JPH05137972A - External pressure type hollow fiber membrane module - Google Patents

Abstract

PURPOSE:To wash away the particulates sticking to the secondary side of the external pressure type hollow fiber membrane module with permeated water in the initial period of the operation of the membrane module by providing a permeated fluid distributing member near the permeated fluid outlet side end of hollow fiber membranes. CONSTITUTION:Hollow yarn membrane bundles 2 are housed into a cylindrical case 1. A resin partition wall 3 cast into one end of the cylindrical case 1 embeds the one end of the hollow fiber membrane bundles 2 and position the openings 21 on one end of the respective hollow fiber membranes to the outside surface of the resin partition wall. A resin block 4 deposited at the other end of the hollow fiber membrane bundles 2 closes the other end 22 of the hollow fiber membranes. A permeated water port 5 fixed at one end of the cylindrical case 1 has a permeated water outlet 51 and is provided with the disturbing member 6 for disturbing the permeated water flow therein. As a result, the particulates sticking to the secondary side of the module including the flank on the permeated water outlet side of the hollow fiber membranes are washed away by the permeated water.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an external pressure type hollow fiber membrane module used for producing ultrapure water.

[0002]

2. Description of the Related Art When raw water is treated with a permeable membrane to obtain permeated water, conditions such as the number of fine particles, the amount of dissolved oxygen, the amount of dissolved carbon and the number of viable bacteria differ depending on the use of the permeated water.

In semiconductor ICs, however, silicon
It is manufactured by repeating a series of steps of optically printing the circuit on the wafer, removing unnecessary parts, and then washing with water, and if fine particles adhere to the printed wiring, the circuit can operate normally. In ultrapure water used for washing with water, the number of fine particles is particularly important among the above conditions.

Various types of membrane modules for producing the above ultrapure water are known, but according to the external pressure type hollow fiber membrane module, the number of fine particles is 0.1 μm level. The external pressure type hollow fiber membrane module is the mainstream of the ultrapure water production module.

[0005]

However, in recent years, the LSI is highly integrated and the number of fine particles is required to be more stringent. In the conventional external pressure type hollow fiber membrane module, this severe condition is required. It is becoming difficult to meet the conditions.

Therefore, in the present inventor, when ultrapure water is produced by using the external pressure type hollow fiber membrane module, the problematic fine particles are on the secondary side (permeate side) of the membrane. It is presumed that the adhered fine particles are accidentally desorbed due to vibration, etc., and this is the result of being mixed into the permeated water.At the time of manufacturing the module, be careful not to attach the fine particles to the secondary side as much as possible. In addition, by thoroughly washing the module with water, the number of fine particles adhering to the secondary side was reduced, the number of fine particles of ultrapure water was significantly reduced, and high quality external pressure type hollow fiber membrane module was made possible. .

As a result of further diligent investigations by the present inventors in order to reduce the number of fine particles in ultrapure water, as a result, in the conventional external pressure type hollow fiber membrane module, the permeated water flow velocity is remarkably low or practically low. There is a place where the permeated water is accumulated,
It was not easy to remove the fine particles adhering to these parts by the above-mentioned water washing, and it was found that the removal of the adhering fine particles is effective for further reducing the number of fine particles in the ultrapure water.

The object of the present invention is to provide an external pressure type hollow fiber membrane module.
Fine particles adhering to the secondary side (permeated water side) of the membrane can be thoroughly washed with permeated water at the initial stage of operation of the membrane module, and ultrapure water with a very small number of fine particles (fine particle diameter, 0.1 μm or less It is to provide an external pressure type hollow fiber membrane module capable of supplying 1 point / ml) to the use point.

[0009]

The external pressure type hollow fiber membrane module of the present invention is a hollow fiber in which the inside of the hollow fiber membrane is the permeable fluid side and the permeated fluid outlet side end of the hollow fiber membrane is located on the outer surface of the resin partition wall. In the membrane module, a permeated fluid turbulent member is provided near the end of the hollow fiber membrane on the permeated fluid outlet side.

[0010]

[Function] Since permeate can be made to flow even at the end face of the permeate outlet of the hollow fiber membrane at a sufficient flow rate, and fine particles adhering to the end face can be removed by washing with water, the permeate wash at the beginning of the module operation By performing the above, it is possible to send the permeated water having a remarkably small number of fine particles to the use point.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing an embodiment of the present invention. In FIG. 1, 1 is a cylindrical case. Reference numeral 2 denotes a hollow fiber membrane bundle (RO membrane, UF membrane, MF membrane, etc.) accommodated in the tubular case 1, 3
Is a resin partition wall cast on one end of the cylindrical case 1, one end of the hollow fiber membrane bundle 2 is embedded, and one end opening 21 of each hollow fiber membrane is located on the outer surface of the resin partition wall. Reference numeral 4 denotes a resin block attached to the other end of the hollow fiber membrane bundle 2 and closes the other end 22 of each hollow fiber membrane. Reference numeral 5 denotes a permeated water port fixed to one end of the cylindrical case 1, which has a permeated water outlet 51, and a turbulence-imparting member 6 for turbulating the permeated water flow therein. . Reference numeral 7 is a raw water port fixed to the other end of the tubular case 1 and has a raw water inlet 71. Reference numeral 72 is a raw water outlet provided on one end side of the cylindrical case 1.

As the turbulence-imparting member for the permeated water flow of the permeated water port 5, a member for generating a turbulent flow in the port 5 and flowing the permeated water in contact with the outer surface of the resin partition wall 3 is used. As shown in FIG. 2A, a diaphragm 61 is attached in the port 5, and as shown in FIG. 2B, a baffle 62 is attached.
It can be attached in the grate 5. In this case, in order to prevent permeated water from accumulating at the entry corners formed by the addition of the diaphragm 61 or the baffle 62 (in order to prevent the propagation of various bacteria in the water accumulation dead space), for example, an ink liquid or the like is used. It is effective to design the port based on all water flow observations.

In the above-mentioned external pressure type hollow fiber membrane module, raw water is supplied from the raw water port 7 into the cylindrical case 1, and in the cylindrical case 1, the raw water is fed into the hollow fiber membrane 2. The permeated water in the hollow fiber membrane 2 flows out from the permeated water outlet 51 of the permeated water port 5 while being contacted with and flowing. On the other hand, non-permeable raw water flows out from the raw water outlet 72.

In the production of ultrapure water by the above-mentioned external pressure type hollow fiber membrane module, the permeate flow described above is carried out for washing the secondary side of the hollow fiber membrane module with water for a certain initial period. After the washing, the permeated water is supplied to the use point.

In the external pressure type hollow fiber membrane module of the present invention, the permeated water turbulence member 6 is provided in the permeated water port 5.
Since the permeated water in contact with the outer surface of the resin partition wall 3 is made to flow, it adheres not only to the inner surface of the hollow fiber membrane but also to the end surface of the hollow fiber membrane one end 21 and the outer surface of the resin partition wall 3 during the above washing with water. Fine particles can also be washed away well.

On the other hand, in the conventional external pressure type hollow fiber membrane module in which the permeated water port does not have the permeated water turbulence member, it is difficult to sufficiently permeate the permeated water in contact with the outer surface of the resin partition wall, and the hollow It is difficult to wash fine particles adhering to one end surface of the thread film and the outer surface of the resin partition wall with water. This is also clear from the following test results.

Test Results A permeated water port of an external pressure type hollow fiber membrane module in which 500 hollow fiber membranes having an outer diameter of 1 mm are housed in a cylindrical case having an inner diameter of 100 mm, is squeezed inside as shown in the figure. The example product using the one having the above and the comparative example using the ordinary product not having the restriction are mounted in parallel in the ultrapure water production system, and the number of fine particles in the permeated water (particle diameter of 0.1 μm or less) is temporally changed. When the change was measured, it was as shown in FIG. In FIG. 3, the arrow indicates the time when vibration was applied to the module.

As is clear from the results of this test, in the case of the example product, after the third shaking, the particles were removed early with almost no increase in the number of particles due to the shaking, whereas in the comparative example product. In the same as above, the increase in the number of fine particles due to the vibration is remarkable, and it is difficult to wash and remove the fine particles with permeated water.

[0019]

The external pressure type hollow fiber membrane module of the present invention has the structure as described above, and the fine particles adhered to the secondary side of the module including the permeate outlet side end surface of the hollow fiber membrane. Since the permeated water can be well washed and removed with permeated water, ultrapure water substantially free of fine particles can be supplied by performing permeated water washing and then supplying the permeated water to the youth.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a different example of a permeate port having a turbulent permeate member inside, which is used in the present invention.

FIG. 3 is a table showing the permeated water cleaning effect of the external pressure type hollow fiber membrane module of the present invention.

[Explanation of symbols]

 2 hollow fiber membrane bundle 21 permeate outlet side end of hollow fiber membrane 3 resin partition wall 6 permeate water turbulent member

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] December 30, 1991

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction content]

Test Results An external pressure type hollow fiber membrane module in which 5000 hollow fiber membranes having an outer diameter of 1 mm were housed in a cylindrical case having an inner diameter of 100 mm was used as a permeate port having an internal throttle as shown in the figure. An example product and a comparative example using a normal product without a diaphragm were installed in parallel in an ultrapure water production system, and the time-dependent change in the number of fine particles in permeated water (particle diameter 0.1 μm or less) was measured. It was as shown in FIG. In FIG. 3, the arrow indicates the time when vibration is applied to the module.

Claims (1)

[Claims] 1. A hollow fiber membrane module in which the inside of the hollow fiber membrane is on the permeate side and the end of the hollow fiber membrane on the permeate fluid outlet side is located on the outer surface of the resin partition wall. An external pressure type hollow fiber membrane module characterized in that a permeable fluid turbulent member is provided in the vicinity thereof.