JPH05128963A - Electron gun - Google Patents
Electron gunInfo
- Publication number
- JPH05128963A JPH05128963A JP8665191A JP8665191A JPH05128963A JP H05128963 A JPH05128963 A JP H05128963A JP 8665191 A JP8665191 A JP 8665191A JP 8665191 A JP8665191 A JP 8665191A JP H05128963 A JPH05128963 A JP H05128963A
- Authority
- JP
- Japan
- Prior art keywords
- electron gun
- cathode
- indirectly heated
- electron
- lab
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子銃、更に詳しくい
えば、補助電子銃から放出された電子線照射により発熱
する発熱体と、その発熱体による加熱によって熱電子を
放出する陰極部材をもつ傍熱型電子銃に係り、特に大電
流で長寿命化に好適な電子銃の構成に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron gun, and more specifically, to a heating element which generates heat by irradiation of an electron beam emitted from an auxiliary electron gun, and a cathode member which emits thermoelectrons by heating by the heating element. The present invention relates to an indirectly heated electron gun, and more particularly to a configuration of an electron gun suitable for long life with a large current.
【０００２】[0002]
【従来の技術】電子線加速器や電子線溶接器で用いられ
ている電子銃には、アンペアオ−ダの大電流が必要であ
る。このような大電流が得られるものとして、高い放射
電流密度の得易いＬａＢ6陰極を用いた熱電子銃が使用
されている。一般に、熱電子銃において大電流を得よう
とすると、高温で動作させる必要があり、そのために寿
命が短いという問題が生じる。この主たる原因は、陰極
部材の蒸発によるものであるが、陰極部材がすべて消耗
する訳ではなく、蒸発に伴う特性の劣化や寸法変化によ
る陰極支持体の形状変化によるものである。特に、電子
線加速器や電子線溶接器では、大電流のみならず陰極か
ら放出された電子線はわずかな距離で高エネルギ−に加
速する必要がある。そのために、耐放電の問題から陰極
を支持する方法は極めて難しい。2. Description of the Related Art An electron gun used in an electron beam accelerator or an electron beam welder requires a large current of ampere order. A thermoelectron gun using a LaB 6 cathode, which can easily obtain a high emission current density, is used as a device that can obtain such a large current. Generally, in order to obtain a large current in a thermoelectron gun, it is necessary to operate at a high temperature, which causes a problem that the life is short. The main cause of this is evaporation of the cathode member, but not all of the cathode member is consumed, but deterioration of the characteristics and a change in shape of the cathode support due to dimensional change accompanying evaporation. Particularly, in an electron beam accelerator or an electron beam welder, not only a large current but also an electron beam emitted from the cathode needs to be accelerated to high energy at a short distance. Therefore, the method of supporting the cathode is extremely difficult due to the problem of discharge resistance.
【０００３】電子線加速器の一つであるマイクロトロン
の従来の電子銃は、図４に示すような構造になってい
た。すなわち円柱状のＬａＢ6陰極部材１は、支持体２
に直接機械的に保持されていた。なお、この種の従来技
術が記載された文献として、エス・ピー・カピッツァ，
他著；“マイクロトロン”，ハーウッド・アカデミック
・パブリシャズ（1978）１１２−１１５頁〔Ｓ．Ｐ．Ｋ
apitza et. al. ; “Ｔhe Ｍicrotron”,Ｈarwood Ａc
ademic Ｐublishers（１９７８），p１１２−１１５〕
が挙げられる。A conventional electron gun of a microtron, which is one of electron beam accelerators, has a structure shown in FIG. That is, the cylindrical LaB 6 cathode member 1 is composed of the support 2
Was mechanically held directly to. As a document describing this type of conventional technology, S.P.
Other work; "Microtron", Harwood Academic Publicize (1978) 112-115 [S. P. K
apitza et. al .; “The Microtron”, Harwood Ac
ademic Publishers (1978), p112-115]
Is mentioned.
【０００４】[0004]
【発明が解決しようとする課題】上記した従来の傍熱型
電子銃は、陰極材の蒸発により寸法に変化が生じ、支持
体が陰極を支持できなくなり、陰極材が支持体から脱落
しやすかった。そのために電子銃の寿命が短いという問
題が生じていた。本発明の目的は、従来技術での上記し
た問題を解決し、長寿命な傍熱型電子銃を提供すること
にある。本発明の他の目的は、大電流で動作し、しかも
長寿命な傍熱電子銃を提供することにある。In the above-mentioned conventional indirectly heated electron gun, the dimensions change due to evaporation of the cathode material, the support can no longer support the cathode, and the cathode material easily falls off from the support. .. Therefore, there has been a problem that the life of the electron gun is short. An object of the present invention is to solve the above-mentioned problems in the prior art and provide a long-life indirectly heated electron gun. Another object of the present invention is to provide an indirectly heated electron gun which operates at a large current and has a long life.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するた
め、本発明は、傍熱型電子銃において、陰極部材と補助
電子銃から放出された電子線照射により発熱する発熱体
との間に上記陰極部材の電子放出面を残した部分を覆う
耐腐食材を設けた。特に好ましい実施形態としては、電
子放射陰極材にＬａＢ6、耐腐食材にグラッシィカーボ
ン、発熱体兼支持にタンタル、レニウム、モリブデン、
炭素等を用い、上記陰極と上記支持体を一体化した。グ
ラッシィカーボンはフルフリルアルコールとＰ−トルエ
ンスルホン酸エチルの粘土質混合体を真空加熱によって
固化したものである。In order to achieve the above-mentioned object, the present invention provides an indirectly heated electron gun, wherein a cathode member and a heating element which generates heat by irradiation of an electron beam emitted from an auxiliary electron gun are provided. A corrosion resistant material was provided to cover the portion of the cathode member where the electron emission surface was left. As a particularly preferred embodiment, LaB 6 is used as the electron emission cathode material, glassy carbon is used as the corrosion resistant material, and tantalum, rhenium, molybdenum is used as the heating element and support,
The cathode and the support were integrated using carbon or the like. Grassy carbon is a solidified clayey mixture of furfuryl alcohol and ethyl P-toluenesulfonate by vacuum heating.
【０００６】[0006]
【作用】従来の傍熱型電子銃において、陰極部材が支持
体を兼ねる発熱体から脱落するのは以下の理由に起因し
ていた。すなわち、大電流を得るためにはＬａＢ6陰極
が適しているが、ＬａＢ6陰極から大電流を得ようとす
ると、ＬａＢ6陰極を１５００℃以上の高温に加熱する
必要がある。このような高温域ではＬａＢ6陰極の蒸発
が生じ、陰極部材の外形寸法が変化する。そのため支持
体（発熱体）からの脱落を引き起こしていた。本発明で
は、グラッシィーカーボンのような耐腐食材で陰極を電
子放射面を残して被覆したので、陰極材の蒸発による寸
法の変化が抑えられ、陰極材の支持体からの脱落が防止
される。In the conventional indirectly heated electron gun, the reason why the cathode member is detached from the heating element which also serves as the support is due to the following reasons. That is, in order to obtain a large current is suitable LaB 6 cathode, in order to obtain a large current from LaB 6 cathode, it is necessary to heat LaB 6 cathode to temperatures higher than 1500 ° C.. In such a high temperature range, evaporation of the LaB 6 cathode occurs, and the outer dimensions of the cathode member change. As a result, it has fallen off from the support (heating element). In the present invention, since the cathode is coated with a corrosion resistant material such as glassy carbon while leaving the electron emission surface, the dimensional change due to evaporation of the cathode material is suppressed and the cathode material is prevented from falling off the support. ..
【０００７】特に、陰極部材としてＬａＢ6を用いる場
合、大電流が得られるとともに、グラッシィーカーボン
で被覆されたＬａＢ6面は蒸発による消耗が全くない。
また、グラッシィーカーボンは高温で析出するボロンと
反応しないため、電子銃の長寿命化が図れる。特に傍熱
型電子銃においては、補助電子銃から放出された電子線
がグラッシィーカーボンに直接照射されるとカーボンの
劣化が激しく、長寿命化が実現できないが、本発明で
は、電子線の照射は、直接グラッシィーカーボンに照射
されず、支持体（発熱体）が配置されるため、グラッシ
ィーカーボンの劣化は少なく、長寿命化と大電流化が同
時に実現できる。In particular, when LaB 6 is used as the cathode member, a large current can be obtained, and the LaB 6 surface coated with glassy carbon is not consumed at all by evaporation.
Further, since the glassy carbon does not react with the boron deposited at a high temperature, the life of the electron gun can be extended. Particularly in the indirectly heated electron gun, when the electron beam emitted from the auxiliary electron gun is directly irradiated on the glassy carbon, the carbon is severely deteriorated and the life cannot be extended. However, in the present invention, the electron beam irradiation is performed. Since the support is not directly irradiated on the glassy carbon but the support (heating element) is arranged, the deterioration of the glassy carbon is small, and the long life and the large current can be realized at the same time.
【０００８】[0008]
【実施例】以下、図面により本発明の実施例を説明す
る。図１は本発明による傍熱型電子銃の一実施例の要部
断面図である。同図において、ＬａＢ6単結晶陰極部材
１は外径部に段差を設けた円柱状のＬａＢ6単結晶の陰
極部材である。これはグラッシィカーボン４が着けられ
ない電子放射面に対抗する面の大きさが上記電子放射面
より大きいことにより確実に支持できる構造である。こ
のＬａＢ6単結晶陰極部材１は、高融点材で構成した２
つの支持体２、３により、小径の円柱部が支持体２で、
大径の円柱部が支持体３でそれぞれ支持されており、さ
らに、この陰極部材１と支持体２、３との隙間にはグラ
ッシィカーボン４が埋め込まれている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an essential part of one embodiment of an indirectly heated electron gun according to the present invention. In the figure, the LaB 6 single crystal cathode member 1 is a columnar LaB 6 single crystal cathode member having a step on the outer diameter. This is a structure that can be reliably supported because the size of the surface facing the electron emission surface on which the glassy carbon 4 is not attached is larger than the electron emission surface. This LaB 6 single crystal cathode member 1 is composed of a high melting point material 2
With the two supports 2 and 3, the small-diameter cylindrical portion is the support 2,
A large-diameter columnar portion is supported by a support body 3, and a glassy carbon 4 is embedded in a gap between the cathode member 1 and the support bodies 2 and 3.
【０００９】これらの固定やハンドリングを容易にする
ために、支持体２、３は円筒状になった支持棒５に取り
付けられている。支持棒５の円筒状の一部には、ＬａＢ
6単結晶陰極１から熱電子７を取り出す穴６が側面にあ
けられている。熱電子７を発生させるために、補助電子
銃８が設けられており、補助電子銃８から放出された電
子線９によりＬａＢ6単結晶陰極１は支持体２、３を介
して加熱される。おさえ１０は支持体２、３を固定位置
に保持するための円環状の部材である。In order to facilitate the fixing and handling of these, the supports 2 and 3 are attached to a cylindrical support rod 5. The cylindrical portion of the support rod 5 has a LaB
6 A hole 6 for taking out thermoelectrons 7 from the single crystal cathode 1 is formed on the side surface. An auxiliary electron gun 8 is provided to generate thermoelectrons 7, and the LaB 6 single crystal cathode 1 is heated via the supports 2 and 3 by an electron beam 9 emitted from the auxiliary electron gun 8. The retainer 10 is an annular member for holding the supports 2 and 3 at a fixed position.
【００１０】大電流を得るためには、ＬａＢ6単結晶陰
極部材１の加熱温度を１５００℃以上にする必要があ
る。このときＬａＢ6単結晶陰極部材１から金属に対し
て活性であるＢ（ボロン）が析出して金属を腐食させ
る。従って、本実施例では支持体２、３および支持棒５
は、高融点でかつボロンに対して腐食しにくいタンタル
（Ｔａ）材を用いた。また、本構成のもう一つ特徴は、
ＬａＢ6単結晶陰極部材１の電子放射面以外の面をグラ
ッシィカーボン４で被覆していることである。このグラ
ッシィカーボン４で被覆されたＬａＢ6単結晶の面は蒸
発による消耗がほとんどない。したがって、傍熱型電子
銃の長寿命化を図ることができる。In order to obtain a large current, the heating temperature of the LaB 6 single crystal cathode member 1 must be 1500 ° C. or higher. At this time, B (boron), which is active with respect to the metal, is deposited from the LaB 6 single crystal cathode member 1 and corrodes the metal. Therefore, in this embodiment, the supports 2 and 3 and the support rod 5 are used.
Is a tantalum (Ta) material that has a high melting point and is not easily corroded by boron. In addition, another feature of this configuration is
That is, the surface other than the electron emission surface of the LaB 6 single crystal cathode member 1 is coated with the glassy carbon 4. The surface of the LaB 6 single crystal coated with this glassy carbon 4 is hardly consumed by evaporation. Therefore, the life of the indirectly heated electron gun can be extended.
【００１１】本実施例の傍熱型電子銃を電子線加速器に
搭載して用いたところ、ＬａＢ6単結晶陰極１の寿命は
従来の数倍である約２０００時間を達成することができ
た。また、グラッシィカーボン４でＬａＢ6単結晶陰極
部材１と支持体２、３の間にできる隙間を埋めることが
できる。このため支持体２、３からＬａＢ6単結晶陰極
１への熱伝導性が向上し、補助電子銃８からの電子線９
の照射も低減でき、補助電子銃８の長寿命化も同時に実
現することができた。When the indirectly heated electron gun of this embodiment was used by being mounted on an electron beam accelerator, the life of the LaB 6 single crystal cathode 1 was able to reach about 2000 hours, which is several times that of the conventional one. Further, the gap formed between the LaB 6 single crystal cathode member 1 and the supports 2 and 3 can be filled with the glassy carbon 4. Therefore, the thermal conductivity from the supports 2 and 3 to the LaB 6 single crystal cathode 1 is improved, and the electron beam 9 from the auxiliary electron gun 8 is increased.
It was also possible to reduce the amount of irradiation and to extend the life of the auxiliary electron gun 8 at the same time.
【００１２】以上、本発明の一実施例について述べた
が、本発明は上記実施例に限定されるものではなく、以
下に示すような種々の変形構成も可能である。例えば、
おさえ１０をスポット溶接やレ−ザ溶接により強制的に
陰極の支持体２、３と支持棒５との連結部に固定溶接す
る構造としてもよい。また、図１の実施例では補助電子
銃８を支持棒５の外に配置する構成にしたが、図２の本
発明の他の実施例に示すように、支持棒５に補助電子銃
８を収納した構成にしても良い。Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modified configurations as shown below are possible. For example,
It is also possible to adopt a structure in which the retainer 10 is forcibly fixed and welded to the connecting portion between the cathode supports 2 and 3 and the support rod 5 by spot welding or laser welding. Although the auxiliary electron gun 8 is arranged outside the support rod 5 in the embodiment of FIG. 1, the auxiliary electron gun 8 is attached to the support rod 5 as shown in another embodiment of the present invention of FIG. It may be configured to be stored.
【００１３】更に、図３の本発明の他の実施例に示すよ
うに、熱電子７を支持棒５の軸方向から発生させる構成
にしても良い。また、図１の実施例では支持体２、３と
支持棒５にタンタルを用いたが、炭素、レニウム、モリ
ブデン等の材料を用いても可能である。以上はＬａＢ6
単結晶陰極１を個別の部材で挾み込む構成の実施例を示
したが、これに限るものではなく高温域でもＬａＢ6陰
極１が確実に支持できるものであれば本発明の本質を損
なうものではない。また、図１の実施例では補助電子銃
８はタングステンフィラメントを用いたが、これに限る
ものではない。Further, as shown in another embodiment of the present invention in FIG. 3, the thermoelectrons 7 may be generated in the axial direction of the support rod 5. Further, although tantalum is used for the supports 2 and 3 and the support rod 5 in the embodiment of FIG. 1, it is also possible to use materials such as carbon, rhenium and molybdenum. The above is LaB 6
Although the embodiment in which the single crystal cathode 1 is sandwiched by the individual members is shown, the present invention is not limited to this, and the essential point of the present invention is impaired if the LaB 6 cathode 1 can be reliably supported even in a high temperature range. is not. Further, although the auxiliary electron gun 8 uses the tungsten filament in the embodiment of FIG. 1, the present invention is not limited to this.
【００１４】[0014]
【発明の効果】本発明による構造を備えた傍熱型電子銃
を電子線加速器に搭載して用いたところ、グラッシィカ
ーボンでＬａＢ6単結晶陰極１の蒸発による消耗がおさ
えられ、従来の寿命の数倍である約２０００時間を達成
することができた。これより、大電流で長寿命な傍熱型
電子銃を提供できるようになった。When the indirectly heated electron gun having the structure according to the present invention is mounted on the electron beam accelerator and used, the consumption of LaB 6 single crystal cathode 1 due to evaporation is suppressed by the glassy carbon and the conventional life is shortened. It was possible to achieve about 2000 hours, which is several times higher than the above. This makes it possible to provide an indirectly heated electron gun with a large current and a long life.
【図１】本発明による傍熱型電子銃の一実施例を示す断
面図である。FIG. 1 is a sectional view showing an embodiment of an indirectly heated electron gun according to the present invention.
【図２】本発明による傍熱型電子銃の他の実施例を示す
断面図である。。FIG. 2 is a sectional view showing another embodiment of the indirectly heated electron gun according to the present invention. .
【図３】本発明による傍熱型電子銃の更に他の実施例を
示す断面図である。FIG. 3 is a sectional view showing still another embodiment of the indirectly heated electron gun according to the present invention.
【図４】従来の傍熱型電子銃の断面図である。FIG. 4 is a cross-sectional view of a conventional indirectly heated electron gun.
１…ＬaＢ6単結晶陰極部材 ２，３…支持体、 ４…グラッシィカーボン、 ５…支持棒、 ６…穴、 ７，９…電子線、 ８…補助電子銃、 １０…おさえ。1 ... LaB 6 single crystal cathode members 2 ... support, 4 ... glassy I carbon, 5 ... supporting rod, 6 ... holes, 7,9 ... electron beam, 8 ... auxiliary electron gun, 10 ... presser.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 西村 正俊 千葉県柏市新十余二２−１ 株式会社日立 メデイコ柏工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masatoshi Nishimura 2-1 Shinjuyo, Kashiwa City, Chiba Prefecture Hitachi Medico Kashiwa Plant
Claims (4)
より陰極が加熱されて熱電子を放出する傍熱型の電子銃
において、 上記陰極が加熱によって電子を放出する電子放射陰極部
材と、上記陰極部材の電子放出面外を覆う耐腐食材と、
上記耐腐食材を介して上記陰極部材を保持する支持体と
で構成されたことを特徴とする電子銃。1. An indirectly heated electron gun in which a cathode is heated by irradiation of an electron beam emitted from an auxiliary electron gun to emit thermoelectrons, wherein the cathode emits electrons by heating, and A corrosion resistant material covering the outside of the electron emission surface of the cathode member,
An electron gun comprising a support body that holds the cathode member via the corrosion resistant material.
子放射陰極部材がＬａＢ6、上記耐腐食材がグラッシィ
カーボンで構成されたことを特徴とする電子銃。2. The electron gun according to claim 1, wherein the electron emitting cathode member is made of LaB 6 and the corrosion resistant material is made of glassy carbon.
上記支持体がタンタル、レニウム、モリブデン又は炭素
のいずれかで構成されたことを特徴とする電子銃。3. The electron gun according to claim 1,
An electron gun, wherein the support is made of tantalum, rhenium, molybdenum, or carbon.
極部材の上記グラッシィカーボンが着けられない電子放
射面に対抗する面の大きさが上記電子放射面より大きい
ことを特徴とする電子銃。4. The electron gun according to claim 2, wherein a size of a surface of the cathode member facing the electron emission surface on which the glassy carbon is not attached is larger than the electron emission surface. ..
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8665191A JPH05128963A (en) | 1991-04-18 | 1991-04-18 | Electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8665191A JPH05128963A (en) | 1991-04-18 | 1991-04-18 | Electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05128963A true JPH05128963A (en) | 1993-05-25 |
Family
ID=13892938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8665191A Pending JPH05128963A (en) | 1991-04-18 | 1991-04-18 | Electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05128963A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08339774A (en) * | 1995-06-13 | 1996-12-24 | Hitachi Medical Corp | Electron gun |
| WO2008140080A1 (en) * | 2007-05-16 | 2008-11-20 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| JP2013131505A (en) * | 2013-03-29 | 2013-07-04 | Param Co Ltd | Electron gun and electron beam device |
| CN103392216A (en) * | 2011-02-25 | 2013-11-13 | 株式会社Ｐａｒａｍ | Electron gun and electron beam device |
-
1991
- 1991-04-18 JP JP8665191A patent/JPH05128963A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08339774A (en) * | 1995-06-13 | 1996-12-24 | Hitachi Medical Corp | Electron gun |
| WO2008140080A1 (en) * | 2007-05-16 | 2008-11-20 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| EP2148354A1 (en) * | 2007-05-16 | 2010-01-27 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| US20100090581A1 (en) * | 2007-05-16 | 2010-04-15 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| JPWO2008140080A1 (en) * | 2007-05-16 | 2010-08-05 | 電気化学工業株式会社 | Electron source |
| EP2148354A4 (en) * | 2007-05-16 | 2011-09-07 | Denki Kagaku Kogyo Kk | Electron source |
| JP5011383B2 (en) * | 2007-05-16 | 2012-08-29 | 電気化学工業株式会社 | Electron source |
| US8436524B2 (en) | 2007-05-16 | 2013-05-07 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| CN103392216A (en) * | 2011-02-25 | 2013-11-13 | 株式会社Ｐａｒａｍ | Electron gun and electron beam device |
| JP5525104B2 (en) * | 2011-02-25 | 2014-06-18 | 株式会社Ｐａｒａｍ | Electron gun and electron beam device |
| US9070527B2 (en) | 2011-02-25 | 2015-06-30 | Param Corporation | Electron gun and electron beam device |
| JP2013131505A (en) * | 2013-03-29 | 2013-07-04 | Param Co Ltd | Electron gun and electron beam device |
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