JPH05164506A - Measuring instrument for surface roughness of spherical part - Google Patents

Measuring instrument for surface roughness of spherical part

Info

Publication number
JPH05164506A
JPH05164506A JP32751091A JP32751091A JPH05164506A JP H05164506 A JPH05164506 A JP H05164506A JP 32751091 A JP32751091 A JP 32751091A JP 32751091 A JP32751091 A JP 32751091A JP H05164506 A JPH05164506 A JP H05164506A
Authority
JP
Japan
Prior art keywords
measured
stylus
spherical
surface roughness
spherical surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32751091A
Other languages
Japanese (ja)
Inventor
Takashi Sato
隆 佐藤
Hideki Kobayashi
英喜 小林
Seiji Yoshikawa
清治 好川
Hiroshi Inoue
寛 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP32751091A priority Critical patent/JPH05164506A/en
Publication of JPH05164506A publication Critical patent/JPH05164506A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a measuring instrument for surface roughness of a spherical part making it possible to reduce the cost and for an operator to conduct a measuring operation easily as occasion demands, by a simple construction. CONSTITUTION:A support block 12 of which the support surface 14 having a V-shaped section supports the spherical part Sa of a substance S to be measured, a probe 17 which is a detector projecting on the support surface 14 of the support block 12 and coming into contact with the surface of the spherical part Sa of the substance S actuated to rotate, and an amplifying display unit 20 which is connected to the probe 17 electrically and amplifies and displays minute indentations sensed by the probe 17, are provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、球面部を有する被測定
物の、球面部表面粗さを測定する測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device for measuring the surface roughness of a spherical surface of an object having a spherical surface.

【0002】[0002]

【従来の技術】被測定物の球面部表面粗さを測定する測
定装置には、従来、たとえば図2および図3に示すよう
なものがある。
2. Description of the Related Art Conventionally, there is a measuring device for measuring the surface roughness of the spherical surface of an object to be measured as shown in FIGS. 2 and 3, for example.

【0003】図2の測定装置は、被測定物としての球体
Aを、同一曲率半径に形成された曲面凹部を有する受け
座1に支持する。この受け座1は、装置本体2の一部に
突設される支持部3に載設される。
The measuring apparatus of FIG. 2 supports a spherical body A as an object to be measured on a receiving seat 1 having a curved concave portion formed with the same radius of curvature. The receiving seat 1 is mounted on a supporting portion 3 that is provided so as to project from a part of the apparatus main body 2.

【0004】支持部3の下方部位には、図示しない駆動
モータなどの駆動源に接続される回転軸4が、その軸方
向を鉛直方向に向けて配置される。この回転軸4の回転
中心軸Sは、上記球体Aの鉛直方向の中心軸Sと一致さ
せる必要がある。
A rotary shaft 4 connected to a drive source such as a drive motor (not shown) is disposed below the support portion 3 with its axial direction oriented in the vertical direction. The rotation center axis S of the rotation shaft 4 needs to match the vertical center axis S of the sphere A.

【0005】上記回転軸4の上端部に、略L字状に形成
されるアーム5の下端部が一体に設けられる。このアー
ム5の上端部に、逆L字状に形成される触針支持部6が
突設される。
An upper end of the rotary shaft 4 is integrally provided with a lower end of an arm 5 formed in a substantially L shape. A stylus support portion 6 formed in an inverted L shape is provided at the upper end of the arm 5 so as to project.

【0006】上記アーム5と同様、L字状に形成される
触針7が、上記触針支持部6に設けられる。上記触針7
は、触針支持部6において取付け固定される部分が、こ
こでは水平方向に回動自在に枢支される。
Like the arm 5, an L-shaped stylus 7 is provided on the stylus support 6. Stylus 7
The portion of the stylus support 6 that is attached and fixed is pivotally supported here so as to be rotatable in the horizontal direction.

【0007】触針7の、水平方向に折曲された先端が尖
鋭状に形成され、上記受け座1に支持される球体Aの球
面に接触する。この触針7の動きは、触針支持部6と電
気的に接続され、ここでは図示しない増幅器で増幅する
ようになっている。
The tip of the stylus 7, which is bent in the horizontal direction, is formed in a sharp shape and contacts the spherical surface of the sphere A supported by the receiving seat 1. The movement of the stylus 7 is electrically connected to the stylus support portion 6, and is amplified by an amplifier (not shown) here.

【0008】したがって、駆動源が回転軸4を回転駆動
することにより、アーム5とともに触針7が球体A周囲
に沿って回転し、かつ触針7の先端尖鋭部が球体Aの球
面に継続して接触する。
Therefore, when the drive source rotationally drives the rotary shaft 4, the stylus 7 rotates along with the arm 5 along the circumference of the sphere A, and the sharp tip of the stylus 7 continues to the spherical surface of the sphere A. Contact.

【0009】球面にわずかの粗さがあっても、触針7が
水平方向に回動し、その変化は触針支持部6が電気的な
変化として捕え、その電気信号を増幅器に送る。すなわ
ち、球面部の表面粗さが測定される。
Even if the spherical surface has a slight roughness, the stylus 7 rotates in the horizontal direction, and the change is detected by the stylus support portion 6 as an electric change, and the electric signal is sent to the amplifier. That is, the surface roughness of the spherical portion is measured.

【0010】図3の測定装置は、受け座1に支持される
被測定物としての球体Aに対して、たとえばエアシリン
ダの作動杆である、水平方向に進退自在な直動軸8が延
出される。この直動軸8の端部に、触針9を支持する触
針支持部10が設けられている。上記触針支持部10
は、図示しないコンピュータと電気的に接続されてい
て、触針9の変動を電気信号に換えて送るようになって
いる。
In the measuring apparatus shown in FIG. 3, a linear movement shaft 8 which is movable in the horizontal direction, which is an operating rod of an air cylinder, extends from a spherical body A as an object to be measured supported on the receiving seat 1. Be done. A stylus support portion 10 that supports the stylus 9 is provided at the end of the linear motion shaft 8. The stylus support 10
Is electrically connected to a computer (not shown), and changes the stylus 9 into electrical signals.

【0011】したがって、直動軸8を駆動して、触針9
を水平方向に進退駆動すると、触針9の先端部が球体A
の球面部に沿って接触し、上下方向に回動する。この回
動データをコンピュータが処理し、円弧補正、うねりの
成分の分離などを行って、表面粗さを表示し、あるいは
記録する。
Therefore, the linear motion shaft 8 is driven to move the stylus 9
When the needle is driven to move back and forth in the horizontal direction, the tip of the stylus 9 will move to the sphere A.
It contacts along the spherical surface of the and rotates up and down. The rotation data is processed by a computer, the arc is corrected, the components of the waviness are separated, and the surface roughness is displayed or recorded.

【0012】[0012]

【発明が解決しようとする課題】このような測定装置
は、以下に述べるような不具合を有する。
Such a measuring device has the following drawbacks.

【0013】図2に示した測定装置は、触針7を、極め
て回転誤差の少ない回転駆動機構で駆動しなければなら
ない。そして、回転軸4と被測定物Aの中心軸Sを、極
めて精度よく一致させる、いわゆるセンタリング調整が
必要であるとともに、触針7先端部の回転軌跡半径を、
被測定物Aの半径と完全に一致させなければならず、そ
のための作業が非常に面倒で、熟練を要する。
In the measuring device shown in FIG. 2, the stylus 7 must be driven by a rotary drive mechanism having a very small rotational error. Then, so-called centering adjustment is required to make the rotation shaft 4 and the center axis S of the object to be measured A coincide with each other with extremely high accuracy, and the radius of the rotation trajectory of the tip of the stylus 7 is
The radius of the object to be measured A must be perfectly matched, and the work therefor is very troublesome and requires skill.

【0014】図3に示す測定装置は、触針9を水平方向
に進退駆動しているにも係わらず、いわゆる「てこ」の
状態として円弧運動をさせるため、相互の関係を補正し
なければならない。
In the measuring device shown in FIG. 3, since the stylus 9 is driven to move back and forth in the horizontal direction, the stylus 9 moves in an arc in a so-called "lever" state, so that the mutual relationship must be corrected. ..

【0015】検出した縦方向の変位には、球面半径の成
分やうねりの成分などが、表面粗さとともに含まれてい
るため、これら余分な成分を分離するためのコンピュー
タによる演算処理が必要となる。そしてまた、測定レン
ジが広く、高い分解能を持つ変位検出機構が備えなけれ
ばならず、機構的にもシステム的にも、極めて高価とな
る。
Since the detected vertical displacement includes a spherical radius component and a waviness component together with the surface roughness, it is necessary to perform arithmetic processing by a computer to separate these extra components. .. Further, a displacement detection mechanism having a wide measurement range and high resolution must be provided, which is extremely expensive both mechanically and systematically.

【0016】また、図2および図3の測定装置として共
通な事項は、共に触針7,9を一定の速度で移動させな
がら測定するようになっているとともに、装置自体据置
き型となっていることである。このような構成では、セ
ットアップまでに手間がかかり、作業者が、任意の位置
で、随時手軽に測定することができない。
Items common to the measuring devices shown in FIGS. 2 and 3 are that the measuring is performed while moving the stylus 7 and 9 at a constant speed, and the device itself is of a stationary type. It is that you are. With such a configuration, it takes time to set up, and the operator cannot easily measure at any position at any time.

【0017】本発明は上記事情に着目してなされたもの
であり、その目的とするところは、簡素な構成で、低廉
化が得られ、作業者が必要に応じて簡便に測定作業がで
きるようにした球面部表面粗さ測定装置を提供するもの
である。
The present invention has been made by paying attention to the above circumstances, and an object of the present invention is to provide a simple structure, to reduce the cost, and to enable an operator to easily perform a measuring operation as needed. The present invention provides a spherical surface roughness measuring device.

【0018】[0018]

【課題を解決するための手段】上記目的を達成するため
に本発明は、受け台に、球面部を有する被測定物の球面
部を載置する断面V字状の受け面を備え、この受け台の
受け面に検知子を突出して、受け面の最底部方向に球面
部を押圧しながら回動付勢される被測定物に対しこの球
面部の表面粗さを検知し、この検知子と電気的に増幅表
示装置を接続して検知子が検知した球面部表面の微細な
凹凸を増幅して表示することを特徴とする球面部表面粗
さ測定装置である。
In order to achieve the above object, the present invention is provided with a receiving surface having a V-shaped cross section on which a spherical portion of an object to be measured having a spherical portion is placed. By projecting the detector onto the receiving surface of the table and detecting the surface roughness of this spherical portion with respect to the object to be measured which is rotationally biased while pressing the spherical portion toward the bottom of the receiving surface, It is a spherical surface roughness measuring device characterized by electrically connecting an amplification display device and amplifying and displaying fine irregularities on the spherical surface detected by a detector.

【0019】[0019]

【作用】被測定物の球面部を、受け面の最底部に摺接し
ながら回動すれば、検知子がこの表面粗さを検知し測定
できる。したがって、被測定物を手動で回動しても、確
実に測定可能であり、特別な被測定物駆動機構もしくは
触針駆動機構は不要である。
If the spherical surface of the object to be measured is rotated while sliding on the bottom of the receiving surface, the detector can detect and measure this surface roughness. Therefore, even if the object to be measured is manually rotated, the measurement can be reliably performed, and a special object-to-be-measured drive mechanism or a stylus drive mechanism is unnecessary.

【0020】[0020]

【実施例】以下、本発明の一実施例を図1にもとづいて
説明する。図中11は基台であり、この基台11上に受
け台12および検出器13が載設される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. Reference numeral 11 in the drawing denotes a base, on which the receiving base 12 and the detector 13 are mounted.

【0021】上記受け台12は、ブロックからなり、そ
の上面部が、円錐状に形成される受け面14となってい
る。すなわち、受け面14の断面形状はV字状となる。
受け台12の上面で受け面14の開口周辺に沿って、枠
状のガイド板15が取付けられる。
The pedestal 12 is composed of a block, and the upper surface of the pedestal 12 is a conical receiving surface 14. That is, the receiving surface 14 has a V-shaped cross section.
A frame-shaped guide plate 15 is attached on the upper surface of the pedestal 12 along the periphery of the opening of the receiving surface 14.

【0022】さらに、受け台12の一部に切欠部16が
あり、ここに検知子としての触針17が挿入される。触
針17は、L字状に形成されていて、尖鋭状の先端が受
け面14内の最底部に突出する。この突出方向は、表面
粗さを測定すべき被測定物Sの球面部Sa中心に正しく
指向しなければならない。
Further, there is a notch 16 in a part of the pedestal 12, and a stylus 17 as a detector is inserted therein. The stylus 17 is formed in an L shape, and its sharp tip projects to the bottom of the receiving surface 14. This protruding direction must be correctly oriented to the center of the spherical surface portion Sa of the object S to be measured whose surface roughness is to be measured.

【0023】上記検出器13は、触針17の端末部を回
動自在に支持し、かつ調整ねじ18を調整することによ
り、触針17の突出量およびその傾斜角度を調整自在と
した図示しない支持機構を備えている。さらに、検出器
13は触針17の僅かな回動変化を電気的に変換して、
ここに電気的に接続される増幅表示装置20にその信号
を送るようになっている。
The detector 13 rotatably supports the terminal portion of the stylus 17 and adjusts the adjusting screw 18 to adjust the protrusion amount of the stylus 17 and its inclination angle (not shown). It has a support mechanism. Furthermore, the detector 13 electrically converts a slight rotational change of the stylus 17,
The signal is sent to the amplification display device 20 electrically connected to the device.

【0024】上記増幅表示装置20は、増幅器21と、
記録器22とから構成されていて、検出器13から受け
た信号を増幅器21で増幅し、その変化を表示部21a
に表示し、記録器22では記録紙22aに記録するよう
になっている。しかして、検出器13の調整ねじ18を
調整して、触針17の先端部が球面部Sa中心に向くよ
う、その傾斜および位置を正しく設定する。
The amplification display device 20 includes an amplifier 21 and
The recording unit 22 and the recording unit 22 amplify the signal received from the detector 13 by the amplifier 21 and display the change in the display unit 21a.
, And the recording device 22 records on the recording paper 22a. Then, the adjusting screw 18 of the detector 13 is adjusted to correctly set the inclination and position of the probe 17 so that the tip of the probe 17 faces the center of the spherical surface Sa.

【0025】これらの準備が整ったら、被測定物Sの先
端である球面部Saを、受け面14の最底部に当接する
とともに球面部Saから上の部分を受け面14の一方の
面に当接するよう傾ける。ここでは、被測定物Sは、た
とえば丸棒状であって、先端のみ半球状の球面部Saが
形成される。
When these preparations are completed, the spherical portion Sa, which is the tip of the object to be measured S, is brought into contact with the bottom of the receiving surface 14 and the portion above the spherical portion Sa is brought into contact with one surface of the receiving surface 14. Tilt to touch. Here, the measured object S has, for example, a round bar shape, and a hemispherical spherical surface portion Sa is formed only at the tip.

【0026】この状態で、触針17の先端が球面部Sa
の一部に接触する。作業者は、被測定物Sの上部を握っ
て、球面部Saが受け面14の最底部から離間しないよ
う、これを押圧しながら、180°対向する受け面14
の他方の面に当接するまで矢印(ア)方向に回動操作す
る。
In this state, the tip of the stylus 17 has a spherical surface portion Sa.
Touch a part of. The operator grasps the upper part of the object to be measured S and presses the spherical surface portion Sa so as not to separate from the bottommost portion of the receiving surface 14, while holding the receiving surface 14 facing 180 °.
Rotate in the direction of the arrow (a) until it abuts on the other surface.

【0027】球面部Saは受け面14最底部に沿って滑
りながら変位し、触針17に対する接触位置が変化す
る。球面部Saに表面粗さがあるとき、触針17は回動
変位し、検出器13はその変化を電気信号に換えて増幅
表示装置20に送る。増幅器21の表示部21aには、
表面粗さ値が継続して表示され、記録器22はその変化
を増幅して記録紙22aに記録する。
The spherical surface portion Sa is displaced while sliding along the bottommost portion of the receiving surface 14, and the contact position with the stylus 17 changes. When the spherical surface portion Sa has surface roughness, the stylus 17 is rotationally displaced, and the detector 13 converts the change into an electric signal and sends it to the amplification display device 20. In the display section 21a of the amplifier 21,
The surface roughness value is continuously displayed, and the recorder 22 amplifies the change and records it on the recording paper 22a.

【0028】被測定物Sを、受け面14の傾斜面から対
向する傾斜面に当接する角度θに回動操作させれば、表
面部Saの一つの経度(あるいは、緯度)の表面粗さの
測定が終了する。必要に応じて、被測定物Sを所定角度
回動してから、再び上述の作業を繰り返すことにより、
その経度(あるいは緯度)の表面粗さを測定できる。
When the object S to be measured is rotated from the inclined surface of the receiving surface 14 to the angle θ at which it comes into contact with the opposed inclined surface, the surface roughness Sa of one longitude (or latitude) of the surface portion Sa can be obtained. The measurement ends. If necessary, after rotating the DUT S by a predetermined angle, the above-mentioned work is repeated again,
The surface roughness of the longitude (or latitude) can be measured.

【0029】このようにして、被測定物Sを手動で基準
となる受け面14に押し付け、手動で被測定物Sを回動
して表面粗さを測定するため、極めて簡便に球面部Sa
の表面粗さを測定できる。
In this way, the measured object S is manually pressed against the reference receiving surface 14, and the measured object S is manually rotated to measure the surface roughness.
The surface roughness of can be measured.

【0030】被測定面が測定時の基準となるため、手動
であっても安定した測定が可能である。従来のような、
精度の高い加工組立および複雑なコンピュータ処理等が
不要となって、装置の低廉化に寄与する。
Since the surface to be measured serves as a reference at the time of measurement, stable measurement can be performed even manually. Like traditional
This eliminates the need for highly accurate machining and assembly, complicated computer processing, etc., contributing to cost reduction of the device.

【0031】なお、被測定物Sの形状構造としては、先
に説明したような、丸棒状で、先端が半円状の球面部S
aを備えた被測定物ばかりでなく、球面角度は種々のも
のまで測定でき、当然、球体の表面粗さも測定できる。
As the shape structure of the object S to be measured, the spherical portion S having a round bar shape and a semicircular tip as described above.
Not only the object to be measured including a, but also various spherical angles can be measured, and naturally, the surface roughness of a sphere can also be measured.

【0032】また、受け台12の受け面14を円錐状と
せず、通常のVブロックなどのV溝型とすれば、断面が
球面状となった、板体からなる被測定物であっても測定
可能である。触針17の取付け位置は、受け面14底部
に限らず、使用目的に応じて、横部などに取付けること
もできる。
If the receiving surface 14 of the pedestal 12 is not a conical shape but a V groove type such as an ordinary V block, even if the object to be measured is a plate having a spherical cross section. It is measurable. The attachment position of the stylus 17 is not limited to the bottom portion of the receiving surface 14, but may be attached to a lateral portion or the like depending on the purpose of use.

【0033】検知子として、被測定物Sに接触して検知
する触針17ばかりでなく、被測定物に非接触状態で検
知する、たとえば光センサを用いてもよい。すなわち、
上記触針17と検知器13に代って、光センサを受け台
12に取付けて、検知光を球面部に照射し、これを増幅
表示装置に電気信号として送るようになる。
As the detector, not only the stylus 17 for contacting and detecting the object to be measured S, but also an optical sensor for detecting in contact with the object to be measured may be used. That is,
Instead of the stylus 17 and the detector 13, an optical sensor is attached to the pedestal 12 to irradiate the spherical surface with the detection light and send it to the amplification display device as an electric signal.

【0034】増幅表示装置は、検出した微細な表面粗さ
を電気量に変換し、さらに粗さ量として増幅表示するよ
うにしたが、これに限定されず、電気量に変換したもの
をそのままメータなどに表示してもよい。この他、本発
明の要旨を超えない範囲内で、種々の変形実施が可能で
ある。
The amplification display device converts the detected fine surface roughness into an electric quantity and further amplifies and displays it as the roughness quantity. However, the present invention is not limited to this, and the converted electric quantity is directly displayed on the meter. It may be displayed on the screen. In addition, various modifications can be made within the scope of the present invention.

【0035】[0035]

【発明の効果】以上説明したように本発明は、簡素な構
成の装置であって、簡便な作業で、球面部表面粗さの精
度の高い測定が可能できるなどの効果を奏する。
As described above, the present invention is an apparatus having a simple structure, and has an effect that it is possible to measure the surface roughness of the spherical surface portion with high accuracy by a simple operation.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す、球面部表面粗さ測定
装置の構成図。
FIG. 1 is a configuration diagram of a spherical surface roughness measuring apparatus showing an embodiment of the present invention.

【図2】従来例の、球面部表面粗さ測定装置要部の構成
図。
FIG. 2 is a configuration diagram of a main part of a spherical surface roughness measuring device of a conventional example.

【図3】さらに異なる従来例の、球面部表面粗さ測定装
置要部の構成図。
FIG. 3 is a configuration diagram of a main part of a surface roughness measuring device of a spherical surface portion of another conventional example.

【符号の説明】[Explanation of symbols]

Sa…球面部、S…被測定物、14…受け面、12…受
け台、17…触針、20…増幅表示器。
Sa ... spherical part, S ... object to be measured, 14 ... receiving surface, 12 ... pedestal, 17 ... stylus, 20 ... amplification indicator.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 井上 寛 神奈川県横浜市鶴見区末広町2丁目4番地 株式会社東芝京浜事業所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Hiroshi Inoue 2-4 Suehiro-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Toshiba Keihin Office

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】球面部を有する被測定物の球面部を載置す
る断面V字状の受け面を備えた受け台と、この受け台の
受け面に突出し受け面の最底部方向に球面部を押圧しな
がら回動付勢される被測定物に対しこの球面部の表面粗
さを検知する検知子と、この検知子と電気的に接続され
検知子が検知した球面部表面の凹凸を増幅して表示する
増幅表示装置とを有することを特徴とする球面部表面粗
さ測定装置。
1. A pedestal having a receiving surface having a V-shaped cross section, on which a spherical surface portion of an object to be measured having a spherical surface portion is mounted, and a spherical surface portion protruding toward the receiving surface of the pedestal and extending toward the bottom of the receiving surface. A detector that detects the surface roughness of this spherical surface with respect to the measured object that is rotationally biased while pressing, and the unevenness of the spherical surface that is electrically connected to this detector and detected by the detector is amplified. A surface roughness measuring device for spherical surface, comprising:
JP32751091A 1991-12-11 1991-12-11 Measuring instrument for surface roughness of spherical part Pending JPH05164506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32751091A JPH05164506A (en) 1991-12-11 1991-12-11 Measuring instrument for surface roughness of spherical part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32751091A JPH05164506A (en) 1991-12-11 1991-12-11 Measuring instrument for surface roughness of spherical part

Publications (1)

Publication Number Publication Date
JPH05164506A true JPH05164506A (en) 1993-06-29

Family

ID=18199936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32751091A Pending JPH05164506A (en) 1991-12-11 1991-12-11 Measuring instrument for surface roughness of spherical part

Country Status (1)

Country Link
JP (1) JPH05164506A (en)

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