JPH0512099B2 - - Google Patents
Info
- Publication number
- JPH0512099B2 JPH0512099B2 JP24624985A JP24624985A JPH0512099B2 JP H0512099 B2 JPH0512099 B2 JP H0512099B2 JP 24624985 A JP24624985 A JP 24624985A JP 24624985 A JP24624985 A JP 24624985A JP H0512099 B2 JPH0512099 B2 JP H0512099B2
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- grinding wheel
- workpiece
- chuck
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 56
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 56
- 230000033001 locomotion Effects 0.000 description 12
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24624985A JPS62107951A (ja) | 1985-11-05 | 1985-11-05 | 表面研削装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24624985A JPS62107951A (ja) | 1985-11-05 | 1985-11-05 | 表面研削装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62107951A JPS62107951A (ja) | 1987-05-19 |
| JPH0512099B2 true JPH0512099B2 (fr) | 1993-02-17 |
Family
ID=17145717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24624985A Granted JPS62107951A (ja) | 1985-11-05 | 1985-11-05 | 表面研削装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107951A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0732252A (ja) * | 1993-07-22 | 1995-02-03 | Hitachi Ltd | ワーク自転型研削加工方法、ワーク自転型研削盤及びシリコンウェハ並びにセラミック基板 |
| JP4455750B2 (ja) * | 2000-12-27 | 2010-04-21 | 株式会社ディスコ | 研削装置 |
| JP5254539B2 (ja) * | 2006-08-09 | 2013-08-07 | 株式会社ディスコ | ウエーハ研削装置 |
| JP6846176B2 (ja) * | 2016-11-24 | 2021-03-24 | 株式会社ディスコ | 研削装置 |
-
1985
- 1985-11-05 JP JP24624985A patent/JPS62107951A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62107951A (ja) | 1987-05-19 |
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