JPH05128471A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH05128471A
JPH05128471A JP28971391A JP28971391A JPH05128471A JP H05128471 A JPH05128471 A JP H05128471A JP 28971391 A JP28971391 A JP 28971391A JP 28971391 A JP28971391 A JP 28971391A JP H05128471 A JPH05128471 A JP H05128471A
Authority
JP
Japan
Prior art keywords
magnetic recording
film
recording medium
change
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28971391A
Other languages
Japanese (ja)
Inventor
Osamu Kohama
修 小浜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP28971391A priority Critical patent/JPH05128471A/en
Publication of JPH05128471A publication Critical patent/JPH05128471A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To attain drastically high reliability by solving generation of head touch change by dimensional change or dimensional change of a recording part even in an environment severe in humidity change in a magnetic recording medium in which a ferromagnetic metallic thin film is a magnetic recording layer. CONSTITUTION:A fluorine contained hard carbon films 3, 8 are provided on both side of a high polymer film 1 and at least on one side of the surface, a lubricating layer 4 and furthermore the ferromagnetic metallic thin film 5 are provided. The magnetic recording medium constituted by this way drastically increases hygroscopic resistance and dimensional change to humidity change is lowered, excellent head touch is attained and drastically high reliability is attained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、垂直磁気記録をはじめ
とする高密度磁気記録に適した強磁性金属薄膜を磁気記
録層とする磁気記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium having a magnetic recording layer of a ferromagnetic metal thin film suitable for high density magnetic recording such as perpendicular magnetic recording.

【0002】[0002]

【従来の技術】磁気記録分野においては、近年小型化,
長時間化,ディジタル化などの高性能化が進み、トラッ
ク密度の向上と線記録密度の向上は目覚ましく、更に、
記録再生機器の小型化も進められており、今後は決めら
れたカセット空間内にいかに多くの記録面積を確保する
ことができるかに焦点が移り、記録媒体の薄膜化が検討
されている。中でも強磁性金属薄膜を磁気記録層とする
磁気テープは、トラック密度,線記録密度の面で記録密
度の向上に有望であると共に、かかる薄膜化に対しても
有利であることから、両面に磁気記録層を配したもの
(特開昭59−175032号公報)、高分子フィルム
の一方に強磁性金属薄膜、もう一方に軟磁性薄膜を配し
たもの(特開昭60−50717号公報)、高分子フィ
ルムの一方に面内磁化膜、もう一方に垂直磁化膜を配し
たもの(特開昭60−11332号公報)等多くの提案
がされている。
2. Description of the Related Art In the field of magnetic recording, miniaturization,
With improvements in performance such as longer time and digitalization, the track density and linear recording density have improved remarkably.
The miniaturization of recording / reproducing devices is also being promoted, and in the future, the focus will be on how many recording areas can be secured in a predetermined cassette space, and thinning of the recording medium is being considered. Among them, a magnetic tape using a ferromagnetic metal thin film as a magnetic recording layer is promising for improving the recording density in terms of track density and linear recording density, and is advantageous for thinning the magnetic recording layer. One having a recording layer (JP-A-59-175032), one having a ferromagnetic metal thin film on one side of a polymer film, and a soft magnetic thin film on the other side (JP-A-60-50717), Many proposals have been made such as one in which an in-plane magnetized film is arranged on one side of the molecular film and a perpendicular magnetized film is arranged on the other side (JP-A-60-11332).

【0003】[0003]

【発明が解決しようとする課題】しかしながら、高分子
フィルムの両面に上記したような構成の薄膜を配し薄膜
化をはかったものは、湿度の変化が大きい環境下での使
用で、トラック全体に渡って良好なヘッドタッチが得ら
れず、RCMエラー率,スキュー等が劣化する課題があ
り、改善が望まれている。
However, the thin film having the above-mentioned constitution by disposing the thin film on both sides of the polymer film is used in an environment where the humidity changes greatly, so that the entire track is Since there is a problem that a good head touch cannot be obtained and the RCM error rate, skew, etc. are deteriorated, improvement is desired.

【0004】本発明は上記した事情に鑑みなされたもの
で、湿度変化の厳しい環境下でも良好なヘッドタッチを
得ることの出来る磁気記録媒体を提供するものである。
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium capable of obtaining a good head touch even in an environment where humidity changes are severe.

【0005】[0005]

【課題を解決するための手段】上記した課題を解決する
ため本発明の磁気記録媒体は、高分子フィルムの両面に
含フッ素硬質炭素膜を配し、少なくとも一方の面に潤滑
層、更に、強磁性金属薄膜を配するようにしたものであ
る。
In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a fluorine-containing hard carbon film on both sides of a polymer film, a lubricating layer on at least one side, and a strong layer. A magnetic metal thin film is arranged.

【0006】[0006]

【作用】本発明の磁気記録媒体は上記した構成により、
撥水性の高い潤滑層が磁性層と密着し、更に、水を強く
はじく性質をもった含フッ素硬質炭素膜が、高分子フィ
ルム表面に密着し、潤滑層と含フッ素硬質炭素膜の相乗
効果で、吸湿抵抗を大幅に増大させることから、湿度変
化に対しても寸法変化やカール変化が小さく、磁気テー
プ,磁気ディスクのヘッドタッチの変化や記録部位の寸
法変化等の不具合がなくなるのである。
The magnetic recording medium of the present invention has the above-mentioned structure.
The highly water-repellent lubricating layer adheres to the magnetic layer, and the fluorine-containing hard carbon film, which has the property of strongly repelling water, adheres to the polymer film surface, resulting in a synergistic effect of the lubricating layer and the fluorine-containing hard carbon film. Since the moisture absorption resistance is greatly increased, the dimensional change and the curl change are small with respect to the humidity change, and the problems such as the head touch change of the magnetic tape and the magnetic disk and the dimensional change of the recording portion are eliminated.

【0007】[0007]

【実施例】以下、図面を参照しながら本発明の磁気記録
媒体を詳しく説明する。図は本発明の一実施例の磁気記
録媒体の拡大図である。
The magnetic recording medium of the present invention will be described in detail below with reference to the drawings. The drawing is an enlarged view of a magnetic recording medium according to an embodiment of the present invention.

【0008】図1で1はポリエチレンテレフタレート,
ポリエチレンナフタレート,ポリイミド,ポリプロピレ
ン等の高分子フィルムで、厚みは10μm以下、4μm
までが用いられる。2は磁性面側下塗り層で、Si
2,Al23,CaCO3等の微粒子かミミズ状の隆起
層及び、粒子とミミズ状隆起層の組み合わせ等から適宜
選択し、S/N特性と走行耐久性やスチル耐久性等の点
から必要な凹凸を設けるためのものであり、粗さとして
は最大粗さ20mmまでが短波長を対象とした時に望まし
い。3は磁性面側含フッ素硬質炭素膜で、グラファイト
をターゲットにしたスパッタリング法やメタン,プロパ
ン等とフッ素ガスの混合放電ガスを用いたプラズマCV
D法により形成されるもので、フッ素量は炭素化10%
以上、好ましくは20%以上で、膜厚は20mm以上、好
ましくは50mm以上が寸法変化を最少にするのに必要と
なる。4は潤滑層で、脂肪酸,カルボン酸,高級アルコ
ール,スルフォン酸などの極性基をもったものが好まし
く、膜厚は2mm以上、好ましくは4mm以上が撥水効果が
大きい。
In FIG. 1, 1 is polyethylene terephthalate,
Polymer film such as polyethylene naphthalate, polyimide, polypropylene, thickness less than 10μm, 4μm
Are used up to. 2 is an undercoat layer on the magnetic surface side, which is Si
O 2, Al 2 O 3, CaCO 3 or the like particulate or worm-like elevations layer and, particles and suitably selected from a combination of worm-like elevations layer such, S / N characteristics and running durability and the point of still durability, etc. Therefore, the maximum roughness of 20 mm is desirable when a short wavelength is targeted. Numeral 3 is a fluorine-containing hard carbon film on the magnetic surface side, which is a sputtering method using graphite as a target, or a plasma CV using a mixed discharge gas of methane, propane, etc. and fluorine gas.
Formed by method D, the amount of fluorine is 10% carbonized
As described above, preferably 20% or more and the film thickness is 20 mm or more, preferably 50 mm or more, in order to minimize the dimensional change. Reference numeral 4 denotes a lubricating layer, which preferably has a polar group such as fatty acid, carboxylic acid, higher alcohol, and sulfonic acid, and a film thickness of 2 mm or more, preferably 4 mm or more has a large water repellent effect.

【0009】5は強磁性金属薄膜で、Co,Co−N
i,Co−O,Co−Cr,Co−Ni−O,Co−T
i,Co−Cr−O,Co−W等の薄膜でスパッタリン
グ法や電子ビーム蒸着法等で形成されるもので、必要で
あれば多層構造としてもよいし、軟磁性層等を介して構
成してもよいし、もう一方に同様に配した両面アクセス
型としてもよいのは勿論である。6は保護滑剤層で、プ
ラズマ重合膜,カーボン膜,TiC膜等の保護膜に脂肪
酸エステル,高級アルコール,パーフルオロポリエーテ
ル等の滑剤を配したものでスペーシング損失を小さくか
つ耐久性を確保するためバランス良く膜厚や材料の組合
せを実験により決めればよく、特に特別な限定はない。
7は形状付与のための走行面側下塗り層で、基本的には
2と同じ考え方で形成すればよいが粗さは大きくでき
る。8は走行面側含フッ素硬質炭素膜であり、基本的に
は3と同じ考え方で形成すればよく、膜厚は、テープ又
はディスクの全厚を確保するに必要な膜厚で構成するの
が望ましい。
Reference numeral 5 is a ferromagnetic metal thin film, Co, Co--N
i, Co-O, Co-Cr, Co-Ni-O, Co-T
i, Co-Cr-O, Co-W, or the like, which is formed by a sputtering method, an electron beam evaporation method, or the like, and may have a multilayer structure if necessary, or may be formed via a soft magnetic layer or the like. Needless to say, it may be a double-sided access type in which the other side is similarly arranged. Reference numeral 6 is a protective lubricant layer, which is a protective film such as a plasma polymerized film, a carbon film, or a TiC film, on which a lubricant such as fatty acid ester, higher alcohol, or perfluoropolyether is arranged to reduce spacing loss and ensure durability. Therefore, the film thickness and the combination of materials may be determined by experiments in good balance, and there is no particular limitation.
Reference numeral 7 denotes a running surface side undercoat layer for imparting a shape, which may be formed basically in the same way as in 2, but the roughness can be increased. Numeral 8 is a fluorine-containing hard carbon film on the running surface side, which may be formed basically according to the same concept as in 3, and the film thickness is constituted by a film thickness necessary to secure the total thickness of the tape or disk. desirable.

【0010】以下、更に具体的に本発明の実施例につい
て比較例との対比で詳しく説明する。
Hereinafter, the examples of the present invention will be described more specifically in comparison with comparative examples.

【0011】(実施例1)厚み7μmのポリエチレンテ
レフタレートフィルム上に直径12nmのSiO2微粒子
を20ヶ/μm2配し、もう一方の面に直径180nmの
CaCO3微粒子を0.5ヶ/μm2配し、両面に、グラ
ファイトをターゲットにして、Ar+CF2+H2=0.
1Torr、Ar:CF2:H2=1:1:5、100kHz、
1000Wのスパッタ条件でスパッタリングを行ない、
SiO2微粒子側に含フッ素20%,80nmの含フッ素
硬質炭素膜、CaCO3微粒子側に含フッ素20%,2
00nmの含フッ素硬質炭素膜を配し、SiO2微粒子側
に、更にステアリン酸を溶液塗布法で潤滑層を6nm形成
し、その上に、COを直径50cmの円筒キャンに沿わせ
て5×10-5Torrの酸素中で最小入射角30度で電子ビ
ーム蒸着し、0.15μmのCo−O膜を形成し、更に
その上に、ペンタカルボニルニッケルをモノマーガスと
したプラズマ重合膜を0.1Torr,100kHz,800
Wの条件で10nm形成し、その上に潤滑層としてパーフ
ルオロポリエーテルを溶液塗布法で4nm形成し、8mm幅
に裁断し8mmテープを試作した。
[0011] (Example 1) polyethylene terephthalate having a thickness of 7μm phthalate film of SiO 2 particles having a diameter of 12 nm 20 months / [mu] m 2 placed on, a diameter of 180nm on the other side CaCO 3 particles 0.5 months / [mu] m 2 Ar + CF 2 + H 2 = 0.
1 Torr, Ar: CF 2 : H 2 = 1: 1: 5, 100 kHz,
Sputtering is performed under the sputtering condition of 1000 W,
Fluorine-containing 20% fluorinated hard carbon film of 80 nm on the SiO 2 fine particle side, fluorine-containing 20% fluorinated 20% on the CaCO 3 fine particle side, 2
A fluorine-containing hard carbon film having a thickness of 00 nm is arranged, and a lubricating layer having a thickness of 6 nm is further formed on the SiO 2 fine particle side by a solution coating method, and CO is formed thereon along a cylindrical can having a diameter of 50 cm to form 5 × 10. Electron beam vapor deposition was performed in oxygen of -5 Torr at a minimum incident angle of 30 degrees to form a 0.15 μm Co-O film, and a plasma polymerized film using pentacarbonyl nickel as a monomer gas was further applied to 0.1 Torr. , 100kHz, 800
A 10-nm tape was formed under the condition of W, a perfluoropolyether was formed thereon as a lubrication layer by a solution-coating method to a thickness of 4 nm, and the tape was cut into a width of 8 mm to manufacture an 8 mm tape as a prototype.

【0012】(実施例2)厚み6.3μmのポリエチレ
ンテレフタレートフィルムに実施例1と同じ条件で夫々
の要素を配した8mmテープを試作した。
(Example 2) An 8 mm tape was produced by placing each element on a polyethylene terephthalate film having a thickness of 6.3 μm under the same conditions as in Example 1.

【0013】(比較例1)厚み7μmのポリエチレンテ
レフタレートフィルム上に直径12nmのSiO2微粒子
を20ヶ/μm2配し、その上に実施例1と同じくCo
−O膜を0.15μm配し、同様にプラズマ重合膜と滑
剤層を配し、フィルムの反対側に直径180nmのCaC
3微粒子を0.5ヶ/μm2配し、その上にTiC膜を
150nm配し、8mmテープを試作した。
(Comparative Example 1) On a polyethylene terephthalate film having a thickness of 7 μm, 20 particles / μm 2 of SiO 2 fine particles having a diameter of 12 nm were arranged, and Co was deposited thereon in the same manner as in Example 1.
-O film is placed 0.15 μm, plasma polymerized film and lubricant layer are placed in the same manner, and CaC of 180 nm in diameter is placed on the opposite side of the film.
0.5 mm / μm 2 of O 3 fine particles were arranged, and a TiC film was arranged thereon to a thickness of 150 nm to make an 8 mm tape.

【0014】(比較例2)比較例1でフィルム厚み6.
3μmのポリエチレンテレフタレートフィルムに置きか
えた8mmテープを試作した。
(Comparative Example 2) In Comparative Example 1, the film thickness was 6.
An 8 mm tape, which was replaced with a 3 μm polyethylene terephthalate film, was manufactured as a prototype.

【0015】上記したテープを市販の8mmビデオ(SO
NY製EV−S900)により、比較評価した。特にヘ
ッドタッチが影響するPCMのエラー率(LPモード)
で評価した結果を(表1)に示した。記録は23℃65
%RHで行なった後に、夫々の環境へ1週間放置し、PC
Mエラー測定は23℃65%RHで行なった。その結果を
(表1)に示す。
A commercially available 8 mm video (SO
Comparative evaluation was carried out by EV-S900 manufactured by NY. PCM error rate (LP mode) especially affected by head touch
The results evaluated in Table 1 are shown in (Table 1). Record 23 ° C 65
After performing in% RH, leave it in each environment for 1 week
M error measurement was performed at 23 ° C. and 65% RH. The results are shown in (Table 1).

【0016】[0016]

【表1】 [Table 1]

【0017】この(表1)から明らかなように、本実施
例1,2は夫々の環境下で放置後も、比較例と比べPC
Mエラー率は1桁以上改善され、良好なヘッドタッチを
確認した。
As is clear from this (Table 1), in Examples 1 and 2, even after being left in their respective environments, compared with the Comparative Example, PC
The M error rate was improved by one digit or more, and good head touch was confirmed.

【0018】[0018]

【発明の効果】以上のように本発明は、高分子フィルム
の両面に含フッ素硬質炭素膜,潤滑層を設けることによ
り、高湿環境放置による寸法変化やカール変化の小さ
い、良好なヘッドタッチが得られるといった効果があ
り、優れた薄型の磁気記録媒体を実現できるものであ
る。
As described above, according to the present invention, by providing the fluorine-containing hard carbon film and the lubricating layer on both sides of the polymer film, a good head touch with a small dimensional change and curl change due to being left in a high humidity environment can be obtained. It is possible to obtain an excellent thin magnetic recording medium with the effect of being obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の磁気記録媒体の拡大図FIG. 1 is an enlarged view of a magnetic recording medium according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 高分子フィルム 2 磁性面側下塗り層 3 磁性面側含フッ素硬質炭素膜 4 潤滑層 5 強磁性金属薄膜 6 保護滑剤層 7 走行面側下塗り層 8 走行面側含フッ素硬質炭素膜 DESCRIPTION OF SYMBOLS 1 Polymer film 2 Magnetic surface side undercoat layer 3 Magnetic surface side fluorine-containing hard carbon film 4 Lubricating layer 5 Ferromagnetic metal thin film 6 Protective lubricant layer 7 Running surface side undercoat layer 8 Running surface side fluorine-containing hard carbon film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】高分子フィルムの両面に含フッ素硬質炭素
膜を配し、少なくとも一方の面に潤滑層を配し、更に、
強磁性金属薄膜を形成したことを特徴とする磁気記録媒
体。
1. A polymer film having fluorine-containing hard carbon films on both sides, and a lubricating layer on at least one surface, and
A magnetic recording medium having a ferromagnetic metal thin film formed thereon.
JP28971391A 1991-11-06 1991-11-06 Magnetic recording medium Pending JPH05128471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28971391A JPH05128471A (en) 1991-11-06 1991-11-06 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28971391A JPH05128471A (en) 1991-11-06 1991-11-06 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05128471A true JPH05128471A (en) 1993-05-25

Family

ID=17746788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28971391A Pending JPH05128471A (en) 1991-11-06 1991-11-06 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05128471A (en)

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