JPH05124726A - Locational pressing mechanism for square object to be inspected - Google Patents

Abstract

PURPOSE:To provide a simple locating/pressing mechanism, which operates slowly without giving vibration or shocks to a square object to be inspected placed on an inspection table and which performs location of the object and pressing its surface. CONSTITUTION:A locating/pressing mechanism for a square object to be inspected 2 (tray) is fitted with three locational tools 611, 611, 612 to make location of three corners of the object 2 relative to an inspection table 61, a rotary air cylinder 66, and a cam mechanism 67 to convert abrupt rotation of the rotary cylinder into gradual linear motion. Further this mechanism is equipped with a side face pressing mechanism 68, etc., each coupled with the cam mechanism and pressing softly the side faces 21, 23 of the object 2 with rotation of the rotary air cylinder so as to locate the object 2 relative to the three locational tools and a surface pressing mechanism 69 which is to press softly the surface of the object in the neighborhood of the side face 21. This mechanism is applied to an inspection device for tray of glass plate for a CCD sensor, and accurate inspection can be made.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning and pressing mechanism for a square inspection object with respect to an inspection table.

[0002]

2. Description of the Related Art FIG. 2 illustrates a glass plate of a CCD sensor and a tray for accommodating the glass plate as a target example of the present invention. (A) shows an external view of a CCD sensor 1 and a CCD chip is molded and packaged. 11 is formed, and a glass plate 12 for inputting light is fitted on the surface side thereof. In the manufacturing plant, the glass plates 12 are stored in the tray 2 shown in Fig. (B), and a plurality of trays are stored in the storage case 3 shown in Fig. (C).
It is inserted into the shelf 31 and stored or transported. Since the quality of the glass plate 12 deteriorates if scratches or dust adheres to it, the glass plate 12 is inspected by an inspection device, but the inspection is performed in a state of being stored in the tray 2. FIG. 3 shows a transfer system of the tray 2 with respect to the inspection device 6 for the glass plate 12. The predetermined tray 2 is taken out by the robot hand 53 of the robot mechanism 5 from the housing case 3-1 placed on the placing table 4-1. Then, each glass plate 12 is inspected by the inspection optical system 62 after being conveyed to the inspection device 6 and placed on the inspection table 61. When the inspection is completed, Tray 2
Are transported in a direction substantially opposite to the above and are stored in the storage case 3-2 mounted on the mounting table 4-2.

[0003]

In the inspection, the tray 2 placed on the inspection table 61 is positioned, and the trays are arranged so that the height of each glass plate does not change with respect to the focus of the inspection optical system 62. It is necessary to press the surface of. Further, during positioning and pressing of the surface, the glass plate 12 is easily scratched, so it is strictly prohibited to give vibration or shock to the tray 2. Therefore, a mechanism for positioning and pressing the surface is required to operate slowly without giving vibration or shock to the tray. As a matter of course, it is desirable that the positioning and pressing mechanism has a simple structure. The present invention has been made in view of the above, and provides a simple positioning and pressing mechanism that operates slowly without applying vibration or shock to an inspection object placed on an inspection table and performs positioning and pressing the surface. The purpose is to

[0004]

SUMMARY OF THE INVENTION The present invention is a positioning and pressing mechanism that achieves the above-mentioned object, and includes three positioning tools for positioning three corners of an inspection object on an inspection table for inspecting the inspection object, and a rotary. An air cylinder and a cam mechanism that converts rapid rotation of the rotary air cylinder into slow linear movement are provided. Each is connected to a cam mechanism, and by the rotation of the rotary air cylinder, the side surface pressing mechanism that softly presses the two side surfaces of the inspection object to position the inspection object with respect to the three positioning tools, and the vicinity of one side surface of the inspection object. A surface pressing mechanism for softly pressing the surface is provided.

[0005]

In the above positioning / pressing mechanism, the abrupt rotational force of the rotary air cylinder is converted into a slow linear movement by the cam mechanism, so that the side surface pressing mechanism and the surface pressing mechanism connected to the cam mechanism both operate slowly. Then, by these operations, the two side surfaces and the surface in the vicinity of one side surface of the inspection object are softly pressed to position the side surfaces corresponding to the three positioning tools, and the surfaces are pressed to increase the height. Fluctuation is suppressed. Further, since the pressure applied to the side surface and the surface is soft, the safety of the inspection object is ensured without giving vibration or shock to the inspection object.

[0006]

FIG. 1 shows an embodiment in which the present invention is applied to a glass plate tray of a CCD sensor, (a) is a horizontal sectional view,
(b) is a vertical sectional view. In FIGS. 1 (a) and 1 (b), an inspection table 61 is fixed on the right side of the base board 63 in the figure, and three positioning tools 611, 611, corresponding to the three corners of the tray 2 placed on this are installed.
Provide 612. The positioning tool 611 has an L-shaped cross section, and the positioning tool 612 is a flat plate. A positioning mechanism is provided on the left side of the base board 63 in the drawing. The positioning mechanism consists of a fixed part 64 and a moving part 6.
5, a rotary air cylinder 66, a cam mechanism 67, a side surface pressing mechanism 68, and a surface pressing mechanism 69. However, moving part 65
Also serves as a side pressure. The fixed portion 64 is provided with two slide rods 643 and 643 between fixtures 641 and 642 fixed to the base board 63, and the moving portion 65 moves along the slide rods.
The moving unit 65 has a moving element 651 and pressing pieces 652, 652 attached thereto. The cam mechanism 67 includes a coupling arm 671, a cam roller 672 attached to one end of the coupling arm 671, and a cam groove 673 fixed to the moving portion. The other end of the connecting arm is connected to the rotary shaft 661 of the rotary air cylinder. Next, the side surface pressing mechanism 68 moves the bending arm near the tip of one pressing piece 652.
682 is pivotally supported, and one end of the 682 is supported by a support 681.
Rotatably supported on the other side, and the other side has a pressure roller 683
Install and configure. Further, the surface pressing mechanism 69 pivotally supports bending arms 692, 692 near the tips of both pressing pieces 652, 652, one end of which is rotatably supported on the base board 63 by the support tools 691, 691, and the other end is a pressing roller for surface pressing. 693,69
It is configured by attaching 3 each.

The operation of the above positioning and pressing mechanism will be described. When air is supplied to the rotary air cylinder 66 and driven, the rotary shaft 661 rotates and the coupling arm 671 rotates, and the cam roller 672 linearly moves in the cam groove 673. To move. If the attachment angle of the coupling arm 671 is set appropriately, the linear movement of the cam groove 673 can be slowed against the rapid rotation of the rotary shaft 661. Therefore, the moving portion 65 to which the cam groove is fixed moves linearly slowly, and the two pressing pieces 65 attached to the moving portion 65 are slowly moved.
The tips of the 2,652 softly press the side surface 21 of the tray 2 placed on the inspection table 61, and the side surface 24 comes into contact with the positioning tools 611, 611 and is positioned in this direction. Along with this, the bending arms 682 and 692 respectively rotate due to the slow movement of the moving portion, and the pressing roller 683 causes the positioning tool on the side surface 23 to move.
The position corresponding to 612 is softly pressed for positioning in this direction, and the pressing roller 693 is set to the side surface 21.
Press softly on the surface near. This surface pressing suppresses the height variation of the glass plates housed in the tray 2. Since the above-mentioned side and surface pressing is made soft, the tray 2 is not vibrated or shocked and the safety of the stored glass plate is secured. The above-described positioning mechanism is intended for a tray for a glass plate for a CCD sensor as an application example, but is not limited to this, and for other similar rectangular inspection objects where vibration or shock is prohibited. Obviously, can also be applied. Even if the details of the embodiment are slightly different from those of the above embodiment, the rotation mechanism of the rotary air cylinder is converted into a slow linear movement by the cam mechanism, and the positioning mechanism has the structure of performing the side surface pressing and the surface pressing. As long as it is included in the present invention.

[0008]

As described above, in the positioning and pressing mechanism according to the present invention, the rapid rotation of the rotary air cylinder is converted into the slow linear movement by the cam mechanism, and the slow pushing linear movement force causes the side pressing mechanism to operate. A glass plate for a CCD sensor, which drives the surface pressing mechanism and softly presses the side surface and surface of the inspection object to control positioning and height variation without giving vibration or shock to the inspection object. There is a big part that contributes to the inspection device of.

[Brief description of drawings]

FIG. 1 shows an embodiment in which the present invention is applied to a glass plate tray of a CCD sensor, in which (a) is a horizontal sectional view and (b) is a vertical sectional view.

2A and 2B are explanatory views of a glass plate used for a CCD sensor, in which (a) is an external view of a CCD sensor, (b) is an external view of a tray for storing glass plates, and (c) is a plurality of trays. It is an external view of the accommodation case which accommodates.

FIG. 3 shows a configuration of a tray transport system for a glass plate inspection device.

[Explanation of symbols]

1 ... CCD sensor, 11 ... Package, 12 ... Glass plate, 2 ... Tray, 21, 22, 23, 24 ... Side of tray, 3, 3-1, 3-2 ... Storage case, 31 ... Shelf, 4, 4 -1, 4-2 ... Mounting table, 5 ... Robot mechanism, 53 ... Robot hand, 6 ... Inspection device, 61 ... Inspection table, 611,612 ... Positioning tool, 62
… Inspection optical system, 63… Base board, 64… Fixing part, 641,642… Fixing tool, 643…
Slide bar, 65 ... Moving part, 651 ... Moving element, 652 ... Pressing piece, 66 ... Rotary air cylinder, 661 ... Rotating shaft, 67 ... Cam mechanism, 671 ... Coupling arm, 672 ... Cam roller, 673 ... Cam groove, 68 ... Side pressing mechanism, 681 ... Supporting device, 682 ... Bending arm,
683 ... Pressing roller, 69 ... Surface pressing mechanism, 691 ... Supporting tool, 692 ... Bending arm,
692 ... Pressing roller.

Claims (1)

[Claims] 1. A three-dimensional positioning tool for positioning three corners of a test object, a rotary air cylinder, and an abrupt rotation of the rotary air cylinder are converted into slow linear movements on a test table for a square test object. And a cam mechanism for
A side surface pressing mechanism which is respectively coupled to the cam mechanism and softly presses two side surfaces of the inspection object by the rotation of the rotary air cylinder to position the inspection object with respect to the three positioning tools, and the inspection object. 1. A positioning and pressing mechanism for a rectangular inspected object, comprising a surface pressing mechanism for softly pressing the surface in the vicinity of one side surface of the above.