JPH05117011A - Method for burning ceramic material of thin plate - Google Patents

Method for burning ceramic material of thin plate

Info

Publication number
JPH05117011A
JPH05117011A JP3278190A JP27819091A JPH05117011A JP H05117011 A JPH05117011 A JP H05117011A JP 3278190 A JP3278190 A JP 3278190A JP 27819091 A JP27819091 A JP 27819091A JP H05117011 A JPH05117011 A JP H05117011A
Authority
JP
Japan
Prior art keywords
thin plate
thermal expansion
ceramics
firing
fired
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3278190A
Other languages
Japanese (ja)
Inventor
Atsushi Nishiyama
敦 西山
Yoshihiro Ohinata
義宏 大日向
Masaharu Yamada
雅治 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP3278190A priority Critical patent/JPH05117011A/en
Publication of JPH05117011A publication Critical patent/JPH05117011A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To prevent warpage and bending of burnt material of thin plate by placing members made of ceramics having a higher coefficient of thermal expansion than an outer mold made of ceramics having a low coefficient of thermal expansion, sandwiching a thin plate material between the members made of ceramics and burning. CONSTITUTION:An outer mold member 1 consists of a ceramics material (e.g. alumina) having a relatively lower coefficient of thermal expansion and members 2 composed of a ceramics material (e.g. magnesia) having a relatively higher coefficient of thermal expansion than the outer mold are put inside the outer mold. A ceramics material 3 of thin plate to be burnt is sandwiched between the members 2. Consequently, when temperature is raised in burning, the amount of the inner members 2 thermally expanded is larger than that of the outer mold member 1, pressure is continuously applied to the sandwiched ceramics material 3 of thin plate to be burnt and the ceramics material of thin plate will not bend. Moreover, the ceramics material of thin plate do not require lying, a great number of thin plates are put, burnt and volatile components such as Pb will not vaporize.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、薄板セラミックス材料
の焼成方法及びそれに使用する焼成用治具に関する。更
に、詳細には、焼成すべき薄板材料を挾んで圧力を加え
ながら焼成して、焼成による変形を防止する焼成方法及
び焼成用治具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for firing a thin plate ceramic material and a firing jig used therefor. More specifically, the present invention relates to a firing method and a firing jig that prevent a deformation due to firing by firing a thin plate material to be fired while applying pressure.

【0002】[0002]

【従来の技術】従来、セラミックスの製造、特に、エレ
クトロニクスセラミックス、例えば、PZT等の圧電セ
ラミックスや、PTC等のサ−ミスタ、バリスタ−或い
はセラミックスコンデンサ或いはフェライトを製造する
には、薄板状の形状のものを焼成する必要があり、その
ようなときは、セッタ−上に被焼成物を1枚ずつ寝かせ
て重ね、或いは数枚重ねて焼成していた。或いは、その
被焼成物の上に平滑な板を、拘束のために載せて焼成し
ていた。或いは、ホットプレスという機械を用いて焼成
していた。
2. Description of the Related Art Conventionally, in the production of ceramics, in particular, in the production of electronic ceramics, for example, piezoelectric ceramics such as PZT, thermistors such as PTC, varistors, ceramic capacitors or ferrites, a thin plate shape is used. It is necessary to bake things, and in such a case, one to-be-baked object was laid on the setter one by one, or several objects were fired. Alternatively, a smooth plate was placed on the object to be fired for restraint and fired. Alternatively, it was fired using a machine called a hot press.

【0003】また、焼成用治具は、被焼成物を載せるた
めであり、被焼成物と焼成用治具の融着、反応或いは被
焼成物の焼成収縮に伴う摩擦を軽減するため、一般的に
は、敷き粉と称される無機粉末が散布されている。以上
のような方法で焼成した場合、被焼成物(薄板)が反っ
てしまい、平らな焼成ができないことが多いものであっ
た。それを防止するために、数枚重ねたり、上部に拘束
用の板を載せたりしたが、上部と下部とで条件が変わっ
たりする問題があった。
Further, the firing jig is used for mounting an article to be fired, and is generally used to reduce friction caused by fusion between the article to be fired and the firing jig, reaction or shrinkage of the article to be fired. Inorganic powder called sowing powder is sprayed on. When firing is performed by the above method, the article to be fired (thin plate) is warped, and it is often impossible to perform flat firing. In order to prevent this, several sheets were stacked or a restraining plate was placed on the upper part, but there was a problem that the conditions changed between the upper part and the lower part.

【0004】また、平板上に寝かせて焼成しなければな
らないので、即ち立てると曲がってしまうので、炉内の
面積を有効に活用できなかった。また、Pb成分等を含
む場合には、全体をサヤの中に入れなければならなかっ
た。或いは、成分が揮発して、焼成セラミックスの特性
が得られないことがある。或いはホットプレスで焼成す
るためには、多大な装置費用を必要とし、また、1回に
数枚しか焼成できないため、莫大なコストと時間がかか
った。
Further, since it has to be laid on a flat plate and fired, that is, it bends when it is stood up, so that the area in the furnace cannot be effectively utilized. In addition, when the Pb component and the like were included, the whole had to be put in the sheath. Alternatively, the components may volatilize and the characteristics of the fired ceramics may not be obtained. Alternatively, firing with a hot press requires a great amount of equipment cost, and since only a few sheets can be fired at one time, enormous cost and time are required.

【0005】即ち、従来の焼成方法で薄板を焼成した場
合、a.ソリがおきる、b.面積がかかる、c.成分が
揮発する或いはホットプレスで焼成すると、コストと時
間がかかるという諸欠点があった。また、欠点を除去す
るために、薄板を立てたまま、しかも特別な治具なし
に、焼成する方法を見出すべく研究した結果、本発明に
到達したものである。
That is, when a thin plate is fired by a conventional firing method, a. Sleds b. Takes up area, c. If the components volatilize or if they are fired with a hot press, there are various drawbacks such as cost and time. Further, as a result of research to find out a method of firing a thin plate in an upright state without using a special jig in order to eliminate defects, the present invention has been achieved.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記の問題
点を解決するためになされたもので、焼成時に常に、抑
制或いは圧力がかかり、薄板の変形が基本的に防止され
る焼成方法とそのための治具を提供することを目的とす
る。
SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and a firing method in which deformation or deformation of a thin plate is basically prevented by constantly suppressing or applying pressure during firing. It is intended to provide a jig for that purpose.

【0007】[0007]

【課題を解決するための手段】本発明は、上記の技術的
な課題の解決のためになされたもので、熱膨張率の低い
セラミックス材料で構成された外枠に対して、それより
熱膨張率の高いセラミックス材料で構成された部材を、
焼成されるべき薄板材料との間に挾んだ構成にして、焼
成することを特徴とする薄板セラミックス材料の焼成方
法及びそのための焼成用治具を提供する。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned technical problems, and an outer frame made of a ceramic material having a low coefficient of thermal expansion has a thermal expansion coefficient higher than that of the outer frame. A member made of high-ceramic material,
(EN) Provided is a method for firing a thin plate ceramic material, which comprises sandwiching a thin plate material to be fired, and firing, and a firing jig therefor.

【0008】[0008]

【作用】本発明の薄板セラミックス材料の焼成方法によ
ると、外枠材料に熱膨張率の相対的に低いセラミックス
材料で構成し、それに対して、内側に、それより熱膨張
率の相対的に高いセラミックス材料で構成された部材を
入れた構造である。そのために、焼成時に、温度を上げ
ていくと、内側部材も外枠部材も熱膨張するが、内側部
材の熱膨張する量は、外枠部材の熱膨張量に対して大き
いために、挾まれた部分には、その差だけ狭くなってい
き、その挾まれた部分には、常に圧力がかかることにな
る。その、相対的に低い熱膨張率の部材は、更に、クリ
−プが小さいものが好適であり、例えば、アルミナ等が
好適である。また、相対的に高い熱膨張率の部材は、例
えば、マグネシアが好適である。
According to the method for firing a thin ceramic material of the present invention, the outer frame material is made of a ceramic material having a relatively low coefficient of thermal expansion, while the inner frame has a relatively higher coefficient of thermal expansion. This structure has a member made of a ceramic material. Therefore, when the temperature is increased during firing, both the inner member and the outer frame member thermally expand, but the amount of thermal expansion of the inner member is large relative to the amount of thermal expansion of the outer frame member, so it is sandwiched. The difference becomes narrower in the open part, and the sandwiched part is always under pressure. The member having a relatively low coefficient of thermal expansion is preferably one having a smaller creep, for example, alumina or the like. As the member having a relatively high coefficient of thermal expansion, for example, magnesia is suitable.

【0009】従って、焼成のために温度を上げていくに
従って、熱膨張量の差は、さらに大きくなっていき、焼
成過程の進むにつれて、焼成されるべき薄板にかかる圧
力は強くなっていく。この圧力で、薄板は、両側から圧
迫され、曲がらなくなる。しかも、薄板を寝かせる必要
はなくなり、多くの薄板を収納して焼成処理を行うこと
ができる。また、常に圧力がかかっているために、Pb
等の揮発成分が逃げない。
Therefore, as the temperature is raised for firing, the difference in the amount of thermal expansion further increases, and the pressure applied to the thin plate to be fired increases as the firing process progresses. With this pressure, the sheet is pressed from both sides and does not bend. Moreover, it is not necessary to lay down the thin plates, and a large number of thin plates can be housed in the firing process. Also, because pressure is constantly applied, Pb
Volatile components such as do not escape.

【0010】従って、内側に使用する比較的に熱膨張率
の高い材料は、被焼成薄板の間に挾んで使用することも
できる。また、熱膨張率の低い外枠と熱膨張率の高い内
部材の構造、構成は、以上のような特性を発揮できるも
のであれば、良く、それに適する構造ならば、如何なる
ものでも使用することができる。例えば、図3に示すよ
うな、種々の構造、構成で用いることができる。
Therefore, the material having a relatively high coefficient of thermal expansion used for the inside can be sandwiched between the sheets to be fired and used. Further, the outer frame having a low coefficient of thermal expansion and the inner member having a high coefficient of thermal expansion may have any structure or configuration as long as the above characteristics can be exhibited, and any structure may be used as long as it is suitable for the structure. You can For example, it can be used in various structures and configurations as shown in FIG.

【0011】尚、図3において、部材1は、比較的高い
熱膨張率の部材を示し、部材2は、比較的に低い熱膨張
率の部材を示す。
In FIG. 3, the member 1 is a member having a relatively high coefficient of thermal expansion, and the member 2 is a member having a relatively low coefficient of thermal expansion.

【0012】本発明により得られる薄板セラミックス材
料は、PZT圧電素子及びPTCサ−ミスタ、ジルコニ
ア製基板として、特に、好適である。
The thin plate ceramic material obtained by the present invention is particularly suitable as a PZT piezoelectric element, a PTC thermistor, and a zirconia substrate.

【0013】次に、本発明の薄板セラミックス材料の焼
成方法及びその焼成用治具について、具体的に実施例に
より説明するが、本発明はそれらによって限定されるも
のではない。
Next, the method of firing the thin plate ceramic material and the jig for firing the same according to the present invention will be specifically described by way of examples, but the present invention is not limited thereto.

【0014】[0014]

【実施例】10×10×1mmに成形したセラミックス
薄板(材質ZrO23Y23)3を、図1に示すような
焼成治具に装着して焼成した。図1では、外枠1は、図
示のように、舟型をなし、アルミナで作られている。そ
れに対して、内側部材2は、外枠1の内側に、図示のよ
うに、挾んで設けてあり、材質は、マグネシアである。
その間に、薄板の被焼成物3を、図示のように、立てて
並べた構成のものである。これを、25℃から500℃
までは、昇温速度25℃/時間で、500℃から150
0℃までは、昇温速度120℃/時間で昇温し、150
0℃に2時間保持した後に、300℃/時間の降温速度
で、25℃まで降温した。加熱炉は、2ケイ化モリブデ
ン型発熱体で、空気雰囲気で焼成した。
EXAMPLE A ceramic thin plate (material ZrO 2 3Y 2 O 3 ) 3 molded to 10 × 10 × 1 mm was mounted on a firing jig as shown in FIG. 1 and fired. In FIG. 1, the outer frame 1 has a boat shape as shown and is made of alumina. On the other hand, the inner member 2 is provided inside the outer frame 1 in a sandwiched manner as shown in the drawing, and the material thereof is magnesia.
In the meantime, as shown in the figure, the thin plate-shaped objects 3 to be fired are arranged in a standing manner. From this, 25 ℃ to 500 ℃
Up to 500 to 150 at a heating rate of 25 ° C / hour
Up to 0 ° C, the temperature is raised at a heating rate of 120 ° C / hour to 150 ° C.
After holding at 0 ° C. for 2 hours, the temperature was lowered to 25 ° C. at a temperature decreasing rate of 300 ° C./hour. The heating furnace was a molybdenum disilicide type heating element, and was fired in an air atmosphere.

【0015】得られた薄板焼成物は、そりは約0.1m
m以内で、比重は、5.95〜5.96であった。これ
に対して、同じサイズで同じ組成の薄板を、寝かせて、
上に重しとして、焼成セラミックス板を載せて、焼成処
理したところ、そりは、約2mmにもなって、比重は、
約5.92〜5.93であった。また、下の方において
薄板は、荷重のために割れてしまっていた。
The sled of the obtained thin plate fired product was about 0.1 m.
Within m, the specific gravity was 5.95-5.96. On the other hand, lay thin plates of the same size and composition,
When a fired ceramics plate was placed as a weight on top and fired, the sled became about 2 mm and the specific gravity was
It was about 5.92 to 5.93. Further, in the lower part, the thin plate was cracked due to the load.

【0016】更に、図2に示すような構造で、焼成用治
具を作成した。即ち、丸い外枠1をアルミナで作成し、
その内部にマグネシアで作った直方体焼成セラミックス
2を2つ、図示のように置いて、その2つのマグネシア
焼成体2の間に、焼成すべき薄板形成体3を立てて、隙
間なく並べておく。このような構造のものを、焼成炉に
置き、焼成する。
Further, a firing jig having a structure as shown in FIG. 2 was prepared. That is, the round outer frame 1 is made of alumina,
Two rectangular parallelepiped fired ceramics 2 made of magnesia are placed in the inside as shown in the figure, and a thin plate forming body 3 to be fired is stood between the two magnesia fired bodies 2 and arranged side by side without a gap. The one having such a structure is placed in a firing furnace and fired.

【0017】[0017]

【発明の効果】以上説明したように、本発明の薄板セラ
ミックス材料の焼成方法により、前記のような効果が得
られた。それらをまとめると、次のような顕著な技術的
効果となる。即ち、第1に、以上の説明で明らかなよう
に、そりが出なく、曲がらない焼成薄板状セラミックス
が得られる。第2に、立てに並べることができるため
に、スペ−スを有効に使用できる焼成方法を提供した。
第3に、更に、Pb等の揮発性成分もた易くは飛ばな
く、それが他を汚染することが少ない焼成治具を提供し
た。第4に、更に、焼成した薄板焼成セラミックスは、
緻密で得られる焼成方法を提供した。
As described above, the above-described effects are obtained by the method for firing a thin plate ceramic material of the present invention. Summarizing them, the following remarkable technical effects are obtained. That is, first, as is clear from the above description, a fired thin plate-shaped ceramics that does not warp and does not bend can be obtained. Secondly, a firing method is provided in which the space can be effectively used because the space can be arranged vertically.
Thirdly, a firing jig was provided in which volatile components such as Pb did not easily fly and did not contaminate others. Fourth, the fired thin-plate fired ceramics are
A firing method that can be obtained with a high density is provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の焼成用治具の1例を示す斜視図であ
る。
FIG. 1 is a perspective view showing an example of a firing jig of the present invention.

【図2】本発明の焼成用治具の他の例を示す斜視図であ
る。
FIG. 2 is a perspective view showing another example of the firing jig of the present invention.

【図3】本発明の種々の焼成用治具を示す断面図、斜視
図である。
FIG. 3 is a sectional view and a perspective view showing various firing jigs of the present invention.

【符号の説明】[Explanation of symbols]

1 熱膨張率の低いセラミックスの
外枠 2 熱膨張率の高いセラミックス材
料の部材 3 焼成されるべき薄板材料
1 Ceramic outer frame having a low coefficient of thermal expansion 2 Ceramic material member having a high coefficient of thermal expansion 3 Thin plate material to be fired

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 熱膨張率の低いセラミックス材料で構成
された外枠に対して、それより熱膨張率の高いセラミッ
クス材料で構成された部材を、焼成されるべき薄板材料
との間に挾んだ構成にして、焼成することを特徴とする
薄板セラミックス材料の焼成方法。
1. An outer frame made of a ceramic material having a low coefficient of thermal expansion is sandwiched between a member made of a ceramic material having a higher coefficient of thermal expansion and a thin plate material to be fired. A method for firing a thin plate ceramic material, which comprises:
【請求項2】熱膨張率の低いセラミックス材料で構成さ
れた外枠に対して、それより熱膨張率の高いセラミック
ス材料で構成された部材を内側に置いた構造を取り、焼
成されるべき薄板材料を挾んで焼成するための薄板セラ
ミックス材料の焼成用治具。
2. A thin plate to be fired having a structure in which a member made of a ceramic material having a higher coefficient of thermal expansion is placed inside an outer frame made of a ceramic material having a lower coefficient of thermal expansion. A jig for firing thin plate ceramic materials for sandwiching and firing the material.
JP3278190A 1991-10-25 1991-10-25 Method for burning ceramic material of thin plate Withdrawn JPH05117011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3278190A JPH05117011A (en) 1991-10-25 1991-10-25 Method for burning ceramic material of thin plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3278190A JPH05117011A (en) 1991-10-25 1991-10-25 Method for burning ceramic material of thin plate

Publications (1)

Publication Number Publication Date
JPH05117011A true JPH05117011A (en) 1993-05-14

Family

ID=17593849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3278190A Withdrawn JPH05117011A (en) 1991-10-25 1991-10-25 Method for burning ceramic material of thin plate

Country Status (1)

Country Link
JP (1) JPH05117011A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010223A (en) * 2004-06-25 2006-01-12 Tdk Corp Sheath for ceramic firing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010223A (en) * 2004-06-25 2006-01-12 Tdk Corp Sheath for ceramic firing

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