JPH0512882U - Fluoropolymer composite pipe - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a fluororesin composite pipe that does not corrode electric wires by a high-purity fluid that penetrates the tube wall of the fluororesin tube. [Structure] The fluororesin composite pipe is composed of a synthetic resin tube (2) covering the fluororesin tube (1) and a thin thin portion (3) extending in the longitudinal direction of the synthetic resin tube (2). Connect the resin electric wire tube (5) integrally,
An electric wire is wired in the electric wire tube (5).

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a fluororesin composite pipe, and more particularly to a fluororesin composite pipe for a high-purity fluid for transporting gases such as nitric acid, hydrochloric acid, ultrapure water or phosphine used as an etching solution or a cleaning solution.

[0002]

[Prior Art]

 In general, in the field of semiconductor manufacturing, various liquids such as a high-purity liquid that dislikes dust and the like, or a liquid contained in a powerful drug are used. These liquids or gases are transported by transportation pipes, but since leakage of fluid is dangerous, sufficient precautions are taken for safety measures.

FIG. 4 shows an example of conventional safety measures. Reference numeral 21 indicates a fluororesin tube through which a high-purity liquid or gas flows, and the tube 21 is connected by a joint 22. The fluororesin tube 21 is surrounded by a transparent vinyl chloride pipe 23 over the entire length thereof, and the joint 22 which is a connecting portion of the tube 21 is surrounded by a transparent vinyl chloride box 25. A sensor 26 for detecting a liquid leak is attached to the vinyl chloride box 25 so that a leak of a liquid or gas can be detected.

By the way, since this type of fluororesin tube 21 has a total length of several hundreds of meters, work such as installation of the vinyl chloride pipe 23 or wiring of the liquid leak sensor 26 described above is required. There is a problem that it becomes extremely troublesome. In order to solve this problem, as shown in FIG. 5, the outer side of the fluororesin tube 21 is covered with a synthetic resin tube 27, and a plurality of tubes are provided between the fluororesin tube 21 and the synthetic resin tube 27. There is proposed a pipe in which the electric wire 28 is embedded, and the electric wire 28 and the fluororesin tube 21 are integrated so that work such as wiring work of the liquid leak sensor 26 can be simplified.

[0005]

[Problems to be solved by the device]

 However, in the case where the electric wire 28 and the fluororesin tube 21 are integrated, the high-purity fluid penetrates the tube wall of the fluororesin tube 21 when the fluororesin tube 21 is thin. The electric wire 28 may be corroded. Therefore, an object of the present invention is to solve the above-mentioned problems of the conventional technology, and to provide a fluororesin composite pipe that does not corrode an electric wire with a high-purity fluid that permeates the tube wall of the fluororesin tube. To provide.

[0006]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention provides an electric wire tube made of synthetic resin on the outer periphery of a synthetic resin tube covering a fluororesin tube through a thin thin portion extending in the longitudinal direction thereof. It is characterized in that they are integrally connected and an electric wire is laid in the electric wire tube, and the width of the thin portion is smaller than the diameter of the electric wire tube.

[0007]

[Action]

 According to the present invention, a synthetic resin electric wire tube is integrally connected to the outer periphery of a synthetic resin tube covering a fluororesin tube through a thin thin portion extending in the longitudinal direction, Since the wire was laid inside the wire tube, even if a high-purity fluid penetrates the fluororesin tube, this fluid will stop at the thin-walled part and will not penetrate to the wire tube side. The wires are not corroded.

[0008]

【Example】

 An embodiment of the fluororesin composite pipe according to the present invention will be described below with reference to FIGS. In FIG. 1, reference numeral 1 indicates a fluororesin tube through which a high-purity liquid or gas flows. The outside of the fluororesin tube 1 is covered with a synthetic resin tube 2. Further, on one side edge of the outer circumference of the synthetic resin tube 2, a small diameter synthetic resin electric wire tube 5 is provided through a synthetic resin thin portion 3 extending over the entire length of the tube 2 in the longitudinal direction. Are integrally connected. A plurality of resin-coated electric wires 6, 6, ... 6 are wired in the electric wire tube 5.

As the material of the fluororesin tube 1, polytetrafluoroethylene (PTFE), a copolymer of tetrafluoroethylene and perfluoroalkylvinyl (PFA), a copolymer of tetrafluoroethylene and hexafluoropropylene is used. Polymer (ETFE), polyvinylidene fluoride (PVdF) polychlorotrifluoroethylene (PCTFE) polyvinylfluorite (PVF), tetrafluoroethylene / hexafluoropropylene / perfluorovinyl ether copolymer (EPE) and the like are preferable. Is.

When auxiliary agents, plasticizers, etc. are mixed in the molding of the fluororesin tube 1, be careful not to leave these in the tube 1, and especially in molding, the dimensions of the tube 1 It is necessary to pay attention to accuracy. Among the above materials, those having excellent chemical resistance and heat resistance are PFA and FEP, and it is preferable to use these materials. Suitable materials for the synthetic resin tube 2 and the synthetic resin electric wire tube 5 are polyethylene, polypropylene, polyacrylonitrile polyvinyl chloride, and the like. It should be noted that it is preferable to use a material that does not generate a harmful gas such as a halogen gas even if a fire or the like should occur, such as the above-mentioned polyethylene.

The synthetic resin tube 2 and the synthetic resin electric wire tube 5 may be colored so that the liquid or gas flowing therein can be identified. Coloring is done by mixing pigments in the materials of tubes 2 and 5 or applying paint. The synthetic resin tube 2 and the electric wire tube 5 may be electrically conductive. As a result, static electricity generated in the fluororesin tube 1 is prevented from being charged, and the risk of fire or the like can be prevented. To make it conductive, mix carbon, metal powder, etc. into the material of tubes 2 and 5, or apply conductive paint.

The thin portion 3 which is continuous in the longitudinal direction is formed of the same material as the tubes 2 and 5. As shown in FIG. 2, the width w of the thin portion 3 is such that the high-purity fluid that permeates the tube wall of the fluororesin tube 1 does not permeate to the electric wire tube 5 side where the electric wires 6 are bundled. Also, in terms of strength, it is formed with an appropriate narrow width w so that the tubes 2 and 5 are not cut. According to this, even if a high-purity fluid passes through the tube wall of the fluororesin tube 1, it will not penetrate into the electric wire tube 5 side and the electric wire 6 will not be corroded. Since the width w of 3 is thin, various effects such as easy cutting with a knife can be obtained.

Since the electric wire tube 5 is usually smaller in diameter than the synthetic resin tube 2, the width w of the thin portion 3 is preferably smaller than the diameter of the electric wire tube 5, that is, about 1 to 3 mm. On the contrary, if the electric wire tube 5 has a larger diameter than the synthetic resin tube 2, it is preferable that the width w of the thin portion 3 is smaller than the diameter of the synthetic resin tube 2.

Further, the larger the height l (FIG. 2) of the thin portion 3, the less the amount of fluid permeation. However, the larger the height l, the more difficult it is to handle during construction. Therefore, the height l is appropriate. It is preferable to set the size. The resin-coated electric wire 6 is formed by coating a linear or band-shaped electric wire with fluororesin or polyethylene. This may be an optical fiber. This resin-coated electric wire 6 is used as an electrical connection wire for a liquid leak sensor, for opening and closing a valve, for operating various instruments, or for heating.

FIG. 3 shows a state in which the pipes molded as described above are connected via the joint 7. According to the present embodiment, since the fluororesin tube 1 is covered with the synthetic resin tube 2 to form the tube, liquid leakage from the tube itself does not occur. Therefore, if liquid leakage occurs, it is only from the part of the joint 7, and it suffices to provide a joint box 8 for preventing liquid leakage, such as polyethylene, at this part of the joint 7. It's very easy in comparison. Even if the sensor 9 for detecting the leaked liquid is provided in the joint box 8, the electric wire 6 is integrated in the pipe, so that the electrical connection can be easily performed.

It goes without saying that the electric wire 6 is also used as an electrical connection wire other than the liquid leak sensor 9. Furthermore, according to the present embodiment, since the pipe is formed in a double shape, the pressure resistance of the pipe is greater than that of the conventional one, and the size can be reduced. It is also possible to bundle dozens of pipes, and the piping installation area can be greatly reduced compared to the conventional one.

[0017]

[Effect of the device]

 As is clear from the above description, according to the present invention, the electric wire made of synthetic resin is provided on the outer periphery of the synthetic resin tube covering the fluororesin tube through the thin thin portion extending in the longitudinal direction thereof. Since the tubes are connected together and the wires are laid inside this wire tube, even if a high-purity fluid penetrates the fluororesin tube, this fluid will stop at the thin-walled part and penetrate to the wire tube side. Therefore, corrosion of the wire is reliably prevented.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a fluororesin composite pipe according to the present invention.

FIG. 2 is a cross-sectional view showing an embodiment of the fluororesin composite pipe.

FIG. 3 is a partial vertical sectional view showing a state in which a pipe according to the present invention is connected.

FIG. 4 is a partial vertical sectional view showing a state in which a conventional pipe is connected.

FIG. 5 is a cross-sectional view showing a conventional pipe.

[Explanation of symbols]

 1 Fluororesin tube 2 Synthetic resin tube 3 Thin section, 5 Electric wire tube 6 Resin coated electric wire 7 Joint 8 Joint box 9 Liquid leak sensor

Claims (2)

[Scope of utility model registration request] 1. An electric wire tube made of synthetic resin is integrally connected to the outer circumference of a synthetic resin tube covering a fluororesin tube through a thin thin portion extending in the longitudinal direction, A composite tube made of fluororesin, characterized in that electric wires are laid inside the tube. 2. The fluororesin composite pipe according to claim 1, wherein the width of the thin portion is smaller than the diameter of the electric wire tube.