JPH05152044A - Bonding device for small pitch lead device - Google Patents

Bonding device for small pitch lead device

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Publication number
JPH05152044A
JPH05152044A JP31046991A JP31046991A JPH05152044A JP H05152044 A JPH05152044 A JP H05152044A JP 31046991 A JP31046991 A JP 31046991A JP 31046991 A JP31046991 A JP 31046991A JP H05152044 A JPH05152044 A JP H05152044A
Authority
JP
Japan
Prior art keywords
pressing
tool
pressed
pressure
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31046991A
Other languages
Japanese (ja)
Other versions
JP3532930B2 (en
Inventor
Hiroshi Matsumoto
宏 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP31046991A priority Critical patent/JP3532930B2/en
Publication of JPH05152044A publication Critical patent/JPH05152044A/en
Application granted granted Critical
Publication of JP3532930B2 publication Critical patent/JP3532930B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To provide a bonding device having the capability of easily maintaining the flatness of the pressing side of a presser tool, and ensuring the high durability of the tool. CONSTITUTION:This bonding device is equipped with a presser tool 4 having a pressing side 4a faced to a pressed surface S, a presser tool drive mechanism 10 for pressing the tool 4 in a direction N perpendicular to the pressing side 4a, a filament body 6 coming in pressed contact between the side 4a and the surface S when the tool 4 is at a position for pressing the surface S, and a filament body feed mechanism 20 for feeding the filament body 6 along the pressed surface S.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はTABデバイスなどの狭
ピッチリードデバイスのボンディング装置に係り、詳し
くはこの装置の加圧ツールの平面度を容易に保持するこ
とができ耐用性を向上したものに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bonding apparatus for a narrow pitch lead device such as a TAB device, and more particularly to a bonding apparatus capable of easily maintaining the flatness of a pressure tool of this apparatus and improving its durability. ..

【0002】[0002]

【従来の技術】近年、コンピューターやワードプロセッ
サ等のディスプレイとして、液晶パネルやプラズマディ
スプレイパネルなどのパネル素子が多用されるようにな
ってきている。このパネル素子は、積層される一組のガ
ラス板の内面に回路が設けられたもので、その角部以外
の外縁部の表面に多数条のパネル電極が露出しているも
のである。このパネル電極は通常数10μの狭ピッチを
介して列設され、このパネル電極に同様の狭ピッチのリ
ードを備えたTABデバイスなどの狭ピッチリードデバ
イスがボンディングされる。
2. Description of the Related Art In recent years, panel elements such as liquid crystal panels and plasma display panels have been widely used as displays for computers and word processors. In this panel element, a circuit is provided on the inner surface of a pair of laminated glass plates, and a large number of panel electrodes are exposed on the surface of the outer edge portion other than the corner portions. Usually, the panel electrodes are arranged in a row with a narrow pitch of several tens of μm, and a narrow pitch lead device such as a TAB device having leads of the same narrow pitch is bonded to the panel electrode.

【0003】この狭ピッチリードデバイスのリードを上
記パネル電極にボンディングする手段の一つとして、硬
化性樹脂、特に紫外線硬化性絶縁樹脂によるものがあ
る。この手段を、図5を参照して説明する。まず透明の
パネル主材101上に形成されたパネル電極102側全
面に硬化性樹脂103を塗布する(同図(a))。次に
狭ピッチリードデバイスのリード105の下面105b
をパネル電極102の上面102aに接合するように載
せ、リード105の上面105aと硬化性樹脂103の
上面103aとで被押圧面Sを形成し、この被押圧面S
に加圧ツール104の押圧面104aを重合し被押圧面
Sを加圧すると共に、紫外線を照射して硬化性樹脂10
3を硬化させる(同図(b))。次に、硬化が終了する
と、被押圧面Sから加圧ツール104の押圧面104a
を離脱し、リード105とパネル電極102とのボンデ
ィングを完了する(同図(c))というものである。こ
こで加圧位置(同図(b))において、硬化性樹脂10
3の上面103aとリード105の上面105aとから
なる被押圧面Sに、加圧ツール104の押圧面104a
が直に接触して加圧していた。
As one of the means for bonding the leads of the narrow pitch lead device to the panel electrode, there is a curable resin, especially an ultraviolet curable insulating resin. This means will be described with reference to FIG. First, the curable resin 103 is applied to the entire surface of the transparent panel main material 101 on the side of the panel electrode 102 (FIG. 8A). Next, the lower surface 105b of the lead 105 of the narrow pitch read device
Is placed so as to be bonded to the upper surface 102a of the panel electrode 102, and the upper surface 105a of the lead 105 and the upper surface 103a of the curable resin 103 form a pressed surface S.
The pressing surface 104a of the pressing tool 104 is superposed on the pressing surface 104 to press the pressed surface S, and the curable resin 10 is irradiated with ultraviolet rays.
3 is cured ((b) in the same figure). Next, when the curing is completed, the surface to be pressed S is pushed to the pressing surface 104a of the pressing tool 104.
And the bonding between the lead 105 and the panel electrode 102 is completed (FIG. 7C). Here, at the pressurizing position ((b) in the figure), the curable resin 10
3 to the pressed surface S composed of the upper surface 103a of the lead 105 and the upper surface 105a of the lead 105.
Was in direct contact with and pressing.

【0004】[0004]

【発明が解決しようとする課題】ところで、被押圧面、
特に多数のリードの上面を均一に加圧するためには、加
圧ツールの押圧面の平面度を高く保持することが不可欠
であるが、上記従来技術によると押圧面の平面度を保ち
にくい問題点があった。すなわち、従来技術では加圧ツ
ールの押圧面を直に多数のリードの上面に接して加圧し
ていたので、各リードに均等な力を作用させるために、
加圧ツールはある程度の弾力を備えた柔らかい材料、例
えば樹脂により形成せざるを得ない。
By the way, the pressed surface,
Particularly, in order to uniformly press the upper surfaces of a large number of leads, it is essential to keep the flatness of the pressing surface of the pressing tool high, but it is difficult to maintain the flatness of the pressing surface according to the above conventional technique. was there. That is, in the prior art, since the pressing surface of the pressing tool was directly in contact with the upper surfaces of many leads to apply pressure, in order to apply an even force to each lead,
The pressure tool must be made of a soft material having some elasticity, for example, a resin.

【0005】ところが、弾力を備えた材料からなる加圧
ツールの押圧面を、高い平面度(数μm程度)を有する
ように加工することは、一般にきわめて困難である。ま
た、弾力を備えた押圧面がこの押圧面よりも硬いリード
に直に圧接するものであるため、押圧面に圧痕が残り簡
単に平面度が低下し、加圧ツールを頻繁に交換する必要
があった。さらに、押圧面は硬化性樹脂にも直接圧接す
るため、押圧面に硬化性樹脂が付着し平面度が低下す
る。したがって、絶えず押圧面をクリーニングしておく
必要がある。このように、従来技術によると加圧ツール
の押圧面の平面度を保持することが困難であり、加圧ツ
ールの耐用性が低いという欠点があった。
However, it is generally extremely difficult to process the pressing surface of the pressure tool made of a material having elasticity to have a high flatness (about several μm). Further, since the pressing surface having elasticity is directly in pressure contact with the lead harder than this pressing surface, an indentation remains on the pressing surface to easily reduce the flatness, and it is necessary to frequently replace the pressing tool. there were. Further, since the pressing surface also comes into direct pressure contact with the curable resin, the curable resin adheres to the pressing surface and the flatness decreases. Therefore, it is necessary to constantly clean the pressing surface. As described above, according to the conventional technique, it is difficult to maintain the flatness of the pressing surface of the pressure tool, and the durability of the pressure tool is low.

【0006】そこで本発明は、加圧ツールの押圧面の平
面度を容易に保つことができ、加圧ツールの耐用性が高
いボンディング装置を提供することを目的とする。
Therefore, an object of the present invention is to provide a bonding apparatus which can easily maintain the flatness of the pressing surface of the pressure tool and has a high durability of the pressure tool.

【0007】[0007]

【課題を解決するための手段】このために本発明は、被
押圧面と対面する押圧面を備えた加圧ツールと、この加
圧ツールを前記押圧面と垂直な方向に押圧する加圧ツー
ル駆動機構と、前記加圧ツールが前記被押圧面の加圧位
置にある際、前記押圧面と前記被押圧面との間に圧接す
る線条体と、この線条体を前記被押圧面に沿って送る線
条体の送り機構とを有するようにしたものである。
To this end, the present invention provides a pressing tool having a pressing surface facing a surface to be pressed, and a pressing tool for pressing the pressing tool in a direction perpendicular to the pressing surface. When the drive mechanism and the pressing tool are in the pressing position of the pressed surface, a linear member that makes pressure contact between the pressing surface and the pressed surface, and the linear member on the pressed surface. And a feeding mechanism for the filamentous body.

【0008】[0008]

【作用】上記構成において、リードの上面と硬化性樹脂
の上面とが交互に並ぶ被押圧面上に、線条体の下面を位
置させ、加圧ツール駆動機構を押方向へ作動して加圧ツ
ールの押圧面を線条体の上面に圧接すると、この加圧ツ
ール駆動機構の押圧力が線条体を介して被押圧面へ伝達
する。そして、硬化性樹脂を硬化させた後加圧ツール駆
動機構を引方向へ作動して加圧ツールの押圧面を線条体
から離し、線条体の送り機構を作動して平面度が低下し
た線条体の既使用部分を送り、順次平面度の高い線条体
の未使用部分に加圧ツールの押圧面を圧接する。このよ
うに、加圧ツールの押圧面は被押圧面に直に接触するこ
とがないので、この押圧面の平面度は、リードの圧痕や
硬化性樹脂の付着により低下せず加圧ツールの耐用性を
向上することができる。
In the above structure, the lower surface of the linear member is positioned on the pressed surface where the upper surface of the lead and the upper surface of the curable resin are alternately arranged, and the pressing tool driving mechanism is operated in the pressing direction to apply pressure. When the pressing surface of the tool is brought into pressure contact with the upper surface of the linear body, the pressing force of the pressing tool driving mechanism is transmitted to the pressed surface via the linear body. Then, after curing the curable resin, the pressing tool driving mechanism is operated in the pulling direction to separate the pressing surface of the pressing tool from the linear body, and the linear body feeding mechanism is operated to reduce the flatness. The used part of the linear body is fed, and the pressing surface of the pressing tool is pressed against the unused part of the linear body with high flatness. In this way, since the pressing surface of the pressure tool does not directly contact the surface to be pressed, the flatness of this pressing surface does not decrease due to the indentation of the lead or the adhesion of the curable resin It is possible to improve the property.

【0009】[0009]

【実施例】図面を参照して本発明の実施例を説明する。
図1は本発明のボンディング装置を示す要部斜視図であ
る。Dは液晶パネルやプラズマパネルなどのパネル素子
であり、このパネル素子Dの外縁部の表面にはパネル電
極2が列状に露出している。そしてこのパネル電極2上
に紫外線硬化性樹脂3を塗布し((図4(a)も参
照)、TABデバイスPのリードLをパネル電極2に位
置合わせしたうえで重合し、リードL上面と樹脂3上面
とから被押圧面Sを形成する(同図(b)も参照)。6
は、例えばナイロン糸やナイロン細テープなどからなる
線条体であり、安価に高い平面度を得ることができる。
この線条体6は種々考えられるものであって、要する
に、後述する加圧ツール駆動機構10の押圧力を被押圧
面Sに十分伝達しうるものであれば任意であり、さらに
はリードLや加圧ツール4(後述)を痛めないように、
やや弾性を有するものが望ましい。
Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of essential parts showing a bonding apparatus of the present invention. D is a panel element such as a liquid crystal panel or a plasma panel, and the panel electrodes 2 are exposed in rows on the surface of the outer edge of the panel element D. Then, an ultraviolet curable resin 3 is applied onto the panel electrode 2 (see also FIG. 4A), and the lead L of the TAB device P is aligned with the panel electrode 2 and polymerized to form an upper surface of the lead L and the resin. The pressed surface S is formed from the upper surface 3 (see also FIG. 6B).
Is a filament made of, for example, a nylon thread or a nylon thin tape, and can obtain high flatness at low cost.
There are various conceivable linear bodies 6, in short, as long as they can sufficiently transmit the pressing force of the pressing tool driving mechanism 10 described later to the pressed surface S, and further, the leads L and Do not damage the pressure tool 4 (described later)
A material having a little elasticity is desirable.

【0010】この線条体6は、送り機構20により被押
圧面S上に張力を有する状態で接触できるように支持さ
れており、送り機構20を作動すると被押圧面Sに沿っ
て所望長さ送ることができる。この送り機構20は、図
2に詳細に示すように線条体6が巻装された繰出しリー
ル21、テンションローラ22及びガイドローラ23か
らなる繰出し側のローラ列と、巻取りリール26、テン
ションローラ25及びガイドローラ24からなる巻取り
側のローラ列とが、被押圧面Sの両脇に対称に設けられ
てなり、繰出しリール21と巻取りリール26のそれぞ
れの駆動軸21a、26aには、モータM、Mの出力軸
28、27がそれぞれ連結されており、線条体6は送り
方向(図2矢印C方向)に沿って、繰出しリール21、
テンションローラ22、ガイドローラ23、ガイドロー
ラ24、テンションローラ25、巻取りリール26のそ
れぞれを順次周回するようになっている。また、テンシ
ョンローラ22、25の軸支部22a、25aは、ばね
22b、25bのそれぞれの先端に連結され、このばね
が図2矢印t方向に線条体6を押すことにより線条体6
の張力を調節するものである。
The linear member 6 is supported by the feed mechanism 20 so that it can be brought into contact with the surface S to be pressed in a tensioned state. When the feed mechanism 20 is operated, the linear member 6 has a desired length along the surface S to be pressed. Can be sent. As shown in detail in FIG. 2, the feeding mechanism 20 includes a take-up reel 21 around which the linear member 6 is wound, a take-up side roller train including a tension roller 22 and a guide roller 23, a take-up reel 26, and a tension roller. 25 and a roller row on the winding side, which includes guide rollers 24, are symmetrically provided on both sides of the pressed surface S, and the drive shafts 21a and 26a of the feeding reel 21 and the winding reel 26 respectively include The output shafts 28 and 27 of the motors M and M are connected to each other, and the filamentous body 6 is fed along the feeding direction (direction of arrow C in FIG. 2).
The tension roller 22, the guide roller 23, the guide roller 24, the tension roller 25, and the take-up reel 26 are sequentially rotated. Further, the shaft support portions 22a and 25a of the tension rollers 22 and 25 are connected to the respective tips of the springs 22b and 25b, and the springs push the filament body 6 in the direction of arrow t in FIG.
It is to adjust the tension of.

【0011】4は、線条体6を押圧し被押圧面Sと対面
する押圧面4aを備えた加圧ツールであって、加圧ツー
ル4の上面4b中央にはシリンダ11のロッド12の先
端部が連結される。このシリンダ11とロッド12とに
より加圧ツール駆動機構10が構成される。この加圧ツ
ール駆動機構10は加圧ツール4を図2仮想線位置と、
実線位置で示す加圧位置との間を昇降させるように設け
たものであって、この加圧位置において加圧ツール4の
押圧面4aを線条体6に押し付け、線条体6を介して被
押圧面Sこの面Sと垂直な方向(図2N方向)の押圧力
を作用させるものである(図3も参照)。この加圧ツー
ル駆動機構10はシリンダに限定されるものではなく加
圧ツール4を十分な力で押圧しうるものであれば任意で
あり、例えば図示外のモータと、このモータの出力軸に
連結されこの出力軸の回転力を変換して加圧ツールを昇
降させる伝動機構とにより構成してもよい。
Reference numeral 4 denotes a pressing tool having a pressing surface 4a that presses the linear member 6 and faces the pressed surface S. The tip of the rod 12 of the cylinder 11 is located at the center of the upper surface 4b of the pressing tool 4. The parts are connected. The cylinder 11 and the rod 12 constitute the pressure tool driving mechanism 10. The pressure tool drive mechanism 10 moves the pressure tool 4 to the position shown in phantom in FIG.
It is provided so as to move up and down between the pressing position shown by the solid line position, and the pressing surface 4a of the pressing tool 4 is pressed against the linear member 6 at this pressing position, Pressed surface S A pressing force in a direction perpendicular to this surface S (direction of FIG. 2N) is applied (see also FIG. 3). The pressure tool driving mechanism 10 is not limited to the cylinder, but may be any pressure mechanism capable of pressing the pressure tool 4 with sufficient force. For example, a motor (not shown) and an output shaft of the motor may be connected. A transmission mechanism for converting the rotational force of the output shaft to move the pressure tool up and down may be used.

【0012】本装置は上記のような構成よりなり、次に
動作を説明する。まず、パネル電極2上に紫外線硬化性
樹脂3を塗布し(図4(a)参照)、リードLをパネル
電極2上に重合し、リードL上面と樹脂3上面とからな
る被押圧面Sを形成する(同図(b)参照)。次に、図
2に示すように送り機構20のモータM、Mを作動し、
テンションローラ22、25で張力を調節しつつ線条体
6を送り、未使用の線条体6の下面を被押圧面S上に位
置させる。次に、シリンダ11を作動し、ロッド12
を、加圧ツール4の押圧面4aと垂直な方向である押方
向(矢印N参照)へ下降させ、加圧ツール4を加圧位置
へ移動させる。すると、押圧面4aは線条体6の上面に
圧接し、さらに加圧ツール4を押すと押圧面4a及び線
条体6を介して押圧力が被押圧面Sへ伝達され、リード
Lとパネル電極2が十分な力で圧接される。その結果、
リードL下面とパネル電極2上面との間に残留していた
樹脂3がこれらの面間から外部へ押し出されて、リード
Lはパネル電極2に接触する(図3も参照)。この状態
において、パネル基板Dの下方から紫外線を照射し、樹
脂3を硬化させる。そして樹脂3が硬化した後、シリン
ダ11を上記と逆方向に作動しロッド12を引方向へ上
昇させて押圧面4aを線条体6から離し、押圧面4aと
被押圧面Sとに挾まれていた線条体6の既使用部分を送
り機構20により送るものである。
This apparatus has the above-mentioned structure, and its operation will be described below. First, the ultraviolet curable resin 3 is applied on the panel electrode 2 (see FIG. 4A), the leads L are polymerized on the panel electrode 2, and the pressed surface S including the upper surface of the lead L and the upper surface of the resin 3 is formed. It is formed (see FIG. 2B). Next, as shown in FIG. 2, the motors M, M of the feed mechanism 20 are operated,
The filament body 6 is fed while adjusting the tension with the tension rollers 22 and 25, and the lower surface of the unused filament body 6 is positioned on the pressed surface S. Next, the cylinder 11 is operated and the rod 12
Is lowered in the pushing direction (see arrow N) which is the direction perpendicular to the pushing surface 4a of the pushing tool 4, and the pushing tool 4 is moved to the pushing position. Then, the pressing surface 4a comes into pressure contact with the upper surface of the linear body 6, and when the pressing tool 4 is further pressed, the pressing force is transmitted to the pressed surface S via the pressing surface 4a and the linear body 6, and the lead L and the panel. The electrode 2 is pressed with sufficient force. as a result,
The resin 3 remaining between the lower surface of the lead L and the upper surface of the panel electrode 2 is pushed out from between these surfaces, and the lead L contacts the panel electrode 2 (see also FIG. 3). In this state, ultraviolet rays are irradiated from below the panel substrate D to cure the resin 3. Then, after the resin 3 is cured, the cylinder 11 is operated in the opposite direction to raise the rod 12 in the pulling direction to separate the pressing surface 4a from the linear body 6, and it is sandwiched between the pressing surface 4a and the pressed surface S. The used part of the filamentous body 6 is fed by the feeding mechanism 20.

【0013】本発明では線条体6を介して被押圧面Sを
押圧するようにしたので、従来手段のように加圧ツール
4を弾力を備えた材料で形成する必要がなく、例えばス
テンレスなどのように硬い材料で形成することができ、
高い平面度を有するように押圧面4aを加工することが
容易である。また、上記実施例では紫外線硬化性樹脂3
を用いてボンディングを行なったが、熱硬化性樹脂を用
いることもできる。この熱硬化性樹脂を用いる場合に
は、線条体6が耐熱性のあるものとする。加えて、押圧
面4aによる押圧を受けた線条体6の既使用部分は巻き
取りリール26により巻き取られた後処分されるもので
あるが、線条体6は加圧ツール4に比べ非常に安価に平
面度の高いものを得ることができ加圧ツール4の耐用性
を向上することができるので、上記のように構成しても
装置全体として格別のコストアップになることはない。
In the present invention, since the surface to be pressed S is pressed through the linear member 6, it is not necessary to form the pressing tool 4 with a material having elasticity as in the conventional means, and for example, stainless steel or the like is used. Can be made of a hard material like
It is easy to process the pressing surface 4a so as to have high flatness. Further, in the above embodiment, the ultraviolet curable resin 3
Although the bonding was performed by using, a thermosetting resin can also be used. When this thermosetting resin is used, the filament 6 has heat resistance. In addition, the used portion of the linear member 6 that has been pressed by the pressing surface 4a is to be disposed of after being wound by the take-up reel 26, but the linear member 6 is much more difficult than the pressing tool 4. Moreover, since it is possible to obtain a highly flat tool at a low cost and to improve the durability of the pressing tool 4, even if it is configured as described above, there is no particular increase in the cost of the entire apparatus.

【0014】[0014]

【発明の効果】以上説明したように本発明は、被押圧面
と対面する押圧面を備えた加圧ツールと、この加圧ツー
ルを前記押圧面と垂直な方向に押圧する加圧ツール駆動
機構と、前記加圧ツールが前記被押圧面の加圧位置にあ
る際、前記押圧面と前記被押圧面との間に圧接する線条
体と、この線条体を前記被押圧面に沿って送る線条体の
送り機構とから、狭ピッチリードデバイスのボンディン
グ装置を構成しているので、ツールの押圧面が被押圧面
に直接接触することがなく、この押圧面の平面度を容易
に保持することができ、加圧ツールの耐用性が高いボン
ディング装置を得ることができる。
As described above, the present invention provides a pressing tool having a pressing surface facing a surface to be pressed, and a pressing tool driving mechanism for pressing the pressing tool in a direction perpendicular to the pressing surface. When the pressure tool is at the pressure position of the pressed surface, a linear member that is pressed between the pressing surface and the pressed surface, and the linear member along the pressed surface. Since the bonding device for the narrow-pitch lead device is composed of the feeding mechanism of the feeding linear body, the pressing surface of the tool does not come into direct contact with the pressed surface, and the flatness of this pressing surface is easily maintained. Therefore, it is possible to obtain a bonding apparatus with high durability of the pressure tool.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るボンディング装置の要部斜視図FIG. 1 is a perspective view of a main part of a bonding apparatus according to the present invention.

【図2】同正面図FIG. 2 is a front view of the same.

【図3】同図2B−B断面図FIG. 3 is a sectional view of FIG. 2B-B.

【図4】同被押圧面形成の説明図FIG. 4 is an explanatory view of forming the pressed surface.

【図5】従来のボンディグ工程の説明図FIG. 5 is an explanatory view of a conventional bonding process.

【符号の説明】[Explanation of symbols]

4 加圧ツール 4a 押圧面 6 線条体 10 加圧ツール駆動機構 20 送り機構 N 押圧面と垂直な方向 S 被押圧面 4 Pressure Tool 4a Pressing Surface 6 Striation 10 Pressure Tool Driving Mechanism 20 Feeding Mechanism N Vertical Direction to Pressing Surface S Pressed Surface

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被押圧面と対面する押圧面を備えた加圧ツ
ールと、この加圧ツールを前記押圧面と垂直な方向に押
圧する加圧ツール駆動機構と、前記加圧ツールが前記被
押圧面の加圧位置にある際、前記押圧面と前記被押圧面
との間に圧接する線条体と、この線条体を前記被押圧面
に沿って送る線条体の送り機構とを有することを特徴と
する狭ピッチリードデバイスのボンディング装置。
1. A pressing tool having a pressing surface facing a pressed surface, a pressing tool drive mechanism for pressing the pressing tool in a direction perpendicular to the pressing surface, and the pressing tool is provided with the pressing surface. A linear member that is in pressure contact between the pressing surface and the pressed surface when the pressing surface is in the pressing position, and a linear member feeding mechanism that sends the linear member along the pressed surface. A bonding apparatus for a narrow-pitch lead device, which has.
JP31046991A 1991-11-26 1991-11-26 Bonding apparatus and bonding method for narrow pitch lead device Expired - Fee Related JP3532930B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31046991A JP3532930B2 (en) 1991-11-26 1991-11-26 Bonding apparatus and bonding method for narrow pitch lead device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31046991A JP3532930B2 (en) 1991-11-26 1991-11-26 Bonding apparatus and bonding method for narrow pitch lead device

Publications (2)

Publication Number Publication Date
JPH05152044A true JPH05152044A (en) 1993-06-18
JP3532930B2 JP3532930B2 (en) 2004-05-31

Family

ID=18005622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31046991A Expired - Fee Related JP3532930B2 (en) 1991-11-26 1991-11-26 Bonding apparatus and bonding method for narrow pitch lead device

Country Status (1)

Country Link
JP (1) JP3532930B2 (en)

Also Published As

Publication number Publication date
JP3532930B2 (en) 2004-05-31

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