JPH05115991A - Laser beam machine - Google Patents

Abstract

PURPOSE:To improve the fine machining capability and to obtain the exact color tone of observing picture. CONSTITUTION:A laser beam emitted from a visible laser beam source 8 is expanded with a beam expander 9, after totally reflecting with a laser beam introducing mirror 7 inserted in the beam way with a mirror driving mechanism 6, and is collected on the machining surface 12 with an object lens 11. A part of laser beam reflected on the machining surface is transmitted the laser beam introducing mirror 7, and in made incident or the TV camera 2 through an image formation lens 10. The TV camera 2 outputs the incident machining picture to a picture treating device 3, and the picture treating device 3 displays on the TV monitor 4 by composing the machining picture from the TV camera 2 and the picture being stored on the picture memory 4 at the observing time.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a laser processing apparatus, and more particularly to a laser repair apparatus for processing a liquid crystal panel or the like.

[0002]

2. Description of the Related Art Conventionally, in a laser repair apparatus, a mask residual defect and a liquid crystal panel short-circuit portion are repaired. An Nd: YAG laser is often used for this laser repair device, and the infrared light of 1.06 μm, which is the fundamental wave of the Nd: YAG laser, is used.
There is a case where 0.53 μm green light which is (second harmonic) light is used.

In laser processing, the shorter the wavelength is, the smaller the focused spot is. Therefore, even in the case of the image forming method in which the slit aperture image illuminated by the laser light is reduced and projected onto the processing surface by the lens, the short wavelength green is produced. Fine processing is realized by using light.

However, in a laser repair apparatus using green light, if it is attempted to always observe the processed surface with the optical axis of the laser light and the optical axis of the observation optical system being coaxial, a powerful green light for processing is obtained by the TV camera. Or into the eyepiece section, and may damage the eyes of the observer or the image pickup surface of the camera. Therefore, by totally reflecting the laser light,
It is necessary to prevent visible laser light from entering the observation system.

In this case, since green light does not enter the observation optical system, the observed image becomes reddish and accurate color information of the workpiece cannot be obtained. In a processed object composed of various thin films as represented by a liquid crystal panel, a defective portion may be recognized only by an image containing accurate color information rather than contrast.

Therefore, in order to obtain accurate color information with a laser repair apparatus, a coating that does not affect the color tone of RGB using 1.06 μm infrared light, which is the fundamental wave of the Nd: YAG laser, is used. Will be adopted. When infrared light is used, the light-collecting characteristics are not as good as those of green light as described above, and the absorption coefficient is lower than that of green light depending on the thin film material. May be required.

In such a conventional laser repair apparatus,
When green light is used to increase the processing accuracy (fine processing performance), the color tone of the observed image becomes inaccurate, and when infrared light is used to make the color tone of the observed image accurate, the fine processing performance deteriorates. There is.

[0008]

SUMMARY OF THE INVENTION The present invention has been made to eliminate the above-mentioned problems of the prior art, and a laser processing apparatus capable of improving fine processing performance and obtaining an accurate color tone of an observed image. For the purpose of providing.

[0009]

A laser processing apparatus according to the present invention irradiates monitor light through an observation optical system to observe a processed surface of the workpiece, and irradiates laser light through the processing optical system to perform the above-mentioned operation. A laser processing apparatus for processing a work piece, comprising: a laser introducing mirror that totally reflects the laser light to irradiate the work piece; and the laser introducing mirror according to whether or not the work piece is processed. Of moving means for moving the laser light on the optical axis, holding means for holding image data of the processing surface obtained from the observation optical system by irradiation of the monitor light, and during processing of the workpiece. Image data of the processed surface obtained through the laser introduction mirror moved by the moving means on the optical axis and the observation optical system and image data held by the holding means are combined and displayed. Set up means Characterized in that was.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, at the time of observation, white light emitted from a monitor light source (not shown) provided on the optical axis of the TV camera 2 is guided by the objective lens 11 onto the processing surface 12 and reflected, and passes through the imaging lens 10. It is incident on the TV camera 2. Since white light is used during this observation, the processed surface 12 can be observed without losing color information. Further, at the time of this observation, the laser introducing mirror 7 is removed from the optical path by moving it in the direction of arrow A by the mirror driving mechanism 6.

The TV camera 2 converts the incident image into an electric signal and outputs it as image data to the image processing device 3.
The image processing device 3 stores the image data from the TV camera 2 in the image memory 4.

On the other hand, the laser light emitted from the visible laser light source 8 during processing is expanded by the beam expander 9 and totally reflected by the laser introducing mirror 7 inserted in the optical path by the mirror driving mechanism 6, and then the objective lens. It is condensed on the processed surface 12 by 11.

At this time, a part of the laser light reflected by the processed surface 12 passes through the laser introducing mirror 7 and the imaging lens 10
Is incident on the TV camera 2 via. The TV camera 2 converts the incident processed surface image into an electric signal and outputs it as image data to the image processing device 3. The image processing device 3 synthesizes the image data from the TV camera 2 and the image data stored in the image memory 4 and displays them on the TV monitor 5.

Here, it is assumed that the laser introducing mirror 7 is coated with a dielectric multi-layered film and exhibits uniform and high reflectance (for example, 99.5%) over the entire visible light region.
The color tone of the composite image displayed on the V monitor 5 is prevented from changing.

Normally, the mirror driving mechanism 6 removes the laser introducing mirror 7 from the optical path to bring it into an observation state, and only the observed image is displayed on the TV monitor 5 in real time, not the composite image.

When the laser processing command signal is output from the controller 1, the image data currently displayed on the TV monitor 5 is stored in the image memory 4 by the image processing device 3, and the laser introducing mirror 7 is moved by the mirror driving mechanism 6. It is inserted in the optical path. When the laser introduction mirror 7 is inserted in the optical path, the controller 1 outputs a laser oscillation command signal to the visible laser light source 8 and processes the processing surface 12 with the laser light emitted from the visible laser light source 8. Processing surface 1
When the laser processing for 2 is laser repair, the laser processing for the processing surface 12 is performed with a laser pulse of a single pulse to several tens of pulses.

When the laser processing on the processing surface 12 is completed, the laser driving mirror 6 is removed from the optical path by the mirror driving mechanism 6 under the control of the controller 1, and the image data of the processing surface 12 is directly displayed on the TV monitor 5. Is displayed.

In the above processing method, the laser beam is processed only at a specific position while the workpiece is stopped. However, the workpiece is processed within the range displayed on the TV monitor 5 by the XY stage 13.
The present embodiment can be applied to the case where continuous processing is performed while moving with.

When performing continuous machining while moving the workpiece on the XY stage 13, the image data stored in the image memory 4 is shifted according to the movement of the XY stage 13 and displayed on the TV monitor 5. .. When the cross line indicating the processing position is displayed on the TV monitor 5, the image data of the cross line is not shifted.

As described above, the image data shifted according to the movement of the XY stage 13 and the image data showing the state of the laser processing seen through the laser introducing mirror 7 are superimposed and displayed on the TV monitor 5. The processing state of the processing surface 12 can be observed without losing the color information.

Further, in order to display the processing locus on the TV monitor 5, it is necessary to superimpose and display the processed image after each laser shot on another image memory (not shown). This processing locus image is irrelevant to the movement of the XY stage 13, and if it is combined with the previous unprocessed image and displayed on the TV monitor 5, the processing locus can be confirmed at the time of processing without damaging the color information. You can

FIG. 2 is a block diagram showing another embodiment of the present invention. In the drawings, the other embodiment of the present invention has the same structure as that of the embodiment of the present invention except for the processing optical system, and the same components are designated by the same reference numerals. The operation of those same components is the same as that of the embodiment of the present invention. In the figure, the controller 1 and the image processing device 3
The observation optical system including the image memory 4 and the TV monitor 5 is not shown.

The laser light emitted from the visible laser light source 8 during processing illuminates the slit 16. As a result, the laser light emitted from the opening of the slit 16 passes through the imaging lens 17, is totally reflected by the laser introduction mirror 15, and then is condensed on the processed surface 12 by the objective lens 11.

At this time, a part of the laser light reflected by the processed surface 12 passes through the laser introducing mirror 15 and the imaging lens 1
It is incident on the TV camera 2 via 0. The TV camera 2 converts the incident processed surface image into an electric signal and outputs it as image data to the image processing device 3. The image processing device 3 synthesizes the image data from the TV camera 2 and the image data stored in the image memory 4 and displays them on the TV monitor 5.

The switching of the optical paths between the observation optical system and the processing optical system is performed by the mirror rotating device 14 and the laser introducing mirror 15 is used.
Is rotated in the direction of arrow B. The laser introducing mirror 15 is provided with a high reflectance coating portion having a high reflectance for visible light and an AR (non-reflection) coating portion at every 90 °, and is rotated at a constant speed by the mirror rotating device 14. It

The laser processing is performed when a sensor (not shown) detects that the high reflectance coating portion of the laser introducing mirror 15 has entered the optical path. Further, the image data is taken in when the sensor detects that the AR coat portion of the laser introduction mirror 15 has entered the optical path.

As described above, the laser introducing mirrors 7 and 15 having a high reflectance for visible light are inserted into the optical path only at the time of laser processing, and the laser light is focused on the processing surface 12 to perform the laser processing. , The image stored in the image memory 4 through the observation optical system when not processed and the processed image are combined to obtain T
By displaying on the V monitor 5, it is possible to always observe a processed surface image having an accurate color tone. This makes it possible to easily identify a defect location that is difficult to distinguish only by contrast, so that it is possible to improve the fine processing performance and obtain an accurate color tone of the observed image.

[0029]

As described above, according to the present invention, the movement of the laser introduction mirror, which totally reflects the laser beam and irradiates the work piece, is moved along the optical axis depending on whether the work piece is processed or not. By synthesizing and displaying the image data of the processed surface obtained from the observation optical system and temporarily held by the irradiation of the monitor light and the image data of the processed surface obtained when the workpiece is processed, There is an effect that the fine processing performance can be improved and an accurate color tone of the observed image can be obtained.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of the present invention.

FIG. 2 is a configuration diagram showing another embodiment of the present invention.

[Explanation of symbols]

 1 Controller 2 TV Camera 3 Image Processing Device 4 Image Memory 5 TV Monitor 6 Mirror Driving Mechanism 7, 15 Laser Introducing Mirror 8 Visible Laser Light Source 12 Processing Surface 14 Mirror Rotating Device

Claims (1)

[Claims] 1. A laser for irradiating monitor light through an observation optical system to observe a machined surface of the workpiece, and irradiating laser light through a machining optical system for machining the workpiece. A processing device, a laser introducing mirror that totally reflects the laser light to irradiate the workpiece, and an optical axis of the laser light of the laser introducing mirror depending on whether or not the workpiece is processed. On the optical axis by means of moving means for moving to the optical axis, holding means for holding image data of the processing surface obtained from the observation optical system by irradiation of the monitor light, and the moving means during processing of the workpiece. A means for synthesizing and displaying the image data of the processed surface obtained through the laser introduction mirror moved to the position and the observation optical system and the image data held by the holding means. Laser processing equipment Place