JPH05118499A - Charging tube - Google Patents

Abstract

PURPOSE:To provide a gas charging tube capable of eliminating gas stagnation, and easily keeping a gas flow passage clean at the desired level of cleanliness. CONSTITUTION:A through-hole is drilled in a cap nut type sleeve 12 in a lengthwise direction, and a gas transfer tube 13 is inserted in the hole until the end thereof is aligned with the end of the sleeve 12. Then, both of the ends are welded to each other, thereby fixing the tube 13 to the sleeve 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filling pipe attached to a container valve of a high pressure vessel when transferring a special material gas filled in the high pressure vessel to a semiconductor reactor or the like.

[0002]

2. Description of the Related Art Conventionally, as a filling pipe for transferring a special material gas filled in a high-pressure container to a semiconductor reactor, as shown in FIG. 6, a length of a sleeve 2 fitted with a cap nut 1 is used. Direction, a gas flow hole 3 is formed, a guide hole 5 for fitting the gas transfer pipe 4 is provided at the rear end of the gas flow hole 3, and the gas transfer pipe 4 is inserted into the guide hole 5.
The gap between the transfer pipe 4 and the sleeve 2 was welded 6 from the side where the was inserted.

However, in recent years, especially in the industrial fields related to semiconductors and fine ceramics, it has been required to clean the gas pipes. In the above conventional technique, however, the transfer pipe 4, the gas flow hole 3 and the sleeve guide hole 5 are required. There is a problem in maintaining the purity of the gas, maintaining the dew point, and managing dust because there is a gas space (dead space) between it and the gas flow hole even though welding is performed while the back seal gas is flowing. The inner surfaces of 3 and tube 4 are not a little oxidized, and it is difficult to remove them because they are in positions that cannot be visually confirmed.
It was difficult to maintain the cleanliness of clean gas.
In addition, since the gas directly passes through the gas flow hole 3 formed in the sleeve 2, it is necessary to finish the surface roughness of the inner surface of the gas flow hole 3 to be extremely small and clean cleanliness. Therefore, there is a problem that the manufacturing cost is high.

[0004]

SUMMARY OF THE INVENTION The present invention is intended to solve such a problem, and it is possible to eliminate a gas reservoir and to easily fill a gas flow passage with a clean cleanliness. Intended to provide a tube.

[0005]

According to the structure of the present invention which meets the above-mentioned object, a through hole is bored in the length direction of a cap nut type sleeve, and a gas transfer pipe is aligned with the tip of the sleeve. It is characterized in that the gas transfer pipe is fitted and welded between the gas transfer pipe and the tip of the sleeve to fix the gas transfer pipe to the sleeve. In short, the present invention eliminates a gas pool by allowing gas to always pass through a tube of the same thickness,
The inside of the transfer pipe, which is oxidized by welding, can be easily checked visually, and it is easy to clean the inside of the transfer pipe to be used. The purpose is to be able to do.

[0006]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a half sectional view showing an embodiment of the present invention,
The sleeve 12 is fitted to the cap nut 11, and the sleeve 12
An example is shown in which the gas transfer pipe 13 is fitted into the through hole formed in the length direction of the above, and the tip of the gas transfer pipe 13 and the sleeve end are fixed by welding 14. FIG. 3 shows another embodiment of the present invention, in which two sleeves 12 are equipped with two gas transfer pipes 13. As described above, if a plurality of gas transfer pipes are installed inside the sleeve, it is convenient because the inflow passage of the special material gas, the introduction passage of the inert gas, and the passages such as the gas bend can be collectively formed. A concave groove is formed on the outer peripheral surface of the sleeve 12, and a ring-shaped retaining ring 15 is fitted in the concave groove. By thus providing the retaining ring 15, the cap nut 11 does not come off from the sleeve 12, so the cap nut 11
The work of tightening the cap nut when attaching the valve to the container valve becomes extremely easy. The outer peripheral surface of the sleeve 12 is formed in a stepped portion, and as shown in FIGS. 2 and 4, a wrench fitting portion 16 whose both sides are flat is formed in the stepped portion. The spanner 17 is fitted. The wrench 17
As shown in FIG. 5, an opening 18 having the same shape as the spanner fitting portion 16 is formed at the tip, and the opening 18 is formed by the spanner fitting portion 1.
6 is fitted. As described above, by constantly passing the spanner 17 through the sleeve 12, the cap nut 11 can be attached to the container valve by separately preparing one spanner, so that the tightening operation of the cap nut becomes extremely easy and the filling pipe The work efficiency of installation and removal work of is greatly improved.

[0007]

Next, the operation of the present invention constructed as above will be described. First, in order to attach the filling pipe of the present invention shown in FIG. 1 to the container valve, the spanner 17 of the filling pipe should be held in one hand and the cap nut 11 should be screwed and tightened to the container valve with the spanner held in the other hand. . The special material gas filled in the high-pressure container is sent to the semiconductor reactor or the like through the transfer pipe 13.
At this time, since the inner diameters of the transfer pipes 13 are the same, it is possible to eliminate gas accumulation, and moreover, the gas flow passage can be easily kept clean and clean, so that the purity of gas and the dew point are maintained. Not only can it be maintained, but also dust and the like can be easily prevented.

[0008]

As described above, according to the present invention, the gas can always pass through the transfer pipe having the same diameter, so that the gas accumulation can be prevented and the transfer pipe is welded to the sleeve. The oxidized part can be easily checked visually and easily removed, and the inside of the transfer pipe can be easily kept clean and clean, so that the purity of the gas and the dew point can be maintained and dust, etc. can be maintained. It is possible to easily prevent the mixture and generation of.

[0009]

[Brief description of drawings]

FIG. 1 is a half sectional view showing an embodiment of the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a half sectional view showing another embodiment of the present invention.

FIG. 4 is a side view of FIG.

FIG. 5 is a top view of the spanner of the present invention.

FIG. 6 is a cross-sectional view showing a conventional filling pipe.

[Explanation of symbols]

 11 Cap Nuts 12 Sleeves 13 Transfer Pipes 14 Welds 15 Snap Rings 17 Spanners

Claims (3)

[Claims] 1. A through hole is bored in a length direction of a cap nut type sleeve, and a gas transfer pipe is fitted into the through hole until it coincides with a tip of the sleeve. A filling pipe for transferring a special material gas filled in a high-pressure container, characterized in that a gas transfer pipe is fixed to a sleeve by welding between the two. 2. The filling pipe according to claim 1, wherein a retaining ring for fixing the cap nut is fixed to the outer periphery of the sleeve. 3. The filling pipe according to claim 1, wherein a spanner engaging portion is formed on the outer circumference of the sleeve, and a spanner having an opening having the same shape as the engaging portion is fitted into the engaging portion. ..