JPH05129262A - Cleanness measuring device - Google Patents
Cleanness measuring deviceInfo
- Publication number
- JPH05129262A JPH05129262A JP3291299A JP29129991A JPH05129262A JP H05129262 A JPH05129262 A JP H05129262A JP 3291299 A JP3291299 A JP 3291299A JP 29129991 A JP29129991 A JP 29129991A JP H05129262 A JPH05129262 A JP H05129262A
- Authority
- JP
- Japan
- Prior art keywords
- lifting table
- measuring device
- vibrating electrode
- processed
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、液晶画面に使用する
ガラスや、シリコンウエハー等の被処理物を紫外線洗浄
した後、その洗浄度を測定するために使用される洗浄度
測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning degree measuring device used for measuring the degree of cleaning of a glass used for a liquid crystal screen, an object to be treated such as a silicon wafer, and the like after being cleaned with ultraviolet rays.
【０００２】[0002]
【従来の技術】一般に、液晶画面に使用するガラスや、
ＬＳＩに使用されるシリコンウエハー等は、微細な電極
を形成する工程で、その表面に付着した人間の皮膚脂
や、有機性のラッピング剤等、表面の汚染物を除去する
ことが重要であり、この除去作業に紫外線洗浄装置が広
く使用されている。2. Description of the Related Art Generally, glass used for liquid crystal screens,
In the process of forming fine electrodes, it is important to remove surface contaminants such as human skin oil adhering to the surface of a silicon wafer used for LSI, and an organic wrapping agent. An ultraviolet cleaning device is widely used for this removal work.
【０００３】そして、紫外線洗浄した被処理物は、その
表面に置いた水滴の角度を測定して洗浄度を検査する接
触角法によりその洗浄度が測定されている。また、Ｘ線
により被処理物からの放射角をパラメーターとし脱出深
さを変えてＸ線励起光電子を測定し、洗浄度を測定する
装置が知られている。The degree of cleaning of the object to be treated, which has been cleaned with ultraviolet rays, is measured by the contact angle method in which the angle of water droplets placed on the surface is measured to inspect the degree of cleaning. There is also known an apparatus that measures the X-ray excited photoelectrons by changing the escape depth with X-rays as a parameter of the radiation angle from the object to be processed to measure the cleaning degree.
【０００４】[0004]
【発明が解決しようとする課題】しかし、上記した測定
装置では、以下のような問題点を有していた。 接触角法は、水滴を滴下してその水滴の角度を測定
することで、洗浄度を測定するので、表面積が小さい被
処理物の洗浄度を測定する場合に優れているが、被処理
物の全面に渡るような広い面積を測定するには不向きで
あった。また、洗浄した表面を水滴により汚してしまう
ことになる。 Ｘ線を用いる方法は、装置が大型で複雑になり、製
造費も高価になる。However, the above measuring device has the following problems. The contact angle method is excellent in measuring the degree of cleaning of an object having a small surface area because the degree of cleaning is measured by dropping the water droplet and measuring the angle of the water droplet. It was not suitable for measuring a large area over the entire surface. In addition, the washed surface will be contaminated with water drops. The method using X-rays requires a large apparatus and is complicated, and the manufacturing cost is high.
【０００５】 なお、エンビシート等のシート状物体
の静電特性を検査する方法として、被処理物表面の電位
を測定する方法が行なわれているが、この方法では、表
面の帯電を測定するため、表面の汚れによる微小な電位
の変化を測定することは不可能であった。 この発明は、上記の問題点に鑑み創案されたもので、従
来の表面電位測定方法を利用して被処理物の全面に渡っ
て洗浄度を測定できると共に、被処理物の厚みにかかわ
らず洗浄度の測定を可能とする洗浄度測定装置を提供す
ることを課題とする。As a method for inspecting the electrostatic characteristics of a sheet-like object such as an ENVI-Sheet, a method of measuring the potential of the surface of the object to be processed has been performed. However, in this method, the charge on the surface is measured. However, it was impossible to measure a minute change in electric potential due to surface contamination. The present invention was devised in view of the above problems, and it is possible to measure the degree of cleaning over the entire surface of the object to be processed by using the conventional surface potential measuring method, and to perform cleaning regardless of the thickness of the object to be processed. An object of the present invention is to provide a cleaning degree measuring device capable of measuring the degree of cleaning.
【課題を解決するための手段】前記課題を解決するた
め、この発明は、上面に電極を設けた昇降テーブルと、
この昇降テーブルを昇降自在に駆動する駆動機構と、前
記昇降テーブルに対向するように昇降テーブルの上方に
配置した振動電極部と、前記昇降テーブル上に載置した
被処理物と前記振動電極部間の距離を設定するセンサー
とを備えた洗浄度測定装置として構成した。In order to solve the above-mentioned problems, the present invention is directed to a lifting table having electrodes on the upper surface thereof,
A drive mechanism that drives the lifting table to move up and down, a vibrating electrode section arranged above the lifting table so as to face the lifting table, and a workpiece placed on the lifting table and the vibrating electrode section. It was constituted as a cleaning degree measuring device equipped with a sensor for setting the distance.
【０００６】[0006]
【作用】前記手段により、以下のような作用を有する。 洗浄度測定装置の昇降テーブルに被処理物を載置
し、駆動機構等のモータ等の駆動により昇降テーブルが
上昇して所望のレベルに設定されるので、厚みの異なる
ものに対応できる。 昇降テーブルは、その全面に電極が設けられている
ので、大きな被処理物の全面に渡って表面電位を測定で
きる。したがって、異なるサイズの被処理物にも対応可
能である。The above-mentioned means has the following effects. The object to be processed is placed on the lifting table of the cleaning degree measuring apparatus, and the lifting table is lifted and set to a desired level by driving a motor such as a drive mechanism, so that it is possible to cope with different thicknesses. Since the lifting table is provided with electrodes on its entire surface, the surface potential can be measured over the entire surface of a large object to be processed. Therefore, it is possible to handle objects of different sizes.
【０００７】[0007]
【実施例】以下、図面に基づいてこの発明の実施例を説
明する。図１は、洗浄度測定装置の全体を示す斜視図、
図２は、洗浄度測定装置の側面図、図３は、洗浄度測定
装置の電気回路の構成を示すブロックダイアグラム図で
ある。洗浄度測定装置１は、被処理物２を載置する昇降
テーブル３と、この昇降テーブル３をガイドバー５に沿
って駆動する駆動機構４と、この駆動機構４で一定位置
まで昇降した後に前記昇降テーブル３の載置部３ａを所
定位置に設定するシリンダ装置３ｂ1 と、昇降テーブル
３に対面するように昇降テーブル３の上方に配置した平
板状の振動電極部６と、昇降テーブル３に載置されてい
る被処理物２の上面から振動電極部６の下面までの距離
を所定の寸法に設定する位置決めセンサー７、８等によ
って構成されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an entire cleaning degree measuring device,
FIG. 2 is a side view of the cleaning degree measuring device, and FIG. 3 is a block diagram showing the configuration of an electric circuit of the cleaning degree measuring device. The cleaning degree measuring apparatus 1 includes an elevating table 3 on which a workpiece 2 is placed, a drive mechanism 4 for driving the elevating table 3 along a guide bar 5, and an elevating table 3 which is moved up and down to a predetermined position by the drive mechanism 4. A cylinder device 3b 1 for setting the placing portion 3a of the lifting table 3 at a predetermined position, a flat plate-shaped vibrating electrode portion 6 arranged above the lifting table 3 so as to face the lifting table 3, and a mounting device mounted on the lifting table 3. The positioning sensor 7, 8 and the like set the distance from the upper surface of the object 2 to be processed to the lower surface of the vibrating electrode portion 6 to a predetermined dimension.
【０００８】図１に示すように前記昇降テーブル３は、
電極３ａ1 を有する載置部３ａと、図２に示すように、
この載置部３ａを上下動させるシリンダー装置３ｂ1 と
載置部３ａの作動をガイドする案内バー３ｂ2，３ｂ2
とを有している。また、載置部３ａは、シリンダー装置
３ｂ1 および案内バー３ｂ2 ，３ｂ2 に着脱自在に係合
しており、被処理物の大きさに応じて載置部３ａを所望
の寸法のものに取り替えることができるようになってい
る。As shown in FIG. 1, the lifting table 3 is
A mounting portion 3a having an electrode 3a 1 and, as shown in FIG.
A cylinder device 3b 1 for vertically moving the placing portion 3a and guide bars 3b 2 , 3b 2 for guiding the operation of the placing portion 3a.
And have. Further, the mounting portion 3a is detachably engaged with the cylinder device 3b 1 and the guide bars 3b 2 and 3b 2 , so that the mounting portion 3a can have a desired size according to the size of the object to be processed. It can be replaced.
【０００９】また、載置部３ａは、そのテーブル周端側
に突出し、かつ、載置部３ａから上下方に移動可能に構
成された位置決め磁気センサー７を少なくとも一個以上
（図では２個）有しており、後述する振動電極部６の側
部に設けた位置決め磁気センサー８との距離が所望の値
に到達すると信号を発生し、シリンダ装置３ｂ1 を停止
させることによって被処理物２の上面から振動電極部６
までの距離を常に一定にするように構成されている。Further, the mounting portion 3a has at least one (two in the figure) positioning magnetic sensor 7 projecting toward the peripheral edge of the table and movable upward and downward from the mounting portion 3a. When the distance to the positioning magnetic sensor 8 provided on the side portion of the vibrating electrode portion 6 described later reaches a desired value, a signal is generated, and the cylinder device 3b 1 is stopped so that the upper surface of the object 2 to be processed. Vibrating electrode part 6
It is configured so that the distance to is always constant.
【００１０】駆動機構４は、ガイドバー５に設けられた
ラック５ａにピニオンが係合すると共に、係合突部４
ａ、４ａがガイドバー５の両側部に設けられた溝ガイド
５ｂ、５ｂに係合して駆動モータの駆動を介してガイド
バー５に沿って昇降するように構成されている。また、
この駆動機構４の側部上端側には、前記昇降テーブル３
の支持アーム３ｄを着脱自在に保持する保持アーム４ｂ
が一体に固設されている。In the drive mechanism 4, the pinion is engaged with the rack 5a provided on the guide bar 5, and the engaging projection 4 is formed.
It is configured that a and 4a are engaged with groove guides 5b and 5b provided on both sides of the guide bar 5 and moved up and down along the guide bar 5 through the driving of a drive motor. Also,
The lifting table 3 is provided on the upper end side of the drive mechanism 4.
Holding arm 4b for detachably holding the supporting arm 3d
Are fixed together.
【００１１】振動電極部６の下面には、前記載置部３ａ
に設けた電極３ａ1に対面するように電磁石６ａ（図３
参照）が碁盤の目状に配設され、この電磁石６ａの振動
により振動する振動電極６ａ1 を有している。また、こ
の振動電極部６は、その側端に支持アーム９を有してお
り、前記ガイドバー５に固定した保持部１０の側端から
延びる保持アーム１１にこの支持アーム９を着脱自在に
保持させている。On the lower surface of the vibrating electrode section 6, the placing section 3a is placed.
To face the electrode 3a 1 provided on the electromagnet 6a (see FIG. 3).
See) is arranged in a grid shape, and has a vibrating electrode 6a 1 for vibration by the vibration of the electromagnet 6a. The vibrating electrode portion 6 has a supporting arm 9 at its side end, and the supporting arm 9 is detachably held by a holding arm 11 extending from the side end of a holding portion 10 fixed to the guide bar 5. I am letting you.
【００１２】洗浄度測定法に使用される公知の電気回路
の概要は、図３で示すように、発信器２０によって作動
する電磁石６ａと、この電磁石６ａの振動により振動電
極６ａ1 が振動し電極３ａ1 との間に生じる信号電圧を
増幅するプリアンプ２１およびメインアンプ２２と、こ
のメインアンプ２２で増幅された信号電圧中の交流成分
を除去する同期検波回路２３と、この同期検波回路２３
が取り出した信号電圧の直流成分を増幅する直流アンプ
２５と、増幅された直流の信号電圧を測定値として表示
する指示計１３，１４（ディスプレイ，電子画面）と、
測定値をプリンター等に記録表示するための出力端子２
６等からなる。なお、図中２７は一定電圧供給用電源回
路、２４はゼロ点調整回路であり、この発明では各電磁
石６ａごとに前記の回路構成を複数個設けている。As shown in FIG. 3, an outline of a known electric circuit used in the cleaning degree measuring method is as follows: an electromagnet 6a operated by a transmitter 20 and a vibrating electrode 6a 1 vibrated by the vibration of the electromagnet 6a. 3a 1 , a preamplifier 21 and a main amplifier 22 for amplifying a signal voltage, a synchronous detection circuit 23 for removing an AC component in the signal voltage amplified by the main amplifier 22, and a synchronous detection circuit 23.
A direct current amplifier 25 for amplifying the direct current component of the signal voltage taken out by, and indicators 13 and 14 (display, electronic screen) for displaying the amplified direct current signal voltage as measured values,
Output terminal 2 for recording and displaying measured values on a printer
It consists of 6 mag. In the figure, 27 is a constant voltage power supply circuit, and 24 is a zero-point adjusting circuit. In the present invention, a plurality of the above circuit configurations are provided for each electromagnet 6a.
【００１３】また、図１における１２は洗浄度の限界許
容値を入力する操作ボード、１３は測定値が限界値を越
えたときに警告を発するディスプレイ、１４は被処理物
２上の各部の表面電位の測定値、すなわち、各指示計の
目盛りを測定場所ごとに表示する電子画面であり、この
電子画面には、振動電極部６に設けられている電磁石電
極６ａ1 の数に対応した分割画面数が表示されており、
被処理物２のどの位置がどの程度汚れているか数値で判
断できるように構成されている。Further, 12 in FIG. 1 is an operation board for inputting a permissible limit value of the cleaning degree, 13 is a display for issuing a warning when the measured value exceeds the limit value, and 14 is a surface of each part on the object to be processed 2. This is an electronic screen that displays the measured value of the electric potential, that is, the scale of each indicator for each measurement location. This electronic screen has a divided screen corresponding to the number of electromagnet electrodes 6a 1 provided in the vibrating electrode section 6. The number is displayed,
It is configured such that it can be numerically determined which position of the object to be processed 2 is dirty.
【００１４】次に、洗浄度測定装置をその使用手順に沿
って説明する。はじめに、洗浄度測定装置１を使用する
際は、ゼロ調整回路２４によりゼロアジャストを行い、
ディスプレイ１３，１４の指示計の目盛りを零に合わせ
る。洗浄度測定装置１の昇降テーブル３に被処理物２を
載置したのち、駆動機構４等を駆動して昇降テーブル３
を上昇させる。そして、一方のセンサー７、８の検出に
より駆動機構４を振動電極部６の近傍で停止させ、他方
のセンサー７、８の検出によりシリンダー装置３ｂ1 が
駆動して所定位置に被処理物２を設定することになる。Next, the cleaning degree measuring device will be described along with its use procedure. First, when using the cleaning degree measuring device 1, zero adjustment is performed by the zero adjustment circuit 24,
Set the scale of the indicators on the displays 13 and 14 to zero. After the workpiece 2 is placed on the lifting table 3 of the cleaning degree measuring apparatus 1, the driving mechanism 4 is driven to move the lifting table 3
Raise. Then, the drive mechanism 4 is stopped in the vicinity of the vibrating electrode section 6 by the detection of one of the sensors 7 and 8, and the cylinder device 3b 1 is driven by the detection of the other sensor 7 and 8 to move the workpiece 2 to a predetermined position. Will be set.
【００１５】そして、被処理物２の上面と振動電極部６
の下面との距離が0.5mm になるとシリンダー装置３ｂ1
が停止する。電極３ａ1 に載置された被処理物２の表面
と振動電極６ａ1 の間には、被処理物２の表面の電位と
距離に応じた電気容量が発生する。ここで電源スイッチ
を入れると発信器２０が２２０ＨZ の交流を各電磁石６
ａに供給し、各振動電極６ａ1 が振動する。この振動に
より振動電極６ａ1に対向する被処理物２の部分との電
気容量が変化する。The upper surface of the object 2 to be processed and the vibrating electrode portion 6
When the distance from the bottom surface of the cylinder becomes 0.5 mm, the cylinder device 3b 1
Stops. Between the surface of the object 2 to be processed placed on the electrode 3a 1 and the vibrating electrode 6a 1 , an electric capacity corresponding to the potential of the surface of the object 2 to be processed and the distance is generated. Wherein each exchange with transmitter 20 is 220H Z turn switch electromagnet 6
and each vibrating electrode 6a 1 vibrates. Due to this vibration, the capacitance with the portion of the object to be processed 2 facing the vibrating electrode 6a 1 changes.
【００１６】そして、この電気容量の変化に対応する変
動電位が、プリアンプ２１に送られ、さらに、増幅、検
波されたのちディスプレー１４の指示計に表示される。The fluctuating potential corresponding to the change in the electric capacity is sent to the preamplifier 21, further amplified and detected, and then displayed on the indicator of the display 14.
【００１７】被処理物２のある部分の上面が汚れている
場合は、他の部分に比べて表面電位が高くなる。そし
て、この表面電位の上昇はディスプレー１４の指示計に
表示される。したがって、この指示計の目盛りを比較す
ることによって、被処理物２のどの部分が汚れているか
判断でき、再洗浄をおこなうときの目安となる。When the upper surface of a portion of the object to be processed 2 is dirty, the surface potential becomes higher than that of other portions. Then, the rise of the surface potential is displayed on the indicator of the display 14. Therefore, by comparing the scales of the indicator, it is possible to determine which part of the object to be treated 2 is dirty, and it can be used as a guide when rewashing.
【００１８】なお、この発明は、上記の実施例に限定さ
れるものではなく、例えば、駆動機構等に替えて送りネ
ジを使用して昇降テーブルを駆動し、被処理物の設定位
置を決める構成とすること等、その他この発明の要旨を
逸脱しない範囲において種々の変更ができることは勿論
である。The present invention is not limited to the above-mentioned embodiment, and for example, a feed screw is used instead of the driving mechanism to drive the lifting table to determine the setting position of the object to be processed. Needless to say, various modifications can be made without departing from the scope of the present invention.
【００１９】[0019]
【発明の効果】この発明は上記のように構成したので、
以下に記載する効果を奏する。 被処理物を載置する昇降テーブルは、所望の位置決
めレベルに設定されるので、種々の厚みの被処理物がそ
の洗浄度を測定できる。 洗浄度測定の昇降テーブルは、その上面略全面に電
極が設けられているため、広い面積の洗浄度測定が可能
となり、大きな被処理物にも対応できる。Since the present invention is constructed as described above,
The following effects are achieved. Since the lifting table on which the object to be processed is placed is set to a desired positioning level, the objects to be processed having various thicknesses can measure the cleaning degree. Since the lifting table for measuring the cleaning degree has electrodes provided on substantially the entire upper surface thereof, it is possible to measure the cleaning degree in a large area and can be applied to a large object to be processed.
【図１】洗浄度測定装置の全体を示す斜視図である。FIG. 1 is a perspective view showing an entire cleaning degree measuring device.
【図２】洗浄度測定装置の側面図である。FIG. 2 is a side view of a cleaning degree measuring device.
【図３】洗浄度測定装置の原理を示すブロックダイアグ
ラム図である。FIG. 3 is a block diagram showing the principle of a cleaning degree measuring device.
１ 洗浄度測定装置 ２ 被処理物 ３ 昇降テーブル ４ 駆動機構 ５ ガイドバー ６ 振動電極部 ７ 位置決めセンサー ８ 位置決めセンサー 1 Cleaning degree measuring device 2 Object to be processed 3 Lifting table 4 Drive mechanism 5 Guide bar 6 Vibrating electrode part 7 Positioning sensor 8 Positioning sensor
Claims (1)
の昇降テーブルを昇降自在に駆動する駆動機構と、前記
昇降テーブルに対向するように昇降テーブルの上方に配
置した振動電極部と、前記昇降テーブル上に載置した被
処理物と前記振動電極部間の距離を設定するセンサーと
を備えたことを特徴とする洗浄度測定装置。1. An elevating table having an electrode on its upper surface, a drive mechanism for driving the elevating table to move up and down, a vibrating electrode section disposed above the elevating table so as to face the elevating table, and the elevating table. A cleaning degree measuring device comprising: a workpiece placed on a table and a sensor for setting a distance between the vibrating electrode portions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3291299A JP2909670B2 (en) | 1991-11-07 | 1991-11-07 | Cleaning degree measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3291299A JP2909670B2 (en) | 1991-11-07 | 1991-11-07 | Cleaning degree measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05129262A true JPH05129262A (en) | 1993-05-25 |
| JP2909670B2 JP2909670B2 (en) | 1999-06-23 |
Family
ID=17767095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3291299A Expired - Lifetime JP2909670B2 (en) | 1991-11-07 | 1991-11-07 | Cleaning degree measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2909670B2 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61162045U (en) * | 1985-03-27 | 1986-10-07 | ||
| JPH02114113A (en) * | 1988-10-24 | 1990-04-26 | Hitachi Ltd | Microscope apparatus with function of measuring flatness |
| JPH02114386A (en) * | 1988-10-25 | 1990-04-26 | Mitsubishi Electric Corp | Defect inspecting device |
| JPH02170279A (en) * | 1988-12-23 | 1990-07-02 | Hitachi Ltd | Method and device for detecting defect of pattern to be checked |
| JPH02224243A (en) * | 1988-11-01 | 1990-09-06 | Matsushita Electron Corp | Cleaner and cleaning degree measuring method |
-
1991
- 1991-11-07 JP JP3291299A patent/JP2909670B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61162045U (en) * | 1985-03-27 | 1986-10-07 | ||
| JPH02114113A (en) * | 1988-10-24 | 1990-04-26 | Hitachi Ltd | Microscope apparatus with function of measuring flatness |
| JPH02114386A (en) * | 1988-10-25 | 1990-04-26 | Mitsubishi Electric Corp | Defect inspecting device |
| JPH02224243A (en) * | 1988-11-01 | 1990-09-06 | Matsushita Electron Corp | Cleaner and cleaning degree measuring method |
| JPH02170279A (en) * | 1988-12-23 | 1990-07-02 | Hitachi Ltd | Method and device for detecting defect of pattern to be checked |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2909670B2 (en) | 1999-06-23 |
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