JPH05138070A - Electrically fine particle charging device - Google Patents
Electrically fine particle charging deviceInfo
- Publication number
- JPH05138070A JPH05138070A JP32241791A JP32241791A JPH05138070A JP H05138070 A JPH05138070 A JP H05138070A JP 32241791 A JP32241791 A JP 32241791A JP 32241791 A JP32241791 A JP 32241791A JP H05138070 A JPH05138070 A JP H05138070A
- Authority
- JP
- Japan
- Prior art keywords
- space
- fine particles
- electrode
- photoelectron
- photoelectron emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010419 fine particle Substances 0.000 title claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 92
- 230000005684 electric field Effects 0.000 claims abstract description 23
- 239000002245 particle Substances 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 239000007772 electrode material Substances 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000013618 particulate matter Substances 0.000 description 4
- 230000001954 sterilising effect Effects 0.000 description 4
- 210000002268 wool Anatomy 0.000 description 4
- 229910017518 Cu Zn Inorganic materials 0.000 description 3
- 229910017752 Cu-Zn Inorganic materials 0.000 description 3
- 229910017943 Cu—Zn Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000497 Amalgam Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- MXCPYJZDGPQDRA-UHFFFAOYSA-N dialuminum;2-acetyloxybenzoic acid;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3].CC(=O)OC1=CC=CC=C1C(O)=O MXCPYJZDGPQDRA-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、空間中の微粒子の荷電
装置に係り、電場における光電効果により発生する光電
子による空間中の微粒子を荷電する装置に関する。そし
て、微粒子を荷電して利用する分野としては、（ａ）荷
電微粒子を捕集・除去して、清浄化気体あるいは清浄化
空間を得る分野、清浄化液体を得る分野、（ｂ）荷電微
粒子により、空気あるいは排ガス等の気体中あるいは空
間中あるいは液体中の微粒子の濃度や粒径の測定を行う
分野、（ｃ）微粒子の表面改質、荷電量の制御、微粒子
の分離、分級を行う分野等がある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for charging particles in a space, and more particularly to a device for charging particles in a space by photoelectrons generated by a photoelectric effect in an electric field. In the field of charging and utilizing the fine particles, (a) a field of collecting and removing the charged fine particles to obtain a cleaning gas or a cleaning space, a field of obtaining a cleaning liquid, and (b) charging particles , The field of measuring the concentration and particle size of fine particles in gas or space such as air or exhaust gas, or liquid, (c) the surface modification of fine particles, control of charge amount, separation of fine particles, classification, etc. There is.
【０００２】[0002]
【従来の技術】光電子放出材に、紫外線を照射すること
により発生する光電子による微粒子の荷電及びその利用
については、本発明者の多数の提案がある。本発明者が
気体清浄化関係において提案したものの内、本発明と特
に関連性を有するものは次の通りである。 （１）特開昭６１−１７８０５０号（ＵＳ Patent ４，
７５０，９１７号） （２）特開昭６３−１００９５５号 （３）特開平１−２６２９５４号 （４）特願平２−２９５４２２号 又、測定関係において提案したものには （１）特開昭６２−２４２８３８号 （２）特開平２−４７５３６号各公報 （３）特願平１−１３４７８１号がある。2. Description of the Related Art A number of proposals have been made by the present inventor regarding charging and utilization of fine particles by photoelectrons generated by irradiating a photoelectron emitting material with ultraviolet rays. Among the things that the present inventor has proposed in the gas cleaning relationship, the following are particularly relevant to the present invention. (1) JP-A-61-178050 (US Patent 4,
No. 750,917) (2) JP-A-63-100955 (3) JP-A-1-262954 (4) Japanese Patent Application No. 2-295422 No. 62-242838 (2) Japanese Patent Application Laid-Open No. 2-47536 (3) Japanese Patent Application No. 1-134781.
【０００３】さら分離・分級関係において提案したもの
には、特願平１−１７７１９８号がある。その他、荷電
条件関係において提案したものには、（１）特願平１−
１２０５６３号、（２）特願平１−１２０５６４号、
（３）特願平３−１０５０９３号、（４）特願平３−１
３１６４０号がある。さらに、光電子放出材関係におい
て提案したものに、（１）特願平１−１５５８５７号、
（２）特願平２−１５３３３５号、（３）特願平２−２
７８１２３号、（４）特願平２−２９５４２３号があ
る。これらの方式は適用分野によっては有効であるが、
特定の分野の特定の用途においては改善の余地がある。
例えば、紫外線源として低波長紫外線を一部含む紫外線
ランプの使用においては、該紫外線が被処理空間中の空
気に照射された場合、空気中より微粒子（超微粒子）が
発生する場合がある。このような場合は、例えば微粒子
の荷電・捕集において、光電子による微粒子の荷電・捕
集の負荷が大きくなり問題であった。すなわち、荷電部
・捕集部の負担が大きくなり、改善の必要があった。Further proposed in the separation / classification relationship is Japanese Patent Application No. 1-177198. Other proposals related to charging conditions include (1) Japanese Patent Application No. 1-
No. 120563, (2) Japanese Patent Application No. 1-1205564,
(3) Japanese Patent Application No. 3-105093, (4) Japanese Patent Application No. 3-1
There is 31640 issue. In addition, the proposals related to photoelectron emitting materials include (1) Japanese Patent Application No. 1-155857.
(2) Japanese Patent Application No. 2-153335, (3) Japanese Patent Application 2-2
78123 and (4) Japanese Patent Application No. 2-295423. These methods are effective depending on the application field,
There is room for improvement in specific applications in specific areas.
For example, in the case of using an ultraviolet lamp containing a part of low-wavelength ultraviolet rays as an ultraviolet ray source, when the ultraviolet rays are applied to the air in the space to be treated, fine particles (ultrafine particles) may be generated from the air. In such a case, for example, in charging and collecting fine particles, the load of charging and collecting fine particles by photoelectrons becomes large, which is a problem. That is, the burden on the charging section / collecting section becomes large, and there is a need for improvement.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、上記のよう
な問題点を解決するため、被処理空間部での紫外線の照
射による微粒子が発生しない微粒子の荷電装置を提供す
ることを目的とする。SUMMARY OF THE INVENTION In order to solve the above problems, it is an object of the present invention to provide a fine particle charging device which does not generate fine particles due to the irradiation of ultraviolet rays in the space to be treated. ..
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明では、紫外線源、紫外線の照射により光電子
を発生する光電子放出材、電場設定用電極を有する空間
中の微粒子の荷電装置において、前記光電子放出材と電
極とからなる光電子放出部が存在する空間部とそれ以外
の空間部（以下、被処理空間部という）とを紫外線の透
過を遮えぎる遮光材で区分したものである。そして、前
記遮光材は、光電子放出材を兼ねることができ、また、
前記荷電装置において、空間部を形成する壁面は、紫外
線の反射率の小さい材料で構成するのがよい。また、本
発明の微粒子の荷電装置においては、遮光材の位置は光
電子放出部と被処理空間部の間で、その形状は、被処理
空間部に存在する微粒子が光電子放出部（電極と光電子
放出材の間）に迅速に移動できるものであれば何れでも
良い。In order to achieve the above object, in the present invention, an ultraviolet source, a photoelectron emitting material for generating photoelectrons by irradiation of ultraviolet rays, and a device for charging fine particles in a space having an electrode for setting an electric field are provided. A space portion in which a photoelectron emitting portion including the photoelectron emitting material and an electrode is present and a space portion other than the space (hereinafter referred to as a treated space portion) are divided by a light shielding material that blocks transmission of ultraviolet rays. .. The light shielding material can also serve as a photoelectron emitting material, and
In the charging device, the wall surface forming the space is preferably made of a material having a low ultraviolet ray reflectance. Further, in the particle charging device of the present invention, the position of the light shielding material is between the photoelectron emitting portion and the treated space portion, and the shape is such that the particles present in the treated space portion are the photoelectron emitting portion (electrode and photoelectron emitting portion). Any material may be used as long as it can be quickly moved between materials.
【０００６】次に、本発明の夫々の構成を詳細に説明す
る。光電子放出材は、紫外線照射により光電子を放出す
るものであれば何れでも良く、光電的な仕事関数が小さ
なもの程好ましい、効果や経済性の面から、Ｂａ，Ｓ
ｒ，Ｃａ，Ｙ，Ｇｄ，Ｌａ，Ｃｅ，Ｎｄ，Ｔｈ，Ｐｒ，
Ｂｅ，Ｚｒ，Ｆｅ，Ｎｉ，Ｚｎ，Ｃｕ，Ａｇ，Ｐｔ，Ｃ
ｄ，Ｐｂ，Ａｌ，Ｃ，Ｍｇ，Ａｕ，Ｉｎ，Ｂｉ，Ｎｂ，
Ｓｉ，Ｔｉ，Ｔａ，Ｕ，Ｂ，Ｅｕ，Ｓｎ，Ｐ，Ｗのいず
れか又はこれらの化合物又は合金又は混合物が好まし
く、これらは単独で又は二種以上を複合して用いられ
る。複合材としては、アマルガムの如く物理的な複合材
も用いうる。例えば、化合物としては酸化物、ほう化
物、炭化物があり、酸化物にはＢａＯ，ＳｒＯ，Ｃａ
Ｏ，Ｙ2 Ｏ5 ，Ｇｄ2 Ｏ3 ，Ｎｄ2 Ｏ3 ，ＴｈＯ2 ，Ｚ
ｒＯ2 ，Ｆｅ2 Ｏ3 ，ＺｎＯ，ＣｕＯ，Ａｇ2 Ｏ，Ｌａ
2 Ｏ3 ，ＰｔＯ，ＰｂＯ，Ａｌ2 Ｏ3 ，ＭｇＯ，Ｉｎ2
Ｏ3 ，ＢｉＯ，ＮｂＯ，ＢｅＯなどがあり、またほう化
物にはＹＢ6 ，ＧｄＢ6 ，ＬａＢ5 ，ＮｄＢ6 ，ＣｅＢ
6 ，ＢｕＢ6 ，ＰｒＢ6 ，ＺｒＢ2 などがあり、さらに
炭化物としてはＵＣ，ＺｒＣ，ＴａＣ，ＴｉＣ，Ｎｂ
Ｃ，ＷＣなどがある。Next, each structure of the present invention will be described in detail. The photoelectron emitting material may be any material as long as it emits photoelectrons upon irradiation with ultraviolet rays, and a material having a smaller photoelectric work function is more preferable.
r, Ca, Y, Gd, La, Ce, Nd, Th, Pr,
Be, Zr, Fe, Ni, Zn, Cu, Ag, Pt, C
d, Pb, Al, C, Mg, Au, In, Bi, Nb,
Any one of Si, Ti, Ta, U, B, Eu, Sn, P, W, or a compound or alloy or mixture thereof is preferable, and these are used alone or in combination of two or more kinds. As the composite material, a physical composite material such as amalgam can also be used. For example, compounds include oxides, borides, and carbides, and oxides include BaO, SrO, and Ca.
O, Y 2 O 5 , Gd 2 O 3 , Nd 2 O 3 , ThO 2 , Z
rO 2 , Fe 2 O 3 , ZnO, CuO, Ag 2 O, La
2 O 3 , PtO, PbO, Al 2 O 3 , MgO, In 2
O 3, BiO, NbO, YB 6 is to include BeO, also borides, GdB 6, LaB 5, NdB 6, CeB
6 , BuB 6 , PrB 6 , ZrB 2 and the like, and as carbides, UC, ZrC, TaC, TiC, Nb.
C, WC, etc.
【０００７】また、合金としては黄銅、青銅、リン青
銅、ＡｇとＭｇとの合金（Ｍｇが２〜２０wt％）、Ｃｕ
とＢｅとの合金（Ｂｅが１〜１０wt％）及びＢａとＡｌ
との合金を用いることができ、上記ＡｇとＭｇとの合
金、ＣｕとＢｅとの合金及びＢａとＡｌとの合金が好ま
しい。酸化物は金属表面のみを空気中で加熱したり、或
いは薬品で酸化することによっても得ることができる。
さらに他の方法としては使用前に加熱し、表面に酸化層
を形成して長期にわたって安定な酸化層を得ることもで
きる。この例としてはＭｇとＡｇとの合金を水蒸気中で
３００〜４００℃の温度の条件下でその表面に酸化膜を
形成させることができ、この酸化薄膜は長期間にわたっ
て安定なものである。As the alloy, brass, bronze, phosphor bronze, an alloy of Ag and Mg (Mg is 2 to 20 wt%), Cu
With Be and alloys (Be is 1 to 10 wt%) and Ba and Al
An alloy of Ag and Mg can be used, and an alloy of Ag and Mg, an alloy of Cu and Be, and an alloy of Ba and Al are preferable. The oxide can also be obtained by heating only the metal surface in air, or by oxidizing with a chemical.
As another method, it is also possible to heat before use to form an oxide layer on the surface to obtain a stable oxide layer for a long period of time. As an example of this, an alloy of Mg and Ag can be formed into an oxide film on its surface under the condition of a temperature of 300 to 400 ° C. in water vapor, and this oxide thin film is stable for a long period of time.
【０００８】また、本発明者が、すでに提案したように
光電子放出材を多重構造としたものも好適に使用できる
（特願平１−１５５８５７号）。また、適宜の母材上に
薄膜状に光電子を放出し得る物質を付加し、使用するこ
ともできる（特願平２−２７８１２３号）。この例とし
て、紫外線透過性物質（母材）としての石英ガラス上に
光電子を放出し得る物質として、Ａｕを薄膜状に付加し
たものがある（特願平２−２９５４２３号）。これらの
材料の使用形状は、棒状、綿状、格子状、板状、プリー
ツ状、曲面状、金網状等何れの形状でもよいが、紫外線
の照射面積及び処理空間との接触面積の大きな形状のも
のが良く、装置によっては被処理空間部（後述）に存在
する微粒子が光電子放出部に迅速に移動できるものが好
ましい。光電子放出材からの光電子放出のための照射源
は、照射による光電子を放出するものであればいずれで
も良い。本例で述べた紫外線の他に電磁波、レーザ、放
射線が適宜に適用分野、装置規模、形状、効果等で選択
し、使用できる。この内、効果、操作性の面で、紫外線
が通常好ましい。Further, as proposed by the present inventor, a photoelectron emitting material having a multiple structure can be preferably used (Japanese Patent Application No. 1-155857). Further, a substance capable of emitting photoelectrons in a thin film form may be added to an appropriate base material and used (Japanese Patent Application No. 2-278123). As an example of this, there is a thin film of Au added as a substance capable of emitting photoelectrons on a quartz glass as a UV transparent substance (base material) (Japanese Patent Application No. 2-295423). The shape of these materials to be used may be any shape such as a rod shape, a cotton shape, a lattice shape, a plate shape, a pleated shape, a curved surface shape, and a wire mesh shape, but a shape having a large irradiation area of ultraviolet rays and a large contact area with a processing space is used. It is preferable that the fine particles are present, and depending on the apparatus, fine particles existing in the space to be processed (described later) can be rapidly moved to the photoelectron emitting portion. The irradiation source for emitting photoelectrons from the photoelectron emitting material may be any one as long as it emits photoelectrons by irradiation. In addition to the ultraviolet rays described in this example, electromagnetic waves, lasers, and radiations can be appropriately selected and used according to application fields, device scales, shapes, effects, and the like. Of these, ultraviolet rays are usually preferred in terms of effects and operability.
【０００９】紫外線の種類は、その照射により光電子放
出材が光電子を放出しうるものであれば何れでも良く、
適用分野によっては、殺菌（滅菌）作用を併せてもつも
のが好ましい。紫外線の種類は、適用分野、作業内容、
用途、経済性などにより適宜決めることができる。例え
ば、バイオロジカル分野においては、殺菌作用、効率の
面から遠紫外線を併用するのが好ましい。該紫外線源と
しては、紫外線を発するものであれば何れも使用でき、
適用分野、装置の形状、構造、効果、経済性等により適
宜選択し用いることができる。例えば、水銀灯、水素放
電管、キセノン放電管、ライマン放電管などを適宜使用
できる。バイオロジカル分野では、殺菌（滅菌）波長２
５４nmを有する紫外線を用いると、殺菌（滅菌）効果が
併用でき好ましい。Any kind of ultraviolet light may be used as long as the photoelectron emitting material can emit photoelectrons by its irradiation.
Depending on the field of application, those having a sterilizing effect are also preferable. The type of UV light depends on the application field, work content,
It can be appropriately determined depending on the use, economy and the like. For example, in the biological field, it is preferable to use deep ultraviolet rays together from the viewpoint of bactericidal action and efficiency. As the ultraviolet source, any source can be used as long as it emits ultraviolet rays.
It can be appropriately selected and used depending on the application field, the shape of the device, the structure, the effect, the economical efficiency and the like. For example, a mercury lamp, a hydrogen discharge tube, a xenon discharge tube, a Lyman discharge tube, or the like can be used as appropriate. In the biological field, sterilization wavelength 2
It is preferable to use an ultraviolet ray having a wavelength of 54 nm because the sterilizing effect can be used together.
【００１０】次に、光電子放出材及び電場用電極の位置
や形状について述べる。光電子放出材及び／又は電極
は、微粒子の存在する空間の適宜の位置の空間の１部分
に、電場と光電子放出材の間に電場が形成できるように
設置され、光電子放出材（−）と電極（＋）間に電場
（電界）を形成する。該電場により光電子放出材から光
電子が効率よく放出される（光電子放出部）。電極又は
光電子放出材の位置や形状は、微粒子の存在する空間に
より適宜に選択でき、電場のための印加電圧が低くでき
て光電子放出材からの光電子が空間中で微粒子に荷電を
与えることができれば何れでもよく、利用分野、装置規
模、形状、効果、経済性等を考慮して、適宜予備試験等
により決めることができる。電極材の材質は、導体であ
れば何れも使用でき、周知の荷電装置における各種電極
材が好適に使用できる。また、電極と光電子放出材の設
置位置と形状は、本発明者がすでに提案した（特願平３
−１３１６４０号）ように構成するのが好ましい。Next, the positions and shapes of the photoelectron emitting material and the electric field electrode will be described. The photoelectron emission material and / or the electrode is installed in a part of a space at an appropriate position in the space where the particles are present so that an electric field can be formed between the electric field and the photoelectron emission material, and the photoelectron emission material (-) and the electrode An electric field (electric field) is formed between (+). Due to the electric field, photoelectrons are efficiently emitted from the photoelectron emitting material (photoelectron emitting portion). The position or shape of the electrode or the photoelectron emitting material can be appropriately selected depending on the space in which the particles are present, and if the applied voltage for the electric field can be lowered and the photoelectrons from the photoelectron emitting material can charge the particles in the space. Any of them may be used, and can be appropriately determined by a preliminary test or the like in consideration of the field of use, device scale, shape, effect, economy, and the like. Any material can be used for the electrode material as long as it is a conductor, and various electrode materials in known charging devices can be preferably used. Further, the present inventors have already proposed the installation position and shape of the electrode and the photoelectron emitting material (Japanese Patent Application No.
It is preferable to configure as follows.
【００１１】次に、本発明の特徴である遮光材について
述べる。遮光材は、紫外線源からの紫外線が被処理空間
部に直接照射されない様設置できるものであれば何れで
も良い。設置位置は光電子放出部（後述）と被処理空間
部の間である。形状は、被処理空間部に存在する微粒子
が光電子放出部に移動できるものであれば何れでも良
い。通常、板状、格子状、プリーツ状、網状、曲面状の
いずれか１種類又は２種以上を適宜に組合せて使用する
ことができる。図２に、遮光材形状の例（断面図）を示
す。また、遮光材に光電子放出材の機能を持たせること
ができる。また、遮光材を光電子放出材として利用でき
る。これらの利用は、本荷電装置の利用分野、装置形
状、規模、効果などにより適宜決めることができる。Next, the light shielding material which is a feature of the present invention will be described. Any light-shielding material may be used as long as it can be installed so that the ultraviolet light from the ultraviolet light source is not directly irradiated to the space to be processed. The installation position is between the photoelectron emission unit (described later) and the space to be processed. The shape may be any shape as long as the particles existing in the space to be processed can move to the photoelectron emitting portion. Usually, any one kind of plate-like, lattice-like, pleated, net-like, and curved surface-like ones or two or more kinds thereof can be appropriately combined and used. FIG. 2 shows an example (cross-sectional view) of the shape of the light shielding material. In addition, the light shielding material can have the function of a photoelectron emitting material. Further, the light shielding material can be used as a photoelectron emitting material. These usages can be appropriately determined according to the field of use, the shape of the device, the scale, the effect, etc. of the charging device.
【００１２】また、荷電装置内の壁表面を紫外線の反射
率の小さい材料にすると、荷電装置内からの微粒子発生
が抑制され好ましい。例えば、被処理空間部の壁面を黒
色の材料にすると、被処理空間部に（一部）紫外線が入
った場合壁面からの反射が少くなり微粒子発生が抑制さ
れる。壁表面の紫外線の反射率を小さくする方法は、周
知の紫外線の反射率を小さくする方法が適宜に利用でき
る。Further, it is preferable that the wall surface in the charging device is made of a material having a small reflectance of ultraviolet rays, because the generation of fine particles in the charging device is suppressed. For example, if the wall surface of the space to be processed is made of a black material, when (partly) ultraviolet rays enter the space to be processed, the reflection from the wall surface is reduced and the generation of fine particles is suppressed. As a method for reducing the reflectance of ultraviolet rays on the wall surface, a known method for reducing the reflectance of ultraviolet rays can be appropriately used.
【００１３】本発明に用いる電場電圧は、０．１Ｖ／cm
〜２kV／cmである。好適な電場の強さは、利用分野、条
件、装置形状、規模、効果、経済性等で適宜予備試験や
検討を行い決めることが出来る。微粒子を荷電して利用
する分野における荷電微粒子の捕集材（集じん材）は、
荷電微粒子が捕集できるものであればいずれでも使用で
きる。通常の荷電装置における集じん板、集じん電極等
各種電極材や静電フィルター方式が一般的であるが、ス
チールウールで電極、タングステンウール電極のような
捕集部自体が電極を構成するウール状構造のものも有効
である。エレクトレック材も好適に使用できる。気体の
流動が少ないかもしくは無視できる密閉空間の清浄化へ
の利用では電場用電極材が、荷電微粒子捕集材と兼用又
は一体化していると装置がコンパクト化でき好ましい。
例えば、上述荷電微粒子捕集材の内、集じん板や集じん
電極あるいはスチールウール電極、タングステンウール
電極のようなウール状電極材等の各種電極材は、電場用
電極と、荷電微粒子の捕集を兼ねてできるので好まし
い。The electric field voltage used in the present invention is 0.1 V / cm.
~ 2 kV / cm. The suitable strength of the electric field can be determined by conducting preliminary tests and examinations depending on the field of use, conditions, device shape, scale, effect, economical efficiency and the like. In the field of charging and using fine particles, the collecting material (dust collecting material) for charged fine particles is
Any material can be used as long as it can collect the charged fine particles. Various electrode materials such as a dust collecting plate and a dust collecting electrode in an ordinary charging device and an electrostatic filter method are generally used, but a wool-like electrode in which the electrode itself is made of steel wool or a tungsten wool electrode constitutes the electrode. Structured ones are also effective. Electrec material can also be preferably used. For use in cleaning a closed space in which gas flow is small or negligible, it is preferable that the electrode material for electric field also serves as or is integrated with the material for collecting charged fine particles because the device can be made compact.
For example, among the above-mentioned charged particulate matter collecting materials, various electrode materials such as a dust collecting plate, a dust collecting electrode, or a wool-like electrode material such as a steel wool electrode and a tungsten wool electrode are used as an electric field electrode and a collection of charged particulate matter. It is preferable because it can be combined with the above.
【００１４】[0014]
【実施例】以下、本発明を実施例により具体的に説明す
るが、本発明はこれに限定されるものではない。 実施例１ 半導体工場のウェハ保管庫における空気清浄を、図１に
示した本発明の基本構成図を用いて説明する。密閉空間
（気体が流動せず、静止状態とみなせる空間）であるウ
ェハ保管庫１の空気清浄は、ウェハ保管庫１の外側に設
置された紫外線ランプ２、紫外線の反射面５、光電子放
出材３、電場設置のための電極４及び荷電微粒子の捕集
材４（本構成では、電極が捕集材を兼用）にて実施され
る。EXAMPLES The present invention will now be specifically described with reference to examples, but the present invention is not limited thereto. Example 1 Air cleaning in a wafer storage of a semiconductor factory will be described with reference to the basic configuration diagram of the present invention shown in FIG. Air cleaning of the wafer storage 1 which is a closed space (a space where gas does not flow and can be regarded as a stationary state) is performed by an ultraviolet lamp 2, an ultraviolet reflecting surface 5, and a photoelectron emitting material 3 which are installed outside the wafer storage 1. The electrode 4 for setting an electric field and the collector 4 for charged fine particles (in this configuration, the electrode also serves as the collector) are used.
【００１５】すなわち、ウェハ保管庫１中の微粒子（微
粒子状物質）６は、紫外線ランプ２が照射された光電子
放出材３から放出される光電子７により荷電され、荷電
微粒子８となり、該荷電微粒子８は荷電微粒子の捕集材
４に捕集され、ウェハの存在する被処理空間部（清浄化
空間部、Ａ）は高清浄化される。ここで、遮光材９は被
処理空間部Ａと光電子放出部Ｂの間に設置されている。
遮光材９は、複数の板状の金属板を相互に組合せたもの
で、被処理空間部Ａに存在する微粒子６が、光電子放出
部Ｂに移動できるように上部、中央部、下部に被処理空
間部Ａと光電子放出部Ｂ間に同通個所を有している。That is, the fine particles (fine particle substances) 6 in the wafer storage 1 are charged by the photoelectrons 7 emitted from the photoelectron emitting material 3 irradiated by the ultraviolet lamp 2, and become charged fine particles 8. Are collected by the collection material 4 of charged fine particles, and the processed space (cleaning space, A) where the wafer exists is highly cleaned. Here, the light shielding material 9 is installed between the processed space portion A and the photoelectron emission portion B.
The light shielding material 9 is a combination of a plurality of plate-shaped metal plates, and the particles 6 existing in the space A to be processed are processed on the upper, central, and lower portions so that they can move to the photoelectron emission area B. The same portion is provided between the space portion A and the photoelectron emitting portion B.
【００１６】ここでの光電子放出材３は、ガラス材表面
にＡｕを薄膜状に付加したものであり、このような構成
の光電子放出材については、本発明者等の別の発明があ
る（特願平２−２９５４２３号）。このようにして、ウ
ェハ保管庫１中の微粒子（粒子状物質）６は捕集・除去
され、ウェハ保管庫は清浄空気となる。上記において、
光電子放出材への紫外線の照射は、曲面状の反射面５を
用い、紫外線ランプ２から紫外線を板状の光電子放出材
３に効率よく照射している。電極４は、光電子放出材３
からの光電子放出を電場で行うために設置している。す
なわち、光電子放出材３と電極４の間に電場を形成して
いる（光電子放出部、Ｂ）。微粒子の荷電は、電場にお
いて光電子放出材３に紫外線照射することにより発生す
る光電子７により効率よく実施される。ここでの電場の
電圧は、５０Ｖ／cmである。The photoelectron emitting material 3 here is a thin film of Au added to the surface of the glass material, and there is another invention of the present inventors regarding the photoelectron emitting material having such a structure (special feature). Japanese Patent Application No. 2-295423). In this way, the fine particles (particulate matter) 6 in the wafer storage 1 are collected and removed, and the wafer storage becomes clean air. In the above,
To irradiate the photoelectron emitting material with ultraviolet rays, the curved reflecting surface 5 is used to efficiently irradiate the plate-shaped photoelectron emitting material 3 with ultraviolet rays from the ultraviolet lamp 2. The electrode 4 is the photoelectron emission material 3
It is installed to perform photoelectron emission from an electric field. That is, an electric field is formed between the photoelectron emitting material 3 and the electrode 4 (photoelectron emitting portion, B). The fine particles are efficiently charged by the photoelectrons 7 generated by irradiating the photoelectron emitting material 3 with ultraviolet rays in an electric field. The electric field voltage here is 50 V / cm.
【００１７】また、荷電粒子の捕集は、電極４を用いて
行っている。電極材は金網状のＣｕ−Ｚｎ材を金メッキ
して用い、光電子放出材より１cmの位置（全長Ａ＋Ｂの
距離１に対し０．０３の位置）に設置している。１０、
１１は、夫々ウェハキャリャ、ウェハを示す。本例にお
いて、ウェハ保管庫内の１部に気流の攪拌部を設けると
微粒子除去速度が早くなることから好ましい。この方法
として、温度差をつけるための加温部、機械的な攪拌部
があり、適宜に使用できる。本例では、壁面を光電子放
出材３とし、微粒子の存在する空間部に電場用電極材４
及び遮光材９を設置しているが、遮光材９に光電子放出
（例えば、Ｃｕ−Ｚｎ材にＡｕを被覆して、（−）極と
する）の機能を持たせて使用することもできる。この場
合の光電子放出は、光電子放出材３と遮光材９の両方と
なり微粒子の荷電が効果的となる。The electrode 4 is used to collect the charged particles. The electrode material is a wire-mesh Cu-Zn material plated with gold, and is installed at a position 1 cm from the photoelectron emitting material (position 0.03 with respect to the distance 1 of the total length A + B). 10,
Reference numeral 11 denotes a wafer carrier and a wafer, respectively. In this example, it is preferable to provide an agitating part for the air flow in a part of the wafer storage because the particle removal rate is increased. As this method, there is a heating section for making a temperature difference and a mechanical stirring section, which can be appropriately used. In this example, the wall surface is the photoelectron emitting material 3, and the electric field electrode material 4 is provided in the space where fine particles are present.
Although the light shielding material 9 is provided, the light shielding material 9 may be used with a function of emitting photoelectrons (for example, a Cu—Zn material is coated with Au to serve as a (−) pole). In this case, the photoelectron emission becomes both the photoelectron emitting material 3 and the light shielding material 9, and the fine particles are effectively charged.
【００１８】実施例２ 図１に示した構成の清浄器に下記試料ガスを入れ、遮光
材の有無の場合について紫外線照射を行い、粒子測定器
（パーティクルカウンター）を用い、清浄器内の微粒子
濃度を調べた。 清浄器大きさ； ３０リットル 光電子放出材； 石英ガラスに薄膜状にＡｕを付加した
もの 電極材； 金網状Ｃｕ−Ｚｎを光電子放出材から１cmの
位置（光電子放出材と対向する壁面までの全長距離１対
し０．０３の位置）に設置 遮光材； 板状ステンレスを図１のごとく電極材から１
cm、１．５cmの位置に交互に設置 荷電微粒子捕集材； 電極材で兼用 紫外線ランプ； 殺菌灯 電場電圧； ５０Ｖ／cm 試料ガス（入口ガス）； 媒体ガス・・・空気 濃度（クラス）・・・２００ （クラス；１ft3 中の０．１μｍ以上の微粒子の個数） 照射時間； ３時間Example 2 The following sample gas was put into the purifier having the structure shown in FIG. 1, and ultraviolet rays were radiated with and without a light-shielding material, and the particle concentration in the purifier was measured using a particle counter (particle counter). I checked. Purifier size: 30 liters Photoelectron emission material; Quartz glass with Au added in a thin film Electrode material: Wire mesh Cu-Zn at a position 1 cm from the photoelectron emission material (total distance to the wall facing the photoelectron emission material) Installed at the position of 0.03 for one) Shading material: Plate-shaped stainless steel from the electrode material 1 as shown in FIG.
Alternately installed at positions of 1.5 cm and 1.5 cm Charged particle collector; UV lamp used as electrode material; Sterilization lamp Electric field voltage; 50 V / cm Sample gas (inlet gas); Medium gas ... Air concentration (class) ..200 (class; number of particles of 0.1 μm or more in 1 ft 3 ) Irradiation time: 3 hours
【００１９】結 果 ０．１μｍ以上の微粒子濃度を測定器で測定した。結果
をft3 中の微粒子の個数として表１に示す。As a result, a fine particle concentration of 0.1 μm or more was measured with a measuring instrument. The results are shown in Table 1 as the number of fine particles in ft 3 .
【表１】 尚、ブランクとして、紫外線照射した場合の３時間放
置後の清浄器内の微粒子濃度を調べたところ、初期濃度
（入口濃度）に対し７６％が認められた（測定され
た）。本例は、空気清浄の例を説明したが、微粒子状物
質を荷電して、利用する分野に何ら限定なく利用でき
る。[Table 1] As a blank, when the particle concentration in the purifier after being left for 3 hours when irradiated with ultraviolet rays was examined, 76% of the initial concentration (inlet concentration) was recognized (measured). In this example, the example of air cleaning has been described, but the particulate matter can be charged and used without any limitation in the field of use.
【００２０】[0020]
【発明の効果】本発明によれば次の効果を奏することが
できた。 （１）．電場下で光電子放出材に紫外線を照射するにお
いて、光電子放出部と被処理空間部の間の空間に遮光材
を設置することにより、 紫外線が被処理空間部に照射されなくなり、被処理空
間からの微粒子発生がなくなった。 （２）．遮光材の形状を板状、格子状、プリーツ状、網
状、曲面状のいずれか１種類又は２種以上の組合せと
し、光電子放出部と被処理空間部の間に、両部分が同通
するように開口部を設けて遮光材を設置することによ
り、 微粒子の存在する被処理空間部（Ａ）の微粒子が光
電子放出部（Ｂ）からの光電子により効果的に荷電され
た。（Ａにおける微粒子は、迅速に開口部より光電子に
出合うため容易に荷電された。）According to the present invention, the following effects can be obtained. (1). When irradiating the photoelectron emission material with ultraviolet light under an electric field, by installing a light shielding material in the space between the photoelectron emission part and the space to be treated, the space to be treated will not be exposed to the ultraviolet rays, and The generation of fine particles has disappeared. (2). The shape of the light-shielding material is plate-like, lattice-like, pleat-like, mesh-like, curved-surface-like one kind or a combination of two or more kinds, and both parts are made to pass between the photoelectron emitting part and the processed space part. By providing the opening with the light-shielding member, the particles in the space (A) to be processed in which the particles are present were effectively charged by the photoelectrons from the photoelectron emitting section (B). (The fine particles in A were easily charged because they quickly met the photoelectrons through the opening.)
【００２１】（３）．遮光材の材質を光電子放出性物質
とすることにより、 遮光材からも光電子が放出され、微粒子の荷電が効
果的となった。 遮光材を光電子放出材とすることができるので、利
用分野によっては、簡易な構成・構造の荷電装置となっ
た。 （４）．荷電装置の壁表面を紫外線の反射率の小さい材
料にすることにより、 紫外線の壁面反射による粒子発生が抑制された。(3). By using a photoelectron-emitting substance as the material of the light-shielding material, photoelectrons were also emitted from the light-shielding material, and the charging of the fine particles became effective. Since the light shielding material can be a photoelectron emitting material, the charging device has a simple structure and structure depending on the field of use. (4). By making the wall surface of the charging device a material with low UV reflectance, particle generation due to UV wall reflection was suppressed.
【図１】本発明の荷電装置を用いたウェハ保管庫におけ
る空気清浄器の基本構成図である。FIG. 1 is a basic configuration diagram of an air purifier in a wafer storage using a charging device of the present invention.
【図２】遮光材の形状を示す断面図である。FIG. 2 is a cross-sectional view showing the shape of a light shielding material.
１：ウェハ保管庫、２：紫外線ランプ、３：光電子放出
材、４：電極、５：反射面、６：微粒子、７：光電子、
８：荷電微粒子、９：遮光材1: Wafer storage, 2: Ultraviolet lamp, 3: Photoelectron emitting material, 4: Electrode, 5: Reflecting surface, 6: Fine particles, 7: Photoelectron,
8: charged fine particles, 9: light shielding material
Claims (3)
発生する光電子放出材、電場設定用電極を有する空間中
の微粒子の荷電装置において、前記光電子放出材と電極
とからなる光電子放出部が存在する空間部とそれ以外の
空間部とを紫外線の透過を遮えぎる遮光材で区分したこ
とを特徴とする空間中の微粒子の荷電装置。1. A charging device for particles in a space having an ultraviolet source, a photoelectron emitting material for generating photoelectrons by irradiation of ultraviolet rays, and an electric field setting electrode, and a photoelectron emitting portion including the photoelectron emitting material and the electrode. A device for charging fine particles in a space, characterized in that the space portion and the other space portion are divided by a light shielding material that blocks transmission of ultraviolet rays.
とを特徴とする請求項１記載の空間中の微粒子の荷電装
置。2. The device for charging fine particles in a space according to claim 1, wherein the light shielding material also serves as a photoelectron emitting material.
は、紫外線の反射率の小さい材料で構成されていること
を特徴とする請求項１記載の空間中の微粒子の荷電装
置。3. The charging device for particles in a space according to claim 1, wherein the wall surface forming the space of the charging device is made of a material having a low reflectance of ultraviolet rays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32241791A JPH07121369B2 (en) | 1991-11-12 | 1991-11-12 | Particle charging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32241791A JPH07121369B2 (en) | 1991-11-12 | 1991-11-12 | Particle charging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05138070A true JPH05138070A (en) | 1993-06-01 |
| JPH07121369B2 JPH07121369B2 (en) | 1995-12-25 |
Family
ID=18143434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32241791A Expired - Fee Related JPH07121369B2 (en) | 1991-11-12 | 1991-11-12 | Particle charging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07121369B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194882A (en) * | 2005-01-13 | 2006-07-27 | Matter Engineering Ag | Method and instrument for measuring numerical concentration and average diameter of aerosol particle |
-
1991
- 1991-11-12 JP JP32241791A patent/JPH07121369B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194882A (en) * | 2005-01-13 | 2006-07-27 | Matter Engineering Ag | Method and instrument for measuring numerical concentration and average diameter of aerosol particle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07121369B2 (en) | 1995-12-25 |
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