JPH0516374A - Manufacture of printing head - Google Patents

Abstract

PURPOSE:To transfer an adhesive to a sheet-like component of an ink jet head. CONSTITUTION:In a manufacturing method of a printing head for transferring fluid resin to a substrate 2 from a flexible film 1 coated with the resin, the flexible film 1 is superimposed on the substrate 2, and a roller is rotated while an end part of the flexible film is being pushed by holding with an adsorption part 3 of the roller. The flexible film 1 is successively separated from the substrate 2 and thereby, transfer can be performed without transverse shear in printing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printhead, and more particularly to a method for manufacturing a printhead by transferring an adhesive to a plate-shaped member which is a component and laminating the adhesive.

[0002]

2. Description of the Related Art A conventional method for manufacturing a print head by transferring an adhesive and laminating the print head is disclosed in JP-A-63-34152. This method is shown in FIG. An adhesive 22 is applied to a flexible film 21 such as mylar, placed on a plate-like member 24 in which a groove 23 to be an ink channel is formed in advance, pressure is applied by a rubber roller, and then the flexible film 2
One end of 1 is folded back one after another and pulled in the horizontal direction 25 to separate the adhesive layer and transfer the adhesive 22 to the plate member 24.

[0003]

However, in the method of peeling the film 21 from the plate-like member while folding back the film 21 from one end one after another in this manner, the film-like plate-like member 24 is attached to the film 21.
Since a force is applied in the lateral direction along the surface, the fluid adhesive is laterally displaced, and the adhesive is accumulated in the groove serving as the ink flow path or is not uniformly transferred.

Therefore, the present invention aims to eliminate the occurrence of lateral displacement of the adhesive when transferring and peeling the fluid adhesive from the flexible film, and to obtain an adhesive layer transferred as a uniform thin film. To do.

[0005]

According to the present invention, a flexible film coated with a fluid resin is laminated on a substrate, and then the flexible film is peeled off from the substrate to deposit the fluid resin on the substrate. In the method of manufacturing a print head for transferring, the flexible film is overlaid on the substrate, and a roller member having a grip portion on its surface for gripping an end portion of the flexible film is provided on the flexible film. Is arranged so as to come into contact with the end portion of the substrate, and is gripped, and then the roller member is rotated while keeping contact with the flexible film overlaid on the substrate to sequentially peel the flexible film from the substrate. To solve the problem.

[0006]

In the present invention, as shown in FIG. 1, a roller member having a flexible film 1 on a substrate 2 and a grip portion 3 for gripping an end portion of the flexible film 1 by suction or the like on its surface. 4 is arranged so that the grip 3 contacts the end of the flexible film 1, and the end of the flexible film is gripped, and then the roller member 4 is flexed over the substrate. The flexible film 1 is rotated in the lateral direction on the flexible film 1 by rotating the flexible film 1 from the substrate 2 along the outer periphery of the roller member 4 while rotating while pressing the flexible film 1 while keeping the contact. Prevents the application of force and transfers fluid adhesive without lateral displacement.

[0007]

【Example】

(Embodiment 1) FIGS. 2 and 3 show a transfer device used for carrying out the present invention. The transfer device includes a hot plate 7 for adsorbing and mounting the channel wafer 6, a chuck handle 9 for adsorbing and holding the PET film 8 and moving it while positioning it at a predetermined position of the channel wafer 6, and pressing the channel wafer 6 for pressing. A pressure rubber roller 10 moving upward and a peeling rubber roller 11 are provided.

The print head used in this transfer apparatus is manufactured by bonding two silicon wafers together as disclosed in Japanese Patent Laid-Open No. 63-34152.
The adhesive is transferred and applied to a channel wafer in which silicon is etched to form a groove or the like that serves as an ink flow path.
First, the PET film 8 for transfer is spin-coated with an adhesive for several μm. This PET film 8 is a channel wafer 6
A circular sheet of the same shape as that of the channel wafer 6
Is about 5 to 20 mm larger than that. Channel wafer 6
Is heated to 40 to 50 ° C. on the hot plate 7 and fixed at the suction port 9 of the hot plate 7. The suction port 9 of the hot plate 7 is provided corresponding to the periphery of the channel wafer 6 where there is no hole 12 penetrating the front and back surfaces.

The PET film 8 on which the adhesive has been spin-coated is held by the chuck handle 9, and one surface of the PET film 8 below which the adhesive is applied is brought into contact with the end of the channel wafer 6. Then, the PET rubber 8 is moved from the right side to the left side in the drawing while being pressed by a pressure rubber roller 10 made of silicon rubber with a weight of 0.5 to 1.5 kg to bring the entire surface into close contact with the channel wafer 6. At this time, the chuck handle 9 moves to the lower left 16 in association with the movement of the pressure rubber roller 10 from right to left (FIG. 2). After that, the PET film 8 is released from the chuck handle 9.

Then, a peeling rubber roller 11 arranged on the right side of the pressure rubber roller 10 adsorbs the end of the PET film 8 by the adsorbing portion 12 and winds it off while moving to the left side of the figure (FIG. 3). The peeling rubber roller 10 is pressed at a rate of about 0.5 kg / cm ² in the direction perpendicular to the surface of the channel wafer 6 to prevent lateral displacement of the PET film 8 at the time of peeling.

The peripheral length of the peeling rubber roller 11 is slightly larger than the diameter of the PET film 8, and the other end portion of the PET film 8 is sucked and peeled off by the other suction portion 13. Then, the PET film 8 is removed from the rubber roller 11 after the suction is released on a waste tray (not shown).

The shape of the outer peripheral surface of the peeling rubber roller 11 is shown in FIG. When a thin film is spin-coated with a spinner, the adhesive that is blown to the outer periphery wraps around the back surface a little. Therefore, when pressure and peeling are repeated with the roller, the adhesive adheres to the roller and the PET film adheres to the roller. Therefore, a step 14 is provided so that the adhesive that has wrapped around does not contact around the PET film 8 attached to the roller. Since the adhesive wraparound amount is several mm, the contacting convex portion 15 is 5 to 30 mm larger than the PET film diameter.
It may be reduced by mm. The above-described film suction ports 12 and 13 are provided at both ends of the contact convex portion 15.

(Embodiment 2) FIG. 5 shows an embodiment of a transfer device in which one roller 17 has the functions of pressing and peeling.
After the roller 17 pressurizes the PET film 8 to bring it into close contact with the channel wafer 6, a vacuum is applied to the suction portion 18 to start the peeling operation. In this apparatus, when the roller 17 is further soiled, it may be cleaned with a roller impregnated with a solvent such as acetone.

[0014]

According to the present invention, the outer peripheral surface of the roller member holds the end portion of the flexible film laminated on the substrate,
Then, the roller member is rotated while pressing the flexible film while keeping contact with the flexible film to sequentially peel the flexible film from the substrate along the outer periphery of the roller member. The adhesive can be transferred without any lateral displacement without acting.

[0015]

[Brief description of drawings]

FIG. 1 is a diagram for explaining the operation of the present invention.

FIG. 2 is a diagram for explaining a pressing operation of the transfer device used in the embodiment of the present invention.

FIG. 3 is a diagram illustrating a peeling operation of a transfer device used in an embodiment of the present invention.

FIG. 4 is a diagram illustrating a structure of an outer peripheral surface of a rubber roller used in an embodiment of the present invention.

FIG. 5 is a diagram illustrating another embodiment of the present invention.

FIG. 6 is a diagram illustrating a conventional adhesive transfer method.

[0016]

[Explanation of symbols]

1, 8 ... PET film, 2 ... Channel wafer, 3
..Suction parts, 4 ... Rollers

Claims (1)

Claim: What is claimed is: 1. A flexible film coated with a fluid resin is superposed on a substrate, and then the flexible film is peeled from the substrate to transfer the fluid resin to the substrate. In the method for manufacturing a print head, the flexible film is overlaid on the substrate, and a roller member having a grip portion for gripping an end portion of the flexible film is provided on the surface of the roller member. The roller member is arranged so as to be in contact with the portion and gripped, and then the roller member is rotated while keeping contact on the flexible film overlaid on the substrate to sequentially peel the flexible film from the substrate. A method for manufacturing a characteristic print head.