JPH05142036A - Photo sensor device - Google Patents

Abstract

PURPOSE:To provide a photo sensor with a self-calibration function by eliminating an environmental influence such as temperature fluctuation. CONSTITUTION:A title item is provided with a first chamber 11 which accommodates a power-supply part, a calibration device 25, and light sources 21a and 21b for irradiating light to an object 1 to be measured and a second chamber 12 for housing a spectral optical system 30. Fans 20a and (20b) are provided within the first chamber 11 and the first chamber 11 is temperature- controlled by a first temperature-control device 15 and the fans 20a and (20b). The second chamber 12 is nearly closed and is in heat-insulation structure by a heat-insulation material 17 and the temperature is made constant by a second temperature-control device 16. The self-calibration device 25 moves to a calibration position at the time of calibration automatically and light from the light sources 21a and 21b impinge on the spectral optical system 30, thus achieving calibration.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical sensor device including a heat generating source and an optical system having optical sensor means in a box.

[0002]

2. Description of the Related Art Optical sensor devices having a spectroscopic optical system are used not only in laboratories but also in factories and other production lines and quality inspection lines. Such an optical sensor device is configured by incorporating, in addition to the spectroscopic optical system, a power source, a light source for irradiating light to the object to be measured, and the like in a box.

The spectroscopic optical system is composed of, for example, a convex lens, a concave mirror, a mirror, a diffraction grating plate, and an optical sensor section for measuring the spectral brightness. A signal corresponding to the spectral brightness is obtained from this optical sensor unit, and this signal is processed to obtain necessary information. The calibration of such an optical sensor device is performed by placing a standard reflection plate at the position of the object to be measured, irradiating the reflection plate with light from a light source, and causing the reflected light to enter a spectroscopic optical system. There is.

[0004]

However, the optical sensor device used in the above-mentioned production line or quality inspection line has the following problems. (1) The power supply unit, the light source, and the like in the optical sensor device become heat generation sources because part of their power consumption is changed to heat.
This may cause the temperature inside the device to rise. (2) The optical sensor device is not used in a relatively clean laboratory or the like, but is often used in an environment where the temperature fluctuation is relatively large and the dust is relatively large. (3) The spectroscopic optical system is a precisely adjusted optical system, and the optical sensor is, for example, a G light receiving element for near infrared light.
Although e, PbS and the like are used, the light receiving element made of these materials has a large temperature dependency. Therefore, the dust and the temperature change as described above are likely to adversely affect the spectroscopic measurement. (4) Since the measurement in actual use as described above is often performed for a relatively long time, the influence of the temperature change as described above is relatively large, and therefore the frequency of calibration of the device increases. (5) The calibration of the optical sensor device is time-consuming because the measurer himself places the standard reflector at the position of the object to be measured. Further, since the environmental conditions of use of the device are relatively poor as described above, use in such an environment may adversely affect the accuracy of calibration, and it may be difficult to maintain reproducibility of calibration. There were many.

The present invention solves the above-mentioned problems in the optical sensor device, and suppresses the temperature rise in the device and the temperature fluctuation in the optical system to enable stable measurement for a long time, Another object of the present invention is to provide an optical sensor device capable of easily and reproducibly calibrating the device.

[0006]

According to a first aspect of the present invention, there is provided an optical sensor device including a heat generating source such as a power source section or a light source, and an optical system having an optical sensor means in the box body, into which external light is incident. In, a first chamber for accommodating the heat generation source and having a first temperature control means, and a second chamber for accommodating the optical system and having a second temperature control means and having a substantially sealed heat insulating structure It is equipped with.

According to a second aspect of the present invention, a calibration means for calibrating the optical system, the power source section and the light source are housed in the first aspect.
And a second chamber that houses the optical system and that includes the second temperature control unit and that is substantially sealed and has a heat insulating structure. The calibration means is configured to automatically move to a calibration position where the light from the light source can enter the optical system during calibration.

In the optical sensor device according to a third aspect of the present invention, the first temperature control means is provided with an air circulating means such as a fan for convection the air in the first room, so that the air in the first room is convected. Is configured to.

According to another aspect of the optical sensor device of the present invention, the second chamber is provided with a vibration damping means made of a vibration damping material such as rubber or a spring, so that the vibration applied to the optical system from the outside can be removed. Therefore, the measurement accuracy can be improved.

According to another aspect of the optical sensor device of the present invention, reflecting means is arranged between the light source and the object to be measured, and the light from the light source is transmitted through the reflecting means to the object to be measured from at least two directions. It can be configured to be incident, and the measurement accuracy can be improved.

In the optical sensor device according to a sixth aspect, means for chopping the light from the light source at a predetermined frequency is arranged between the light source and the reflecting means to improve the measurement accuracy in the optical system. You can

The concrete constitutions and operational effects of the respective optical sensor devices of claims 7 to 11 will be clarified in the following embodiments.

[0013]

The temperature of the first chamber containing the heat generation source is adjusted by the first temperature control means, and the temperature of the second chamber containing the optical system is adjusted by the second temperature control means. And
By the cooperation of the first temperature control means with the second temperature control means, and by the configuration of the second chamber which is substantially sealed and has a heat insulating structure, the second chamber is kept in a constant temperature state for a long time. Can be done. Further, the calibration can be performed inside the apparatus by the calibration means provided in the first chamber that is substantially shielded from the outside air. The calibrating means can be configured to automatically move to the calibrating position during calibrating and automatically retract from the calibrating position during measurement by the optical system. Therefore, an optical sensor device having an automated self-calibration function can be realized.

[0014]

Embodiments 1 to 4 according to the present invention will be described below with reference to the drawings. Example 1 FIG. 1 shows a side view of the inside of the optical sensor device of the first example, and FIG. 2 shows a view from the top. As shown in FIGS. 1 and 2, a power supply unit (not shown) including a transformer and a resistor is provided in the box body 2 of the optical sensor device.
A first chamber 11 including the above components and a second chamber 12 including the spectroscopic optical system 30 are formed. Further, light sources 21a and 21b for irradiating the DUT 1 with light, a calibration device 25, and the like are provided in the upper portion 13 of the first chamber. The second chamber 12 is substantially sealed and the first chamber 11
Has a structure that is almost shielded from the outside air. The first chamber 11 and the second chamber 12 are configured so that light from the outside enters only through the openings 40 and 41.

The first chamber 11 is provided with a first temperature control device 15, and the second chamber 12 is provided with a second temperature control device 16. As shown in FIG. 2, two fans 20a and 20b are provided in the first chamber 11. The first temperature control device 15 is turned on / off so that it operates when the first chamber 11 reaches a certain temperature and stops when the first chamber 11 has a certain temperature or less.
This is a configuration based on the OFF control method. Second temperature control device 1
Reference numeral 6 denotes a PID (Proportional Integral Derivative) control method, which accurately controls the temperature in the second chamber 12. This second
The temperature control device 16 is configured to control the temperature of the outside air and perform heating and cooling. In addition, the first temperature control device 15 may be configured to perform a rougher temperature adjustment than the second temperature control device 16.

The second chamber 12 is located in the upper part of the box body 2, and the light sources 21a and 21b, the calibration device 25 and the like are arranged on the front surface thereof. In the first chamber 11, the lower part and the upper part are
As shown in FIG. 2, the openings 3 provided on both sides of the box body 2
And 4 communicate with each other. Therefore, the fan 20
Air is moved upward in the first chamber 11 in the direction of the arrow m in FIG. 1 by a and 20b, and this air flows in the direction of the arrow n in the vicinity of the ceiling of the first chamber 11, and It descends in the direction of the arrow m ′ toward the openings 3 and 4 through both sides. In this way, the temperature-controlled air in the first chamber 11 is forcibly convected and circulates through the upper part of the first chamber 11 and back to the lower part thereof. The temperature control of the entire chamber 11 can be performed by the first temperature control device 15.

The second chamber 12 has a relatively thick outer wall 1
2a separates the first and third chambers 11 and 13 from each other to form a closed structure. In the outer wall 12a, the second
A heat insulating material 17 is filled almost entirely around the chamber 12 to form a heat insulating structure. An inner box 12b for housing the spectroscopic optical system 30 is further provided in the second chamber 12. Although an opening 40 is provided in the outer wall 12a for allowing light to enter the spectroscopic optical system 30, the opening 40 is covered and sealed by a transparent plate 39.

As shown in FIG. 1, the spectroscopic optical system 30 includes an objective lens 31, an entrance slit 31a, and a first mirror 3.
2, a first concave mirror 33, a second mirror 34, a diffraction grating plate 35, a second concave mirror 36, a cylindrical lens 37 and a light receiving element 38. Objective lens 31
Is directed to the DUT 1. An optical axis a is a line connecting the center of the objective lens 31 and the measurement point of the DUT 1. A signal processing device (not shown) is connected to the light receiving element 38 and is configured to perform predetermined signal processing based on a signal from the light receiving element.

The light that has entered the objective lens 31 through the optical axis a passes through the entrance slit 31a and the first mirror 32.
At an acute angle toward the first concave mirror 33, the parallel light is converted by the first concave mirror 33, enters the second mirror 34, and is reflected by the mirror 34 toward the diffraction grating plate 35 at a substantially right angle. .. The light diffracted and dispersed by the diffraction grating plate 35 enters the second concave mirror 36, and then enters from the concave mirror 36 through the cylindrical lens 37 to the light receiving element 38 as an optical sensor unit. The light receiving element 38 is configured as a linear sensor, and measures the spectral brightness over a predetermined wavelength range. The light receiving element 38 is, for example, 400 to 10
The spectral brightness in the wavelength range of 00 nm can be measured. The signal based on this spectral luminance is subjected to predetermined signal processing by a signal processing device (not shown).

The spectroscopic optical system 30 described above includes a second mirror 34.
The optical elements (31, 32, 33) and the other optical elements (37, 36, 35) are arranged in a substantially symmetrical relationship with respect to each other so that the incident light does not cross until reaching the light receiving element 38. Is configured. This makes it possible to provide a compact spectroscopic optical system with little stray light. In addition,
The cylindrical lens 37 is used to efficiently collect light on the light receiving element 38, which is a linear sensor, in the direction perpendicular to the optical axis (the direction perpendicular to the longitudinal direction of the linear sensor).

FIG. 3 shows a device under test 1, light sources 21a and 21b,
It is a perspective view which shows roughly the optical arrangement of the calibration apparatus 25, the objective lens 31, etc. As shown in FIG. 3, in the light sources 21a and 21b in the third chamber 13, these lights are transmitted from two directions through the diaphragm plates 22a and 22b, the convex lenses 23a and 23b, and the mirrors 24a and 24b, respectively. 1
It is configured to be irradiated. Then, the reflected light from the DUT 1 is transmitted along the optical axis a along the above-mentioned spectroscopic optical system 30.
Is incident on the objective lens 31. The light sources 21a, 21
b is a white light source such as a halogen lamp.

As shown in FIG. 3, the calibration device 25 provided in the upper portion 13 of the first chamber 11 further includes a pair of mirrors 27a and 27b and a light transmission diffusion plate 28 on the base plate 26. There is. A light shielding plate 29 may be provided on the base plate 26 so as to surround the mirrors 27a and 27b as shown by the dashed line in the figure.

The above-described calibration device 25 uses a calibration device raising / lowering mechanism (not shown) to calibrate the optical sensor device as shown in FIG.
Is configured to rise in the arrow V direction. The calibration device 25 rises by a predetermined height and stops at the calibration position shown by the broken line in FIG. At the calibration position indicated by the broken line, the lights emitted from the light sources 21a and 21b and reflected by the mirrors 24a and 24b toward the device under test 1 are blocked by the mirrors 27a and 27b of the calibration device 25, respectively, and are reflected by the mirrors 27a and 27b.
It is configured to reflect from 27b toward almost the center of the light transmitting / diffusing plate 28. The optical axis a passes through substantially the center of the light transmitting / diffusing plate 28. As the light transmitting / diffusing plate 28, for example, a ground glass frost type can be used.

As shown in FIG. 1, a vibration damping member 18 is provided below the inner box 12b in the second chamber 12 so that vibration from the outside (the first chamber 11 or the like) causes the second vibration. Transmission to the spectroscopic optical system 30 in the chamber 12 can be suppressed. As a result, it is possible to effectively prevent each optical element of the spectroscopic optical system 30 from vibrating and causing an unexpected measurement error. Although the base member 19 is provided in the lower portion of the box body 2, the base member 19 may be made of a damping material in order to suppress vibration from the outside of the device.

On the front surface of the upper part 13 of the first chamber 11,
An opening 41 is provided so that the light on the optical axis a passes therethrough, and the opening 41 is covered with a translucent plate 42, so that the first chamber 11 is almost shielded from the outside air.

Next, the operation of the above optical sensor device will be described. Switch means (not shown) of the optical sensor device is used to measure the power supply and the light sources 21 a, 21.
When b is turned on, the fans 20a and 20b also operate.
Since the power supply unit and the light sources 21a and 21b are heat sources, the temperature inside the first chamber 11 rises. Then, when the temperature in the first chamber 11 reaches a certain temperature, the first temperature control device 15 operates and is operated until the temperature becomes less than the certain temperature.
At the same time, the temperature inside the entire first chamber 1 is controlled by the fans 20a and 20b to be adjusted to be constant.

Further, the second temperature control device 16 is also operated, and the temperature in the second chamber 12 is accurately controlled by the PID control method within a range of about ± 1 ° C., preferably about ± 0.5 ° C. It Then, since the second chamber 12 is almost sealed and has a heat insulating structure by the heat insulating material 17, the temperature inside the second chamber 12 is independent of the temperature rise in the first chamber 11 and the fluctuation of the outside air temperature. The temperature is kept constant and kept almost constant. And the first
Since the temperature control device 15 limits the temperature rise of the first chamber 11 to the constant temperature as described above, the load on the second temperature control device 16 is lightened.

Further, since the first and second chambers 11 and 12 are almost shielded from the outside world, the present optical sensor device has a dustproof structure. Temperature control device 1
The temperature in the apparatus is kept constant by 5 and 16 as described above.

As described above, the spectroscopic optical system 30 in the second chamber 12 can almost eliminate the influence of the external environment (temperature change, dust, vibration, etc.), and accurate spectroscopic measurement can be performed.

Further, the optical sensor device is often used for a long time by being used, for example, so that the object to be measured 1 in FIG. 1 is moved on a conveyor and a predetermined measurement is continuously performed. .. In such a case, the temperature change of the device becomes a particular problem, but the optical sensor device of the present embodiment enables stable measurement irrespective of such temperature change.

Next, the operation of the calibration device 25 will be described. For calibration at the time of starting the optical sensor device, the calibration device 25 standing by at the lower position as shown in FIG. 3 is raised by a calibration device raising / lowering mechanism (not shown) operated by a switch means (not shown). , And automatically stops at the calibration position shown by the broken line in FIG. Thereby, the light source 2
The light emitted from 1a and 21b to the DUT 1 is incident on the mirrors 27a and 27b of the calibration device 25, and the reflected light is emitted to the light transmission diffusion plate 28. The light from the light transmitting / diffusing plate 28 due to this irradiation passes on the optical axis a and enters the objective lens 31 of the spectroscopic optical system 30.

In the standard state of the spectroscopic optical system 30, the signal level of the light receiving element 38 when the light from the light transmitting / diffusing plate 28 is incident as the reference light, and the standard in which the reflectance in the vicinity of the DUT 1 is known. The signal level measured when the reflector is placed is stored in the signal processing device in advance. When actually measuring the reflected light from the object, the ratio of the output signal of the measured reflected light to the output signal of the reference light at the time of each calibration is compared with each of the above signal levels to measure the reflection of the measured object. Calculate the rate. Even if the output signal changes due to temperature fluctuations, etc., by taking the ratio of both output signals,
It is possible to cancel changes in the system due to temperature fluctuations and the like, and it is possible to obtain the correct reflectance of the measured object.

When the necessary calibration is completed, the calibration device 25 is lowered from the calibration position to the original position by a calibration device raising / lowering mechanism (not shown), and the optical sensor device returns to a state in which spectroscopic measurement can be performed.

When the calibrating device 25 is provided with a light shielding plate 29 as shown by the one-dot chain line in FIG. 3, when the calibrating device 25 is in the raised position as shown in FIGS. 1 and 2, calibration is performed. At the opening 4 in the upper part 13 of the first chamber
Since the light-shielding plate 29 substantially covers the light source 1, the light from the outside can be substantially blocked. Further, since the first chamber 11 is almost shielded from the outside air, the above-mentioned calibration can be performed without being affected by the outside environment such as dust and external light. Can be done. From the above,
The calibration of the optical sensor device according to the present embodiment has improved accuracy and reproducibility as compared with the conventional one, and can be easily and automatically performed.

The above-described calibration device 25 is an example, and is capable of dividing the light from the light sources 21a and 21b into the object lens 31 of the spectroscopic optical system 30 before reaching the object to be measured 1. If

Embodiment 2 This embodiment 2 is shown in FIG. The second embodiment shows another example of the calibration device that can be used in the optical sensor device of the first embodiment. The same parts as those in FIG. 3 are designated by the same reference numerals and the description thereof will be omitted.

The calibration device 75 shown in FIG. 4 includes a pulse motor 50, a gear 51 connected to the rotary shaft 50a of the pulse motor 50, gears 52 and 5 meshing with the gear 51, respectively.
3, a mirror rotating shaft 60 connected to the gear 52, a gear 53
And a mirror 27a, 27b attached to the mirror rotation shaft 60, and a light transmission diffusion plate 28 attached to the diffusion plate rotation shaft 61. The mirrors 27a and 27b are calibrated so that they rotate about 90 ° together with the mirror rotation shaft 60, and the light transmission diffusion plate 28 rotates about 90 ° together with the diffusion plate rotation shaft 61.

Next, the operation of the calibration device 75 will be described. The mirrors 27a and 27b and the light transmission diffusion plate 28
Is in a state of falling to the position shown by the solid line in FIG. 4 when the object to be measured 1 is measured by the optical sensor device.
The light from b is irradiated onto the object to be measured 1 and the reflected light from the light enters the objective lens 31 through the optical axis a, and a predetermined measurement is performed.

When the calibration device 75 calibrates the optical sensor device, the gear motor 5 is rotated by the rotation of the pulse motor 50.
1 rotates a predetermined amount in the direction of arrow r in FIG. When the gears 52 and 53 rotate together with the rotation of the gear 51, the rotating shafts 60 and 61 rotate by a predetermined amount, respectively, and the mirrors 27a and 27b and the light transmitting / diffusing plate 28 rotate to the positions shown by the broken lines in FIG. Moving. In this state, the light from the light sources 21a and 21b is reflected by the mirrors 27a and 27b.
The light sensor device can be calibrated in the same manner as in the above-described first embodiment by reflecting the light at b and entering the light transmission diffusion plate 28. To return the optical sensor device from the calibration state to the measurement state, the pulse motor 50 may be rotated in the direction opposite to the r direction or may be rotated in the r direction as it is.

According to the calibration device 75 of the second embodiment, the calibration device of the optical sensor device can be easily and compactly calibrated together with its moving mechanism.

Third Embodiment FIG. 5 shows the third embodiment. The calibration device of the third embodiment has the same configuration as the calibration device of the second embodiment, but the configuration of the entire calibration device and the configuration of the light source and the like are different from those of the second embodiment. It can be used in a device. Therefore, in the third embodiment, as shown in FIG.
The same parts as those in FIG. 4 are designated by the same reference numerals and the description thereof will be omitted.

The light sources 21a and 21b shown in FIG. 5 are arranged closer to each other, and their optical axes a'and b'are inclined so as to open in the light traveling direction by a predetermined angle.
Corresponding to this, diaphragm plates 22a and 22b, convex lens 23
a, 23b and mirrors 24a, 24b are respectively arranged, and the distance (n) between the centers of the light sources 21a, 21b is the mirror 2
It is narrower than the distance (m) between the centers of 4a and 24b. A chopping rotary plate 80 is arranged between the diaphragm plates 22a and 22b and the convex lenses 23a and 23b. The chopping rotary plate 80 is provided with a plurality of windows 80a, 80b, 80c, 80d symmetrically formed at the centers thereof, and is rotated at a constant rotational speed by a drive motor (not shown). Optical axes a'-b 'in each of the plurality of windows 80a-80d
The distance (n ′) is shorter than m and longer than n.

The chopping rotary plate 80 is used for the light source 21.
Both light from a, 21b is transmitted through windows 80a, 80b, 80
It is possible to irradiate the DUT 1 with light having the frequency component by intermittently chopping and chopping at a constant cycle while synchronizing with c and 80d. In the optical sensor device, the reflected light having this frequency component is incident on the light receiving element 38 through the spectroscopic optical system 30 of FIG. 1. By performing the processing of the signal from this light receiving element 38 in synchronization with the above frequency, S It is possible to improve the / N ratio and eliminate the influence of ambient light. This effect can be obtained, for example, by Japanese Patent Application No.
It is particularly effective when measuring a moving object to be measured online and in almost real time, as proposed in US Pat. No. 4,249,148.

The chopping rotary plate 80, as shown in FIG. 5, includes both the diaphragm plates 22a and 22b and the lens 23.
The light sources 21a, 21 are arranged between the light sources 21a, 23b.
Both lights from b are chopped as above. Therefore, when the light sources 21a and 21b are located apart from each other (the center-to-center distance n becomes long), the diameter of the chopping rotary plate 80 must be increased. If the diameter of the rotating plate 80 increases, the mass increases, and the load of the drive motor (not shown) increases, so that the rotating shaft (not shown) of the rotating plate is easily worn, and the rotating plate vibrates. It becomes easy to do so, and it has an unfavorable influence on the measurement. Therefore, it is preferable that the diameter of the chopping rotary plate 80 is small. Therefore, in this embodiment, the light sources 21a and 21b are arranged close to each other (the center-to-center distance n is short). Although it is conceivable to separately arrange a chopping rotary plate for each light source, this makes it difficult to synchronize both lights.

By the way, when irradiating the measured object 1 with light from a plurality of directions, it is possible to reduce the influence on the measurement of the unevenness of the measured object 1 and to eliminate the influence of total reflection on the optical axis a. There are advantages. Therefore, in the embodiment of the present application, irradiation is performed from two directions. However, this effect is reduced when light is applied to the DUT 1 at a too small angle (β described later), so β is about 5 ° to 30 °. , Preferably 10 ° to 20 °
Is good. This angle becomes smaller as the center distance (m) between the mirrors 24a and 24b becomes shorter. Therefore, in the present embodiment, the optical axes a'and b'of the light source are tilted so as to spread in the light traveling direction, and the center distance (m) is increased. ) Is lengthened to some extent, and the positions of the mirrors 24a and 24b are determined as follows.

In FIG. 6, the optical axis of the light source 21a is the vertical line c.
In contrast, the relationship is shown in which the light that has traveled through the optical axis a ′ by a predetermined angle (α) and is reflected by the mirror 24a is incident on the DUT 1 at a predetermined angle (β) with respect to the optical axis a. Further, FIG. 7 shows the inclination angle (ξ) of the mirror 24a with respect to the wall surface 99.
And the rotation angle (η) of the mirror 24a. The relationships shown in FIGS. 6 and 7 are the same for the light source 21b.

The three-dimensional fixed position of the mirror 24a is determined by the tilt angle (ξ) and the rotation angle (η) at the position where the light from the light source 21a is incident, and these angles are normal to the wall surface 99. Let the line unit vector be (n _x ,
_ny , _nz ) is obtained from the following equations (1) and (2). _{^{ξ = cos -1 n z (1}} ) η = tan -1 (n x / n y) (2) _{where, = n x (1 / k} ) (sinα + sinβ), n y = - (1 / k) ( cos α), _nz = (1 / k) (cos β), k = (2 (sin ² ((α + β) / 2) + cos ² ((α-β) / 2)) ^1/2 .

Here, for example, α = 12 °, β = 14.
If 8 °, ξ = 48.23 °, η = −25.35 °
Becomes Therefore, it is sufficient to dispose the light sources 21a and 21b close to each other, shorten the distance n'between the windows of the chopping rotary plate 80 and increase the center point distance (m) between the mirrors 24a and 24b. It can be seen that the object 1 can be irradiated with light at a preferable angle. Therefore, the diameter of the chopping rotary plate 80 can be made sufficiently small, and stable measurement can be continued without causing problems such as wear and vibration of the rotary shaft of the rotary plate. Also, since the light sources can be arranged close to each other, the structure can be made compact and only one means (fan, etc.) for cooling the light source can be installed.

In the third embodiment, the calibration device is the same as that of FIG. 4, but the entire calibration device 75 is arranged such that the light transmission / scattering plate 28 is located between the mirrors 24a and 24b. There is. As a result, the optical sensor device can be calibrated similarly to the second embodiment, and the configuration of the calibration device, the light source, etc. can be made more compact.

Fourth Embodiment FIG. 8 shows a fourth embodiment. The calibration device of the fourth embodiment has the same configuration as the calibration device of the second embodiment, but the configuration of the light source and the like is different from that of the second embodiment, and these can be similarly used in the optical sensor device of the first embodiment. It is a thing. Therefore, in the fourth embodiment, the same parts as those in FIGS. 3 and 4 are designated by the same reference numerals, and the description thereof will be omitted.

The light source of the fourth embodiment is composed of one light source, and is configured to obtain two lights by using a light splitting means such as a beam splitter. As shown in FIG.
3a, a chopping rotating plate 90 having a plurality of windows 90a, 90b, 90c, 90d, a convex lens 23a, a half mirror 91, and a mirror 92.

The light from the light source 21a goes straight on the half mirror 91 and is incident on the mirror 23a, while the light bent by the half mirror 91 is reflected on the mirror 92, and the reflected light is incident on the mirror 24b. In this way, two lights can be obtained as irradiation light from a single light source. Further, according to the fourth embodiment, the diameter of the chopping rotary plate 90 can be further reduced, and wear and vibration of the rotary shaft of the rotary plate can be prevented.

[0053]

According to the structure of the first aspect of the present invention, since the second chamber is substantially sealed and kept in a constant temperature state for a long time, the influence from the outside world, the outside air temperature and the heat generation inside the device are generated. The effects of temperature changes from and to the source can be eliminated.
Therefore, the influence of the temperature change can be eliminated in the output from the optical sensor means of the optical system housed in the second chamber, and stable and accurate measurement can be performed for a long time.

According to the configuration of the invention of claim 2, the second chamber can eliminate the influence from the outside and the influence of the temperature change as in the case of the first aspect, and the stable and accurate measurement can be performed for a long time. Is possible. Then, it is possible to calibrate the inside of the apparatus by the calibrating means provided in the first chamber that can almost eliminate the influence of the outside world, and this calibration can be configured to be carried out automatically. Therefore, it becomes possible to calibrate the device easily and with good reproducibility.

According to the fifth and sixth aspects of the present invention, the reflecting means is arranged between the light source and the object to be measured, and the light from the light source passes through the reflecting means to the object to be measured by at least two. The measurement accuracy can be improved by arranging the light source from the direction and arranging means for chopping the light from the light source at a predetermined frequency between the light source and the reflecting means.

[Brief description of drawings]

FIG. 1 is a side view of an optical sensor device according to a first embodiment of the present invention.

FIG. 2 is a top view of the optical sensor device shown in FIG.

FIG. 3 is a perspective view showing an optical arrangement of an object to be measured, a calibration device, a light source, an objective lens of a spectroscopic optical system, and the like in the optical sensor device shown in FIG.

FIG. 4 is a perspective view showing a calibration device according to a second embodiment of the present invention together with a light source and the like.

FIG. 5 is a perspective view showing an arrangement of a calibration device, a light source, a chopping rotating plate, and the like according to a third embodiment of the present invention.

6 is a perspective view showing an optical arrangement of a light source, a mirror, an object to be measured and the like shown in FIG.

FIG. 7 is a perspective view showing the arrangement of the mirrors shown in FIG.

FIG. 8 is a perspective view showing the arrangement of a light source, a chopping rotating plate, a half mirror, etc. according to a fourth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Measured object 11 1st chamber 12 2nd chamber 15 1st temperature control apparatus 16 2nd temperature control apparatus 17 Heat insulating material 18 Damping member 20a, 20b Fan (air circulation means) 21a, 21b Light source 24a, 24b Mirror (reflecting means) 25, 75 Calibration device 30 Spectroscopic optical system 80, 90 Rotating plate for chopping (chopping means) 80a-80d, 90a-90d Window section 91 Half mirror (light splitting means) m Center point of each reflecting means Distance n Distance between centers of each light source n Distance between windows

Claims (10)

[Claims] 1. A photosensor device including a heat generation source and an optical system, which has an optical sensor unit and which receives external light, in a box body, the heat generation source is housed, and a first temperature control unit is provided. First
And a second chamber for accommodating the optical system, having a second temperature control means, and having a substantially hermetically insulating structure. 2. A light sensor including a power source section, a light source for irradiating light to the object to be measured, and an optical system having a light sensor means while the reflected light from the object to be measured is incident in a box body. In the apparatus, a calibrating unit for calibrating the optical system, the power supply unit and the light source are provided, a first temperature control unit is provided, and a first chamber substantially shielded from the outside air, and the optical system are provided. And a second chamber having a second temperature control means and being substantially sealed and having a heat insulating structure, wherein the calibration means automatically moves to a calibration position where light from the light source can enter the optical system during calibration. An optical sensor device configured to move to. 3. The optical sensor device according to claim 2, wherein the first temperature control means includes an air circulation means for convection of air in the first chamber. 4. The optical sensor device according to claim 1, 2 or 3, wherein vibration damping means is provided in the second chamber. 5. A reflecting means is arranged between the light source and the object to be measured, and the light from the light source is configured to enter the object to be measured from the at least two directions via the reflecting means. The optical sensor device according to claim 2, 3 or 4. 6. The optical sensor device according to claim 5, wherein means for chopping the light from the light source at a predetermined frequency is arranged between the light source and the reflecting means. 7. The optical sensor device according to claim 5, wherein the light source is composed of two light sources arranged close to each other, and two reflecting means are arranged. 8. A configuration in which a distance (m) between center points at which each light from each light source is reflected by each reflection means is longer than a distance (n) between centers of each light source. The optical sensor device described. 9. The optical sensor device according to claim 5, wherein the light source is single, and a light splitting means for splitting light from the light source is provided and two reflecting means are arranged. 10. The chopping means comprises a rotating plate having a plurality of windows through which light from the light source passes,
9. The optical sensor device according to claim 8, wherein the distance (n ′) between the windows is shorter than the distance (m) between the center points of the reflecting means.