JPH051523A - Exhaust filter for internal combustion engine - Google Patents
Exhaust filter for internal combustion engineInfo
- Publication number
- JPH051523A JPH051523A JP3152704A JP15270491A JPH051523A JP H051523 A JPH051523 A JP H051523A JP 3152704 A JP3152704 A JP 3152704A JP 15270491 A JP15270491 A JP 15270491A JP H051523 A JPH051523 A JP H051523A
- Authority
- JP
- Japan
- Prior art keywords
- mesh
- metal fiber
- filter
- exhaust
- fiber plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Processes For Solid Components From Exhaust (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、内燃機関、特にディ
ーゼル機関で問題となるカーボン等の排気微粒子を捕集
除去するための排気フィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust filter for collecting and removing exhaust particulates such as carbon, which is a problem in internal combustion engines, especially diesel engines.
【0002】[0002]
【従来の技術】ディーゼル機関で問題となるカーボン等
の排気微粒子を、排気系に介装した排気フィルタにて捕
集除去することは従来から考えられており、種々の形式
の排気フィルタが既に提案されている。2. Description of the Related Art It has been conventionally considered to collect and remove exhaust particulates such as carbon, which is a problem in diesel engines, by an exhaust filter interposed in an exhaust system, and various types of exhaust filters have already been proposed. Has been done.
【0003】この排気フィルタの代表的なものは、いわ
ゆる目封じ型フィルタに代表される濾過捕集形式のもの
である。上記目封じ型フィルタは、例えば特開昭56−
124417号公報に示されているように、セラミック
ス製のブロックに排気流方向に沿った多数の微細な流路
を形成し、かつ各流路の端部を交互にセラミックスにて
閉塞した構成であって、流路間のセラミックスの隔壁を
排気が通過することにより、排気微粒子を濾過捕集する
ようにしたものである。A typical one of the exhaust filters is a filtration and collection type, which is represented by a so-called plugged filter. The above-mentioned plugged filter is disclosed, for example, in Japanese Patent Laid-Open No. 56-
As disclosed in Japanese Patent No. 124417, many fine flow passages are formed in a ceramic block along the exhaust flow direction, and the ends of the flow passages are alternately closed with ceramics. Then, the exhaust gas passes through the ceramic partition walls between the flow paths to filter and collect the exhaust fine particles.
【0004】この濾過捕集形式のものでは、非常に高い
捕集効率が得られる反面、排気微粒子を過剰捕集し易
く、微粒子捕集量がフィルタの焼損限界を越え易い。つ
まり、バーナー等を用いた強制再生や排気熱による再生
の時期が多少でも遅れたりした場合に、多量の排気微粒
子が急激に燃焼し、フィルタの焼損を招く可能性があ
る。しかも、焼却除去が不可能なAsh成分(オイル添
加剤の酸化物等)までも捕集してしまい、いずれは目詰
まり状態に至る可能性がある。[0004] With this filtration and collection type, although very high collection efficiency is obtained, exhaust particulates are easily collected excessively, and the particulate collection amount easily exceeds the burnout limit of the filter. That is, if the timing of forced regeneration using a burner or the like or regeneration by exhaust heat is delayed for some time, a large amount of exhaust particulates may rapidly burn, resulting in burnout of the filter. Moreover, even Ash components (oxides of oil additives, etc.) that cannot be removed by incineration are collected, and eventually there is a possibility that clogging will occur.
【0005】そこで、この濾過捕集形式のものに代え
て、付着捕集形式の排気フィルタが提案されている。そ
の一例としては、実開昭51−23615号公報や実開
昭51−50109号公報に見られるように、触媒を担
持した薄い耐熱性繊維板を多数積層してフィルタエレメ
ントとしたものが知られている。この付着捕集形式のも
のでは、フィルタエレメント内に生じる複雑な流路を排
気ガスが通流する際に、その流路表面に排気微粒子が付
着して捕集されるのであり、濾過捕集形式のような過剰
捕集は生じにくい。Therefore, an exhaust filter of adhering trapping type has been proposed in place of the filter trapping type. As one example thereof, as disclosed in Japanese Utility Model Publication No. 51-23615 and Japanese Utility Model Publication No. 51-50109, a filter element is known in which a large number of thin heat-resistant fiber plates carrying a catalyst are laminated. ing. With this adhering and collecting type, when exhaust gas flows through the complicated flow path generated inside the filter element, exhaust particulates adhere to and collect on the surface of the flow path. It is unlikely that excessive collection such as.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記の
ような薄い繊維板は、それ自体の機械的強度が低いた
め、規則正しく積層した状態で形状保持することが難し
い。つまり、ケーシング内に固定するに際して繊維や網
目が部分的に潰れたり片寄ったりし易く、この結果、潰
れ等により目が密となった箇所に排気微粒子が局部的に
多く捕集され、排気微粒子の分布が非常に不均一とな
る。従って、再生時に、排気微粒子が過度に堆積してい
た箇所で局部的に高温となってフィルタの焼損を招く虞
れがある。しかも、このように排気微粒子の捕集が各部
で不均一であると、フィルタに触媒を担持させたとして
も、排気ガスと触媒との接触効率が悪くなり、触媒によ
る再生能力や排気浄化性能が低下する。However, since the thin fiberboard as described above has a low mechanical strength, it is difficult to maintain the shape in a regularly laminated state. That is, when fixed in the casing, the fibers and meshes are likely to be partially crushed or biased, and as a result, many exhaust particulates are locally collected at the places where the meshes are dense due to crushing and the like, and The distribution is very uneven. Therefore, at the time of regeneration, there is a possibility that the temperature of the exhaust particulates may locally become high and the filter may be burned out. Moreover, if the collection of exhaust particulates is non-uniform in each part in this way, the contact efficiency between the exhaust gas and the catalyst becomes poor, even if the catalyst is carried on the filter, and the regeneration performance and exhaust purification performance by the catalyst are reduced. descend.
【0007】また、上記従来例のように、耐熱性繊維板
をそのまま多数積層した構成では、通気抵抗が無意味に
増大するばかりで、排気微粒子の捕集効率はそれ程高く
得られない、という欠点もある。そして、付着捕集形式
の欠点の一つである機関加速時等における排気微粒子の
ブローオフも十分に抑制することができない。Further, in the structure in which a large number of heat-resistant fiber boards are laminated as they are as in the above-mentioned conventional example, the ventilation resistance is meaninglessly increased, and the exhaust particulate collection efficiency cannot be so high. There is also. Further, blow-off of exhaust particulates during engine acceleration, which is one of the drawbacks of the adhering and collecting method, cannot be sufficiently suppressed.
【0008】[0008]
【課題を解決するための手段】この発明に係る内燃機関
の排気フィルタは、波板状に屈曲した網目状金属繊維板
を平坦な網目状金属繊維板の片面もしくは両面に重ね合
わせ、その端縁を断面略U字形をなす金属製フレームに
て挟持固定して板状のフィルタ部材を形成するととも
に、目の粗さが異なる複数種のフィルタ部材を用い、こ
の複数枚のフィルタ部材を、排気流下流側に向かうに従
って目が細かくなるように積層してケーシング内に収容
したことを特徴としている。An exhaust gas filter for an internal combustion engine according to the present invention has a mesh-like metal fiber board bent in a corrugated plate shape, which is superposed on one side or both sides of a flat mesh-like metal fiber board, and has an end edge thereof. Is sandwiched and fixed by a metal frame having a substantially U-shaped cross section to form a plate-shaped filter member, and a plurality of types of filter members having different meshes are used. It is characterized in that the sheets are stacked so that the eyes become finer toward the downstream side and are housed in the casing.
【0009】[0009]
【作用】上記構成では、網目状金属繊維板の端縁が金属
製フレームによって支持されるので、機械的強度が向上
し、多数積層した状態でケーシング内に容易に固定でき
る。このとき、上記フレームはスペーサとしても機能
し、各フィルタ部材同士で網目状金属繊維板の間に適宜
な空間が保たれる。In the above structure, since the edge of the mesh-like metal fiber board is supported by the metal frame, the mechanical strength is improved, and a large number of laminated sheets can be easily fixed in the casing. At this time, the frame also functions as a spacer, and an appropriate space is maintained between the mesh metal fiber boards between the filter members.
【0010】また、平坦な網目状金属繊維板が波板状を
なす網目状金属繊維板とともにフレームにて固定される
ため、波板状をなす繊維板の形状保持が確実になされ、
それぞれの板の間に適宜な空間が保たれるとともに、経
時的な片寄りやだれが防止される。Further, since the flat mesh-like metal fiber board is fixed to the frame together with the corrugated mesh-like metal fiber board by the frame, the shape of the corrugated fiber board is surely maintained.
An appropriate space is maintained between the plates, and deviation and sagging with time are prevented.
【0011】[0011]
【実施例】以下、この発明の一実施例を図面に基づいて
詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.
【0012】図2は、この発明に係る排気フィルタの一
実施例を示す断面図であり、ケーシング1内に円柱状の
フィルタエレメント2が収容されている。FIG. 2 is a sectional view showing an embodiment of the exhaust filter according to the present invention, in which a cylindrical filter element 2 is housed in a casing 1.
【0013】上記ケーシング1は例えばディーゼル機関
の排気管の途中に介装されるもので、円筒状の本体部1
aと略円錐状の入口部1bおよび出口部1cとから構成
されている。尚、このケーシング1は、上下に2分割さ
れて形成されており、フィルタエレメント2を収容した
後に、溶接等により一体化されている。The casing 1 is inserted in the middle of an exhaust pipe of a diesel engine, for example, and has a cylindrical main body 1
a and a substantially conical inlet portion 1b and outlet portion 1c. It should be noted that the casing 1 is formed by being vertically divided into two parts, and after housing the filter element 2, it is integrated by welding or the like.
【0014】フィルタエレメント2は、図3に示すよう
に、複数枚の円板状のフィルタ部材3から構成されてい
る。つまり、複数枚のフィルタ部材3を積層するととも
に筒状ケース4内に収容し、かつ筒状ケース4の両側の
開口端縁4aをかしめることで堅固に一体化されてい
る。As shown in FIG. 3, the filter element 2 is composed of a plurality of disc-shaped filter members 3. That is, a plurality of filter members 3 are stacked, housed in the tubular case 4, and the open end edges 4a on both sides of the tubular case 4 are caulked to be firmly integrated.
【0015】各フィルタ部材3は、図1に示すように触
媒を担持した3枚の網目状金属繊維板を重ね合わせて構
成されている。中心に位置する網目状金属繊維板5は平
坦な円板状をなしており、その両面に、波板状に屈曲し
た一対の網目状金属繊維板6がそれぞれ重ね合わされて
いる。そして、3枚の網目状金属繊維板5,6の周端縁
を重ね合わせた状態で、断面略U字形をなす金属製フレ
ーム7にて挾持固定されている。上記網目状金属繊維板
5,6は、金属繊維を網目を有する薄いシート状に形成
したものであって、1つのフィルタ部材3を構成する3
枚の網目状金属繊維板5,6は、その目の粗さが同一に
設定されている。As shown in FIG. 1, each filter member 3 is formed by stacking three mesh-like metal fiber plates carrying a catalyst. The mesh-like metal fiber board 5 located at the center has a flat disk shape, and a pair of mesh-like metal fiber boards 6 bent in a corrugated shape are superposed on both surfaces thereof. The three mesh-shaped metal fiber plates 5 and 6 are sandwiched and fixed by a metal frame 7 having a substantially U-shaped cross section in a state where the peripheral edges of the mesh-shaped metal fiber plates 5 and 6 are overlapped. The mesh-like metal fiber plates 5 and 6 are formed by forming metal fibers into a thin sheet having meshes, and constitute one filter member 3
The mesh-like metal fiber boards 5 and 6 have the same mesh roughness.
【0016】そして、フィルタエレメント2全体として
は、目の粗さが異なる複数種のフィルタ部材3が用いら
れており、図4に示すように、排気流上流側で比較的目
が粗く、下流側へ向かうに従って目が細かくなるような
順序に複数枚のフィルタ部材3が積層されている。As the filter element 2 as a whole, a plurality of types of filter members 3 having different meshes are used. As shown in FIG. 4, the mesh is relatively coarse on the upstream side of the exhaust flow and downstream, as shown in FIG. A plurality of filter members 3 are stacked in such an order that the eyes become finer toward the bottom.
【0017】尚、波板状に屈曲した網目状金属繊維板6
の凹凸の高さは、図1に明らかなように金属製フレーム
7の突出量よりも小さく設定されている。The mesh-shaped metal fiber plate 6 bent into a corrugated plate shape
As is clear from FIG. 1, the height of the unevenness is set smaller than the protruding amount of the metal frame 7.
【0018】上記実施例の構成によれば、排気がフィル
タエレメント2つまり多数のフィルタ部材3を通過する
際に、排気微粒子が網目状金属繊維板5,6の表面に付
着して捕集される。そして、この捕集された排気微粒子
は、例えば排気温が高くなったときなどに再燃焼し、フ
ィルタエレメント2が再生される。According to the configuration of the above embodiment, when exhaust gas passes through the filter element 2, that is, a large number of filter members 3, exhaust gas particulates adhere to the surfaces of the reticulated metal fiber plates 5, 6 and are collected. .. Then, the collected exhaust particulates are reburned when, for example, the exhaust temperature becomes high, and the filter element 2 is regenerated.
【0019】ここで、上記構成では、複数枚の網目状金
属繊維板5,6が図1のように互いに密着することなく
波板状の凹凸により離れた状態に積層される。しかも金
属製フレーム7が一種のスペーサとして機能して、隣接
するフィルタ部材3同士でも網目状金属繊維板6の密着
が防止される。また波板状をなす網目状金属繊維板6
は、その凹凸により大きな表面積を確保できる。従っ
て、排気との実質的な接触面積が大きく得られ、通気抵
抗の大幅な増大を来すことなく捕集効率を高めることが
できる。尚、触媒との接触効率もそれだけ良好となり、
触媒による排気浄化作用や再生能力が向上する。そし
て、波板状の網目状金属繊維板6を平坦な網目状金属繊
維板5と併せて金属製フレーム7で一体化してあるた
め、平坦な網目状金属繊維板5の張力によって図1のよ
うな断面形状が確実に保持され、例えば自重によって潰
れたり、目の粗密が片寄ったりすることがない。従っ
て、比較的各部均一に排気微粒子が捕集され、再生時の
局部的な過熱が防止される。Here, in the above structure, a plurality of mesh-shaped metal fiber plates 5 and 6 are laminated in a state separated from each other by corrugated unevenness without being in close contact with each other as shown in FIG. Moreover, the metal frame 7 functions as a kind of spacer to prevent the mesh-shaped metal fiber plates 6 from adhering to each other even between the adjacent filter members 3. In addition, a mesh-shaped metal fiber plate 6 having a corrugated plate shape
Has a large surface area due to the unevenness. Therefore, a large substantial contact area with the exhaust gas can be obtained, and the trapping efficiency can be improved without significantly increasing the ventilation resistance. In addition, the contact efficiency with the catalyst is also good,
Exhaust gas purification effect and regeneration capacity by the catalyst are improved. Since the corrugated mesh-like metal fiber board 6 is integrated with the flat mesh-like metal fiber board 5 by the metal frame 7, the flat mesh-like metal fiber board 5 is tensioned as shown in FIG. The cross-sectional shape is surely maintained, and for example, it is not crushed by its own weight and the density of eyes is not biased. Therefore, exhaust particulates are relatively evenly collected in each part, and local overheating during regeneration is prevented.
【0020】また上記構成では、複数枚の網目状金属繊
維板5,6が予め金属製フレーム7にて一体化されるの
で、その取り扱いが容易になるとともに、機械的強度の
低い網目状金属繊維板5,6を多数積層した状態に堅固
に固定支持することが可能となり、耐久性に優れたもの
となる。特に、筒状ケース4の開口端縁4aをかしめる
際に、各フィルタ部材3の金属製フレーム7の部分に力
が加わるので、かしめ時の変形等も防止され、堅固に一
体化することができる。Further, in the above structure, since the plurality of mesh-shaped metal fiber plates 5 and 6 are integrated in advance by the metal frame 7, the mesh-shaped metal fibers are easy to handle and have low mechanical strength. It becomes possible to firmly fix and support a large number of plates 5 and 6 in a laminated state, and the durability becomes excellent. In particular, when caulking the opening edge 4a of the tubular case 4, a force is applied to the metal frame 7 of each filter member 3, so that deformation during caulking is also prevented, and it is possible to firmly integrate them. it can.
【0021】更に、上記フィルタエレメント2は、排気
流上流側で目が粗く、下流側へ向かうに従って目が細か
くなるように複数枚のフィルタ部材3が組み合わされて
いるので、例えば機関を急加速したような場合に、上流
側の網目状金属繊維板5,6から排気微粒子がブローオ
フしたとしても下流側の網目状金属繊維板5,6におい
て再捕集され易くなり、外部へのブローオフが防止され
る。Further, since the filter element 2 is composed of a plurality of filter members 3 so that the mesh is coarse on the upstream side of the exhaust flow and finer on the downstream side, the engine is rapidly accelerated, for example. In such a case, even if the exhaust particulate matter blows off from the mesh-shaped metal fiber plates 5 and 6 on the upstream side, it is easily collected again on the mesh-shaped metal fiber plates 5 and 6 on the downstream side, and blow-off to the outside is prevented. It
【0022】次に、図5,図6は、この発明の異なる実
施例を示している。この実施例では、1つのフィルタ部
材3A,3Bが2枚の網目状金属繊維板5,6つまり平
坦な網目状金属繊維板5とその上流側の面に重ね合わさ
れた波板状の網目状金属繊維板6とから構成されてい
る。そして、金属製フレーム7の構成が異なる2種類の
フィルタ部材3A,3Bが交互に積層されている。Next, FIGS. 5 and 6 show different embodiments of the present invention. In this embodiment, one filter member 3A, 3B has two mesh-like metal fiber plates 5, 6, that is, a flat mesh-like metal fiber plate 5 and a corrugated plate-like mesh metal which is superposed on the upstream surface thereof. It is composed of a fiber board 6. Then, two types of filter members 3A and 3B having different configurations of the metal frame 7 are alternately laminated.
【0023】一方のフィルタ部材3Aにおいては、金属
製フレーム7の下流側の面の中央部に邪魔板部7aが形
成されており、これが略十字形のブリッジ部7bによっ
てフレーム7周縁部に連結されている。また、他方のフ
ィルタ部材3Bにおいては、金属製フレーム7の下流側
の面が内周側に延長されており、これによって外周部を
覆う邪魔板部7cが形成されている。尚、各フィルタ部
材3A,3Bの網目状金属繊維板5,6の目の粗さは、
前述した実施例と同様に下流側へ向かうに従って細かく
設定されている。In one filter member 3A, a baffle plate portion 7a is formed at the center of the downstream surface of the metal frame 7, and this baffle plate portion 7a is connected to the peripheral portion of the frame 7 by a substantially cross-shaped bridge portion 7b. ing. Further, in the other filter member 3B, the downstream surface of the metal frame 7 is extended to the inner peripheral side, whereby a baffle plate portion 7c that covers the outer peripheral portion is formed. The roughness of the mesh-like metal fiber plates 5 and 6 of the filter members 3A and 3B is
Similar to the embodiment described above, the setting is made finer toward the downstream side.
【0024】従って、この実施例においては、図6に矢
印で示すように、排気流が非常に乱れた形でフィルタエ
レメント2内を通流することになり、排気微粒子の捕集
効率が向上するとともに、触媒との接触効率が一層良好
なものとなる。また、各邪魔板部7a,7cおよびブリ
ッジ部7bが金属製フレーム7の一部として網目状金属
繊維板5,6を支持するので、網目状金属繊維板5,6
の支持が一層確実となり、かつフィルタ部材3A,3B
としての機械的強度が向上する。Therefore, in this embodiment, as shown by the arrow in FIG. 6, the exhaust gas flows through the filter element 2 in a very turbulent manner, and the exhaust particulate collection efficiency is improved. At the same time, the contact efficiency with the catalyst becomes even better. Further, since the baffle plates 7a and 7c and the bridge portion 7b support the mesh-like metal fiber plates 5 and 6 as a part of the metal frame 7, the mesh-like metal fiber plates 5 and 6 are provided.
Is more reliably supported, and the filter members 3A and 3B are
As a result, the mechanical strength is improved.
【0025】尚、いずれの実施例においても、網目状金
属繊維板5,6の目の粗さは必ずしも1枚づつ連続的に
変化させる必要はなく、何枚かづつ同一のものとして段
階的に変化させるようにしても良い。In any of the embodiments, it is not always necessary to continuously change the roughness of the mesh-shaped metal fiber plates 5 and 6 one by one. It may be changed.
【0026】[0026]
【発明の効果】以上の説明で明らかなように、この発明
に係る内燃機関の排気フィルタにおいては、機械的強度
の低い網目状金属繊維板とりわけ波板状に屈曲させた網
目状金属繊維板を安定的に固定支持することが可能とな
り、耐久性の向上や性能の安定化が図れる。また、多数
の網目状金属繊維板を非密着状態に維持でき、通気抵抗
に比して高い捕集効率が得られるとともに、自重による
潰れや粗密の片寄りが防止され、各部で比較的均一な捕
集を行うことができる。As is apparent from the above description, in the exhaust gas filter of the internal combustion engine according to the present invention, the mesh-like metal fiber plate having a low mechanical strength, particularly the mesh-like metal fiber plate bent in a corrugated plate shape, is used. It becomes possible to stably fix and support, improving durability and stabilizing performance. Further, it is possible to maintain a large number of mesh-shaped metal fiber plates in a non-adhered state, and a high collection efficiency can be obtained compared to the ventilation resistance, and crushing due to its own weight and deviation of coarse and dense are prevented, and each part is relatively uniform. Collection can be done.
【0027】そして、目の粗さが異なるフィルタ部材を
順次積層することにより、機関急加速時等のブローオフ
が防止される。Blow-off at the time of sudden acceleration of the engine or the like is prevented by sequentially laminating the filter members having different meshes.
【図1】この発明に係る排気フィルタの要部を示す断面
図。FIG. 1 is a sectional view showing a main part of an exhaust filter according to the present invention.
【図2】この発明に係る排気フィルタの全体的構成を示
す断面図。FIG. 2 is a sectional view showing the overall structure of an exhaust filter according to the present invention.
【図3】フィルタエレメントのみを示す一部切欠の斜視
図。FIG. 3 is a partially cutaway perspective view showing only a filter element.
【図4】フィルタ部材の積層状態を示す説明図。FIG. 4 is an explanatory view showing a laminated state of filter members.
【図5】この発明の異なる実施例を示す要部の断面図。FIG. 5 is a sectional view of an essential part showing a different embodiment of the present invention.
【図6】この実施例におけるフィルタ部材の積層状態を
示す説明図。FIG. 6 is an explanatory view showing a laminated state of filter members in this embodiment.
2…フィルタエレメント 3…フィルタ部材 5,6…網目状金属繊維板 7…金属製フレーム 2 ... Filter element 3 ... Filter member 5, 6 ... Mesh-shaped metal fiber board 7 ... Metal frame
Claims (1)
坦な網目状金属繊維板の片面もしくは両面に重ね合わ
せ、その端縁を断面略U字形をなす金属製フレームにて
挟持固定して板状のフィルタ部材を形成するとともに、
目の粗さが異なる複数種のフィルタ部材を用い、この複
数枚のフィルタ部材を、排気流下流側に向かうに従って
目が細かくなるように積層してケーシング内に収容した
ことを特徴とする内燃機関の排気フィルタ。Claim: What is claimed is: 1. A mesh-like metal fiber board bent in a corrugated plate shape is superposed on one or both sides of a flat mesh-like metal fiber board, and its edge is made of a metal having a substantially U-shaped cross section. While sandwiching and fixing with a frame to form a plate-shaped filter member,
An internal combustion engine characterized in that a plurality of types of filter members having different meshes are used, and the plurality of filter members are stacked and housed in a casing so that the eyes become finer toward the exhaust flow downstream side. Exhaust filter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3152704A JP2671646B2 (en) | 1991-06-25 | 1991-06-25 | Exhaust filter for internal combustion engine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3152704A JP2671646B2 (en) | 1991-06-25 | 1991-06-25 | Exhaust filter for internal combustion engine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH051523A true JPH051523A (en) | 1993-01-08 |
JP2671646B2 JP2671646B2 (en) | 1997-10-29 |
Family
ID=15546326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3152704A Expired - Lifetime JP2671646B2 (en) | 1991-06-25 | 1991-06-25 | Exhaust filter for internal combustion engine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2671646B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020131637A1 (en) * | 2020-05-22 | 2021-11-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | FILTER DEVICE FOR THE PROCESS OF MANUFACTURING SEMICONDUCTOR DEVICES |
-
1991
- 1991-06-25 JP JP3152704A patent/JP2671646B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2671646B2 (en) | 1997-10-29 |
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