JPH05133742A - Laser type surface roughness measuring device - Google Patents

Abstract

PURPOSE:To provide a laser type surface roughness measuring device, which automatically measures the surface roughness of a steel material and which marks any part out of intended roughness automatically with information of the condition of surface roughness. CONSTITUTION:A semiconductor laser oscillator exerts a laser power which can give an output for marking on the surface of a steel material 7, and this laser power is controlled so as to perform measuring the surface roughness and marking continuously by means of scanning with laser beam, and it is made practicable to directly check ocularly the condition of surface roughness of the steel material 7 which has gone through the processes of measurement and marking.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser type surface roughness measuring device capable of automatically measuring the surface roughness of a steel material and automatically marking the state of the surface roughness on a portion where the roughness is not obtained. It is about.

[0002]

2. Description of the Related Art In order to improve the adhesion between a steel material and a coating, the surface roughness of the steel material is important as a required range for adjusting the base material for coating and coating. The surface roughness of the steel material is generally adjusted by blasting. Therefore, the anchor profile (concavo-convex shape on the surface) applied by blasting
It is also important to know how much is.

The methods of measuring the surface roughness of steel materials can be broadly classified into contact type and non-contact type. The contact type includes, for example, a stylus type and a pres-au film, and the non-contact type includes, for example, a visual comparator and a light wave precision interferometer using a laser. Among these, the non-contact type optical wave precision interferometer using a laser detects surface roughness by utilizing the wave dynamics of light, and both accuracy and reliability are better than those of other measurement methods. It can be said that it is excellent,
Furthermore, if a semiconductor laser is used as the laser, the device becomes smaller and lighter, and it is also advantageous in terms of controllability. Here, a brief explanation will be given of the principle of the laser-based precision interferometric length measuring machine. measure. The diffraction fringes can be easily extracted by making the scanning direction of the laser orthogonal to the rolling direction of the steel material. The intensity distribution of the diffraction image corresponds to a fine structure on the surface of the steel material, and the state of surface roughness can be monitored by detecting the intensity distribution of the diffraction image.

In both the non-contact type using the laser and the contact type described above, the measured surface roughness data is stored in a memory or enlarged and recorded on a piece of paper by a printer or the like. I am trying. Also,
There is also known an analog-type measuring device in which the surface roughness Ra, Rz, and Rmax can be directly indicated on the meter. here,
Surface roughness Ra is center line average roughness, Rz is ten-point average roughness,
Rmax means the maximum height (JIS B 06
01).

[0005]

There are various types of conventional surface roughness measuring devices as described above, and the measured surface roughness data are stored in a memory or enlarged and recorded on a piece of paper. , Surface roughness Ra, Rz, Rma on the meter
Although x is indicated directly, these surface roughness data are not used to directly mark the surface of the steel material to be measured, so the obtained surface roughness data (for example, a line diagram enlarged and recorded on a piece of paper) It was not possible to directly check which part of the steel material was visually observed, and there was a problem that it required skill to know the correspondence between the surface roughness data and the steel material.

In view of the above points, the present invention is a laser type surface roughness measurement capable of automatically measuring the surface roughness of a steel material and automatically marking the state of the surface roughness on a portion where roughness is not obtained. The purpose is to obtain the device.

[0007]

A laser type surface roughness measuring apparatus according to the present invention is a semiconductor laser oscillator capable of obtaining an output capable of marking a surface of a steel material, a light projecting lens, and a laser emitted from the semiconductor laser oscillator. A light projecting unit having a mirror for scanning light, a laser power drive control unit that drives and controls the semiconductor laser oscillator based on a set value, and outputs a laser output state signal at the time of laser output, and the laser power drive control. When a laser output state signal is input from the means, mirror drive control means for driving and controlling the mirror to scan the laser light, and reflected light of the low output scanning laser light emitted from the light projecting portion to the steel surface. A light-receiving part for receiving light and a shield arranged on the front surface of the light-receiving part for blocking the reflected light of the high-power laser light emitted from the light-projecting part to the steel surface. Of the steel material surface roughness measuring means for measuring the roughness of the steel material surface from the reflected light received by the light receiving part, and the steel material surface roughness and the reference value measured by the steel material surface roughness measuring means. When the difference is calculated and the subtractor that outputs the calculated difference is input, and the difference calculated by the subtracter is input, based on the relationship data between the difference between the reference value and the time stored in the memory in advance. , A marking power for calculating a time corresponding to the difference obtained by the subtractor and outputting a signal of the obtained time and a laser power increase signal such that the power of the laser light becomes a power capable of marking the surface of the steel material Based on the time signal and the laser power increase signal from the control means and the marking power control means, the laser power set in the laser power drive control means is changed from the surface roughness measuring laser power to a predetermined time mark. It is provided with a and switcher to switch to Gupawa.

[0008]

In the present invention, when a low-power laser beam is emitted from the light projecting portion toward the surface of the steel material to be measured and scanned in the direction orthogonal to the rolling direction of the steel material, the surface of the steel material is diffracted by the laser light. The image appears. The light receiving section captures the light wave of the diffraction image which is the reflected light from the steel material surface and outputs it to the steel material surface roughness measuring means. The steel material surface roughness measuring means detects the intensity distribution of the diffraction image received by the light receiving portion, processes the distribution state at high speed to measure the roughness of the steel material surface, and outputs the measurement result to the subtractor. The subtractor obtains the difference between the steel material surface roughness measured by the steel material surface roughness measuring means and the reference value, and outputs the obtained difference value to the marking power control means. When the difference value obtained by the subtractor is input, the marking power control means responds to the difference obtained by the subtracter based on the relational data of the difference between the reference value and the time stored in advance in the memory. The time is calculated, and the signal of the obtained time and the laser power increase signal such that the power of the laser light becomes the power capable of marking the surface of the steel material are output to the switch. The switcher switches the laser power set in the laser power drive control means from the surface roughness measuring laser power to the marking power for a predetermined time based on the time signal and the laser power increase signal from the marking power control means. The laser power drive control means controls the current of the semiconductor laser oscillator to increase the output so that the laser power becomes the marking power while the laser power increase signal is being input from the switcher, and the steel material is increased by the laser light that has been powered up. Mark the surface.

[0009]

The present invention will be described below with reference to the illustrated embodiments.

FIG. 1 is a block diagram showing a configuration of a control unit of a laser type surface roughness measuring apparatus according to an embodiment of the present invention, FIG.
Is a perspective view showing its appearance, and FIG. 3 is an explanatory view for explaining its operation.

In FIG. 2, reference numeral 1 denotes parallel rails 2a and 2b.
This is a gate-type work cart that can move upward in the Y-axis direction. On one end face side thereof, the gate-shaped legs 1a and 1b to the horizontal beam portion 1c are provided.
A guide groove 1d is provided over the entire area. Reference numeral 3 denotes a measuring device main body supported in a cantilever state by a roller 4 capable of rolling in the guide groove 1d, and comprises a laser light projecting section 5 and a light receiving section 6, and the main body 3 itself is a parallel rail (Y. X-axis and Z-axis which are orthogonal parts to the (axis) and A-axis, B-axis and C which are attitude parts
It has five axes of freedom. 7 is a parallel rail 2a,
It is a steel material that is a measurement target placed on the stand 8 between 2b. Therefore, the main body 3 can be moved in the Y-axis direction by the work carriage, and the steel material 7 can be moved by its own 5-axis freedom.
You can move around it according to its shape. Each axis has a drive motor, and the drive motor is controlled by the NC device. However, the control method can be controlled by a method known in the related art, and therefore the description thereof is omitted. To do.

The light projecting section 5 has a built-in semiconductor laser oscillator capable of obtaining an output capable of marking the surface of the steel material 7, a light projecting lens, and a mirror for scanning the laser light emitted from the semiconductor laser oscillator. When the main body 3 is positioned with respect to the steel material 7 by the six axes including the Y axis (not shown), the surface of the steel material facing at that position can be scanned with laser light within a predetermined range. ing.

A shutter 9 for blocking the reflected light of the high-power laser light emitted from the light-projecting portion 5 to the surface of the steel material is installed on the front surface of the light-receiving portion 6, and the inside of the shutter 9 is reflected by the high-output laser light. The element can be prevented from being affected. Therefore, the light receiving unit 6 receives only the reflected light of the low output scanning laser light emitted from the light projecting unit 5 to the surface of the steel material.

Next, the configuration of the control unit of the apparatus of this embodiment is shown in FIG.
10 is a laser power drive control means for controlling the semiconductor laser in the light projecting unit 5, which controls the semiconductor laser based on the set value.
A laser power control unit 11 that outputs a laser output state signal at the time of laser output, and a laser drive that controls the current of the semiconductor laser based on the value of the laser power set by the laser power control unit 11 and the feedback signal from the light receiving unit 6. And a part 12.

Numeral 13 is a mirror drive control means for controlling the mirror in the light projecting section 5 to scan the laser light, and when the laser power control section 11 inputs a laser output state signal, the mirror is shaken within a predetermined range. In addition to outputting a swing signal for moving, when the laser power control unit 11 does not input a laser output state signal, a stop signal for stopping the mirror at the next scanning line start position is output, and the mirror outputs the next signal. A mirror control unit 14 that outputs a standby signal to the laser power control unit 11 when stopped at the scanning line start position
And a mirror drive unit 15 that drives a mirror drive motor (not shown) based on a swing signal or a stop signal from the mirror control unit 14. Reference numeral 16 denotes a steel material surface roughness measuring means, which measures the surface roughness of the steel material 7 by detecting the intensity distribution of the reflected light received by the light receiving portion 6, that is, the diffraction image, outputs the measurement result, and stores it in the memory. It is stored in 17.

Reference numeral 18 denotes a subtracter, which calculates the difference between the steel material surface roughness measured by the steel material surface roughness measuring means 16 and the reference value, and outputs the calculated difference value.

Reference numeral 19 is a marking power control means,
When the value of the difference obtained by the subtracter 18 is input, the time corresponding to the difference obtained by the subtracter 18 is calculated based on the relational data of the difference between the reference value and the time stored in the memory 20 in advance. The signal of the obtained time and the laser power increase signal such that the power of the laser light becomes the power capable of marking the surface of the steel material are output.

Reference numeral 21 denotes a shutter drive unit, which drives the shutter 9 to shield the light receiving unit 6 from light when a signal for notifying that the laser power increase signal has been output from the marking power control unit 19. It is a thing.

Reference numeral 22 denotes a surface roughness measuring laser power setting means, which causes the laser power controller 11 to set the power of the semiconductor laser to the surface roughness measuring laser power.

Reference numeral 23 denotes a switch, which sets the laser power set in the laser power control unit 11 based on the time signal from the marking power control means 19 and the laser power increase signal from the surface roughness measuring laser power for a predetermined time. It switches to marking power.

Next, the operation of the apparatus of this embodiment having the above-mentioned structure will be described based on FIGS. 1 and 2 and also with reference to FIG. In this case, the main body 3 has each axis (Y axis, X axis, Z
It is assumed that the shafts, the A-axis, the B-axis, and the C-axis) are controlled by the NC device so as to be opposed to a predetermined surface of the steel material 7 and are in a stopped state, that is, a scanning enabled state. Further, although the scanning width and the line interval of the laser light can be set arbitrarily, the scanning width is 200 mm and the line interval is 2 to 3 mm in this embodiment, and the light receiving unit 6 has the scanning width of 200 mm and the number of lines. It is assumed that n (for example, 70 rows) has a viewing angle within the field of view.

First, a low-power laser beam is emitted from the light projecting portion 5 toward the surface of the steel material 7 to be measured, and the mirror drive control means 13 causes the mirror to swing within a predetermined range so as to be orthogonal to the steel material rolling direction. When the scanning a of the laser beam in the first row shown in FIG. 3 is started, a diffraction image by the laser beam appears on the surface of the steel material.

The light receiving section 6 captures the light wave of the diffraction image which is the reflected light from the steel material surface and outputs it to the steel material surface roughness measuring means 16.

The steel material surface roughness measuring means 16 detects the intensity distribution of the diffraction image by the scanning a in the first row received by the light receiving portion 6, and processes the distribution state at high speed to determine the surface roughness of the steel material. The measurement is performed and the measurement result is output to the subtractor 18.

The subtractor 18 obtains the difference between the steel material surface roughness measured by the steel material surface roughness measuring means 16 and the reference value, and outputs the obtained difference value to the marking power control means 19.

In the marking power control means 19, when the difference value is input from the subtractor 18, the difference value from the subtractor 18 is calculated based on the relationship data between the reference value read from the memory 20 and time. For example, the difference from the roughness reference value is small,
Calculate which range is divided into three levels, medium and large,
The time t corresponding to small, medium, and large is extracted, and the obtained time t
And a laser power increase signal for making the power of the laser light a power for marking the surface of the steel material to the switching unit 23, and notifying the shutter drive unit 21 of the output of the laser power increase signal. , The shutter 9 is closed. In this case, it is assumed that the difference is small and the corresponding time t is t1.

The switch 23 is the marking power control means 1
Based on the time signal t1 from 9 and the laser power increase signal, the laser power set in the laser power drive control means 10 is switched from the surface roughness measuring laser power to the marking power for the time t1.

In the laser power drive control means 10, while the laser power increase signal is being input from the switch 23, the current of the semiconductor laser oscillator is controlled so that the laser power becomes the marking power, and the output is increased. During the time t1 from the start point of the scanning b of the laser light on the line, the surface of the steel material is marked by the laser light that has been powered up, and the time t1 is reached.
When is passed, the output of the semiconductor laser oscillator is stopped until the standby signal is input from the mirror control unit 14,
When a standby signal is input, the current of the semiconductor laser oscillator is controlled so that the set value of the laser power is changed from the marking power to the laser power for measuring surface roughness, and the output is lowered.

During the stop of the output of the semiconductor laser oscillator at the time of switching the marking power, the laser power drive control means 10
Since the output of the laser output state signal from the mirror drive control means 13 to the mirror drive control means 13 is stopped, the mirror control part 14 instructs the mirror drive part 15 to stop the mirror at the next scanning line start position. Then, the mirror driving unit 15 sets the angle of the mirror to the starting point of the scanning c on the third row by the laser light. When the laser power is switched from the marking power to the surface roughness measuring laser power and the laser power drive control means 10 outputs the laser output state signal again to the mirror drive control means 13, the mirror drive control means 13 is output. Starts scanning c of the laser beam on the third row.

When the above operation is repeated and the roughness is insufficient, scanning with the laser power for surface roughness measurement,
Scanning with marking power is repeated every other line,
Marking corresponding to the difference from the standard value is applied to the steel surface. Then, when the scanning up to the final row n (70th row) is completed, the main body 3 moves to each axis (Y axis, X axis, Z axis, A axis, B axis, C).
The shaft 3) is driven to move the main body 3 to the next surface roughness measuring portion of the steel material 7, and the same operation as described above is repeated.

As described above, in the laser type surface roughness measuring apparatus of this embodiment, since the surface roughness measurement and the marking are continuously performed by the scanning of the laser beam, it takes time to measure the surface roughness and the marking. The steel material 7 which has not been subjected to the surface roughness measurement and marking can be directly visually inspected for its surface roughness state, and the correspondence between the surface roughness and the steel material 7 can be easily grasped.

FIG. 4 is a block diagram showing the configuration of the control unit of a laser type surface roughness measuring apparatus according to another embodiment of the present invention. The marking power control means 1 is used in this embodiment.
When outputting the laser power increase signal, 9 notifies the mirror control unit 14 of the output of the laser power increase signal by a signal at time t, and
When the marking power control unit 19 notifies the mirror control unit 14 of the output of the laser power increase signal by the signal at time t, the mirror control unit 14 reads the character data corresponding to the signal at time t stored in the memory 24 in advance. The read character is different from that of the above-described embodiment in that the read character is marked on the next line of the scanning line for measuring the surface roughness of the steel material by laser light.

In this embodiment, since the state of the surface roughness of the steel material can be confirmed by characters, the correspondence between the surface roughness and the steel material 7 can be more easily grasped.

In each of the above-mentioned embodiments, the laser power is controlled only by the current control of the semiconductor laser oscillator. However, an automatic focusing device is further added to the laser power, and the laser by the projection lens is added. The automatic focal length adjustment of light may be performed, which can further improve the stability, accuracy, and reliability of the laser power.

[0035]

As described above, according to the present invention, the surface roughness measurement and the marking are continuously performed by the scanning of the laser beam, so that it takes time to measure the surface roughness and the marking. In addition, there is an effect that the state of the surface roughness of the steel material for which the surface roughness measurement and marking have been completed can be directly visually confirmed, and the correspondence relationship between the surface roughness and the steel material can be easily grasped. ..

[Brief description of drawings]

FIG. 1 is a block diagram illustrating a configuration of a control unit of an apparatus according to an exemplary embodiment of the present invention.

FIG. 2 is a perspective view showing the external appearance of an apparatus according to an embodiment of the present invention.

FIG. 3 is an explanatory diagram for explaining the operation of the apparatus according to the embodiment of the present invention.

FIG. 4 is a block diagram showing a configuration of a control unit of an apparatus according to another embodiment of the present invention.

[Explanation of symbols]

 5 Light emitting unit 6 Light receiving unit 7 Steel material 9 Shutter 10 Laser power drive control means 13 Mirror drive control means 16 Steel material surface roughness measuring means 18 Subtractor 19 Marking power control means 20 Memory 23 Switching device

Front Page Continuation (72) Inventor Susumu Nakamura 1-2 1-2 Marunouchi, Chiyoda-ku, Tokyo Nihon Steel Pipe Co., Ltd.

Claims (1)

[Claims] 1. A semiconductor laser oscillator capable of obtaining an output capable of marking on the surface of a steel material, a light projecting lens, and a light projecting section having a mirror for scanning laser light emitted from the semiconductor laser oscillator, and the semiconductor laser. The oscillator is driven and controlled based on a set value, and a laser power drive control unit that outputs a laser output state signal at the time of laser output, and a laser output state signal input from the laser power drive control unit, drive controls the mirror. Drive control means for scanning the laser light by a laser beam, a light receiving portion for receiving the reflected light of the low-power scanning laser light emitted from the light emitting portion to the surface of the steel material, and a light receiving portion arranged in front of the light receiving portion. A shutter that blocks the reflected light of the high-power laser light emitted from the light section to the steel surface, and the roughness of the steel surface from the reflected light received by the light receiving section. A steel material surface roughness measuring means for measuring, a subtractor for obtaining a difference between the steel material surface roughness measured by the steel material surface roughness measuring means and a reference value, and outputting a value of the obtained difference, the subtractor When the value of the difference obtained in step 1 is input, the time corresponding to the difference obtained by the subtractor is calculated and obtained based on the relationship data between the time difference and the reference value stored in the memory in advance. A time signal and marking power control means for outputting a laser power increase signal such that the power of the laser light becomes a power capable of marking the surface of the steel material, and a time signal and a laser power increase signal from the marking power control means. Based on the above, there is provided a switching device for switching the laser power set in the laser power drive control means from the surface roughness measuring laser power to the marking power for a predetermined time. Laser type surface roughness measuring device for.