number 1 and registers the mode setting condition for image observation having a plurality of functions for this registration number 1, the operator thereafter. Only by specifying the registration number 1, the mode setting condition for image observation is set for the charged beam apparatus. Therefore, since the mode setting condition which has been conventionally set by operating a plurality of switches is set only by the operator designating the registration number, the trouble of operating a large number of switches for each mode setting is eliminated. Further, according to the setting device of the present invention, the setting method of the image observation mode of the charged beam device can be directly implemented.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In this example, the present invention is applied to a scanning electron microscope console. FIG. 1 shows the system configuration of this example. In FIG. 1, 1 is a console as a whole, 2
Indicates a scanning electron microscope, and an operator sets a mode setting condition for image observation including a scanning speed, an integrated number of sheets, and a scanning region on the scanning electron microscope 2 through the console 1.

In the console 1, 3 is a central processing unit (hereinafter abbreviated as "CPU") for controlling the whole operation,
Reference numeral 4 denotes a coordinate input unit such as a mouse connected to the CPU 3, and 5 denotes a CRT display for operation connected to the CPU 3. The operator moves the cursor in the display screen of the CRT display 5 to a desired icon via the coordinate input unit 4 and then operates the data input switch on the coordinate input unit 4 to operate the CPU 3
Can be made to perform a desired operation.

Reference numeral 6 denotes a memory connected to the CPU 3,
The memory 6 stores each function data of the image observation mode setting conditions set for each registration number in the procedure described later. After that, when the operator designates a desired registration number, the CPU 3 reads each function data of the mode setting condition for image observation corresponding to the registration number from the memory 6 and teaches it to the scanning electron microscope 2. Specifically, CPU3
Supplies the scanning speed information SV of the electron beam, the integrated number information AP and the scanning area information SA to the scanning electron microscope 2. Further, the console 1 is provided with a CRT display 7 for an observation image, and the scanning electron microscope 2 supplies the video signal VS of the observation image to the CRT display 7. In addition,
The CRT display 7 may be mounted on the scanning electron microscope 2 side.

Next, an example of the operation when setting each function of the mode setting condition for image observation to the scanning electron microscope 2 using the console 1 of this example will be described. in this case,
As shown in FIG. 2, a setting image is displayed on the display screen 5a of the operating CRT display 5. In the display screen 5a of FIG. 2, 9A to 9C are registration number switch units corresponding to registration numbers 1 to 3, and 10 is a registration switch unit for instructing the registration mode.
Also, the 4-digit numerical part 11 is the scanning speed, and the 2-digit numerical part 12 is
Indicates the cumulative number of sheets and the 2-digit numerical part 13 indicates a scanning area in the form of a fraction. When the cursor 8 is moved to the arrow part 14A or 14B, the numerical value of the numerical part 11 changes in the direction of increasing or decreasing. Similarly, when the cursor 8 is moved to the arrow portion 15A or 15B, the numerical value of the numerical value portion 12 is changed to increase or decrease, and the cursor 8 is moved to the arrow portion 16A.
When it is moved to A or 16B, the numerical value of the numerical value part 13 changes in the increasing or decreasing direction. That is, the operator can set the scanning speed, the cumulative number of sheets, and the numerical data of the scanning area to arbitrary values by operating the coordinate input unit 4 while looking at the display screen 5a.

First, referring to FIG. 2 and FIG.
An operation method for registering each function data of the screen observation mode with the registration number of will be described. First, in step 105 of FIG. 3, the operator displays the display screen 5a of FIG.
After moving the cursor 8 to the registration switch section 10, the data input switch of the coordinate input unit 4 is turned on.
As a result, it is considered that the registration switch unit 10 has been selected, and the operation of the CPU 3 of the console 1 proceeds to step 106.

In step 106, when the operator selects the first registration number switch section 9A corresponding to the registration number 1, the operation proceeds to step 107, and the operator moves the scanning speed numerical section on the display screen 5a of FIG. 11
Set the desired numerical value to, and set the set numerical value to the CPU3.
Reads. CPU in the following step 108
3 is the registration number 1 which is the numerical value indicating the read scanning speed.
And writes it in the memory 6. Next, the operator sets a desired numerical value in the numerical value part 12 of the cumulative number on the display screen 5a, and the CPU 3 reads this numerical value (step 109), and the CPU 3 corresponds the read numerical value indicating the cumulative number to the registration number 1. Then, the data is written in the memory 6 (step 110). After that, the operator displays the display screen 5
In a, a desired numerical value is set in the numerical part 13 of the scanning area, and the CPU 3 reads this numerical value (step 11
1) The CPU 3 writes the read numerical value indicating the scanning area in the memory 6 in association with the registration number 1 (step 112), and the registration for the registration number 1 is completed.

In step 106, the registration number 1
If the registration is not performed for, the operation is step 113.
Move to. When the operator selects the second registration number switch unit 9B corresponding to the registration number 2 on the display screen 5a of FIG. 2, the operation shifts to step 114. Then, during steps 114 to 119, as in steps 107 to 112, the scanning speed, the cumulative number of sheets, and the numerical value indicating the scanning area are stored in the memory 6 in the form corresponding to the registration number 2. On the other hand, if the registration for registration number 2 is not performed in step 113, the operation proceeds to step 120. Then, when the operator selects the third registration number switch unit 9C corresponding to the registration number 3 on the display screen 5a of FIG. 2, the shape corresponding to the registration number 3 is stored in the memory 6 in steps 121 to 126 below. The scanning speed, the cumulative number of sheets, and the numerical value indicating the scanning area are stored.

Next, with reference to FIG. 2 and FIG. 4, the operation for calling the image observation mode setting conditions already registered in the memory 6 for each registration number will be described. For example, when the operator wants to set the mode setting condition for image observation registered as the registration number 1 in the scanning electron microscope 2 of FIG.
The first registration number switch 9A corresponding to the registration number 1 on the display screen 5a is selected. Thereafter, the CPU 3 reads the numerical value of the scanning speed stored in association with the registration number 1 from the memory 6, and sets this numerical value in the scanning electron microscope 2 as the scanning speed information SV (step 128). Subsequently, the CPU 3 reads the numerical value of the cumulative number of sheets stored corresponding to the registration number 1 from the memory 6, and sets this numerical value in the scanning electron microscope 2 as the cumulative number of sheets information AP (step 1
29) Further, the CPU 3 reads the numerical value of the scanning area stored corresponding to the registration number 1 and sets this numerical value in the scanning electron microscope 2 as the scanning area information SA (step 130). Then, in step 131, the scanning electron microscope 2 scans the electron beam under the mode setting condition for image observation registered as the registration number 1.

Further, when the operator wants to set the mode setting condition for image observation registered as the registration number 2 in the scanning electron microscope 2, the operator enters the registration number 2 on the display screen 5a of FIG. 2 in step 132 of FIG. The second registration number switch unit 9B corresponding to is selected. In subsequent steps 133 to 135, the CPU 3 reads the scanning speed, the cumulative number of sheets and the numerical value of the scanning area stored in association with the registration number 2 from the memory 6 to read the scanning electron microscope 2.
Set to. Then, in step 131, the scanning electron microscope 2 scans the electron beam under the mode setting condition for image observation registered as the registration number 2.

On the other hand, when the operator wants to set the mode setting condition for image observation registered as the registration number 3 in the scanning electron microscope 2, the operator at step 136 in FIG. 4 registers the registration number 3 on the display screen 5a in FIG. The third registration number switch unit 9C corresponding to is selected. In subsequent steps 137 to 139, the CPU 3 reads from the memory 6 the scanning speed, the cumulative number of sheets, and the numerical values of the scanning area stored corresponding to the registration number 3, and the scanning electron microscope 2
Set to. Then, in step 131, the scanning electron microscope 2 scans the electron beam under the mode setting condition for image observation registered as the registration number 3.

On the other hand, when the operator wants to newly set the mode setting condition for image observation instead of the already registered mode setting condition for image observation, the operator registers the registration numbers 1 to 3 on the display screen 5a of FIG. No registration number switch unit 9A-9C corresponding to is selected. As a result, the operation shifts to step 140 in FIG.
When the desired numerical value is set to 1, the CPU 3 reads the numerical value and sets it in the scanning electron microscope 2. Next, when the operator sets a desired numerical value in the numerical value part 12 of the integrated number on the display screen 5a, the CPU 3 reads the numerical value and sets it in the scanning electron microscope 2 (step 141). When a desired numerical value is set in the numerical part 13 of the scanning area in 5a, the CPU 3 reads the numerical value and sets it in the scanning electron microscope 2 (step 142). Then, in step 131, the scanning electron microscope 2 scans the electron beam under the mode setting conditions for image observation thus set.

As described above, according to this example, the registration numbers 1 to 1
3, once each function of the mode setting condition for image observation is set, thereafter, the desired mode setting condition for image observation is set to the scanning electron microscope 2 very quickly only by selecting a desired registration number. Can be set. Further, the operator can freely register each function of the mode setting condition for image observation, and the operability of the scanning electron microscope can be improved. Furthermore, in this example, since three registration numbers are prepared, it is possible to register at least three kinds of setting conditions of the mode setting condition for frequently used image observation, and to quickly use for various uses of the scanning electron microscope. Can respond.

In this example, the operator uses the coordinate input unit 4 to select an icon on the display screen 5a of the CRT display 5 and causes the CPU 3 to perform the corresponding operation. The operation corresponding to the CPU 3 may be performed by operating the switch. Further, although the present embodiment is directed to the scanning electron microscope, the present invention can be applied to a console such as an exposure device using a charged beam. As described above, the present invention is not limited to the above-described embodiments, and various configurations can be taken without departing from the gist of the present invention.

[0021]

According to the setting method and the setting device of the present invention, if the mode setting condition for image observation is registered only once with respect to the registration number, then the image observation can be performed quickly by simply specifying the registration number. Mode setting conditions for the charged beam device can be set. Therefore, the setting of the mode setting condition, which has conventionally been required to be set by a large number of switch operations, can be performed by a single operation, and there is an effect that the troublesomeness of the switch operation is eliminated.

[Brief description of drawings]

FIG. 1 is a block diagram showing a system configuration of an embodiment of the present invention.

FIG. 2 is a front view showing an image on a display screen of a CRT display 5 in FIG.

FIG. 3 is a flowchart showing an operation when registering a mode setting condition for image observation in the embodiment.

FIG. 4 is a flowchart showing an operation when setting a mode setting condition for image observation in a scanning electron microscope in the embodiment.

FIG. 5 is a flowchart showing an operation when setting a mode setting condition for image observation in a scanning electron microscope in a conventional example.

[Explanation of symbols]

 1 Operation Table 2 Scanning Electron Microscope 3 Central Processing Unit (CPU) 4 Coordinate Input Unit 5 CRT Display for Operation 6 Memory 7 CRT Display for Observation 9A-9C Registration Number Switch Section 10 Registration Switch Section

Claims (2)

[Claims] 1. An arbitrary registration number is selected from a plurality of registration numbers, a mode setting condition for image observation of a charged particle beam system is registered for the selected registration number, and then the selected registration number is selected. Is set, the image observation mode setting condition registered for the selected registration number is set in the charged beam device. 2. A selection means for selecting an arbitrary registration number from a plurality of registration numbers, a setting means for presetting a mode setting condition for image observation of the charged particle beam apparatus with respect to the selected registration number, Storage means for storing the set mode setting condition for image observation in association with the selected registration number; and for the image observation read out from the storage means when the selected registration number is designated. An apparatus for setting an image observation mode of a charged beam apparatus, comprising: a teaching means for teaching the charged beam apparatus the mode setting conditions.