JP2953838B2 - Filling tube - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filling pipe attached to a container valve of a high-pressure vessel when a special material gas filled in the high-pressure vessel is transferred to a semiconductor reactor or the like.

[0002]

2. Description of the Related Art Conventionally, as a filling tube for transferring a special material gas filled in a high-pressure container to a semiconductor reactor, as shown in FIG. A gas flow hole 3 is formed in the direction, a guide hole 5 for fitting a gas transfer tube 4 is provided at the rear end of the gas flow hole 3, and the gas transfer tube 4 is inserted into the guide hole 5.
The gap between the transfer pipe 4 and the sleeve 2 is welded 6 from the side where the is inserted.

In recent years, particularly in the semiconductor and fine ceramics-related industries, it has been required to clean gas pipes. However, in the above-mentioned conventional technique, the transfer pipe 4, the gas flow holes 3 and the sleeve guide holes 5 are required. There is a problem in maintaining gas purity, maintaining dew point, and managing dust and the like. The inner surfaces of the tube 3 and the tube 4 are oxidized to a certain extent, and since they are located at positions where they cannot be visually confirmed, it is difficult to remove them.
It was difficult to maintain clean gas cleanliness.
In addition, since the gas directly passes through the gas flow holes 3 formed in the sleeve 2, it is necessary to finish the surface roughness of the inner surface of the gas flow holes 3 to be extremely small and to finish the gas cleanly. Therefore, there has been a problem that the production cost is high.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem, and it is possible to eliminate gas accumulation and to make a gas flow path easily clean. The purpose is to provide a tube.

[0005]

SUMMARY OF THE INVENTION In accordance with the above-mentioned object of the present invention, a through hole is formed in a length direction of a cap nut type sleeve, and a gas transfer pipe is formed in the through hole until the gas transfer pipe is aligned with the end of the sleeve. The gas transfer pipe is fixed to the sleeve by fitting the gas transfer pipe and the distal end of the sleeve by welding. In short, the present invention eliminates gas accumulation by allowing gas to always pass through a pipe of the same size,
The inside of the transfer pipe that is oxidized by welding can be easily checked visually, and it is easy to clean the inside of the transfer pipe to be used in advance. The gist of the present invention is that it is possible to do so.

[0006]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a half sectional view showing an embodiment of the present invention,
The sleeve 12 is fitted to the cap nut 11, and the sleeve 12
A gas transfer pipe 13 is fitted into a through hole formed in the length direction of the sleeve, and the tip of the gas transfer pipe 13 and the tip of the sleeve are fixed by welding 14. FIG. 3 shows another embodiment of the present invention, and shows an example in which two gas transfer pipes 13 are provided inside a sleeve 12. As described above, if a plurality of gas transfer pipes are provided in the sleeve, the inflow path of the special material gas, the flow path of the inert gas, and the flow path such as the gas bend can be conveniently formed together. A concave groove is formed on the outer peripheral surface of the sleeve 12, and a ring-shaped retaining ring 15 is fitted into the concave groove. By providing the retaining ring 15 in this manner, since the cap nut 11 does not come off the sleeve 12, the cap nut 11
This makes it extremely easy to tighten the cap nut when attaching the cap nut to the container valve. The outer peripheral surface of the sleeve 12 is formed in a step portion. As shown in FIGS. 2 and 4, a wrench fitting portion 16 having both sides flattened is formed in the step portion. A wrench 17 is fitted. Spanner 17
As shown in FIG. 5, an opening 18 having the same shape as the wrench fitting portion 16 is formed at the tip, and the opening 18 is
6. In this manner, by always passing the spanner 17 through the sleeve 12, if one spanner is separately prepared, the cap nut 11 can be attached to the container valve. The work efficiency of attaching and detaching work is greatly improved.

[0007]

Next, the operation of the present invention configured as described above will be described. First, in order to attach the filling tube of the present invention shown in FIG. 1 to the container valve, the wrench 17 of the filling tube is held in one hand, and the cap nut 11 is screwed to the container valve with the spanner held in the other hand. . The special material gas filled in the high-pressure vessel is sent to a semiconductor reactor or the like through a transfer pipe 13.
At this time, since the inner diameter of the transfer pipe 13 is the same, gas accumulation can be eliminated, and the gas flow passage can be easily kept clean, so that the gas purity can be maintained and the dew point can be maintained. It can be maintained, and the intrusion of dust and the like can be easily prevented.

[0008]

As described above, according to the present invention, the gas can always pass through the transfer pipe having the same diameter, so that gas accumulation can be prevented and the transfer pipe can be welded to the sleeve. Oxidized parts can be easily confirmed visually and easily removed, and the inside of the transfer pipe can be easily kept clean, so that gas purity and dew point can be maintained, and dust and the like can be maintained. , Can be easily prevented.

[0009]

[Brief description of the drawings]

FIG. 1 is a half sectional view showing an embodiment of the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a half sectional view showing another embodiment of the present invention.

FIG. 4 is a side view of FIG. 3;

FIG. 5 is a top view of the spanner of the present invention.

FIG. 6 is a sectional view showing a conventional filling tube.

[Explanation of symbols]

 11 Cap nut 12 Sleeve 13 Transfer pipe 14 Welded part 15 Retaining ring 17 Spanner

Claims (3)

(57) [Claims] A through hole is formed in a length direction of a cap nut type sleeve, and a gas transfer pipe is fitted into the through hole until the gas transfer pipe coincides with the tip of the sleeve. A filling pipe for transferring a special material gas filled in a high-pressure vessel, wherein a gas transfer pipe is fixed to a sleeve by welding between the pipes. 2. A filling tube according to claim 1, wherein a retaining ring for fixing a cap nut is not fixed on an outer periphery of said sleeve. 3. The filling tube according to claim 1, wherein a wrench engaging portion is formed on the outer periphery of the sleeve, and a wrench having an opening having the same shape as the engaging portion is fitted into the engaging portion. .