JPH0513527B2 - - Google Patents
Info
- Publication number
- JPH0513527B2 JPH0513527B2 JP19133686A JP19133686A JPH0513527B2 JP H0513527 B2 JPH0513527 B2 JP H0513527B2 JP 19133686 A JP19133686 A JP 19133686A JP 19133686 A JP19133686 A JP 19133686A JP H0513527 B2 JPH0513527 B2 JP H0513527B2
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- binder
- sintered body
- laminate
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011230 binding agent Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000000462 isostatic pressing Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Landscapes
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は積層セラミツクコンデンサ、積層圧電
アクチユエータ素子などの積層焼結体の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a laminated sintered body such as a laminated ceramic capacitor or a laminated piezoelectric actuator element.
積層セラミツクコンデンサ、積層圧電アクチユ
エータ素子などの積層体の製造において、それの
積層枚数が多く、また大型になればなるほど、積
層体の脱バインダーが困難になる。ここで脱バイ
ンダーとは、グリーンシートの形成のときセラミ
ツク粉末と同時に添加したバインダー〔例えばポ
リビニールブチラール樹脂〕を焼結前に分解して
抜くことを云う。この脱バインダーは積層体の積
層枚数が多いほど中心部分で分解ガスの影響を受
けやすい。また脱バインダーが完全でないと、積
層体内にカーボンが残留し、焼結時空孔を生じや
すくなるなど不具合が発生する。
In the production of laminated bodies such as laminated ceramic capacitors and laminated piezoelectric actuator elements, the larger the number of laminated layers and the larger the size, the more difficult it becomes to remove the binder from the laminated body. Here, debinding refers to decomposing and removing the binder (for example, polyvinyl butyral resin) added at the same time as the ceramic powder when forming the green sheet before sintering. The greater the number of laminated sheets in the laminate, the more susceptible the center portion is to the effects of decomposed gas. Furthermore, if the binder is not completely removed, carbon remains in the laminate, causing problems such as pores being more likely to occur during sintering.
従来は、上記問題に対する対策として、脱バイ
ンダー前に一体化した大型の積層体の脱バインダ
ーは脱バインダー時の昇温速度を極めて小さく
し、さらに加圧雰囲気下で行なうなどが実施され
ている。 Conventionally, as a countermeasure to the above-mentioned problem, debinding of a large laminate that has been integrated before debinding has been carried out by extremely reducing the rate of temperature rise during debinding, and by performing the debinding under a pressurized atmosphere.
上述した従来の脱バインダ方策を実施した場
合、昇温速度を極めて小さくすると、脱バインダ
ーに要する時間が極めて多くなり、生産のリード
タイムが長くなる。また設備的には、厳密な温度
調節の可能なものが必要となり、加圧雰囲気下の
加熱のできるものも必要で、これらを満足する特
殊な炉が必要となる。
When the above-described conventional binder removal measures are implemented, if the temperature increase rate is extremely low, the time required for binder removal becomes extremely long, resulting in a long production lead time. In terms of equipment, equipment that can precisely control the temperature is required, and equipment that can be heated under a pressurized atmosphere is also required, and a special furnace that satisfies these requirements is required.
本発明は脱バインダーが容易で、大型積層焼結
体の製造が可能な積層焼結体の製造方法を提供す
ることを目的とするものである。 An object of the present invention is to provide a method for manufacturing a laminated sintered body, which allows easy removal of the binder and allows production of a large-sized laminated sintered body.
上記問題点を解決する本発明の手段は、セラミ
ツク粉末と有機バインダーからなるグリーンシー
ト上に金属ペーストを被着形成する工程と、前記
グリーンシートを積層一体化して積層体を形成
し、脱バインダーする工程と、前記脱バインダー
が完了した積層体を複数個プレス処理して一体化
後、焼結する工程とを含むことを特徴とする積層
焼結体の製造方法であり、前記プレス処理は静水
圧プレス処理、あるいはラバープレス処理であ
る。
The means of the present invention for solving the above-mentioned problems includes the steps of depositing a metal paste on a green sheet made of ceramic powder and an organic binder, stacking the green sheets together to form a laminate, and removing the binder. and a step of press-processing a plurality of laminates from which the binder has been removed, integrating them, and sintering them, wherein the pressing process is performed using hydrostatic pressure. This is press processing or rubber press processing.
本発明は脱バインダー過程までは積層厚が薄い
状態で処理し、その後静水圧プレスを施すことに
より積層を多くでき、かつ大型な焼結体を得るこ
とができる。
In the present invention, the lamination is processed in a thin state until the binder removal process, and then hydrostatic pressing is performed, thereby making it possible to increase the lamination and obtain a large-sized sintered body.
つぎに、本発明の実施例について説明する。 Next, examples of the present invention will be described.
実施例 １
この実施例では、積層圧電アクチユエータ素子
（以下単に素子という）の積層焼結体に例にとつ
て説明する。Example 1 In this example, a laminated sintered body of a laminated piezoelectric actuator element (hereinafter simply referred to as element) will be explained.
本実施例の素子はまずペロブスカイト結晶構造
を多成分固溶体セラミツクの粉末（例えばPZT）
に有機バインダー（例えばポリビニールブチラー
ル樹脂）の粉末を混合してグリーンシートを作
る。 The device of this example first uses a perovskite crystal structure as a multicomponent solid solution ceramic powder (for example, PZT).
A green sheet is made by mixing powder of an organic binder (for example, polyvinyl butyral resin).
このグリーンシート上に銀ペーストを印刷、塗
布した後、60層以下のグリーンシートを積層し、
温度120℃、圧力270Kg／cm2、時間40分の条件で熱
プレスして積層体を形成する。 After printing and applying silver paste on this green sheet, 60 layers or less of green sheets are laminated,
A laminate is formed by hot pressing at a temperature of 120° C., a pressure of 270 Kg/cm 2 and a time of 40 minutes.
次に積層体を毎時５℃の昇温速度で、温度450
℃まで上昇し、その後炉冷することにより脱バイ
ンダーを完了させる。 Next, the laminate was heated to a temperature of 450°C at a heating rate of 5°C per hour.
Debinding is completed by increasing the temperature to ℃ and then cooling in the furnace.
このように脱バインダーの完了した積層体を２
個つみ重ねてポリエチレン袋で真空パツクし、そ
の真空パツクごと静水圧プレス機の槽内にセツト
し、4t／cm2の静水圧を加えて一体化する。 The laminate that has been debindered in this way is
The pieces are stacked one on top of the other, vacuum-packed in a polyethylene bag, and the vacuum packs are placed in a tank of a hydrostatic press machine, and a hydrostatic pressure of 4 t/cm 2 is applied to integrate them.
この一体化した積層体を昇温速度毎時200℃で
最高温度1100℃で上昇し、温度1100℃で２時間保
持するプロフアイルで焼結体を作成する。 A sintered body is produced using a profile in which this integrated laminate is raised to a maximum temperature of 1100°C at a heating rate of 200°C per hour and held at 1100°C for 2 hours.
このように作成された積層焼結体の機械的強度
は脱バインダー前に一体化した焼結体と同等の値
を示した。 The mechanical strength of the laminated sintered body produced in this way was equivalent to that of the sintered body that was integrated before the binder was removed.
実施例 ２
本実施例では２個の積層体をプレスする方法と
してラバープレス方法を採用した例である。Example 2 This example is an example in which a rubber press method was adopted as a method for pressing two laminates.
積層体の脱バインダーまでは実施例１と同じで
あり、省略する。 The process up to removing the binder from the laminate is the same as in Example 1, and will be omitted.
脱バインダーの完了した積層体を積層体と同じ
形状に作りあげた型に入れ、型ごとプレス機にセ
ツトし、10t／cm2の圧力を加えて一体化する。 The laminate from which the binder has been removed is placed in a mold made in the same shape as the laminate, and the entire mold is placed in a press and a pressure of 10 t/cm 2 is applied to integrate the laminate.
この一体化した積層体を昇温速度毎時200℃で
最高温度1100℃で上昇し、温度1100℃で２時間保
持するプロフアイルで焼結体を作成する。 A sintered body is produced using a profile in which this integrated laminate is raised to a maximum temperature of 1100°C at a heating rate of 200°C per hour and held at 1100°C for 2 hours.
このように作成された積層焼結体の機械的強度
は脱バインダー前に一体化した焼結体と同等の値
を示した。 The mechanical strength of the laminated sintered body produced in this way was equivalent to that of the sintered body that was integrated before the binder was removed.
以上説明したように、本発明は脱バインダー過
程を薄い積層体に対して実施できるので、脱バイ
ンダーが容易にできる。従つて、従来製造不可能
だつた大きさ（例えば高さ30mm以上、大きさ30mm
角）の積層焼結体の製造が可能になるといつた効
果がある。
As explained above, in the present invention, the binder removal process can be performed on a thin laminate, so that the binder removal can be easily performed. Therefore, we are manufacturing products with sizes that were previously impossible to manufacture (for example, height 30mm or more, size 30mm
This has the effect of making it possible to manufacture a laminated sintered body with a square shape.
Claims (1)
リーンシート上に金属ペーストを被着形成する工
程と、前記グリーンシートを積層一体化して積層
体を形成し、脱バインダーする工程と、前記脱バ
インダーが完了した積層体を複数個プレス処理し
て一体化後、焼結する工程とを含むことを特徴と
する積層焼結体の製造方法。 ２ 前記プレス処理が静水圧プレス処理からなる
特許請求の範囲第１項記載の積層焼結体の製造方
法。 ３ 前記プレス処理がラバープレス処理からなる
特許請求の範囲第１項記載の積層焼結体の製造方
法。[Scope of Claims] 1. A step of depositing a metal paste on a green sheet made of ceramic powder and an organic binder, a step of laminating and integrating the green sheets to form a laminate, and removing the binder. 1. A method for manufacturing a laminated sintered body, comprising the steps of press-processing a plurality of laminated bodies in which a binder has been applied, integrating the laminated bodies, and then sintering the laminated bodies. 2. The method for manufacturing a laminated sintered body according to claim 1, wherein the pressing treatment is an isostatic pressing treatment. 3. The method for manufacturing a laminated sintered body according to claim 1, wherein the press treatment comprises a rubber press treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19133686A JPS6346716A (en) | 1986-08-15 | 1986-08-15 | Manufacture of laminated sintered unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19133686A JPS6346716A (en) | 1986-08-15 | 1986-08-15 | Manufacture of laminated sintered unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346716A JPS6346716A (en) | 1988-02-27 |
| JPH0513527B2 true JPH0513527B2 (en) | 1993-02-22 |
Family
ID=16272864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19133686A Granted JPS6346716A (en) | 1986-08-15 | 1986-08-15 | Manufacture of laminated sintered unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346716A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2661213B2 (en) * | 1988-11-24 | 1997-10-08 | 松下電器産業株式会社 | Washing machine |
| JPH04127410A (en) * | 1990-09-18 | 1992-04-28 | Nec Corp | Manufacture of ceramic laminated body |
| JPH04282812A (en) * | 1991-03-11 | 1992-10-07 | Taiyo Yuden Co Ltd | Manufacture of laminate |
-
1986
- 1986-08-15 JP JP19133686A patent/JPS6346716A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346716A (en) | 1988-02-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |